JP7091693B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7091693B2 JP7091693B2 JP2018027161A JP2018027161A JP7091693B2 JP 7091693 B2 JP7091693 B2 JP 7091693B2 JP 2018027161 A JP2018027161 A JP 2018027161A JP 2018027161 A JP2018027161 A JP 2018027161A JP 7091693 B2 JP7091693 B2 JP 7091693B2
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
特許文献1 特開2016-082097号公報
特許文献2 特開2016-096222号公報
Claims (6)
- 第1導電型のドリフト領域を有する半導体基板と、
前記半導体基板に設けられた1つ以上のトランジスタ部と、
前記半導体基板に設けられた1つ以上のダイオード部と
を備え、
前記トランジスタ部および前記ダイオード部の双方が、前記半導体基板の上面から前記ドリフト領域まで設けられ、内部に導電部が設けられたトレンチ部を有し、
前記半導体基板の上面視において、前記トランジスタ部における前記トレンチ部の主方向と、前記ダイオード部における前記トレンチ部の主方向とが異なり、
前記半導体基板の上面視において、前記半導体基板に、前記トランジスタ部における複数の前記トレンチ部の端部と重なって設けられ、前記トランジスタ部における前記トレンチ部の主方向と異なる第1方向が長手方向である、第2導電型の第1ウェル領域と、
前記半導体基板の上面視において、前記半導体基板に、前記ダイオード部における複数の前記トレンチ部の端部と重なって設けられ、前記ダイオード部における前記トレンチ部の主方向と異なる第2方向が長手方向である、第2導電型の第2ウェル領域と、
をさらに備え、
前記第1ウェル領域と前記第2ウェル領域とがつながっており、
前記半導体基板の上面視において、
前記第1ウェル領域は、前記ダイオード部と対向する位置まで延伸し、
前記ダイオード部は、前記第1ウェル領域および前記第2ウェル領域に囲まれている、
半導体装置。 - 前記半導体基板の上面視において、前記トランジスタ部における前記トレンチ部の主方向と、前記ダイオード部における前記トレンチ部の主方向とが直交する、請求項1に記載の半導体装置。
- 前記半導体基板の上面側に設けられた、ライフタイムキラーを含むライフタイム制御領域をさらに有し、
前記トランジスタ部に設けられた前記トレンチ部は、前記半導体基板の上面から前記ドリフト領域まで設けられ、内部に導電部が設けられたゲートトレンチ部を有し、
前記ライフタイム制御領域は、前記ダイオード部に設けられ、前記トランジスタ部における前記ゲートトレンチ部の下方には設けられない、
請求項1または2に記載の半導体装置。 - 前記半導体基板の上方に、前記トランジスタ部に重なって設けられたコンタクトホールと、
前記半導体基板の上方に、前記ダイオード部に重なって設けられたコンタクトホールと、
をさらに備え、
前記半導体基板の上面視において、前記トランジスタ部に重なって設けられた前記コンタクトホールの主方向と、前記ダイオード部に重なって設けられた前記コンタクトホールの主方向とが直交する、請求項3に記載の半導体装置。 - 前記半導体基板の上面視において、前記ダイオード部と対向する位置まで延伸した前記第1ウェル領域の上方に設けられたコンタクトホールをさらに備える、請求項3または4に記載の半導体装置。
- 前記半導体基板の上面視において、前記ライフタイム制御領域は、前記第1ウェル領域の上方に設けられた前記コンタクトホールと重なる、請求項5に記載の半導体装置。
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JP2008205252A (ja) | 2007-02-21 | 2008-09-04 | Denso Corp | 半導体装置 |
JP2013235972A (ja) | 2012-05-09 | 2013-11-21 | Rohm Co Ltd | 半導体装置およびその製造方法 |
WO2016051953A1 (ja) | 2014-09-29 | 2016-04-07 | トヨタ自動車株式会社 | 半導体装置 |
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WO2016051953A1 (ja) | 2014-09-29 | 2016-04-07 | トヨタ自動車株式会社 | 半導体装置 |
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