JP2018517059A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2018517059A5 JP2018517059A5 JP2017559821A JP2017559821A JP2018517059A5 JP 2018517059 A5 JP2018517059 A5 JP 2018517059A5 JP 2017559821 A JP2017559821 A JP 2017559821A JP 2017559821 A JP2017559821 A JP 2017559821A JP 2018517059 A5 JP2018517059 A5 JP 2018517059A5
- Authority
- JP
- Japan
- Prior art keywords
- mon
- layer
- thickness
- substrate surface
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 33
- 239000000758 substrate Substances 0.000 claims 11
- 238000000034 method Methods 0.000 claims 6
- 239000011248 coating agent Substances 0.000 claims 5
- 238000000576 coating method Methods 0.000 claims 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 4
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims 3
- 229910052757 nitrogen Inorganic materials 0.000 claims 3
- 239000011229 interlayer Substances 0.000 claims 2
- 239000002344 surface layer Substances 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011247 coating layer Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 238000005121 nitriding Methods 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015006510.6 | 2015-05-26 | ||
| DE102015006510 | 2015-05-26 | ||
| DE102016003998 | 2016-04-07 | ||
| DE102016003998.1 | 2016-04-07 | ||
| PCT/EP2016/000863 WO2016188632A1 (en) | 2015-05-26 | 2016-05-25 | Wear and/or friction reduction by using molybdenum nitride based coatings |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018517059A JP2018517059A (ja) | 2018-06-28 |
| JP2018517059A5 true JP2018517059A5 (enExample) | 2019-05-09 |
| JP6741690B2 JP6741690B2 (ja) | 2020-08-19 |
Family
ID=56121014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017559821A Active JP6741690B2 (ja) | 2015-05-26 | 2016-05-25 | 窒化モリブデン系コーティングを用いることによる摩耗および／または摩擦低減 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US11168392B2 (enExample) |
| EP (1) | EP3303651B1 (enExample) |
| JP (1) | JP6741690B2 (enExample) |
| KR (1) | KR102576846B1 (enExample) |
| CN (1) | CN107873064B (enExample) |
| WO (1) | WO2016188632A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109399582B (zh) * | 2019-01-02 | 2022-05-31 | 吉林化工学院 | 块体材料氮化钼的高温高压制备 |
| CN109988994B (zh) * | 2019-05-21 | 2024-01-30 | 仪征亚新科双环活塞环有限公司 | 一种具有耐磨减摩作用的镀层、其制备方法及活塞环 |
| US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| KR20210024421A (ko) * | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 주기적 증착 공정에 의해 기판 표면 상에 몰리브덴 질화물 막을 증착하는 방법 및 이와 관련된 몰리브덴 질화물 막을 포함한 반도체 소자 구조 |
| WO2021053072A1 (de) | 2019-09-19 | 2021-03-25 | Oerlikon Surface Solutions Ag, Pfäffikon | Substrat mit einem molydännitrid schichtsystem, sowie beschichtungsverfahren zur herstellung eines schichtsystems |
| KR20230115987A (ko) * | 2020-11-30 | 2023-08-03 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 마모 및 마찰 감소를 위한 질화몰리브덴 기반 다층 코팅 |
| WO2025171013A1 (en) * | 2024-02-08 | 2025-08-14 | The Texas A&M University System | Method for surface modification of stainless steels used in molten salt environments |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2664852A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
| JPH02118064A (ja) * | 1988-10-27 | 1990-05-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| US5492724A (en) * | 1994-02-22 | 1996-02-20 | Osram Sylvania Inc. | Method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor |
| DE102004028487B4 (de) * | 2004-06-11 | 2018-11-15 | Mahle Gmbh | Verfahren zur Herstellung verschleissfester Flanken für einen Trapezring für Verbrennungsmotoren |
