JP4169663B2 - 垂直磁気記録媒体 - Google Patents
垂直磁気記録媒体 Download PDFInfo
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- JP4169663B2 JP4169663B2 JP2003279861A JP2003279861A JP4169663B2 JP 4169663 B2 JP4169663 B2 JP 4169663B2 JP 2003279861 A JP2003279861 A JP 2003279861A JP 2003279861 A JP2003279861 A JP 2003279861A JP 4169663 B2 JP4169663 B2 JP 4169663B2
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- 230000005291 magnetic effect Effects 0.000 title claims description 285
- 239000000463 material Substances 0.000 claims description 59
- 239000013078 crystal Substances 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 48
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 34
- 239000011651 chromium Substances 0.000 claims description 20
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 16
- 239000013081 microcrystal Substances 0.000 claims description 16
- 239000000696 magnetic material Substances 0.000 claims description 15
- VMJRMGHWUWFWOB-UHFFFAOYSA-N nickel tantalum Chemical group [Ni].[Ta] VMJRMGHWUWFWOB-UHFFFAOYSA-N 0.000 claims description 15
- 229910052707 ruthenium Inorganic materials 0.000 claims description 15
- 239000002159 nanocrystal Substances 0.000 claims description 14
- 229910017052 cobalt Inorganic materials 0.000 claims description 13
- 239000010941 cobalt Substances 0.000 claims description 13
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 10
- 229910052759 nickel Inorganic materials 0.000 claims description 10
- 239000007769 metal material Substances 0.000 claims description 8
- 229910001362 Ta alloys Inorganic materials 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- FEBJSGQWYJIENF-UHFFFAOYSA-N nickel niobium Chemical compound [Ni].[Nb] FEBJSGQWYJIENF-UHFFFAOYSA-N 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- MMPUEYVONITLMG-UHFFFAOYSA-N [Cr].[Ni].[Ta] Chemical compound [Cr].[Ni].[Ta] MMPUEYVONITLMG-UHFFFAOYSA-N 0.000 claims description 4
- GUBSQCSIIDQXLB-UHFFFAOYSA-N cobalt platinum Chemical compound [Co].[Pt].[Pt].[Pt] GUBSQCSIIDQXLB-UHFFFAOYSA-N 0.000 claims description 4
- 229910001260 Pt alloy Inorganic materials 0.000 claims description 2
- 229940090961 chromium dioxide Drugs 0.000 claims description 2
- AYTAKQFHWFYBMA-UHFFFAOYSA-N chromium(IV) oxide Inorganic materials O=[Cr]=O AYTAKQFHWFYBMA-UHFFFAOYSA-N 0.000 claims description 2
- 229910001257 Nb alloy Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 159
- 239000000956 alloy Substances 0.000 description 38
- 229910045601 alloy Inorganic materials 0.000 description 36
- 229910004298 SiO 2 Inorganic materials 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 229910052804 chromium Inorganic materials 0.000 description 13
- 229910052715 tantalum Inorganic materials 0.000 description 12
- ZGWQKLYPIPNASE-UHFFFAOYSA-N [Co].[Zr].[Ta] Chemical compound [Co].[Zr].[Ta] ZGWQKLYPIPNASE-UHFFFAOYSA-N 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000005415 magnetization Effects 0.000 description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000010894 electron beam technology Methods 0.000 description 8
- 229910052697 platinum Inorganic materials 0.000 description 8
- 229910052726 zirconium Inorganic materials 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000011241 protective layer Substances 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- KJARLYVSXQNQPM-UHFFFAOYSA-N chromium cobalt dioxosilane platinum Chemical compound [Si](=O)=O.[Pt].[Cr].[Co] KJARLYVSXQNQPM-UHFFFAOYSA-N 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- UMUXBDSQTCDPJZ-UHFFFAOYSA-N chromium titanium Chemical compound [Ti].[Cr] UMUXBDSQTCDPJZ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000001050 lubricating effect Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- GNEMDYVJKXMKCS-UHFFFAOYSA-N cobalt zirconium Chemical compound [Co].[Zr] GNEMDYVJKXMKCS-UHFFFAOYSA-N 0.000 description 4
