JP5787655B2 - 炭化珪素半導体装置およびその製造方法 - Google Patents
炭化珪素半導体装置およびその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 87
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 67
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 66
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000012535 impurity Substances 0.000 claims description 86
- 238000005468 ion implantation Methods 0.000 claims description 43
- 238000002513 implantation Methods 0.000 claims description 34
- 238000001312 dry etching Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 17
- 230000003647 oxidation Effects 0.000 claims description 11
- 238000007254 oxidation reaction Methods 0.000 claims description 11
- 230000004913 activation Effects 0.000 claims description 10
- 238000000137 annealing Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000005669 field effect Effects 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 32
- 238000005530 etching Methods 0.000 description 25
- 230000015556 catabolic process Effects 0.000 description 16
- 239000000758 substrate Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Description
面に生じたダメージ層を除去するエッチングによる耐圧の変化が抑えられる。
図1は、本発明の実施の形態1に係るSiC半導体装置であるMOSFETの構成を示す断面図である。図1(a)はMOSFETのセル部であり、図1(a)はMOSFETの終端部を示している。つまりMOSFETのチップには図1(b)に示す構造のセルが複数個並列に配設され、最外周のセルの外側が図1(b)の構造となっている。
JTE以外の終端構造としては、FLR(Field Limiting Ring)構造が知られている。FLRは、JTE領域と同様のイオン注入工程により形成可能な不純物注入領域であり、本発明を適用することができる。実施の形態2では、本発明をFLRに適用した構成を示す。
Claims (17)
- 炭化珪素半導体層に形成された半導体素子と、
前記半導体素子の終端部に形成され、JTE(Junction Termination Extension)領域およびFLR(Field Limiting Ring)の少なくとも片方を含む不純物注入領域である終端領域とを備え、
前記終端領域の深さ方向の不純物濃度プロファイルにおいて、最も浅い位置の濃度ピークは表面から0.35μmより深い位置にあり、
前記不純物濃度プロファイルにおいて、表面からの深さが0.2μmの濃度は前記最も浅い位置の濃度ピークの10分の1以下であること
を特徴とする炭化珪素半導体装置。 - 炭化珪素半導体層に形成された半導体素子と、
前記半導体素子の終端部に形成され、JTE(Junction Termination Extension)領域およびFLR(Field Limiting Ring)の少なくとも片方を含む不純物注入領域である終端領域と、
前記半導体素子の領域上に形成されるゲート絶縁膜と、
前記終端領域上に形成され、前記ゲート絶縁膜より厚いフィールド絶縁膜と、
を備え、
前記終端領域の深さ方向の不純物濃度プロファイルにおいて、最も浅い位置の濃度ピークは表面から0.35μmより深い位置にあり、
前記不純物濃度プロファイルにおいて、表面からの深さが0.2μmの濃度は前記最も浅い位置の濃度ピークの10分の1以下であること
を特徴とする炭化珪素半導体装置。 - 前記不純物濃度プロファイルにおいて、濃度ピークは1箇所のみである
請求項1または請求項2記載の炭化珪素半導体装置。 - 前記終端領域は前記FLRを含み、
前記半導体素子は、深さ方向の不純物濃度プロファイルが前記FLRと同じであるウエ
ルを有している
請求項1から請求項3のいずれか一項記載の炭化珪素半導体装置。 - 前記終端領域は前記JTE領域および前記FLRの両方を含み、
前記JTE領域と前記FLRは、深さ方向の不純物濃度プロファイルが互いに同じであ
る
請求項1から請求項3のいずれか一項記載の炭化珪素半導体装置。 - 前記終端領域を構成する不純物はAlである
