JP2018078162A - ウェーハの加工方法 - Google Patents
ウェーハの加工方法 Download PDFInfo
- Publication number
- JP2018078162A JP2018078162A JP2016218012A JP2016218012A JP2018078162A JP 2018078162 A JP2018078162 A JP 2018078162A JP 2016218012 A JP2016218012 A JP 2016218012A JP 2016218012 A JP2016218012 A JP 2016218012A JP 2018078162 A JP2018078162 A JP 2018078162A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- protective film
- cutting
- metal film
- cutting groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003672 processing method Methods 0.000 title claims abstract description 12
- 230000001681 protective effect Effects 0.000 claims abstract description 77
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 239000011347 resin Substances 0.000 claims abstract description 13
- 229920005989 resin Polymers 0.000 claims abstract description 13
- 238000004140 cleaning Methods 0.000 claims description 22
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 122
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 20
- 239000007788 liquid Substances 0.000 description 15
- 239000003795 chemical substances by application Substances 0.000 description 14
- 238000003384 imaging method Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 238000002679 ablation Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
波長 :355nm(YAGレーザの第3高調波)
平均出力 :3.0W
繰り返し周波数 :20kHz
送り速度 :100mm/s
13 分割予定ライン
15 デバイス
17 ウェーハユニット
18 チャックテーブル
21 金属膜
23 切削溝
24 レーザビーム照射ユニット
25 保護膜
27 分断溝
28 集光器
30 保護膜形成装置
38 スピンナテーブル
50 保護膜剤吐出手段
54 保護膜剤供給ノズル
60 洗浄水供給手段
64 洗浄水ノズル
Claims (1)
- 交差する複数の分割予定ラインで区画された各領域にそれぞれデバイスが形成された表面を有し、裏面に金属膜が形成されたウェーハの加工方法であって、
ウェーハの表面から切削ブレードで該分割予定ラインに沿ってウェーハを切削し、該金属膜に至らない切削溝を形成する切削ステップと、
該切削ステップを実施した後、ウェーハの表面側に水溶性の樹脂を供給し、ウェーハの表面と該切削溝を該水溶性の樹脂からなる保護膜で被覆する保護膜形成ステップと、
該保護膜形成ステップを実施した後、該金属膜に対して吸収性を有する波長のレーザビームをウェーハの表面側から該切削溝に照射してウェーハと共に該金属膜を分断するレーザ加工ステップと、
該レーザ加工ステップを実施した後、ウェーハを洗浄して該保護膜を除去する保護膜除去ステップと、
を備えたことを特徴とするウェーハの加工方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016218012A JP6739873B2 (ja) | 2016-11-08 | 2016-11-08 | ウェーハの加工方法 |
TW106134033A TWI734840B (zh) | 2016-11-08 | 2017-10-02 | 晶圓的加工方法 |
CN201711058245.XA CN108063118B (zh) | 2016-11-08 | 2017-11-01 | 晶片的加工方法 |
KR1020170145951A KR102336955B1 (ko) | 2016-11-08 | 2017-11-03 | 웨이퍼의 가공 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016218012A JP6739873B2 (ja) | 2016-11-08 | 2016-11-08 | ウェーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018078162A true JP2018078162A (ja) | 2018-05-17 |
JP6739873B2 JP6739873B2 (ja) | 2020-08-12 |
Family
ID=62135586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016218012A Active JP6739873B2 (ja) | 2016-11-08 | 2016-11-08 | ウェーハの加工方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6739873B2 (ja) |
KR (1) | KR102336955B1 (ja) |
CN (1) | CN108063118B (ja) |
TW (1) | TWI734840B (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20190348325A1 (en) * | 2018-05-09 | 2019-11-14 | Disco Corporation | Wafer dividing method |
JP2019212839A (ja) * | 2018-06-07 | 2019-12-12 | 株式会社ディスコ | ウェーハの加工方法 |
JP2020061500A (ja) * | 2018-10-11 | 2020-04-16 | 株式会社ディスコ | ウェーハの加工方法 |
WO2021039802A1 (ja) * | 2019-08-27 | 2021-03-04 | ローム株式会社 | 半導体素子、および半導体素子の製造方法 |
KR20210045304A (ko) | 2019-10-16 | 2021-04-26 | 가부시기가이샤 디스코 | 피가공물의 가공 방법 |
WO2021079879A1 (ja) * | 2019-10-21 | 2021-04-29 | ヌヴォトンテクノロジージャパン株式会社 | 半導体装置および個片化方法 |
KR20210047247A (ko) | 2019-10-21 | 2021-04-29 | 가부시기가이샤 디스코 | 피가공물의 가공 방법 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI820177B (zh) * | 2018-09-26 | 2023-11-01 | 日商三星鑽石工業股份有限公司 | 附有金屬膜之基板的分割方法 |
CN109304547A (zh) * | 2018-10-12 | 2019-02-05 | 广东正业科技股份有限公司 | 一种硬脆材料的激光加工方法及系统 |
JP7171138B2 (ja) * | 2018-12-06 | 2022-11-15 | 株式会社ディスコ | デバイスチップの製造方法 |
CN109909624B (zh) * | 2019-03-14 | 2021-05-11 | 苏州福唐智能科技有限公司 | 一种半导体工件激光切割方法 |
KR102176416B1 (ko) * | 2019-04-24 | 2020-11-10 | 스카이다이아몬드 주식회사 | 형광 박판 다이싱 방법 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS538634A (en) * | 1976-07-14 | 1978-01-26 | Nippon Electric Co | Coating liquid for laser scriber |
JPS6195544A (ja) * | 1984-10-17 | 1986-05-14 | Hitachi Ltd | ペレタイズ方法 |
JPH04142760A (ja) * | 1990-10-03 | 1992-05-15 | Nec Corp | 混成集積回路の製造方法 |