- 238000002003 electron diffraction Methods 0.000 description 4
- 239000003302 ferromagnetic material Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000001771 impaired effect Effects 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000010702 perfluoropolyether Substances 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000010365 information processing Effects 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- DTJAVSFDAWLDHQ-UHFFFAOYSA-N [Cr].[Co].[Pt] Chemical compound [Cr].[Co].[Pt] DTJAVSFDAWLDHQ-UHFFFAOYSA-N 0.000 description 2
- 239000005354 aluminosilicate glass Substances 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 238000003426 chemical strengthening reaction Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- -1 hydrogenated carbon (hydrogenated carbon Chemical class 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/667—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers including a soft magnetic layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
- G11B5/737—Physical structure of underlayer, e.g. texture
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73921—Glass or ceramic substrates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Magnetic Record Carriers (AREA)
Description
00Gビット(100Gbit/inch2)以上が求められるようになりつつある。このような高記録面密度において良好に情報記録及び再生が行える垂直磁気記録ディスクを実現するには、所定のS/N比及び分解能を確保するため、記録層の磁化容易軸の垂直配向性について、さらに一層の厳密な制御をする必要が生ずる。
請求項6記載の本発明は、請求項1乃至請求項5のいずれか一に記載の垂直磁気記録媒体であって、非磁性材料がルテニウムであることを特徴とするものである。
請求項7記載の本発明は、請求項1記載の垂直磁気記録媒体であって、グラニュラー構造が、コバルト−白金系合金に、クロムや二酸化シリコンの非磁性材料が含有されることを特徴とするものである。
請求項8記載の本発明は、請求項1記載の垂直磁気記録媒体であって、第1の非磁性下地層が、ニッケル−タンタル系合金、クロム−ニッケル−タンタル系合金、または、ニッケル−ニオブ系合金であることを特徴とするものである。
本発明に係る垂直磁気記録媒体は、例えば、HDD(ハードディスクドライブ)等に搭載される磁気ディスクとして構成され、垂直磁気記録方式によって高密度の情報信号記録及び再生を行うことができる記録媒体である。磁気ディスクとして構成された本発明に係る垂直磁気記録媒体は、例えば、1.0インチ(inch)、1.8インチ、2.5インチ、3.5インチなどの所定の直径となされて作製される。
この潤滑層8は、パーフロロポリエーテル(PFPE)などからなり、膜厚は1nm程度である。この潤滑層8は、図示しない磁気ヘッドの衝撃を緩和するための層である。
この比較例1においては、実施例1と同様の基板を用いて、〔表1〕に示すように、軟磁性下地層3をアモルファス(非晶質)のコバルト−タンタル−ジルコニウム(Co−Ta−Zr)(Co:88at%、Ta:7at%、Zr:5at%)の合金層とし、第1の非磁性下地層4をチタン(Ti)(Ti:100at%)の金属層とし、第2の非磁性下地層5を非磁性で六方細密充填(hcp)結晶構造のルテニウム(Ru)金属層とし、垂直磁気記録層6をコバルト−クロム−白金−二酸化シリコン(Co−Cr−Pt−(SiO2))系合金((Co:64at%、Cr:16at%、Pt:20at%):92mol%−SiO2:8mol%)からなる硬磁性体層として、を順次成膜した。その他の材料、作製条件は、実施例1と同様である。
この比較例2においては、実施例1と同様の基板を用いて、〔表1〕に示すように、軟磁性下地層3をアモルファス(非晶質)のコバルト−タンタル−ジルコニウム(Co−Ta−Zr)(Co:88at%、Ta:7at%、Zr:5at%)の合金層とし、第1の非磁性下地層4を非磁性アモルファスのニッケル−タンタル(Ni−Ta)(Ni:45at%、Ta:55at%)の合金層とし、第2の非磁性下地層5をなくし、垂直磁気記録層6をコバルト−クロム−白金−二酸化シリコン(Co−Cr−Pt−(SiO2))系合金((Co:64at%、Cr:16at%、Pt:20at%):92mol%−SiO2:8mol%)からなる硬磁性体層として、を順次成膜した。その他の材料、作製条件は、実施例1と同様である。
この比較例3においては、実施例1と同様の基板を用いて、〔表1〕に示すように、軟磁性下地層3をアモルファス(非晶質)のコバルト−タンタル−ジルコニウム(Co−Ta−Zr)(Co:88at%、Ta:7at%、Zr:5at%)の合金層とし、第1の非磁性下地層4をなくし、第2の非磁性下地層5を非磁性で六方細密充填(hcp)結晶構造のルテニウム(Ru)金属層とし、垂直磁気記録層6をコバルト−クロム−白金−二酸化シリコン(Co−Cr−Pt−(SiO2))系合金((Co:64at%、Cr:16at%、Pt:20at%):92mol%−SiO2:8mol%)からなる硬磁性体層として、を順次成膜した。その他の材料、作製条件は、実施例1と同様である。
3 軟磁性下地層
4 第1の非磁性下地層
5 第2の非磁性下地層
6 垂直磁気記録層
Claims (8)
- 非磁性材料からなる基板上に第1及び第2の非磁性下地層が形成され、これら非磁性下地層上に垂直磁気記録層が形成された垂直磁気記録媒体であって、
前記第1の非磁性下地層は、単体で面心立方結晶構造を形成する金属元素のニッケルを含有する、完全な非晶質物質や、微結晶(ナノクリスタル)を含む非晶質物質からなるアモルファスの非磁性金属材料からなり、
前記第2の非磁性下地層は、前記第1の非磁性下地層上にこの第1の非磁性下地層に接して形成され、六方細密充填結晶構造を含有する非磁性材料からなり、
