JP2016518730A5 - - Google Patents
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- Publication number
- JP2016518730A5 JP2016518730A5 JP2016515351A JP2016515351A JP2016518730A5 JP 2016518730 A5 JP2016518730 A5 JP 2016518730A5 JP 2016515351 A JP2016515351 A JP 2016515351A JP 2016515351 A JP2016515351 A JP 2016515351A JP 2016518730 A5 JP2016518730 A5 JP 2016518730A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating layer
- kide
- mold
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 18
- 238000002161 passivation Methods 0.000 claims 10
- 239000000463 material Substances 0.000 claims 8
- 238000000034 method Methods 0.000 claims 8
- 239000004593 Epoxy Substances 0.000 claims 4
- 229920002577 polybenzoxazole Polymers 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000004642 Polyimide Substances 0.000 claims 2
- 238000001465 metallisation Methods 0.000 claims 2
- 229920001721 polyimide Polymers 0.000 claims 2
- 229920000642 polymer Polymers 0.000 claims 2
- 229910000679 solder Inorganic materials 0.000 claims 2
- 206010026749 Mania Diseases 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/898,427 | 2013-05-20 | ||
| US13/898,427 US10141202B2 (en) | 2013-05-20 | 2013-05-20 | Semiconductor device comprising mold for top side and sidewall protection |
| PCT/US2014/037739 WO2014189704A1 (en) | 2013-05-20 | 2014-05-12 | Semiconductor device comprising mold for top side and sidewall protection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016518730A JP2016518730A (ja) | 2016-06-23 |
| JP2016518730A5 true JP2016518730A5 (enExample) | 2017-06-15 |
Family
ID=50897962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016515351A Pending JP2016518730A (ja) | 2013-05-20 | 2014-05-12 | 上面および側壁保護のためのモールドを備える半導体デバイス |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10141202B2 (enExample) |
| EP (1) | EP3000128B1 (enExample) |
| JP (1) | JP2016518730A (enExample) |
| CN (1) | CN105229784A (enExample) |
| WO (1) | WO2014189704A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10720495B2 (en) * | 2014-06-12 | 2020-07-21 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and manufacturing method thereof |
| US10128207B2 (en) * | 2015-03-31 | 2018-11-13 | Stmicroelectronics Pte Ltd | Semiconductor packages with pillar and bump structures |
| CN106505055B (zh) * | 2015-09-08 | 2019-08-27 | 中芯国际集成电路制造(天津)有限公司 | 半导体结构及其形成方法 |
| JP2020074352A (ja) * | 2017-03-13 | 2020-05-14 | 三菱電機株式会社 | 半導体装置 |
| US20190131247A1 (en) * | 2017-10-31 | 2019-05-02 | Microchip Technology Incorporated | Semiconductor Wafer Cutting Using A Polymer Coating To Reduce Physical Damage |
| KR102600001B1 (ko) | 2018-10-18 | 2023-11-08 | 삼성전자주식회사 | 스크라이브 레인을 포함하는 반도체 칩 |
| US12113038B2 (en) * | 2020-01-03 | 2024-10-08 | Qualcomm Incorporated | Thermal compression flip chip bump for high performance and fine pitch |
| US12021013B2 (en) * | 2021-01-29 | 2024-06-25 | Mediatek Inc. | Ball pad design for semiconductor packages |
| KR20240012398A (ko) * | 2021-05-25 | 2024-01-29 | 소니 세미컨덕터 솔루션즈 가부시키가이샤 | 반도체 패키지 및 전자 기기 |
| US11887955B2 (en) * | 2021-08-26 | 2024-01-30 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor die including stress-resistant bonding structures and methods of forming the same |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6181569B1 (en) | 1999-06-07 | 2001-01-30 | Kishore K. Chakravorty | Low cost chip size package and method of fabricating the same |
| JP3770007B2 (ja) | 1999-11-01 | 2006-04-26 | 凸版印刷株式会社 | 半導体装置の製造方法 |
| JP2001144213A (ja) | 1999-11-16 | 2001-05-25 | Hitachi Ltd | 半導体装置の製造方法および半導体装置 |
