JP2019522104A5 - - Google Patents
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- JP2019522104A5 JP2019522104A5 JP2018503240A JP2018503240A JP2019522104A5 JP 2019522104 A5 JP2019522104 A5 JP 2019522104A5 JP 2018503240 A JP2018503240 A JP 2018503240A JP 2018503240 A JP2018503240 A JP 2018503240A JP 2019522104 A5 JP2019522104 A5 JP 2019522104A5
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- Japan
- Prior art keywords
- precursor
- group
- layer
- zirconium
- tris
- Prior art date
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- 239000002243 precursor Substances 0.000 claims 27
- 238000000034 method Methods 0.000 claims 21
- 230000004888 barrier function Effects 0.000 claims 20
- 230000003628 erosive effect Effects 0.000 claims 19
- 238000009792 diffusion process Methods 0.000 claims 18
- 238000000231 atomic layer deposition Methods 0.000 claims 12
- 238000005229 chemical vapour deposition Methods 0.000 claims 12
- 239000007983 Tris buffer Substances 0.000 claims 9
- 239000011248 coating agent Substances 0.000 claims 7
- 238000000576 coating method Methods 0.000 claims 7
- 230000002265 prevention Effects 0.000 claims 7
- 238000000151 deposition Methods 0.000 claims 6
- 229910008651 TiZr Inorganic materials 0.000 claims 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 4
- 125000003368 amide group Chemical group 0.000 claims 4
- PCOPFSXTYFFNIG-UHFFFAOYSA-N butan-1-olate;yttrium(3+) Chemical compound [Y+3].CCCC[O-].CCCC[O-].CCCC[O-] PCOPFSXTYFFNIG-UHFFFAOYSA-N 0.000 claims 4
- OLQIFTSPAVIXCQ-UHFFFAOYSA-N cyclopenta-1,3-diene;yttrium(3+) Chemical compound [Y+3].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 OLQIFTSPAVIXCQ-UHFFFAOYSA-N 0.000 claims 4
- 238000005137 deposition process Methods 0.000 claims 4
- 238000005240 physical vapour deposition Methods 0.000 claims 4
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical group OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 claims 4
- 229910052727 yttrium Inorganic materials 0.000 claims 4
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 4
- BGGIUGXMWNKMCP-UHFFFAOYSA-N 2-methylpropan-2-olate;zirconium(4+) Chemical compound CC(C)(C)O[Zr](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C BGGIUGXMWNKMCP-UHFFFAOYSA-N 0.000 claims 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 3
- PQLAYKMGZDUDLQ-UHFFFAOYSA-K aluminium bromide Chemical compound Br[Al](Br)Br PQLAYKMGZDUDLQ-UHFFFAOYSA-K 0.000 claims 3
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 claims 3
- GOVWJRDDHRBJRW-UHFFFAOYSA-N diethylazanide;zirconium(4+) Chemical compound [Zr+4].CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC GOVWJRDDHRBJRW-UHFFFAOYSA-N 0.000 claims 3
- DWCMDRNGBIZOQL-UHFFFAOYSA-N dimethylazanide;zirconium(4+) Chemical compound [Zr+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C DWCMDRNGBIZOQL-UHFFFAOYSA-N 0.000 claims 3
- GCPCLEKQVMKXJM-UHFFFAOYSA-N ethoxy(diethyl)alumane Chemical group CCO[Al](CC)CC GCPCLEKQVMKXJM-UHFFFAOYSA-N 0.000 claims 3
- SRLSISLWUNZOOB-UHFFFAOYSA-N ethyl(methyl)azanide;zirconium(4+) Chemical compound [Zr+4].CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C SRLSISLWUNZOOB-UHFFFAOYSA-N 0.000 claims 3
- IMKXKRVWMWJAFF-UHFFFAOYSA-N n-bis[ethyl(methyl)amino]alumanyl-n-methylethanamine Chemical compound CCN(C)[Al](N(C)CC)N(C)CC IMKXKRVWMWJAFF-UHFFFAOYSA-N 0.000 claims 3
- 239000010936 titanium Substances 0.000 claims 3
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 claims 3
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 claims 3
- MCULRUJILOGHCJ-UHFFFAOYSA-N triisobutylaluminium Chemical compound CC(C)C[Al](CC(C)C)CC(C)C MCULRUJILOGHCJ-UHFFFAOYSA-N 0.000 claims 3
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 claims 3
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 claims 3
- LSWWNKUULMMMIL-UHFFFAOYSA-J zirconium(iv) bromide Chemical group Br[Zr](Br)(Br)Br LSWWNKUULMMMIL-UHFFFAOYSA-J 0.000 claims 3
- GRWPYGBKJYICOO-UHFFFAOYSA-N 2-methylpropan-2-olate;titanium(4+) Chemical compound [Ti+4].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-] GRWPYGBKJYICOO-UHFFFAOYSA-N 0.000 claims 2
- 238000000137 annealing Methods 0.000 claims 2
- 238000005336 cracking Methods 0.000 claims 2
- GCIHPQVQNZQGFC-UHFFFAOYSA-N diethylazanide;dimethylazanide;titanium(4+) Chemical compound [Ti+4].C[N-]C.C[N-]C.CC[N-]CC.CC[N-]CC GCIHPQVQNZQGFC-UHFFFAOYSA-N 0.000 claims 2
