JP2021077684A - ウエーハの処理方法 - Google Patents
ウエーハの処理方法 Download PDFInfo
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- JP2021077684A JP2021077684A JP2019201191A JP2019201191A JP2021077684A JP 2021077684 A JP2021077684 A JP 2021077684A JP 2019201191 A JP2019201191 A JP 2019201191A JP 2019201191 A JP2019201191 A JP 2019201191A JP 2021077684 A JP2021077684 A JP 2021077684A
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Abstract
【解決手段】本発明によれば、突起状の電極120を備えたデバイス12が分割予定ライン14によって区画され表面10aに複数形成されたウエーハ10の処理方法であって、ウエーハ10の裏面10bをチャックテーブル52の保持面52aに保持し保持面52aと平行に旋回するバイト331によって突起状の電極120の頭を切削して高さを揃えると共に金属面を露出させる切削工程と、熱圧着シート60をウエーハ10の表面10aに敷設する熱圧着シート敷設工程と、熱圧着シート60を加熱すると共に押圧して熱圧着する熱圧着工程と、ウエーハ10を個々のデバイスチップに分割して電極120を配線基板にボンディングする際に熱圧着シート60をウエーハ10から剥離する剥離工程と、を含むウエーハの処理方法が提供される。
【選択図】図2
Description
2:装置ハウジング
21:主部
22:直立壁
3:切削ユニット
31:移動基台
312:案内レール
32:スピンドルユニット
322:回転スピンドル
323:サーボモータ
324:バイト工具装着部材
33:バイト工具
331:バイト
4:切込み送り機構
41:雄ねじロッド
44:パルスモータ
5:チャックテーブル機構
52:チャックテーブル
52a:吸着チャック
10:ウエーハ
12:デバイス
120:電極
122:金属面
14:分割予定ライン
16:アンダーフィル
60:熱圧着シート
70:熱圧着装置
72:吸引テーブル
74:吸着チャック
80:熱圧着手段
82:回転軸
84:加熱ローラ
90:切削手段
96:切削ブレード
100:研削装置
104:研削ホイール
106:研削砥石
110:チャックテーブル
130:分割溝
140:切削装置
146:切削ブレード
Claims (4)
- 突起状の電極を備えたデバイスが分割予定ラインによって区画され表面に複数形成されたウエーハの処理方法であって、
ウエーハの裏面をチャックテーブルの保持面に保持し該保持面と平行に旋回するバイトによって突起状の電極の頭を切削して高さを揃えると共に金属面を露出させる切削工程と、
熱圧着シートをウエーハの表面に敷設する熱圧着シート敷設工程と、
熱圧着シートを加熱すると共に押圧して熱圧着する熱圧着工程と、
ウエーハを個々のデバイスチップに分割して該電極を配線基板にボンディングする際に該熱圧着シートを剥離する剥離工程と、
を含むウエーハの処理方法。 - 該切削工程の後、該熱圧着工程を実施する前に該電極の頭に形成された金属面にメッキを形成するメッキ工程を含む請求項1に記載のウエーハの処理方法。
- 該熱圧着シートは、ポリオレフィン系シート、又はポリエステル系シートであり、
該ポリオレフィン系シートは、ポリエチレンシート、ポリプロピレンシート、ポリスチレンシートのいずれかであり、
該ポリエステル系シートは、ポリエチレンテレフタレートシート、ポリエチレンナフタレートシートのいずれかである請求項1、又は2に記載のウエーハの処理方法。 - 該熱圧着工程において熱圧着シートを加熱する際の加熱温度は、該熱圧着シートとしてポリエチレンシートが選択された場合は120℃〜140℃であり、ポリプロピレンシートが選択された場合は160℃〜180℃であり、ポリスチレンシートが選択された場合は220℃〜240℃であり、ポリエチレンテレフタレートシートが選択された場合は250℃〜270℃であり、ポリエチレンナフタレートが選択された場合は160℃〜180℃である請求項3に記載のウエーハの処理方法。
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