前記垂直磁気記録層は、前記第2の非磁性下地層上にこの第2の非磁性下地層に接して形成されていることを特徴とする垂直磁気記録媒体。 - 前記基板と前記第1の非磁性下地層との間に、完全な非晶質物質や、微結晶(ナノクリスタル)を含む非晶質物質からなるアモルファスの軟磁性下地層が形成されていることを特徴とする請求項1記載の垂直磁気記録媒体。
- 前記アモルファスの軟磁性下地層は、完全な非晶質物質や、微結晶(ナノクリスタル)を含む非晶質物質からなるアモルファスのコバルト系材料からなることを特徴とする請求項2記載の垂直磁気記録媒体。
- 前記垂直磁気記録層は、グラニュラー磁性層であることを特徴とする請求項1乃至請求項3のいずれか一に記載の垂直磁気記録媒体。
- 前記基板は、アモルファスを含むガラス基板であることを特徴とする請求項1乃至請求項4のいずれか一に記載の垂直磁気記録媒体。
- 前記非磁性材料がルテニウムであることを特徴とする請求項1乃至請求項5のいずれか一に記載の垂直磁気記録媒体。
- 前記グラニュラー構造が、コバルト−白金系合金に、クロムや二酸化シリコンの非磁性材料が含有されることを特徴とする請求項1記載の垂直磁気記録媒体。
- 前記第1の非磁性下地層が、ニッケル−タンタル系合金、クロム−ニッケル−タンタル系合金、または、ニッケル−ニオブ系合金であることを特徴とする請求項1記載の垂直磁気記録媒体。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003279861A JP4169663B2 (ja) | 2003-07-25 | 2003-07-25 | 垂直磁気記録媒体 |
SG200404303A SG108964A1 (en) | 2003-07-25 | 2004-07-23 | Perpendicular magnetic recording medium |
US10/898,348 US7993765B2 (en) | 2003-07-25 | 2004-07-26 | Perpendicular magnetic recording medium |
Applications Claiming Priority (1)
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JP2003279861A JP4169663B2 (ja) | 2003-07-25 | 2003-07-25 | 垂直磁気記録媒体 |
Publications (2)
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JP2005044464A JP2005044464A (ja) | 2005-02-17 |
JP4169663B2 true JP4169663B2 (ja) | 2008-10-22 |
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JP2003279861A Expired - Fee Related JP4169663B2 (ja) | 2003-07-25 | 2003-07-25 | 垂直磁気記録媒体 |
Country Status (3)
Country | Link |
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US (1) | US7993765B2 (ja) |
JP (1) | JP4169663B2 (ja) |
SG (1) | SG108964A1 (ja) |
Families Citing this family (111)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4105654B2 (ja) * | 2004-04-14 | 2008-06-25 | 富士通株式会社 | 垂直磁気記録媒体、磁気記憶装置、および垂直磁気記録媒体の製造方法 |
JP4222965B2 (ja) * | 2004-04-15 | 2009-02-12 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直磁気記録媒体及びその製造方法、磁気記録装置 |
US20060042938A1 (en) * | 2004-09-01 | 2006-03-02 | Heraeus, Inc. | Sputter target material for improved magnetic layer |
US7534507B2 (en) * | 2004-10-25 | 2009-05-19 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording medium for high density magnetic recording and manufacturing of the same |
US7641989B2 (en) * | 2004-12-13 | 2010-01-05 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording medium for high density recording and manufacturing of the same |
US7736765B2 (en) * | 2004-12-28 | 2010-06-15 | Seagate Technology Llc | Granular perpendicular magnetic recording media with dual recording layer and method of fabricating same |
US20060146445A1 (en) * | 2005-01-04 | 2006-07-06 | Seagate Technology Llc. | Erasure-resistant perpendicular magnetic recording media, systems & method of manufacturing same |
US8110298B1 (en) | 2005-03-04 | 2012-02-07 | Seagate Technology Llc | Media for high density perpendicular magnetic recording |
JP2006268972A (ja) * | 2005-03-24 | 2006-10-05 | Hoya Corp | 垂直磁気記録ディスク及びその製造方法 |
US7632580B2 (en) * | 2005-06-06 | 2009-12-15 | Hitachi Global Storage Technologies Netherlands, B.V. | Perpendicular magnetic recording medium having an interlayer of a non-magnetic nickel alloy |
JP2006344293A (ja) * | 2005-06-08 | 2006-12-21 | Fujitsu Ltd | 磁気記録媒体および磁気記憶装置 |
US7833640B2 (en) * | 2005-08-19 | 2010-11-16 | Hitachi Global Storage Technologies Netherlands B.V. | Intermediate tri-layer structure for perpendicular recording media |
US8119263B2 (en) * | 2005-09-22 | 2012-02-21 | Seagate Technology Llc | Tuning exchange coupling in magnetic recording media |
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