JP2020155472A - 半導体装置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 173
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- 239000004020 conductor Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 description 14
- 239000007924 injection Substances 0.000 description 14
- 239000000969 carrier Substances 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 4
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 108091006146 Channels Proteins 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Abstract
Description
図1は、第1実施形態に係る半導体装置1を示す模式断面図である。半導体装置1は、例えば、IGBTである。
図4に示す半導体装置2では、半導体部10は、第1ゲート電極40とエミッタプレート70との間に位置するp形ベース層13の第1部分13mと、第2ゲート電極50とエミッタプレート70との間に位置するp形ベース層13の第2部分13nと、を含む。
図5に示す半導体装置3では、半導体部10は、n形ベース層11とp形ベース層13との間に位置するn形バリア層25(第8半導体層)をさらに含む。
図6は、第2実施形態に係る半導体装置4を示す模式断面図である。
図6に示す半導体装置4では、トレンチゲート構造を有する第3ゲート電極80が設けられる。第3ゲート電極80は、半導体部10の第2面10B側に設けられたトレンチGT4の内部に配置される。第3ゲート電極80は、ゲート絶縁膜81を介して半導体部10から電気的に絶縁される。
Claims (8)
- 第1導電形の第1半導体層を含み、第1面と、前記第1面の反対側に位置する第2面と、を有する半導体部と、
前記第1面上に設けられた第1電極と、
前記第1電極と前記半導体部との間に設けられ、第1絶縁膜を介して前記半導体部から電気的に絶縁され、第2絶縁膜を介して前記第1電極から電気的に絶縁された第1制御電極と、
前記第1電極と前記半導体部との間に設けられ、第3絶縁膜を介して前記半導体部から電気的に絶縁され、第4絶縁膜を介して前記第1電極から電気的に絶縁され、前記第1制御電極とは独立にバイアスされる第2制御電極と、
前記第2面側に設けられ、第5絶縁膜を介して前記半導体部から電気的に絶縁された第3制御電極と、
前記第2面上の前記第3制御電極が設けられていない部分において、前記半導体部に電気的に接続された第2電極と、
を備え、
前記半導体部は、
前記第1半導体層と前記第1電極との間に選択的に設けられた第2導電形の第2半導体層と、
前記第2半導体層と前記第1電極との間に選択的に設けられた第1導電形の第3半導体層と、
前記第1半導体層と前記第2電極との間、および、前記第1半導体層と前記第3制御電極との間に設けられ、前記第1半導体層の第1導電形不純物よりも高濃度の第1導電形不純物を含む第1導電形の第4半導体層と、
前記第4半導体層と前記第2電極との間に設けられた第2導電形の第5半導体層と、
前記第5半導体層と前記第2電極との間に少なくとも一部が設けられた第1導電形の第6半導体層と、
を含み、
前記第1制御電極は、前記第2半導体層の一部に前記第1絶縁膜を介して向き合うように配置され、
前記第2制御電極は、前記第2半導体層の別の一部に前記第3絶縁膜を介して向き合うように配置され、
前記第3制御電極は、前記第5半導体層の一部に前記第5絶縁膜を介して向き合うように配置された半導体装置。 - 前記第1制御電極および前記第2制御電極は、それぞれ、前記半導体部の前記第1面側に設けられたトレンチの内部に配置される請求項1記載の半導体装置。
- 前記第1制御電極および前記第2制御電極との間に設けられた別のトレンチの内部に配置され、第6絶縁膜を介して前記半導体部から電気的に絶縁され、前記第1電極に電気的に接続された導電体をさらに備え、
前記導電体は、前記第1半導体層および前記第2半導体層の前記一部および前記別の一部に前記第6絶縁膜を介して向き合うように配置される請求項2記載の半導体装置。 - 前記半導体部は、前記第3半導体層とは別の第3半導体層をさらに備え、
前記第2制御電極は、前記第1半導体層と前記別の第3半導体層との間に位置する前記第2半導体層の前記別の一部に前記第3絶縁膜を介して向き合うように配置される請求項1〜3のいずれか1つに記載の半導体装置。 - 前記半導体部は、前記第2半導体層の前記第2制御電極と前記導電体との間に位置する部分と、前記第1電極と、の間に設けられ、前記第2半導体層の第2導電形不純物よりも高濃度の第2導電形不純物を含む第2導電形の第7半導体層をさらに備える請求項1〜3のいずれか1つに記載の半導体装置。
- 前記半導体部は、前記第1半導体層と前記第2半導体層との間に設けられ、前記第1半導体層の前記第1導電形不純物よりも高濃度の第1導電形不純物を含む第1導電形の第8半導体層をさらに備えた請求項1〜5のいずれか1つに記載の半導体装置。
- 前記第4半導体層は、前記第1半導体層と前記第3制御電極との間に位置し、前記第4半導体層と前記第5半導体層は、前記第2面に接する部分を含む請求項1〜6のいずれか1つに記載の半導体装置。
- 前記第3制御電極は、前記半導体部の前記第2面側に設けられたトレンチの内部に配置される請求項1〜6のいずれか1つに記載の半導体装置。
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JP2019050052A JP7210342B2 (ja) | 2019-03-18 | 2019-03-18 | 半導体装置 |
CN201910635931.1A CN111725308B (zh) | 2019-03-18 | 2019-07-15 | 半导体装置 |
US16/558,237 US10985268B2 (en) | 2019-03-18 | 2019-09-02 | Semiconductor device |
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Cited By (2)
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US11217686B2 (en) | 2020-03-19 | 2022-01-04 | Kabushiki Kaisha Toshiba | Semiconductor device and semiconductor circuit |
US11984495B2 (en) | 2020-09-16 | 2024-05-14 | Kabushiki Kaisha Toshiba | Semiconductor device and semiconductor circuit |
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US11101375B2 (en) * | 2019-03-19 | 2021-08-24 | Kabushiki Kaisha Toshiba | Semiconductor device and method of controlling same |
US11374563B2 (en) * | 2020-03-03 | 2022-06-28 | Kabushiki Kaisha Toshiba | Method for controlling semiconductor device |
DE102020121771A1 (de) | 2020-08-19 | 2022-02-24 | Infineon Technologies Ag | Erste gate-elektrode und zweite gate-elektrode enthaltendehalbleitervorrichtung |
JP7387562B2 (ja) * | 2020-09-10 | 2023-11-28 | 株式会社東芝 | 半導体素子および半導体装置 |
JP7330155B2 (ja) | 2020-09-16 | 2023-08-21 | 株式会社東芝 | 半導体装置及び半導体回路 |
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JP2000101076A (ja) * | 1998-09-25 | 2000-04-07 | Toshiba Corp | 絶縁ゲート型半導体素子とその駆動方法 |
JP2001320049A (ja) * | 2000-05-09 | 2001-11-16 | Fuji Electric Co Ltd | 半導体装置およびその製造方法 |
Cited By (2)
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US11217686B2 (en) | 2020-03-19 | 2022-01-04 | Kabushiki Kaisha Toshiba | Semiconductor device and semiconductor circuit |
US11984495B2 (en) | 2020-09-16 | 2024-05-14 | Kabushiki Kaisha Toshiba | Semiconductor device and semiconductor circuit |
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US10985268B2 (en) | 2021-04-20 |
CN111725308B (zh) | 2024-04-26 |
JP7210342B2 (ja) | 2023-01-23 |
US20200303524A1 (en) | 2020-09-24 |
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