JP2019161126A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2019161126A JP2019161126A JP2018048619A JP2018048619A JP2019161126A JP 2019161126 A JP2019161126 A JP 2019161126A JP 2018048619 A JP2018048619 A JP 2018048619A JP 2018048619 A JP2018048619 A JP 2018048619A JP 2019161126 A JP2019161126 A JP 2019161126A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 351
- 239000000758 substrate Substances 0.000 claims abstract description 146
- 230000002093 peripheral effect Effects 0.000 claims abstract description 63
- 230000000694 effects Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 32
- 230000000052 comparative effect Effects 0.000 description 23
- 239000010410 layer Substances 0.000 description 22
- 239000000969 carrier Substances 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 238000009825 accumulation Methods 0.000 description 18
- 238000002347 injection Methods 0.000 description 18
- 239000007924 injection Substances 0.000 description 18
- 238000011084 recovery Methods 0.000 description 17
- 239000011229 interlayer Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 5
- 238000009529 body temperature measurement Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 230000036413 temperature sense Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
Description
特許文献1 特開2013−152996号公報
また、第3比較例の半導体装置260は、半導体基板10における下面23側にライフタイム制御領域72が設けられない。このため、このため、第2コンタクト領域19から第2カソード領域82の活性部120中央側へのキャリア(本例においては正孔)の注入を抑制することができない。このため、ダイオード部80の逆回復耐量を改善することができない。
Claims (19)
- 半導体基板と、
前記半導体基板に設けられ、前記半導体基板の上面および下面の間で電流が流れる活性部と、
前記活性部に設けられたトランジスタ部と、
前記活性部に設けられ、前記半導体基板の上面視で予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
前記上面視において、前記半導体基板の外周端と前記活性部との間に設けられたエッジ終端構造部と、
前記半導体基板の下面に設けられる第1導電型の第1カソード領域と、
を備え、
前記第1カソード領域は、
前記上面視において、前記配列方向に直交する延伸方向において前記トランジスタ部と対向し、
前記エッジ終端構造部の少なくとも一部において、前記半導体基板の下面に接する、
半導体装置。 - 前記トランジスタ部は、前記半導体基板の上面に第1導電型のエミッタ領域を有し、
前記上面視において、前記延伸方向における前記第1カソード領域の前記活性部側の端部が、前記延伸方向における前記エミッタ領域の前記外周端側の端部よりも、前記延伸方向における前記外周端側に設けられる、
請求項1に記載の半導体装置。 - 前記トランジスタ部は、前記半導体基板の上面に第2導電型の第1コンタクト領域を有し、
前記上面視において、前記第1コンタクト領域の少なくとも一部と、前記第1カソード領域の少なくとも一部が、前記延伸方向において重なる、
請求項1または2に記載の半導体装置。 - 前記エッジ終端構造部には、前記半導体基板の上面に接して、第2導電型のウェル領域が設けられ、
前記上面視において、前記延伸方向における前記第1カソード領域の前記活性部側の端部が、前記ウェル領域と重なる、
請求項1または2に記載の半導体装置。 - 前記上面視において、前記エッジ終端構造部が前記活性部を囲うように設けられ、
前記上面視において、前記第1カソード領域が前記活性部を囲うように設けられる、
請求項4に記載の半導体装置。 - 前記半導体基板の上面側に、前記ダイオード部から前記エッジ終端構造部の少なくとも一部にわたって、前記上面視で前記配列方向に直交する延伸方向において前記ダイオード部と対向し、ライフタイムキラーを含むライフタイム制御領域が設けられる、請求項4または5に記載の半導体装置。
- 前記ライフタイム制御領域は、前記ウェル領域の下方に設けられ、前記ウェル領域よりも前記外周端側で終端している、
請求項6に記載の半導体装置。 - 前記ダイオード部は、
前記半導体基板の上面に接して設けられた第2導電型の第2コンタクト領域と、
前記半導体基板の下面に接して設けられた第1導電型の第2カソード領域と、
前記第2カソード領域の上方に設けられた、電気的にフローティングとなっている第2導電型の第1フローティング領域と、
を有し、
前記上面視において、前記第1フローティング領域の少なくとも一部と、前記第2コンタクト領域とが、前記延伸方向において重なる、
請求項6または7に記載の半導体装置。 - 前記上面視において、前記延伸方向における前記第1フローティング領域の前記活性部側の端部と、前記延伸方向における前記第2コンタクト領域の前記活性部側の端部との前記延伸方向における距離が、前記延伸方向における前記第1フローティング領域の前記外周端側の端部と、前記延伸方向における前記第2コンタクト領域の前記外周端側の端部との前記延伸方向における距離よりも大きい、請求項8に記載の半導体装置。
- 前記ダイオード部は、前記第2カソード領域の上方に、電気的にフローティングとなっている第2導電型の第2フローティング領域を有し、
前記第1フローティング領域と前記第2フローティング領域は、前記延伸方向に配列される、
請求項8または9に記載の半導体装置。 - 前記延伸方向において、前記第1フローティング領域の幅は、前記第2フローティング領域の幅よりも大きい、請求項10に記載の半導体装置。
- 前記ライフタイム制御領域は、前記第2コンタクト領域の下方に設けられる、請求項8から11のいずれか一項に記載の半導体装置。
- 前記上面視において、前記第2カソード領域よりも前記外周端側に、前記半導体基板の下面に接して第2導電型のコレクタ領域が設けられ、
前記第1フローティング領域は、前記第2カソード領域の上方および前記コレクタ領域の上方に設けられ、
前記上面視において、前記ライフタイム制御領域の少なくとも一部と、前記第1フローティング領域の少なくとも一部が、前記延伸方向において重なる、請求項8から12のいずれか一項に記載の半導体装置。 - 前記第2カソード領域と前記コレクタ領域は接して設けられ、
前記上面視において、前記延伸方向における前記ライフタイム制御領域の前記活性部側の端部が、前記第2カソード領域と前記コレクタ領域との境界と、前記延伸方向における前記第1フローティング領域の前記活性部側の端部との間で終端している、
請求項13に記載の半導体装置。 - 前記上面視において、前記コレクタ領域よりも前記外周端側に、前記半導体基板の下面に接して第1導電型の終端領域が設けられる、請求項14に記載の半導体装置。
- 前記上面視において、前記延伸方向における前記第2コンタクト領域の前記外周端側の端部と、前記延伸方向における前記終端領域の前記活性部側の端部との前記延伸方向における距離が、前記半導体基板の厚さよりも大きい、請求項15に記載の半導体装置。
- 前記上面視において、前記延伸方向における前記第2コンタクト領域の前記活性部側の端部と、前記延伸方向における前記第2カソード領域の前記外周端側の端部との前記延伸方向における距離が、前記延伸方向における前記第2コンタクト領域の前記外周端側の端部と、前記延伸方向における前記終端領域の前記活性部側の端部との前記延伸方向における距離よりも大きい、請求項15または16に記載の半導体装置。
- 前記上面視において、前記延伸方向における前記第2コンタクト領域の前記活性部側の端部と、前記延伸方向における前記第2カソード領域の前記外周端側の端部との前記延伸方向における距離が、前記半導体基板の厚さよりも大きい、請求項8から17のいずれか一項に記載の半導体装置。
- 前記距離が100μm以上である、請求項18に記載の半導体装置。
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