請求項1から請求項5のいずれか一項記載の炭化珪素半導体装置。 - 前記炭化珪素半導体層の表面において、前記終端領域の近傍は平坦である
請求項1から請求項6のいずれか一項記載の炭化珪素半導体装置。 - 前記半導体素子はMOSFET(Metal oxide semiconductor field effect transistor)である
請求項1から請求項7のいずれか一項記載の炭化珪素半導体装置。 - 炭化珪素半導体層に半導体素子を形成する工程と、
前記半導体素子の外周部における前記炭化珪素半導体層の表面部に、不純物のイオン注入
によりJTE(Junction Termination Extension)領域およびFLR(Field Limiting Ring)の少なくとも片方を含む終端領域を形成する工程と、
を備え、
前記不純物のイオン注入は、不純物濃度のピークが前記炭化珪素半導体層の表面から0
.35μmより深い位置になる注入エネルギーで行われ、
前記イオン注入において、前記終端領域の表面からの深さが0.2μmの濃度は、前記最も浅い位置の濃度ピークの10分の1以下であること
を特徴とする炭化珪素半導体装置の製造方法。 - 炭化珪素半導体層に半導体素子を形成する工程と、
前記半導体素子の外周部における前記炭化珪素半導体層の表面部に、不純物のイオン注入によりJTE(Junction Termination Extension)領域およびFLR(Field Limiting Ring)の少なくとも片方を含む終端領域を形成する工程と、
前記半導体素子の領域に形成されるゲート絶縁膜よりも厚膜のフィールド絶縁膜を、前記終端領域上に形成する工程と、
を備え、
前記不純物のイオン注入は、不純物濃度のピークが前記炭化珪素半導体層の表面から0.35μmより深い位置になる注入エネルギーで行われ、
前記イオン注入において、前記終端領域の表面からの深さが0.2μmの濃度は、前記最も浅い位置の濃度ピークの10分の1以下であること
を特徴とする炭化珪素半導体装置の製造方法。
- 前記イオン注入は、前記不純物の種類および注入エネルギーを固定して行われる
請求項9または請求項10記載の炭化珪素半導体装置の製造方法。 - 前記終端領域は前記FLRを含み、
前記半導体素子を形成する工程は、不純物のイオン注入によりウエルを形成する工程を
含み、
前記ウエルを形成する形成工程と前記FLRを形成する工程は、同時に行われる
請求項9から請求項11のいずれか一項記載の炭化珪素半導体装置の製造方法。 - 前記終端領域は前記JTE領域および前記FLRの両方を含み、
前記終端領域を形成する工程において、前記JTEと前記FLRは同時に形成される
請求項9から請求項11のいずれか一項記載の炭化珪素半導体装置の製造方法。 - 前記不純物はAlである
請求項9から請求項13のいずれか一項記載の炭化珪素半導体装置の製造方法。 - 前記イオン注入の注入エネルギーは350keV以上である
請求項14記載の炭化珪素半導体装置の製造方法。 - 前記終端領域の活性化アニールを行う工程と、
前記活性化アニールの後、犠牲酸化処理により前記終端領域の表面を除去する工程とを
さらに備える
請求項9から請求項15のいずれか一項記載の炭化珪素半導体装置の製造方法。 - 前記終端領域の表面に対して選択的なドライエッチングは行われない
請求項9から請求項16のいずれか一項記載の炭化珪素半導体装置の製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011161585A JP5787655B2 (ja) | 2010-11-26 | 2011-07-25 | 炭化珪素半導体装置およびその製造方法 |
US13/252,565 US8525189B2 (en) | 2010-11-26 | 2011-10-04 | Silicon carbide semiconductor device |
KR1020110115592A KR101347224B1 (ko) | 2010-11-26 | 2011-11-08 | 탄화 규소 반도체장치 및 그 제조방법 |
DE102011086500.4A DE102011086500B4 (de) | 2010-11-26 | 2011-11-16 | Siliziumcarbid-Halbleitervorrichtung und deren Herstellungsverfahren |
CN201110380426.0A CN102479807B (zh) | 2010-11-26 | 2011-11-25 | 碳化硅半导体装置及其制造方法 |
US13/950,044 US8932944B2 (en) | 2010-11-26 | 2013-07-24 | Silicon carbide semiconductor device manufacturing method |
KR1020130135434A KR101413197B1 (ko) | 2010-11-26 | 2013-11-08 | 탄화 규소 반도체장치 및 그 제조방법 |
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JP2011161585A JP5787655B2 (ja) | 2010-11-26 | 2011-07-25 | 炭化珪素半導体装置およびその製造方法 |
