JP3868223B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP3868223B2
JP3868223B2 JP2001130766A JP2001130766A JP3868223B2 JP 3868223 B2 JP3868223 B2 JP 3868223B2 JP 2001130766 A JP2001130766 A JP 2001130766A JP 2001130766 A JP2001130766 A JP 2001130766A JP 3868223 B2 JP3868223 B2 JP 3868223B2
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JP
Japan
Prior art keywords
substrate
roller
support
product
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001130766A
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English (en)
Japanese (ja)
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JP2002321820A5 (enrdf_load_stackoverflow
JP2002321820A (ja
Inventor
清久 立山
公男 元田
武虎 篠木
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2001130766A priority Critical patent/JP3868223B2/ja
Publication of JP2002321820A publication Critical patent/JP2002321820A/ja
Publication of JP2002321820A5 publication Critical patent/JP2002321820A5/ja
Application granted granted Critical
Publication of JP3868223B2 publication Critical patent/JP3868223B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2001130766A 2001-04-27 2001-04-27 搬送装置 Expired - Fee Related JP3868223B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001130766A JP3868223B2 (ja) 2001-04-27 2001-04-27 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001130766A JP3868223B2 (ja) 2001-04-27 2001-04-27 搬送装置

Publications (3)

Publication Number Publication Date
JP2002321820A JP2002321820A (ja) 2002-11-08
JP2002321820A5 JP2002321820A5 (enrdf_load_stackoverflow) 2004-09-16
JP3868223B2 true JP3868223B2 (ja) 2007-01-17

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ID=18979073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001130766A Expired - Fee Related JP3868223B2 (ja) 2001-04-27 2001-04-27 搬送装置

Country Status (1)

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JP (1) JP3868223B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101652302B (zh) * 2007-04-05 2012-10-10 平田机工株式会社 基板输送系统

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327985B (en) 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
TWI327128B (en) * 2003-07-08 2010-07-11 Daifuku Kk Plate-shaped work piece transporting apparatus
TWI295658B (en) 2003-08-21 2008-04-11 Daifuku Kk Transporting apparatus
TWI295659B (en) 2003-08-29 2008-04-11 Daifuku Kk Transporting apparatus
JP4244006B2 (ja) * 2003-11-14 2009-03-25 株式会社ダイフク 搬送装置
JP4244000B2 (ja) * 2003-08-29 2009-03-25 株式会社ダイフク 搬送装置
JP4161272B2 (ja) 2003-12-16 2008-10-08 株式会社ダイフク 搬送装置
WO2006003876A1 (ja) * 2004-06-30 2006-01-12 Hirata Corporation 基板塗布装置
JP4554397B2 (ja) 2005-02-23 2010-09-29 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4705794B2 (ja) * 2005-03-28 2011-06-22 富士通株式会社 配線基板の搬送機構
JP4690414B2 (ja) * 2005-09-02 2011-06-01 平田機工株式会社 ワーク搬入出システム及び搬送装置
JP2007073613A (ja) * 2005-09-05 2007-03-22 Shimada Phys & Chem Ind Co Ltd 基板搬送装置
JP4987352B2 (ja) * 2006-05-17 2012-07-25 ゲットナー・ファンデーション・エルエルシー 基板搬送装置
KR100865702B1 (ko) 2006-12-28 2008-10-28 강인택 에어롤러 및 이를 이용한 컨베이어
JP5658858B2 (ja) * 2008-06-10 2015-01-28 東京応化工業株式会社 塗布装置及び塗布方法
JP5056611B2 (ja) * 2008-06-20 2012-10-24 凸版印刷株式会社 基板処理装置
JP2011086807A (ja) * 2009-10-16 2011-04-28 Tokyo Electron Ltd 減圧乾燥装置
CN102774609A (zh) * 2011-05-12 2012-11-14 佶新科技股份有限公司 直接传动式平板运送装置
CN106966168A (zh) * 2017-05-09 2017-07-21 成都亨通兆业精密机械有限公司 一种稳定运输玻璃板的传送装置
KR102154342B1 (ko) * 2019-02-11 2020-09-10 아메스산업(주) 자동 정렬 기능을 갖는 기판 이송 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101652302B (zh) * 2007-04-05 2012-10-10 平田机工株式会社 基板输送系统

Also Published As

Publication number Publication date
JP2002321820A (ja) 2002-11-08

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