JP2018504778A5 - - Google Patents
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- Publication number
- JP2018504778A5 JP2018504778A5 JP2017533808A JP2017533808A JP2018504778A5 JP 2018504778 A5 JP2018504778 A5 JP 2018504778A5 JP 2017533808 A JP2017533808 A JP 2017533808A JP 2017533808 A JP2017533808 A JP 2017533808A JP 2018504778 A5 JP2018504778 A5 JP 2018504778A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- region
- reverse conducting
- mos device
- protective layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 16
- 239000011241 protective layer Substances 0.000 claims 14
- 230000007423 decrease Effects 0.000 claims 3
- 230000001681 protective effect Effects 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14200101 | 2014-12-23 | ||
| EP14200101.5 | 2014-12-23 | ||
| PCT/EP2015/080947 WO2016102549A1 (en) | 2014-12-23 | 2015-12-22 | Reverse-conducting semiconductor device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018504778A JP2018504778A (ja) | 2018-02-15 |
| JP2018504778A5 true JP2018504778A5 (enExample) | 2019-01-17 |
| JP7030515B2 JP7030515B2 (ja) | 2022-03-07 |
Family
ID=52231999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017533808A Active JP7030515B2 (ja) | 2014-12-23 | 2015-12-22 | 逆導通半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10109725B2 (enExample) |
| EP (1) | EP3238260B1 (enExample) |
| JP (1) | JP7030515B2 (enExample) |
| CN (1) | CN107112353B (enExample) |
| WO (1) | WO2016102549A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6649102B2 (ja) * | 2016-02-05 | 2020-02-19 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP6854654B2 (ja) * | 2017-01-26 | 2021-04-07 | ローム株式会社 | 半導体装置 |
| JP6897166B2 (ja) * | 2017-03-03 | 2021-06-30 | 株式会社豊田中央研究所 | 半導体装置 |
| US10355132B2 (en) | 2017-03-20 | 2019-07-16 | North Carolina State University | Power MOSFETs with superior high frequency figure-of-merit |
| JP6804379B2 (ja) * | 2017-04-24 | 2020-12-23 | 三菱電機株式会社 | 半導体装置 |
| DE102018102279A1 (de) * | 2018-02-01 | 2019-08-01 | Infineon Technologies Ag | Halbleiterbauelement mit randabschlussbereich |
| CN111211157A (zh) * | 2018-11-21 | 2020-05-29 | 深圳比亚迪微电子有限公司 | 快恢复二极管及其制备方法 |
| CN110190029B (zh) * | 2019-04-28 | 2021-07-09 | 爱特微(张家港)半导体技术有限公司 | 一种功率半导体器件的制备方法 |
| DE102019111786A1 (de) * | 2019-05-07 | 2020-11-12 | Infineon Technologies Ag | Leistungshalbleitervorrichtung und Verfahren |
| JP7227110B2 (ja) * | 2019-09-18 | 2023-02-21 | 株式会社東芝 | 半導体装置 |
| CN110610986B (zh) * | 2019-10-09 | 2023-03-14 | 重庆邮电大学 | 一种利用结终端集成横向续流二极管的rc-igbt器件 |
| CN110797403B (zh) * | 2019-10-18 | 2023-08-01 | 上海睿驱微电子科技有限公司 | 一种rc-igbt半导体装置 |
| CN110854180B (zh) * | 2019-11-27 | 2024-04-16 | 吉林华微电子股份有限公司 | 终端结构的制造方法、终端结构及半导体器件 |
| US20210273090A1 (en) * | 2020-03-02 | 2021-09-02 | Cree, Inc. | Semiconductor die with improved edge termination |
| CN113782592B (zh) * | 2021-09-10 | 2023-08-29 | 重庆邮电大学 | 一种衬底集成反并联续流二极管的rc-ligbt器件 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0799307A (ja) * | 1993-09-29 | 1995-04-11 | Fuji Electric Co Ltd | 半導体装置およびその製造方法 |
| JP4357753B2 (ja) | 2001-01-26 | 2009-11-04 | 株式会社東芝 | 高耐圧半導体装置 |
| JP4873002B2 (ja) | 2008-12-12 | 2012-02-08 | 株式会社デンソー | 半導体装置の製造方法 |
| JP4905559B2 (ja) * | 2009-01-27 | 2012-03-28 | 株式会社デンソー | 半導体装置 |
| EP2249392B1 (en) * | 2009-04-29 | 2020-05-20 | ABB Power Grids Switzerland AG | Reverse-conducting semiconductor device |
| WO2011157814A2 (en) | 2010-06-17 | 2011-12-22 | Abb Technology Ag | Power semiconductor device |
| US8716746B2 (en) * | 2010-08-17 | 2014-05-06 | Denso Corporation | Semiconductor device |
| JP5787655B2 (ja) * | 2010-11-26 | 2015-09-30 | 三菱電機株式会社 | 炭化珪素半導体装置およびその製造方法 |
| JP5459403B2 (ja) * | 2011-03-28 | 2014-04-02 | トヨタ自動車株式会社 | 縦型半導体装置 |
| US9508870B2 (en) | 2012-04-13 | 2016-11-29 | Mitsubishi Electric Corporation | Diode |
| JP2014038937A (ja) * | 2012-08-16 | 2014-02-27 | Mitsubishi Electric Corp | 半導体装置 |
| CN104704635A (zh) | 2012-10-02 | 2015-06-10 | 三菱电机株式会社 | 半导体装置及其制造方法 |
| JP5939127B2 (ja) * | 2012-10-22 | 2016-06-22 | 住友電気工業株式会社 | 炭化珪素半導体装置 |
| WO2014087522A1 (ja) | 2012-12-06 | 2014-06-12 | 三菱電機株式会社 | 半導体装置 |
| JP2014175377A (ja) | 2013-03-07 | 2014-09-22 | Mitsubishi Electric Corp | 炭化珪素半導体装置およびその製造方法 |
| JP2014192433A (ja) | 2013-03-28 | 2014-10-06 | Sanken Electric Co Ltd | 半導体装置 |
| JP6224454B2 (ja) * | 2013-12-27 | 2017-11-01 | 株式会社豊田中央研究所 | 縦型半導体装置 |
| JP6261494B2 (ja) * | 2014-12-03 | 2018-01-17 | 三菱電機株式会社 | 電力用半導体装置 |
-
2015
- 2015-12-22 JP JP2017533808A patent/JP7030515B2/ja active Active
- 2015-12-22 EP EP15819822.6A patent/EP3238260B1/en active Active
- 2015-12-22 WO PCT/EP2015/080947 patent/WO2016102549A1/en not_active Ceased
- 2015-12-22 CN CN201580070745.8A patent/CN107112353B/zh active Active
-
2017
- 2017-06-22 US US15/630,491 patent/US10109725B2/en active Active
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