JP4864391B2 - 磁気記録媒体、その製造方法および磁気記録再生装置 - Google Patents
磁気記録媒体、その製造方法および磁気記録再生装置 Download PDFInfo
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- JP4864391B2 JP4864391B2 JP2005257366A JP2005257366A JP4864391B2 JP 4864391 B2 JP4864391 B2 JP 4864391B2 JP 2005257366 A JP2005257366 A JP 2005257366A JP 2005257366 A JP2005257366 A JP 2005257366A JP 4864391 B2 JP4864391 B2 JP 4864391B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000203 mixture Substances 0.000 claims description 25
- 239000013078 crystal Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 19
- 229910000929 Ru alloy Inorganic materials 0.000 claims description 5
- 239000000470 constituent Substances 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 229910052707 ruthenium Inorganic materials 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 43
- 238000011156 evaluation Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 229910001004 magnetic alloy Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910001069 Ti alloy Inorganic materials 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 229910005435 FeTaN Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Description
2 裏打ち層
21 第1軟磁性層
22 Ru層
23 第2軟磁性層
3 下地膜
4 中間層
5 垂直磁気記録膜
6 保護膜
Claims (5)
- 非磁性基板上に、少なくとも裏打ち層と下地膜と中間層と垂直磁気記録膜を有する磁気記録媒体において、
前記下地膜は、
NiCrB、NiCrBCoの何れかからなって他の元素を含まず、fcc構造を有する結晶構造であり、
構成元素のうちNiの組成が最も多く、
Bの組成が1at%以上20at%以下であり、
Crの組成が10at%以上45at%以下であり、
前記中間層は、RuまたはRu合金からなり、
前記垂直磁気記録膜は、少なくともCoとPtと酸化物とを含む、
ことを特徴とする磁気記録媒体。 - 前記下地膜の膜厚が1nm以上12nm以下である、請求項1に記載の磁気記録媒体。
- 前記裏打ち層を構成する軟磁性膜が非結晶質構造である、請求項1または2に記載の磁気記録媒体。
- 非磁性基板上に、少なくとも裏打ち層と下地膜と中間層と垂直磁気記録膜を有する磁気記録媒体を製造する磁気記録媒体の製造方法において、
前記下地膜をNiCrB、NiCrBCoの何れかから形成して他の元素を含めず、fcc構造を有する結晶構造とし、
構成元素のうちNiの組成を最も多くし、
Bの組成を1at%以上20at%以下とし、
Crの組成を10at%以上45at%以下とし、
前記中間層を、RuまたはRu合金から形成し、
前記垂直磁気記録膜を、少なくともCoとPtと酸化物とを含むものとする、
ことを特徴とする磁気記録媒体の製造方法。 - 磁気記録媒体と、該磁気記録媒体に情報を記録再生する磁気ヘッドとを備えた磁気記録再生装置であって、磁気ヘッドが単磁極ヘッドであり、磁気記録媒体が、請求項1乃至3の何れか1項に記載の磁気記録媒体である、ことを特徴とする磁気記録再生装置。
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JP2004258245 | 2004-09-06 | ||
JP2005257366A JP4864391B2 (ja) | 2004-09-06 | 2005-09-06 | 磁気記録媒体、その製造方法および磁気記録再生装置 |
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JP2006099951A JP2006099951A (ja) | 2006-04-13 |
JP4864391B2 true JP4864391B2 (ja) | 2012-02-01 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008034060A (ja) * | 2006-07-31 | 2008-02-14 | Fujitsu Ltd | 垂直磁気記録媒体および磁気記憶装置 |
US7736767B2 (en) | 2007-03-02 | 2010-06-15 | Hitachi Global Storage Technologies Netherlands, B.V. | Perpendicular magnetic recording medium having an interlayer formed from a NiWCr alloy |
US7662492B2 (en) | 2007-03-02 | 2010-02-16 | Hitachi Global Storage Techologies Netherlands, B.V. | Perpendicular magnetic recording medium having a multi-layer interlayer that includes BCC material |
US9028984B2 (en) * | 2007-04-13 | 2015-05-12 | Fuji Electric Co., Ltd. | Perpendicular magnetic recording medium |
WO2010032766A1 (ja) | 2008-09-16 | 2010-03-25 | Hoya株式会社 | 垂直磁気記録媒体およびその製造方法 |
JP2010097680A (ja) * | 2008-09-16 | 2010-04-30 | Hoya Corp | 垂直磁気記録媒体 |
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JP4583659B2 (ja) * | 2001-05-23 | 2010-11-17 | 昭和電工株式会社 | 磁気記録媒体、その製造方法、および磁気記録再生装置 |
JP4535666B2 (ja) * | 2002-06-06 | 2010-09-01 | 富士電機デバイステクノロジー株式会社 | 垂直磁気記録媒体 |
CN100373457C (zh) * | 2003-02-20 | 2008-03-05 | 富士通株式会社 | 垂直磁性记录介质 |
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