JP6954449B2 - 半導体装置 - Google Patents
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- 238000011084 recovery Methods 0.000 description 21
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 230000036413 temperature sense Effects 0.000 description 19
- 239000011229 interlayer Substances 0.000 description 15
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 239000000969 carrier Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
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- 238000009529 body temperature measurement Methods 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
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- 150000004767 nitrides Chemical class 0.000 description 2
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
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- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
特許文献1 国際公開WO2016/129041
Claims (13)
- 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた、互いに分離した複数の第1導電型の第1カソード領域および前記第1カソード領域とは導電型が異なる第2カソード領域と、
前記第1カソード領域毎に互いに分離して設けられ、前記第1カソード領域と少なくとも部分的に重なって配置された複数の第2導電型のフローティング領域と、
を有し、
前記フローティング領域は、前記半導体基板の上面視で、前記第1カソード領域および前記第2カソード領域の両方と重なって設けられる
半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた、互いに分離した複数の第1導電型の第1カソード領域および前記第1カソード領域とは導電型が異なる第2カソード領域と、
前記第1カソード領域毎に互いに分離して設けられ、前記第1カソード領域と少なくとも部分的に重なって配置された複数の第2導電型のフローティング領域と、
を有し、
前記第1カソード領域は、前記半導体基板の上面視で、前記フローティング領域よりも前記配列方向に張り出していて、 前記第1カソード領域および前記第2カソード領域は、前記上面視で、前記配列方向に直交する延伸方向に交互に配置され、
前記フローティング領域は、前記上面視で、前記第1カソード領域および前記第2カソード領域の両方と重なって、前記延伸方向に複数設けられる、
半導体装置。 - 前記フローティング領域は、前記上面視で、前記第1カソード領域よりも前記延伸方向に張り出している、請求項2に記載の半導体装置。
- 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた、互いに分離した複数の第1導電型の第1カソード領域および前記第1カソード領域とは導電型が異なる第2カソード領域と、
前記第1カソード領域毎に互いに分離して設けられ、前記第1カソード領域と少なくとも部分的に重なって配置された複数の第2導電型のフローティング領域と、
を有し、
前記第1カソード領域は、前記フローティング領域よりも前記配列方向に直交する延伸方向に張り出していて、
前記第1カソード領域および前記第2カソード領域は、前記半導体基板の上面視で、前記配列方向に交互に配置され、
前記フローティング領域は、前記上面視で、前記第1カソード領域および前記第2カソード領域の両方と重なって、前記配列方向に複数設けられる、
半導体装置。 - 前記フローティング領域は、前記上面視で、前記第1カソード領域よりも前記配列方向に張り出している、請求項4に記載の半導体装置。
- 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第1導電型の第1カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第2導電型領域と、
を有し、
前記半導体基板の下面に接し、前記第1カソード領域に対して前記配列方向に直交する方向に、前記第2導電型領域が設けられ、
前記第2導電型領域は、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域に挟まれて設けられた第2導電型の第2カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域および前記第2カソード領域を挟むように設けられた第2導電型の第3カソード領域と、
を有し、
前記半導体基板の上面視において、前記配列方向に沿った前記第3カソード領域の幅が、前記配列方向に沿った前記第2カソード領域の幅よりも大きく、
前記第3カソード領域のドーピング濃度は、
前記第2カソード領域のドーピング濃度と等しい
半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第1導電型の第1カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第2導電型領域と、
を有し、
前記半導体基板の下面に接し、前記第1カソード領域に対して前記配列方向に直交する方向に、前記第2導電型領域が設けられ、