| US6607941B2 (en) * | 2002-01-11 | 2003-08-19 | National Semiconductor Corporation | Process and structure improvements to shellcase style packaging technology |
| TWI226090B (en) | 2003-09-26 | 2005-01-01 | Advanced Semiconductor Eng | Transparent packaging in wafer level |
| JP4519571B2 (ja) | 2004-08-26 | 2010-08-04 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその検査方法と検査装置並びに半導体装置の製造方法 |
| US7160756B2 (en) * | 2004-10-12 | 2007-01-09 | Agency For Science, Techology And Research | Polymer encapsulated dicing lane (PEDL) technology for Cu/low/ultra-low k devices |
| WO2006054606A1 (ja) * | 2004-11-16 | 2006-05-26 | Rohm Co., Ltd. | 半導体装置および半導体装置の製造方法 |
| US9034731B2 (en) | 2005-02-03 | 2015-05-19 | Stats Chippac Ltd. | Integrated, integrated circuit singulation system |
| KR100652443B1 (ko) | 2005-11-17 | 2006-12-01 | 삼성전자주식회사 | 재배선층을 갖는 웨이퍼 레벨 패키지 및 그 형성방법 |
| US7723225B2 (en) * | 2006-02-07 | 2010-05-25 | Stats Chippac Ltd. | Solder bump confinement system for an integrated circuit package |
| JP4193897B2 (ja) * | 2006-05-19 | 2008-12-10 | カシオ計算機株式会社 | 半導体装置およびその製造方法 |
| TWI419268B (zh) | 2007-09-21 | 2013-12-11 | 兆裝微股份有限公司 | 半導體裝置及其製造方法 |
| KR100887479B1 (ko) | 2007-10-09 | 2009-03-10 | 주식회사 네패스 | 내균열성 반도체 패키지 및 그 제조 방법 |
| JP2009111333A (ja) | 2007-10-12 | 2009-05-21 | Panasonic Corp | 半導体装置 |
| US8048776B2 (en) | 2008-02-22 | 2011-11-01 | Stats Chippac, Ltd. | Semiconductor device and method of supporting a wafer during backgrinding and reflow of solder bumps |
| JP4666028B2 (ja) * | 2008-03-31 | 2011-04-06 | カシオ計算機株式会社 | 半導体装置 |
| CN101552248B (zh) * | 2008-03-31 | 2013-01-23 | 兆装微股份有限公司 | 半导体装置及其制造方法 |
| KR20090123280A (ko) * | 2008-05-27 | 2009-12-02 | 삼성전자주식회사 | 반도체 칩 패키지의 제조 방법, 반도체 웨이퍼 및 그 절단방법 |
| US8580657B2 (en) * | 2008-09-23 | 2013-11-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Protecting sidewalls of semiconductor chips using insulation films |
| US7977783B1 (en) | 2009-08-27 | 2011-07-12 | Amkor Technology, Inc. | Wafer level chip size package having redistribution layers |
| FR2953064B1 (fr) | 2009-11-20 | 2011-12-16 | St Microelectronics Tours Sas | Procede d'encapsulation de composants electroniques sur tranche |
| US8287996B2 (en) | 2009-12-21 | 2012-10-16 | Intel Corporation | Coating for a microelectronic device, treatment comprising same, and method of managing a thermal profile of a microelectronic die |
| JP5553642B2 (ja) | 2010-02-24 | 2014-07-16 | 株式会社テラプローブ | 半導体装置の製造方法及び薄型化基板の製造方法 |
| US8304867B2 (en) | 2010-11-01 | 2012-11-06 | Texas Instruments Incorporated | Crack arrest vias for IC devices |
| US8048778B1 (en) * | 2010-12-10 | 2011-11-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of dicing a semiconductor structure |
| US8786081B2 (en) * | 2011-07-27 | 2014-07-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and device for circuit routing by way of under-bump metallization |
| US20130320522A1 (en) * | 2012-05-30 | 2013-12-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Re-distribution Layer Via Structure and Method of Making Same |
| US9275924B2 (en) | 2012-08-14 | 2016-03-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor package having a recess filled with a molding compound |
-
2013
- 2013-05-20 US US13/898,427 patent/US10141202B2/en active Active
-
2014
- 2014-05-12 CN CN201480028867.6A patent/CN105229784A/zh active Pending
- 2014-05-12 JP JP2016515351A patent/JP2016518730A/ja active Pending
- 2014-05-12 EP EP14729192.6A patent/EP3000128B1/en active Active
- 2014-05-12 WO PCT/US2014/037739 patent/WO2014189704A1/en not_active Ceased
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