JP3980167B2 - Tft電極基板 - Google Patents

Tft電極基板 Download PDF

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Publication number
JP3980167B2
JP3980167B2 JP09426898A JP9426898A JP3980167B2 JP 3980167 B2 JP3980167 B2 JP 3980167B2 JP 09426898 A JP09426898 A JP 09426898A JP 9426898 A JP9426898 A JP 9426898A JP 3980167 B2 JP3980167 B2 JP 3980167B2
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JP
Japan
Prior art keywords
liquid crystal
film
signal line
tft
scanning signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP09426898A
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English (en)
Japanese (ja)
Other versions
JPH11298002A5 (enExample
JPH11298002A (ja
Inventor
育子 盛
拓生 海東
広伸 阿部
正容 江渡
敏浩 佐藤
一博 石田
元 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP09426898A priority Critical patent/JP3980167B2/ja
Priority to TW088103479A priority patent/TW505798B/zh
Priority to KR1019990011675A priority patent/KR100691620B1/ko
Priority to US09/285,025 priority patent/US6344885B1/en
Priority to US09/430,133 priority patent/US6255131B1/en
Publication of JPH11298002A publication Critical patent/JPH11298002A/ja
Publication of JPH11298002A5 publication Critical patent/JPH11298002A5/ja
Application granted granted Critical
Publication of JP3980167B2 publication Critical patent/JP3980167B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136213Storage capacitors associated with the pixel electrode
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6723Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device having light shields
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H10D30/6733Multi-gate TFTs
    • H10D30/6734Multi-gate TFTs having gate electrodes arranged on both top and bottom sides of the channel, e.g. dual-gate TFTs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136209Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/10Materials and properties semiconductor
    • G02F2202/104Materials and properties semiconductor poly-Si

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP09426898A 1998-04-07 1998-04-07 Tft電極基板 Expired - Lifetime JP3980167B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP09426898A JP3980167B2 (ja) 1998-04-07 1998-04-07 Tft電極基板
TW088103479A TW505798B (en) 1998-04-07 1999-03-06 A liquid crystal display device
KR1019990011675A KR100691620B1 (ko) 1998-04-07 1999-03-30 액정표시장치
US09/285,025 US6344885B1 (en) 1998-04-07 1999-04-01 Liquid crystal display device
US09/430,133 US6255131B1 (en) 1998-04-07 1999-10-29 Liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09426898A JP3980167B2 (ja) 1998-04-07 1998-04-07 Tft電極基板

Publications (3)

Publication Number Publication Date
JPH11298002A JPH11298002A (ja) 1999-10-29
JPH11298002A5 JPH11298002A5 (enExample) 2004-09-30
JP3980167B2 true JP3980167B2 (ja) 2007-09-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP09426898A Expired - Lifetime JP3980167B2 (ja) 1998-04-07 1998-04-07 Tft電極基板

Country Status (4)

Country Link
US (2) US6344885B1 (enExample)
JP (1) JP3980167B2 (enExample)
KR (1) KR100691620B1 (enExample)
TW (1) TW505798B (enExample)