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CN103794639B (zh) * | 2012-10-29 | 2018-01-16 | 无锡华润上华科技有限公司 | 半导体器件 |
US10347489B2 (en) * | 2013-07-02 | 2019-07-09 | General Electric Company | Semiconductor devices and methods of manufacture |
JP2015046502A (ja) | 2013-08-28 | 2015-03-12 | 住友電気工業株式会社 | 炭化珪素半導体装置およびその製造方法 |
JP6206339B2 (ja) * | 2014-06-23 | 2017-10-04 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
JP7030515B2 (ja) * | 2014-12-23 | 2022-03-07 | ヒタチ・エナジー・スウィツァーランド・アクチェンゲゼルシャフト | 逆導通半導体装置 |
JP6363541B2 (ja) * | 2015-03-16 | 2018-07-25 | 株式会社東芝 | 半導体装置及びその製造方法 |
DE102015117286B4 (de) | 2015-10-09 | 2018-04-05 | Infineon Technologies Ag | Verfahren zum herstellen einer siliziumcarbidhalbleitervorrichtung durch entfernen amorphisierter abschnitte |
CN105932046B (zh) * | 2016-06-01 | 2019-03-01 | 清华大学 | 面向碳化硅高压大功率器件的边缘结终端结构 |
KR102550521B1 (ko) * | 2016-10-21 | 2023-06-30 | 한국전기연구원 | 실리콘 카바이드 반도체 소자의 제조방법 |
JP2018082025A (ja) * | 2016-11-16 | 2018-05-24 | 株式会社 日立パワーデバイス | 半導体装置、電力変換装置及び半導体装置の製造方法 |
CN107123669B (zh) * | 2017-06-28 | 2020-03-17 | 电子科技大学 | 一种碳化硅功率器件终端结构 |
CN107275391B (zh) * | 2017-07-07 | 2024-01-02 | 泰科天润半导体科技(北京)有限公司 | 用于碳化硅半导体功率器件的复合终端结构及制备方法 |
CN108493232A (zh) * | 2018-03-22 | 2018-09-04 | 北京世纪金光半导体有限公司 | 一种空间剂量调制jte与场线环构成的混合节终端保护结构及其制备方法 |
CN111755497B (zh) * | 2018-06-14 | 2022-08-19 | 北京世纪金光半导体有限公司 | 一种jte和掩埋flr复合终端结构功率器件及其制备方法 |
CN110164955A (zh) * | 2019-05-28 | 2019-08-23 | 深圳市桦沣实业有限公司 | 一种横向变掺杂终端结构 |
JP2020205295A (ja) * | 2019-06-14 | 2020-12-24 | 国立研究開発法人産業技術総合研究所 | 炭化珪素半導体装置 |
CN110534559B (zh) * | 2019-09-03 | 2021-07-20 | 深圳第三代半导体研究院 | 一种碳化硅半导体器件终端及其制造方法 |
CN110854180B (zh) * | 2019-11-27 | 2024-04-16 | 吉林华微电子股份有限公司 | 终端结构的制造方法、终端结构及半导体器件 |
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US9117739B2 (en) * | 2010-03-08 | 2015-08-25 | Cree, Inc. | Semiconductor devices with heterojunction barrier regions and methods of fabricating same |
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KR20130129342A (ko) | 2013-11-28 |
CN102479807B (zh) | 2014-12-10 |
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KR20120057514A (ko) | 2012-06-05 |
JP2012129492A (ja) | 2012-07-05 |
CN102479807A (zh) | 2012-05-30 |
US8932944B2 (en) | 2015-01-13 |
DE102011086500A1 (de) | 2012-05-31 |
US20120132924A1 (en) | 2012-05-31 |
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