JP2017117990A - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
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- 230000015572 biosynthetic process Effects 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 description 117
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- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
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Abstract
【解決手段】表面に形成された複数のデバイスを区画する分割予定ラインにデバイスの仕上がり厚さに相当する深さの溝が形成され、デバイスを含む表面にモールド樹脂を敷設するとともに溝にモールド樹脂が埋設されたウエーハの加工方法であって、ウエーハの表面に敷設されたモールド樹脂の外周部を除去して溝に埋設されたモールド樹脂をウエーハの表面に露出させるモールド樹脂除去工程と、ウエーハの外周部に露出された該溝に埋設されたモールド樹脂を検出し、溝に埋設されたモールド樹脂の幅方向中央にレーザー光線の集光点を位置付けて溝に沿って照射することによりウエーハを個々のデバイスに分割する分割溝を形成する分割溝形成工程とを含む。
【選択図】図7
Description
(1)ウエーハの表面側から分割予定ラインに沿ってデバイスの仕上がり厚みに相当する深さの切削溝を形成する。
(2)ウエーハの表面にモールド樹脂を敷設するとともに切削溝にモールド樹脂を埋設する。
(3)ウエーハの表面に敷設されたモールド樹脂の表面に保護部材を貼着しウエーハの裏面を研削して切削溝を表出させる。
(4)ウエーハの裏面をダイシングテープに貼着し、切削溝の幅より薄い厚みの切削ブレードによって切削溝に埋設されたモールド樹脂を切断することにより、個々のウエーハレベルチップサイズパッケージ(WLCSP)と呼ばれるパッケージデバイスに分割する。
ウエーハの表面に敷設されたモールド樹脂の外周部を除去して該溝に埋設されたモールド樹脂をウエーハの表面に露出させるモールド樹脂除去工程と、
ウエーハの外周部に露出された該溝に埋設されたモールド樹脂を検出し、該溝に埋設されたモールド樹脂の幅方向中央にレーザー光線の集光点を位置付けて該溝に沿って照射することによりウエーハを個々のデバイスに分割する分割溝を形成する分割溝形成工程と、を含む、
ことを特徴とするウエーハの加工方法が提供される。
また、上記分割溝形成工程においてはデバイスの仕上がり厚さに相当する深さの分割溝を形成し、分割溝形成工程が実施されたウエーハの表面に保護部材を貼着する保護部材貼着工程と、ウエーハの裏面を研削してウエーハをデバイスの仕上がり厚さに形成して分割溝を表出させることによりウエーハを個々のデバイスに分割する裏面研削工程とを実施する。
ウエーハの表面に敷設されたモールド樹脂の外周部を除去して該溝に埋設されたモールド樹脂をウエーハの表面に露出させるモールド樹脂除去工程と、
ウエーハの外周部に露出された該溝に埋設されたモールド樹脂を検出し、該溝に埋設されたモールド樹脂の幅方向中央にレーザー光線の集光点を位置付けて該溝に沿って照射することによりウエーハを個々のデバイスに分割する分割溝を形成する分割溝形成工程と、を含んでいるので、分割溝形成工程は、ウエーハの外周部表面に露出された溝に埋設されたモールド樹脂の幅方向中央をレーザー光線を照射する集光器の直下に位置付けて実施するため、ウエーハの表面にモールド樹脂が敷設されていても溝に埋設されたモールド樹脂の幅方向中央に溝に沿ってパルスレーザー光線を照射することができ、デバイスを損傷することはない。
先ず、半導体ウエーハ2の表面側から分割予定ライン21に沿ってデバイスの仕上がり厚さに相当する深さの溝を形成する溝形成工程を実施する。この溝形成工程は、図示の実施形態においては図2に示す切削装置3を用いて実施する。図2に示す切削装置3は、被加工物を保持するチャックテーブル31と、該チャックテーブル31に保持された被加工物を切削する切削手段32と、該チャックテーブル31に保持された被加工物を撮像する撮像手段33を具備している。チャックテーブル31は、被加工物を吸引保持するように構成されており、図示しない切削送り手段によって図2において矢印Xで示す切削送り方向に移動せしめられるとともに、図示しない割り出し送り手段によって矢印Yで示す割り出し送り方向に移動せしめられるようになっている。
