JP2019012795A - レーザー加工装置及びレーザー加工方法 - Google Patents
レーザー加工装置及びレーザー加工方法 Download PDFInfo
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
- B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
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- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
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- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
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Abstract
Description
本発明の実施形態1に係るレーザー加工装置及びレーザー加工方法を図面に基づいて説明する。図1は、実施形態1に係るレーザー加工装置の構成例を示す斜視図である。図2は、図1に示されたレーザー加工装置の加工対象のインゴットを示す斜視図である。図3は、図2に示されたインゴットの側面図である。図4は、図1に示されたレーザー加工装置のチャックテーブルの断面図である。図5は、図2に示されたインゴットとチャックテーブルとを示す平面図である。
図7は、図6に示されたレーザー加工方法の保持ステップを示す平面図である。
図8は、図6に示されたレーザー加工方法のアライメントステップにおいて、カメラユニットがインゴットの外縁部を撮像する状態を一部断面で示す側面図である。図9は、図8に示されたカメラユニットが撮像して得た画像の一例を示す図である。図10は、図6に示されたレーザー加工方法のアライメントステップ後のインゴットとチャックテーブルとを示す平面図である。
図11は、図6に示されたレーザー加工方法のレーザー加工ステップを一部断面で示す側面図である。図12は、図6に示されたレーザー加工方法のレーザー加工ステップにおいてインゴットの内部に形成される改質層及びクラックを示す平面図である。
本発明の実施形態2に係るレーザー加工装置及びレーザー加工方法を図面に基づいて説明する。図13は、実施形態2に係るレーザー加工装置の構成例を示す斜視図である。図14は、実施形態2に係るレーザー加工方法のレーザー加工ステップを一部断面で示す側面図である。図13及び図14は、実施形態1と同一部分に同一符号を付して説明を省略する。
本発明の実施形態2の変形例に係るレーザー加工装置及びレーザー加工方法を図面に基づいて説明する。図15は、実施形態2の変形例に係るレーザー加工装置がレーザー加工ステップを実施する状態を一部断面で示す側面図である。図15は、実施形態1及び実施形態2と同一部分に同一符号を付して説明を省略する。
10,10−2 チャックテーブル
11 保持面
12,12−2 多孔質ガラスプレート(多孔質材)
13 ガラス枠部
14 凹部
15 負圧伝達路
19 テーブルベース
20,20−3 レーザービーム照射ユニット
21 発振器
22 集光レンズ
30 カメラユニット
200 ウェーハ(被加工物)
300,300−3 レーザービーム
400 照明光
600 インゴット(被加工物)
ST2 アライメントステップ
ST3 レーザー加工ステップ
Claims (8)
- 被加工物を保持面で保持するチャックテーブルと、該チャックテーブルに保持された被加工物にレーザービームを照射するレーザービーム照射ユニットと、該チャックテーブルに保持された該被加工物を撮影するカメラユニットと、を備えるレーザー加工装置であって、
該チャックテーブルは、
該保持面を構成する多孔質材と、
該多孔質材が嵌合する凹部と、嵌合した該多孔質材に負圧を伝達する負圧伝達路と、を有し非多孔質ガラスで形成されたガラス枠部と、を備えるレーザー加工装置。 - 該多孔質材は、多孔質ガラスプレートである請求項1に記載のレーザー加工装置。
- 該チャックテーブルは、該レーザービーム照射ユニットに対して移動自在に設けられたテーブルベースに該ガラス枠部が載置されて装着される請求項2に記載のレーザー加工装置。
- 該レーザービーム照射ユニットは、発振器から発振した該レーザービームを集光する集光レンズを該チャックテーブルの該保持面と対面して備える請求項2又は請求項3に記載のレーザー加工装置。
- 該チャックテーブルに保持される被加工物は、該多孔質ガラスプレートを覆って外周縁が該ガラス枠部に支持され、該ガラス枠部は該カメラユニットが備える照明光を透過する請求項2乃至請求項4のうちいずれか一項に記載のレーザー加工装置。
- 該レーザービームの波長は、該被加工物に対して透過性を有する波長である請求項2乃至請求項5のうちいずれか一項に記載のレーザー加工装置。
- 該レーザービームの波長は、該被加工物に対して吸収性を有する波長である請求項2乃至請求項5のうちいずれか一項に記載のレーザー加工装置。
- 保持面を構成する多孔質材と、該多孔質材が嵌合する凹部と嵌合した該多孔質材に負圧を伝達する負圧伝達路とを有し非多孔質ガラスで形成されたガラス枠部と、を備えるチャックテーブルの該保持面に保持された被加工物の外縁部及び該ガラス枠部に照明光を照射しながらカメラユニットで撮像してアライメントを実施するアライメントステップと、
該アライメントステップ後に、該被加工物に対して透過性又は吸収性を有する波長のレーザービームを照射して、該被加工物をレーザー加工するレーザー加工ステップと、
を備えるレーザー加工方法。
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JP2017129662A JP6994852B2 (ja) | 2017-06-30 | 2017-06-30 | レーザー加工装置及びレーザー加工方法 |
KR1020180069186A KR102518005B1 (ko) | 2017-06-30 | 2018-06-15 | 레이저 가공 장치 및 레이저 가공 방법 |
CN201810660262.9A CN109202308B (zh) | 2017-06-30 | 2018-06-25 | 激光加工装置和激光加工方法 |
US16/020,397 US11633804B2 (en) | 2017-06-30 | 2018-06-27 | Laser processing apparatus and laser processing method |
TW107122403A TWI761544B (zh) | 2017-06-30 | 2018-06-28 | 雷射加工裝置以及雷射加工方法 |
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JP2017129662A JP6994852B2 (ja) | 2017-06-30 | 2017-06-30 | レーザー加工装置及びレーザー加工方法 |
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JP2019012795A true JP2019012795A (ja) | 2019-01-24 |
JP6994852B2 JP6994852B2 (ja) | 2022-01-14 |
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JP (1) | JP6994852B2 (ja) |
KR (1) | KR102518005B1 (ja) |
CN (1) | CN109202308B (ja) |
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US20190001433A1 (en) | 2019-01-03 |
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