JP4284946B2 - 窒化物系半導体発光素子 - Google Patents
窒化物系半導体発光素子 Download PDFInfo
- Publication number
- JP4284946B2 JP4284946B2 JP2002246368A JP2002246368A JP4284946B2 JP 4284946 B2 JP4284946 B2 JP 4284946B2 JP 2002246368 A JP2002246368 A JP 2002246368A JP 2002246368 A JP2002246368 A JP 2002246368A JP 4284946 B2 JP4284946 B2 JP 4284946B2
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- Prior art keywords
- layer
- nitride
- well
- light guide
- based semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000004065 semiconductor Substances 0.000 title claims description 71
- 150000004767 nitrides Chemical class 0.000 title claims description 36
- 230000004888 barrier function Effects 0.000 claims description 59
- 229910002704 AlGaN Inorganic materials 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 12
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 273
- 229910002601 GaN Inorganic materials 0.000 description 52
- 239000000203 mixture Substances 0.000 description 18
- 239000013078 crystal Substances 0.000 description 9
- 230000007547 defect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 238000009825 accumulation Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- 238000005253 cladding Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- -1 nitride compound Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- Semiconductor Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002246368A JP4284946B2 (ja) | 2002-08-27 | 2002-08-27 | 窒化物系半導体発光素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002246368A JP4284946B2 (ja) | 2002-08-27 | 2002-08-27 | 窒化物系半導体発光素子 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004087763A JP2004087763A (ja) | 2004-03-18 |
JP2004087763A5 JP2004087763A5 (enrdf_load_stackoverflow) | 2005-10-20 |
JP4284946B2 true JP4284946B2 (ja) | 2009-06-24 |
Family
ID=32054287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002246368A Expired - Lifetime JP4284946B2 (ja) | 2002-08-27 | 2002-08-27 | 窒化物系半導体発光素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4284946B2 (enrdf_load_stackoverflow) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100657963B1 (ko) | 2005-06-28 | 2006-12-14 | 삼성전자주식회사 | 고출력 수직외부공진형 표면발광 레이저 |
KR100753518B1 (ko) | 2006-05-23 | 2007-08-31 | 엘지전자 주식회사 | 질화물계 발광 소자 |
JP4655103B2 (ja) | 2008-04-14 | 2011-03-23 | ソニー株式会社 | GaN系半導体発光素子、発光素子組立体、発光装置、GaN系半導体発光素子の駆動方法、及び、画像表示装置 |
JP2009259953A (ja) * | 2008-04-15 | 2009-11-05 | Sharp Corp | 窒化物半導体レーザ素子 |
JP2010003913A (ja) * | 2008-06-20 | 2010-01-07 | Sharp Corp | 窒化物半導体発光ダイオード素子およびその製造方法 |
JP5196160B2 (ja) | 2008-10-17 | 2013-05-15 | 日亜化学工業株式会社 | 半導体発光素子 |
WO2011021264A1 (ja) * | 2009-08-17 | 2011-02-24 | 株式会社 東芝 | 窒化物半導体発光素子 |
KR20120138080A (ko) * | 2011-06-14 | 2012-12-24 | 엘지이노텍 주식회사 | 발광 소자 |
JP5868650B2 (ja) * | 2011-10-11 | 2016-02-24 | 株式会社東芝 | 半導体発光素子 |
KR101865405B1 (ko) * | 2011-10-13 | 2018-06-07 | 엘지이노텍 주식회사 | 발광소자 |
KR101983777B1 (ko) * | 2012-12-20 | 2019-05-29 | 엘지이노텍 주식회사 | 발광소자 |
JP2015053531A (ja) * | 2014-12-17 | 2015-03-19 | 株式会社東芝 | 半導体発光素子 |
JP6225945B2 (ja) * | 2015-05-26 | 2017-11-08 | 日亜化学工業株式会社 | 半導体レーザ素子 |
JP2018516466A (ja) | 2015-06-05 | 2018-06-21 | オステンド・テクノロジーズ・インコーポレーテッド | 多重活性層へのキャリア注入を選定した発光構造 |
JP6218791B2 (ja) * | 2015-10-28 | 2017-10-25 | シャープ株式会社 | 窒化物半導体レーザ素子 |
WO2021206012A1 (ja) * | 2020-04-06 | 2021-10-14 | ヌヴォトンテクノロジージャパン株式会社 | 半導体レーザ装置及び半導体レーザ装置の製造方法 |
CN113451460B (zh) * | 2020-11-20 | 2022-07-22 | 重庆康佳光电技术研究院有限公司 | 发光器件及其制备方法 |
CN114825048B (zh) * | 2022-04-08 | 2025-03-14 | 安徽格恩半导体有限公司 | 一种半导体激光元件 |
CN114825049B (zh) * | 2022-04-20 | 2025-03-14 | 安徽格恩半导体有限公司 | 一种半导体激光器 |
WO2025103577A1 (en) * | 2023-11-14 | 2025-05-22 | Ams-Osram International Gmbh | Light emitting device with multi-layered barrier layer |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2966982B2 (ja) * | 1991-08-30 | 1999-10-25 | 株式会社東芝 | 半導体レーザ |
JP3658112B2 (ja) * | 1995-11-06 | 2005-06-08 | 日亜化学工業株式会社 | 窒化物半導体レーザダイオード |
JPH09139543A (ja) * | 1995-11-15 | 1997-05-27 | Hitachi Ltd | 半導体レーザ素子 |
JPH1065271A (ja) * | 1996-08-13 | 1998-03-06 | Toshiba Corp | 窒化ガリウム系半導体光発光素子 |
JP2002043695A (ja) * | 2000-07-26 | 2002-02-08 | Sharp Corp | 発光素子 |
JP2002171028A (ja) * | 2000-11-30 | 2002-06-14 | Nichia Chem Ind Ltd | レーザ素子 |
JP2002190635A (ja) * | 2000-12-20 | 2002-07-05 | Sharp Corp | 半導体レーザ素子およびその製造方法 |
-
2002
- 2002-08-27 JP JP2002246368A patent/JP4284946B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2004087763A (ja) | 2004-03-18 |
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