JP2018527456A5 - - Google Patents

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Publication number
JP2018527456A5
JP2018527456A5 JP2017565799A JP2017565799A JP2018527456A5 JP 2018527456 A5 JP2018527456 A5 JP 2018527456A5 JP 2017565799 A JP2017565799 A JP 2017565799A JP 2017565799 A JP2017565799 A JP 2017565799A JP 2018527456 A5 JP2018527456 A5 JP 2018527456A5
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JP
Japan
Prior art keywords
layer
metal
adhesion
film stack
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2017565799A
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English (en)
Japanese (ja)
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JP2018527456A (ja
JP6979881B2 (ja
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Publication date
Priority claimed from US14/745,367 external-priority patent/US10879177B2/en
Application filed filed Critical
Publication of JP2018527456A publication Critical patent/JP2018527456A/ja
Publication of JP2018527456A5 publication Critical patent/JP2018527456A5/ja
Application granted granted Critical
Publication of JP6979881B2 publication Critical patent/JP6979881B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2017565799A 2015-06-19 2016-06-03 多層金属誘電体膜のpvd堆積とアニール Active JP6979881B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/745,367 US10879177B2 (en) 2015-06-19 2015-06-19 PVD deposition and anneal of multi-layer metal-dielectric film
US14/745,367 2015-06-19
PCT/US2016/035826 WO2016204987A1 (en) 2015-06-19 2016-06-03 Pvd deposition and anneal of multi-layer metal-dielectric film

Publications (3)

Publication Number Publication Date
JP2018527456A JP2018527456A (ja) 2018-09-20
JP2018527456A5 true JP2018527456A5 (enExample) 2019-08-29
JP6979881B2 JP6979881B2 (ja) 2021-12-15

Family

ID=57545770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017565799A Active JP6979881B2 (ja) 2015-06-19 2016-06-03 多層金属誘電体膜のpvd堆積とアニール

Country Status (6)

Country Link
US (1) US10879177B2 (enExample)
JP (1) JP6979881B2 (enExample)
KR (1) KR102506953B1 (enExample)
CN (1) CN107873107B (enExample)
TW (1) TWI705149B (enExample)
WO (1) WO2016204987A1 (enExample)

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