- VJDVOZLYDLHLSM-UHFFFAOYSA-N diethylazanide;titanium(4+) Chemical compound [Ti+4].CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC VJDVOZLYDLHLSM-UHFFFAOYSA-N 0.000 claims 2
- LNKYFCABELSPAN-UHFFFAOYSA-N ethyl(methyl)azanide;titanium(4+) Chemical compound [Ti+4].CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C LNKYFCABELSPAN-UHFFFAOYSA-N 0.000 claims 2
- MNWRORMXBIWXCI-UHFFFAOYSA-N tetrakis(dimethylamido)titanium Chemical compound CN(C)[Ti](N(C)C)(N(C)C)N(C)C MNWRORMXBIWXCI-UHFFFAOYSA-N 0.000 claims 2
- UBZYKBZMAMTNKW-UHFFFAOYSA-J titanium tetrabromide Chemical compound Br[Ti](Br)(Br)Br UBZYKBZMAMTNKW-UHFFFAOYSA-J 0.000 claims 2
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims 2
- YRAJNWYBUCUFBD-UHFFFAOYSA-N 2,2,6,6-tetramethylheptane-3,5-dione Chemical compound CC(C)(C)C(=O)CC(=O)C(C)(C)C YRAJNWYBUCUFBD-UHFFFAOYSA-N 0.000 claims 1
- CEQBQHVCXGLHDW-UHFFFAOYSA-N B(=O)N.[Er] Chemical compound B(=O)N.[Er] CEQBQHVCXGLHDW-UHFFFAOYSA-N 0.000 claims 1
- ONDLMOKANOMTNR-UHFFFAOYSA-N CC1=C(C(C=C1)([Er+2])C)C Chemical group CC1=C(C(C=C1)([Er+2])C)C ONDLMOKANOMTNR-UHFFFAOYSA-N 0.000 claims 1
- JRCMYZNYPKTOPG-UHFFFAOYSA-N butylcyclopentane;erbium Chemical compound [Er].CCCC[C]1[CH][CH][CH][CH]1.CCCC[C]1[CH][CH][CH][CH]1.CCCC[C]1[CH][CH][CH][CH]1 JRCMYZNYPKTOPG-UHFFFAOYSA-N 0.000 claims 1
- 125000001664 diethylamino group Chemical group [H]C([H])([H])C([H])([H])N(*)C([H])([H])C([H])([H])[H] 0.000 claims 1
- VSLPMIMVDUOYFW-UHFFFAOYSA-N dimethylazanide;tantalum(5+) Chemical compound [Ta+5].C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C VSLPMIMVDUOYFW-UHFFFAOYSA-N 0.000 claims 1
- JHFPQYFEJICGKC-UHFFFAOYSA-N erbium(3+) Chemical compound [Er+3] JHFPQYFEJICGKC-UHFFFAOYSA-N 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- OEIMLTQPLAGXMX-UHFFFAOYSA-I tantalum(v) chloride Chemical compound Cl[Ta](Cl)(Cl)(Cl)Cl OEIMLTQPLAGXMX-UHFFFAOYSA-I 0.000 claims 1
- HSXKFDGTKKAEHL-UHFFFAOYSA-N tantalum(v) ethoxide Chemical compound [Ta+5].CC[O-].CC[O-].CC[O-].CC[O-].CC[O-] HSXKFDGTKKAEHL-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662362936P | 2016-07-15 | 2016-07-15 | |
| US62/362,936 | 2016-07-15 | ||
| US15/646,602 | 2017-07-11 | ||
| US15/646,602 US20180016678A1 (en) | 2016-07-15 | 2017-07-11 | Multi-layer coating with diffusion barrier layer and erosion resistant layer |
| PCT/US2017/042110 WO2018013909A1 (en) | 2016-07-15 | 2017-07-14 | Multi-layer coating with diffusion barrier layer and erosion resistant layer |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019135023A Division JP7048544B2 (ja) | 2016-07-15 | 2019-07-23 | 拡散障壁層及び浸食防止層を有する多層コーティング |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019522104A JP2019522104A (ja) | 2019-08-08 |
| JP2019522104A5 true JP2019522104A5 (enExample) | 2020-08-20 |
| JP7053452B2 JP7053452B2 (ja) | 2022-04-12 |
Family
ID=60941682
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018503240A Active JP7053452B2 (ja) | 2016-07-15 | 2017-07-14 | 拡散障壁層及び浸食防止層を有する多層コーティング |
| JP2019135023A Active JP7048544B2 (ja) | 2016-07-15 | 2019-07-23 | 拡散障壁層及び浸食防止層を有する多層コーティング |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019135023A Active JP7048544B2 (ja) | 2016-07-15 | 2019-07-23 | 拡散障壁層及び浸食防止層を有する多層コーティング |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US20180016678A1 (enExample) |
| JP (2) | JP7053452B2 (enExample) |
| KR (2) | KR102481924B1 (enExample) |
| CN (2) | CN107849704A (enExample) |
| TW (2) | TW201827626A (enExample) |
| WO (1) | WO2018013909A1 (enExample) |
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-
2017
- 2017-07-11 US US15/646,602 patent/US20180016678A1/en not_active Abandoned
- 2017-07-14 TW TW107101620A patent/TW201827626A/zh unknown
- 2017-07-14 KR KR1020187004122A patent/KR102481924B1/ko active Active
- 2017-07-14 KR KR1020197005973A patent/KR102481950B1/ko active Active
- 2017-07-14 JP JP2018503240A patent/JP7053452B2/ja active Active
- 2017-07-14 WO PCT/US2017/042110 patent/WO2018013909A1/en not_active Ceased
- 2017-07-14 TW TW106123559A patent/TW201823487A/zh unknown
- 2017-07-14 CN CN201780002518.0A patent/CN107849704A/zh not_active Withdrawn
- 2017-07-14 CN CN201810637499.5A patent/CN108531907A/zh not_active Withdrawn
- 2017-12-15 US US15/844,335 patent/US11008653B2/en active Active
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2019
- 2019-07-23 JP JP2019135023A patent/JP7048544B2/ja active Active
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