| DE102006046917C5 (de) * | 2006-10-04 | 2014-03-20 | Federal-Mogul Burscheid Gmbh | Kolbenring für Verbrennungskraftmaschinen |
| US20110308453A1 (en) * | 2008-01-31 | 2011-12-22 | Applied Materials, Inc. | Closed loop mocvd deposition control |
| KR101800039B1 (ko) * | 2010-02-04 | 2017-12-20 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | Αｌ-Ｃｒ-Ｂ-Ｎ/Ｔｉ-Ａｌ-Ｎ 멀티레이어 코팅을 구비한 커팅 툴 |
| JP5668262B2 (ja) * | 2011-02-01 | 2015-02-12 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
| CN102588175A (zh) * | 2012-01-19 | 2012-07-18 | 浙江汇锦梯尔镀层科技有限公司 | 一种新型喷油泵控制阀套及其表面处理方法 |
| EP2831305B1 (en) * | 2012-03-30 | 2016-03-02 | Tata Steel Nederland Technology B.V. | Method and apparatus for feeding liquid metal to an evaporator device |
| DE102012207814A1 (de) * | 2012-05-10 | 2013-11-14 | Mahle International Gmbh | Bauelement, insbesondere ein Gleitelement |
| DE102012020757A1 (de) * | 2012-10-23 | 2014-05-08 | Mahle International Gmbh | Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung |
| CN103741101B (zh) * | 2014-01-19 | 2016-01-13 | 宜昌后皇真空科技有限公司 | 一种MoN/CrN纳米复合涂层及其沉积方法 |
| CN104388899A (zh) * | 2014-12-10 | 2015-03-04 | 武汉大学 | 一种具有MoN/Cr/CrN/Cr纳米复合超厚涂层的活塞环及其制备方法 |
-
2016
- 2016-05-25 KR KR1020177028619A patent/KR102576846B1/ko active Active
- 2016-05-25 EP EP16728832.3A patent/EP3303651B1/en active Active
- 2016-05-25 JP JP2017559821A patent/JP6741690B2/ja active Active
- 2016-05-25 WO PCT/EP2016/000863 patent/WO2016188632A1/en not_active Ceased
- 2016-05-25 US US15/575,031 patent/US11168392B2/en not_active Expired - Fee Related
- 2016-05-25 CN CN201680030533.1A patent/CN107873064B/zh active Active
-
2021
- 2021-10-18 US US17/503,563 patent/US12473628B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2018517059A5 (enExample) | ||
| Graniel et al. | Atomic layer deposition for biosensing applications | |
| CN105143498B (zh) | 铬基的氧化保护层 | |
| JP6249452B2 (ja) | 機械加工作業による摩耗の減少を呈する被膜システム及び高性能ツール、並びに、その被膜システムによる被覆方法 | |
| JP2019522113A5 (enExample) | ||
| US12473628B2 (en) | Wear and/or friction reduction by using molybdenum nitride based coatings | |
| RU2012148385A (ru) | Твердое углеродное покрытие и способ его формирования | |
| WO2010062582A3 (en) | Vapor deposition method for ternary compounds | |
| KR20140085016A (ko) | 절삭공구용 다층박막과 이를 포함하는 절삭공구 | |
| RU2007139636A (ru) | Эрозионно стойкие покрытия и способы нанесения покрытий | |
| JP2013529249A5 (enExample) | ||
| EP1564312A3 (en) | Hard coating and its formation method, and hard-coated tool | |
| CN107002252A (zh) | 提供增强的抗月牙洼磨损性能的AlCrN基涂层 | |
| RU2014120463A (ru) | Сверло с покрытием | |
| KR20170008295A (ko) | 적층형 경질 피막 및 절삭 공구 | |
| RU2015131332A (ru) | Режущий инструмент с покрытием и способ изготовления режущего инструмента с покрытием | |
| JP2018535329A5 (enExample) | ||
| JP2022088457A5 (enExample) | ||
| JP2015200009A (ja) | ジルコニウム複合素材コーティング層及びその形成方法 | |
| JP7344482B2 (ja) | 窒化モリブデンベースの被覆を用いる摩耗及び／又は摩擦の低減 | |
| WO2008152151A3 (de) | Strukturierte schichtabscheidung auf prozessierten wafern der mikrosystemtechnik | |
| AR088049A1 (es) | Metodo para recubrir un sustrato para formar un sustrato recubierto coloreado, metodo para fabricar un sustrato recubierto coloreado en un sistema de deposicion por arco catodico y sustrato recubierto coloreado obtenido | |
| KR20140028581A (ko) | 멀티레이어 코팅층 및 코팅방법 | |
| JPWO2020187744A5 (enExample) | ||
| KR102081264B1 (ko) | 금속 함유 dlc막 및 이의 제조 방법 |