前記第2導電型領域は、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域に挟まれて設けられた第2導電型の第2カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域および前記第2カソード領域を挟むように設けられた第2導電型の第3カソード領域と、
を有し、
前記半導体基板の上面視において、前記配列方向に沿った前記第3カソード領域の幅が、前記配列方向に沿った前記第2カソード領域の幅よりも大きく、
前記第1カソード領域および前記第3カソード領域は、前記配列方向に直交する方向に交互に設けられる
半導体装置。 - 半導体基板と、
前記半導体基板に設けられた1つ以上のダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた、互いに分離した複数の第1導電型の第1カソード領域および前記第1カソード領域とは導電型が異なる第2カソード領域と、
前記第1カソード領域毎に互いに分離して設けられ、前記第1カソード領域と少なくとも部分的に重なって配置された複数の第2導電型のフローティング領域と、
を有し、
前記半導体基板の上面視において、前記第1カソード領域の面積に占める前記フローティング領域の面積の割合は、80%以上90%以下である
半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた、互いに分離した複数の第1導電型の第1カソード領域および前記第1カソード領域とは導電型が異なる第2カソード領域と、
前記第1カソード領域毎に互いに分離して設けられ、前記第1カソード領域と少なくとも部分的に重なって配置された複数の第2導電型のフローティング領域と、
を有し、
前記配列方向における前記フローティング領域の幅は、前記配列方向における前記第1カソード領域の幅の89%以上95%以下である
半導体装置。 - 半導体基板と、
前記半導体基板に設けられたトランジスタ部と、
前記半導体基板に設けられ、予め定められた配列方向に沿って前記トランジスタ部と配列されたダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた、互いに分離した複数の第1導電型の第1カソード領域および前記第1カソード領域とは導電型が異なる第2カソード領域と、
前記第1カソード領域毎に互いに分離して設けられ、前記第1カソード領域と少なくとも部分的に重なって配置された複数の第2導電型のフローティング領域と、
を有し、
前記配列方向に直交する延伸方向における前記フローティング領域の幅は、前記延伸方向における前記第1カソード領域の幅の89%以上95%以下である
半導体装置。 - 半導体基板と、
前記半導体基板に設けられた1つ以上のダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた、互いに分離した複数の第1導電型の第1カソード領域および前記第1カソード領域とは導電型が異なる第2カソード領域と、
前記第1カソード領域毎に互いに分離して設けられ、前記第1カソード領域と少なくとも部分的に重なって配置された複数の第2導電型のフローティング領域と、
を有し、
前記フローティング領域は、前記半導体基板の上面視で、前記第1カソード領域および前記第2カソード領域の両方と重なって設けられる
半導体装置。 - 半導体基板と、
前記半導体基板に設けられた1つ以上のダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第1導電型の第1カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第2導電型領域と、
を有し、
前記半導体基板の下面に接し、前記第1カソード領域に対して延伸方向に、前記第2導電型領域が設けられ、
前記第2導電型領域は、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域に挟まれて設けられた第2導電型の第2カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域および前記第2カソード領域を挟むように設けられた第2導電型の第3カソード領域と、
を有し、
前記半導体基板の上面視において、前記延伸方向に直交する配列方向に沿った前記第3カソード領域の幅が、前記配列方向に沿った前記第2カソード領域の幅よりも大きく、
前記第3カソード領域のドーピング濃度は、
前記第2カソード領域のドーピング濃度と等しい
半導体装置。 - 半導体基板と、
前記半導体基板に設けられた1つ以上のダイオード部と、
を備え、
前記ダイオード部は、
前記半導体基板に設けられた第1導電型のドリフト領域と、
前記半導体基板の上面に接し、前記ドリフト領域よりも上方に設けられた第2導電型のベース領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第1導電型の第1カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられた第2導電型領域と、
を有し、
前記半導体基板の下面に接し、前記第1カソード領域に対して延伸方向に、前記第2導電型領域が設けられ、
前記第2導電型領域は、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域に挟まれて設けられた第2導電型の第2カソード領域と、
前記半導体基板の下面に接し、前記ドリフト領域よりも下方に設けられ、前記第1カソード領域および前記第2カソード領域を挟むように設けられた第2導電型の第3カソード領域と、
を有し、
前記半導体基板の上面視において、前記延伸方向に直交する配列方向に沿った前記第3カソード領域の幅が、前記配列方向に沿った前記第2カソード領域の幅よりも大きく、
前記第1カソード領域および前記第3カソード領域は、前記延伸方向に交互に設けられる
半導体装置。
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