JPH05211381A (ja) * | 1991-11-12 | 1993-08-20 | Nec Corp | 混成集積回路の製造方法 |
JP2005101182A (ja) * | 2003-09-24 | 2005-04-14 | Disco Abrasive Syst Ltd | 半導体チップの製造方法 |
JP2005150523A (ja) * | 2003-11-18 | 2005-06-09 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2006073690A (ja) * | 2004-09-01 | 2006-03-16 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2008053500A (ja) * | 2006-08-25 | 2008-03-06 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2014090127A (ja) * | 2012-10-31 | 2014-05-15 | Disco Abrasive Syst Ltd | チップ形成方法 |
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JP2015138857A (ja) * | 2014-01-22 | 2015-07-30 | 株式会社ディスコ | ウェーハの加工方法 |
Family Cites Families (5)
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US7129114B2 (en) | 2004-03-10 | 2006-10-31 | Micron Technology, Inc. | Methods relating to singulating semiconductor wafers and wafer scale assemblies |
JP2009148793A (ja) * | 2007-12-20 | 2009-07-09 | Disco Abrasive Syst Ltd | 保護膜被覆装置およびレーザー加工機 |
JP2014225519A (ja) | 2013-05-15 | 2014-12-04 | 株式会社ディスコ | 加工方法 |
JP6385131B2 (ja) * | 2014-05-13 | 2018-09-05 | 株式会社ディスコ | ウェーハの加工方法 |
JP6242776B2 (ja) * | 2014-09-26 | 2017-12-06 | 富士フイルム株式会社 | 保護膜組成物、半導体装置の製造方法およびレーザーダイシング方法 |
-
2016
- 2016-11-08 JP JP2016218012A patent/JP6739873B2/ja active Active
-
2017
- 2017-10-02 TW TW106134033A patent/TWI734840B/zh active
- 2017-11-01 CN CN201711058245.XA patent/CN108063118B/zh active Active
- 2017-11-03 KR KR1020170145951A patent/KR102336955B1/ko active IP Right Grant
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS538634A (en) * | 1976-07-14 | 1978-01-26 | Nippon Electric Co | Coating liquid for laser scriber |
JPS6195544A (ja) * | 1984-10-17 | 1986-05-14 | Hitachi Ltd | ペレタイズ方法 |
JPH04142760A (ja) * | 1990-10-03 | 1992-05-15 | Nec Corp | 混成集積回路の製造方法 |
JPH05211381A (ja) * | 1991-11-12 | 1993-08-20 | Nec Corp | 混成集積回路の製造方法 |
JP2005101182A (ja) * | 2003-09-24 | 2005-04-14 | Disco Abrasive Syst Ltd | 半導体チップの製造方法 |
JP2005150523A (ja) * | 2003-11-18 | 2005-06-09 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2006073690A (ja) * | 2004-09-01 | 2006-03-16 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2008053500A (ja) * | 2006-08-25 | 2008-03-06 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2014090127A (ja) * | 2012-10-31 | 2014-05-15 | Disco Abrasive Syst Ltd | チップ形成方法 |
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JP2015138857A (ja) * | 2014-01-22 | 2015-07-30 | 株式会社ディスコ | ウェーハの加工方法 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
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US10840140B2 (en) * | 2018-05-09 | 2020-11-17 | Disco Corporation | Backside wafer dividing method using water-soluble protective film |
US20190348325A1 (en) * | 2018-05-09 | 2019-11-14 | Disco Corporation | Wafer dividing method |
JP2019212839A (ja) * | 2018-06-07 | 2019-12-12 | 株式会社ディスコ | ウェーハの加工方法 |
JP2020061500A (ja) * | 2018-10-11 | 2020-04-16 | 株式会社ディスコ | ウェーハの加工方法 |
WO2021039802A1 (ja) * | 2019-08-27 | 2021-03-04 | ローム株式会社 | 半導体素子、および半導体素子の製造方法 |
US11587831B2 (en) | 2019-10-16 | 2023-02-21 | Disco Corporation | Method for machining workpiece |
KR20210045304A (ko) | 2019-10-16 | 2021-04-26 | 가부시기가이샤 디스코 | 피가공물의 가공 방법 |
WO2021079879A1 (ja) * | 2019-10-21 | 2021-04-29 | ヌヴォトンテクノロジージャパン株式会社 | 半導体装置および個片化方法 |
JP2021068778A (ja) * | 2019-10-21 | 2021-04-30 | 株式会社ディスコ | 被加工物の加工方法 |
JP6909949B1 (ja) * | 2019-10-21 | 2021-07-28 | ヌヴォトンテクノロジージャパン株式会社 | 半導体装置 |
JP2021114621A (ja) * | 2019-10-21 | 2021-08-05 | ヌヴォトンテクノロジージャパン株式会社 | 個片化方法 |
KR20210047247A (ko) | 2019-10-21 | 2021-04-29 | 가부시기가이샤 디스코 | 피가공물의 가공 방법 |
US11798986B2 (en) | 2019-10-21 | 2023-10-24 | Nuvoton Technology Corporation Japan | Semiconductor device and chip singulation method |
Also Published As
Publication number | Publication date |
---|---|
JP6739873B2 (ja) | 2020-08-12 |
CN108063118A (zh) | 2018-05-22 |
KR102336955B1 (ko) | 2021-12-09 |
TWI734840B (zh) | 2021-08-01 |
CN108063118B (zh) | 2022-02-11 |
KR20180051394A (ko) | 2018-05-16 |
TW201818459A (zh) | 2018-05-16 |
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