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KR100288772B1 (ko) * 1998-11-12 2001-05-02 윤종용 액정 표시 장치 및 그 제조 방법
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US6576926B1 (en) * 1999-02-23 2003-06-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and fabrication method thereof
JP4403329B2 (ja) * 1999-08-30 2010-01-27 ソニー株式会社 液晶表示装置の製造方法
JP3889533B2 (ja) * 1999-09-22 2007-03-07 シャープ株式会社 液晶表示装置及びその製造方法
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JP3414343B2 (ja) * 1999-11-26 2003-06-09 日本電気株式会社 イメージセンサ及びその製造方法
JP4599655B2 (ja) * 2000-04-24 2010-12-15 セイコーエプソン株式会社 電気光学装置及びプロジェクタ
JP4896314B2 (ja) * 2000-08-04 2012-03-14 株式会社半導体エネルギー研究所 表示装置
JP3918412B2 (ja) * 2000-08-10 2007-05-23 ソニー株式会社 薄膜半導体装置及び液晶表示装置とこれらの製造方法
US6509616B2 (en) * 2000-09-29 2003-01-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and its manufacturing method
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TW525216B (en) 2000-12-11 2003-03-21 Semiconductor Energy Lab Semiconductor device, and manufacturing method thereof
JP4801262B2 (ja) * 2001-01-30 2011-10-26 株式会社半導体エネルギー研究所 半導体装置の作製方法
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JP4831885B2 (ja) 2001-04-27 2011-12-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
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JP4634673B2 (ja) * 2001-09-26 2011-02-16 シャープ株式会社 液晶表示装置及びその製造方法
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JP4031291B2 (ja) * 2001-11-14 2008-01-09 東芝松下ディスプレイテクノロジー株式会社 液晶表示装置
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JP2004096079A (ja) * 2002-07-11 2004-03-25 Sharp Corp 光電変換装置、画像読取装置および光電変換装置の製造方法
JP4631255B2 (ja) * 2003-07-16 2011-02-16 セイコーエプソン株式会社 アクティブマトリクス基板、表示装置、及び電子機器
JP2006178356A (ja) * 2004-12-24 2006-07-06 Nec Electronics Corp 表示装置の駆動回路
JP4350106B2 (ja) 2005-06-29 2009-10-21 三星モバイルディスプレイ株式會社 平板表示装置及びその駆動方法
JP2007109868A (ja) * 2005-10-13 2007-04-26 Sanyo Electric Co Ltd 薄膜トランジスタ及び有機エレクトロルミネッセンス表示装置
JP4007412B2 (ja) * 2007-01-12 2007-11-14 ソニー株式会社 薄膜半導体装置及び液晶表示装置とこれらの製造方法
JP2009049080A (ja) * 2007-08-15 2009-03-05 Hitachi Displays Ltd 表示装置
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US20120033146A1 (en) * 2010-08-03 2012-02-09 Chimei Innolux Corporation Liquid crystal display device and electronic device using the same
WO2013183495A1 (ja) * 2012-06-08 2013-12-12 シャープ株式会社 半導体装置およびその製造方法
KR101614398B1 (ko) * 2012-08-13 2016-05-02 엘지디스플레이 주식회사 박막 트랜지스터 기판과 그 제조방법 및 그를 이용한 유기 발광장치
JP2014149429A (ja) 2013-02-01 2014-08-21 Japan Display Inc 液晶表示装置および液晶表示装置の製造方法
JP2015206819A (ja) * 2014-04-17 2015-11-19 株式会社ジャパンディスプレイ 表示装置
CN104538456B (zh) * 2014-12-31 2018-07-17 深圳市华星光电技术有限公司 低温多晶硅薄膜晶体管及薄膜晶体管基板
JP2015122538A (ja) * 2015-03-09 2015-07-02 株式会社半導体エネルギー研究所 半導体装置
KR102316458B1 (ko) * 2015-03-24 2021-10-25 삼성디스플레이 주식회사 액정 표시장치
TW202416542A (zh) * 2015-03-30 2024-04-16 日商半導體能源研究所股份有限公司 半導體裝置的製造方法
JP2016200645A (ja) * 2015-04-07 2016-12-01 株式会社ジャパンディスプレイ 表示装置
US9935127B2 (en) 2015-07-29 2018-04-03 Wuhan China Star Optoelectronics Technology Co., Ltd. Control circuit of thin film transistor
CN105093738B (zh) * 2015-07-29 2018-09-04 武汉华星光电技术有限公司 一种薄膜晶体管的控制电路
KR102374537B1 (ko) 2015-08-21 2022-03-15 삼성디스플레이 주식회사 표시 장치
JP6776060B2 (ja) * 2016-08-29 2020-10-28 株式会社ジャパンディスプレイ 表示装置
CN106526992A (zh) * 2016-12-30 2017-03-22 深圳市华星光电技术有限公司 一种coa基板及液晶面板
CN106920804B (zh) 2017-04-28 2020-03-24 厦门天马微电子有限公司 一种阵列基板、其驱动方法、显示面板及显示装置
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Also Published As

Publication number Publication date
TW505798B (en) 2002-10-11
KR100691620B1 (ko) 2007-03-09
JPH11298002A (ja) 1999-10-29
KR19990082905A (ko) 1999-11-25
US6255131B1 (en) 2001-07-03
US6344885B1 (en) 2002-02-05

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