なお、上記モールディング工程においてバンプ23を被覆しないで半導体ウエーハ2の表面2aにモールド樹脂40を敷設した場合には、上述したバンプ露出工程は必ずしも必要ではない。
なお、上述した実施形態においては半導体ウエーハ2の表面に敷設されたモールド樹脂40の外周部を環状に除去した例を示したが、モールド樹脂40の外周部を部分的に除去してもよい。
波長 :355nmのパルスレーザー
繰り返し周波数 :100kHz
平均出力 :2W
集光スポット径 :φ10μm
加工送り速度 :100mm/秒
このようにして分割溝形成工程を実施した結果、半導体ウエーハ2は溝210に埋設されたモールド樹脂40を切断したレーザー加工溝からなる分割溝220によって個々のデバイスに分割され、個々に分割されたデバイス22は図12に示すように表面および側面がモールド樹脂40によって被覆されたウエーハレベルチップサイズパッケージ(WLCSP)と呼ばれるパッケージデバイスを構成している。
この実施形態においては、上記図6に示すモールド樹脂除去工程を実施した後に、半導体ウエーハ2の外周部に露出された溝210に埋設されたモールド樹脂を検出し、溝210に埋設されたモールド樹脂の幅方向中央部にレーザー光線の集光点を位置付けて溝210に沿って照射することにより半導体ウエーハ2を個々のデバイスに分割する分割溝を形成する分割溝形成工程を実施する。この分割溝形成工程は、上記図10に示すレーザー加工装置7を用いて実施する。即ち、図13に示すようにレーザー加工装置7のチャックテーブル71上に上記モールド樹脂除去工程が実施された半導体ウエーハ2の裏面2b側を載置する。そして、図示しない吸引手段を作動することによってチャックテーブル71上に半導体ウエーハ2を吸引保持する。従って、チャックテーブル71上に保持された半導体ウエーハ2は、表面に敷設されたモールド樹脂40が上側となる。このようにして、半導体ウエーハ2を吸引保持したチャックテーブル71は、図示しない加工送り手段によって撮像手段73の直下に位置付けられる。
なお、分割溝形成工程における加工条件は、上記図10および図11に示す分割溝形成工程における加工条件と同様でよい。
そして、上述した分割溝形成工程を半導体ウエーハ2に形成された全ての分割予定ライン21に沿って実施する。
21:分割予定ライン
22:デバイス
3,30:切削装置
31:切削装置のチャックテーブル
32:切削手段
323:切削ブレード
4:樹脂被覆装置
40:モールド樹脂
5:研磨装置
51:研磨装置のチャックテーブル
52:研磨手段
524:研磨工具
6:研削装置
61:研削装置のチャックテーブル
62:研削手段
66:研削ホイール
7:レーザー加工装置
71:レーザー加工装置のチャックテーブル
72:レーザー光線照射手段
722:集光器
F:環状のフレーム
PT:保護テープ
DT:ダイシングテープ
Claims (3)
- 表面に形成された複数のデバイスを区画する分割予定ラインにデバイスの仕上がり厚さに相当する深さの溝が形成され、デバイスを含む表面にモールド樹脂を敷設するとともに該溝にモールド樹脂が埋設されたウエーハの加工方法であって、
ウエーハの表面に敷設されたモールド樹脂の外周部を除去して該溝に埋設されたモールド樹脂をウエーハの表面に露出させるモールド樹脂除去工程と、
ウエーハの外周部に露出された該溝に埋設されたモールド樹脂を検出し、該溝に埋設されたモールド樹脂の幅方向中央にレーザー光線の集光点を位置付けて該溝に沿って照射することによりウエーハを個々のデバイスに分割する分割溝を形成する分割溝形成工程と、を含む、
ことを特徴とするウエーハの加工方法。 - 該分割溝形成工程を実施する前にウエーハの裏面を研削してウエーハをデバイスの仕上がり厚さに形成する裏面研削工程を実施し、該分割溝形成工程はウエーハを個々のデバイスに分割する深さの分割溝を形成する、請求項1記載のウエーハの加工方法。
- 該分割溝形成工程においてはデバイスの仕上がり厚さに相当する深さの分割溝を形成し、該分割溝形成工程が実施されたウエーハの表面に保護部材を貼着する保護部材貼着工程と、ウエーハの裏面を研削してウエーハをデバイスの仕上がり厚さに形成して該分割溝を表出させることによりウエーハを個々のデバイスに分割する裏面研削工程とを実施する、請求項1記載のウエーハの加工方法。
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