JP2016225560A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2016225560A JP2016225560A JP2015112904A JP2015112904A JP2016225560A JP 2016225560 A JP2016225560 A JP 2016225560A JP 2015112904 A JP2015112904 A JP 2015112904A JP 2015112904 A JP2015112904 A JP 2015112904A JP 2016225560 A JP2016225560 A JP 2016225560A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 109
- 210000000746 body region Anatomy 0.000 claims abstract description 189
- 239000012535 impurity Substances 0.000 claims abstract description 137
- 230000004888 barrier function Effects 0.000 claims abstract description 79
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 239000010936 titanium Substances 0.000 claims description 15
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 7
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
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- H01—ELECTRIC ELEMENTS
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- Condensed Matter Physics & Semiconductors (AREA)
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
【解決手段】IGBT領域3は、ドリフト領域13の表面側に形成されているp型のボトムボディ領域14と、ボトムボディ領域14の表面側に形成されているn型のバリア領域15と、バリア領域15の表面側に形成されているp型のトップボディ領域16を備えている。ダイオード領域4は、ドリフト領域13の表面側に形成されているp型のボトムアノード領域22と、ボトムアノード領域22の表面側に形成されているn型のバリア領域25と、バリア領域25の表面側に形成されているp型のトップアノード領域23を備えている。ダイオード領域4は、半導体基板2の表面からトップアノード領域23を貫通してバリア領域25に達する位置まで延びており、表面電極5とバリア領域25に接続されているn型のピラー領域20を備えている。トップボディ領域16の不純物濃度がボトムアノード領域22の不純物濃度より低い。
【選択図】図1
Description
コレクタ領域11は、p型の領域である。コレクタ領域11は、不純物濃度が高い。コレクタ領域11は、ドリフト領域13の裏面側に形成されている。コレクタ領域11は、半導体基板2の裏面60に露出する範囲に形成されている。コレクタ領域11は、裏面電極6にオーミック接触する。
カソード領域21は、n型の領域である。カソード領域21の不純物濃度は、バッファ領域12の不純物濃度より高い。カソード領域21は、バッファ領域12の裏面側に形成されている。カソード領域21は、半導体基板2の裏面60に露出する範囲に形成されている。カソード領域21は、裏面電極6にオーミック接触する。
2 :半導体基板
3 :IGBT領域
4 :ダイオード領域
5 :表面電極
6 :裏面電極
11 :コレクタ領域
12 :バッファ領域
13 :ドリフト領域
14 :ボトムボディ領域
15 :バリア領域
16 :トップボディ領域
17 :エミッタ領域
18 :ボディコンタクト領域
20 :ピラー領域
21 :カソード領域
22 :ボトムアノード領域
23 :トップアノード領域
24 :アノードコンタクト領域
25 :バリア領域
30 :ゲートトレンチ
31 :ゲート絶縁膜
32 :ゲート電極
33 :層間絶縁膜
50 :表面
60 :裏面
Claims (2)
- 半導体基板と、前記半導体基板の表面に形成されている金属からなる表面電極を備えている半導体装置であって、
前記半導体基板は、IGBT領域とダイオード領域を備えており、
前記IGBT領域は、
n型のドリフト領域と、
前記ドリフト領域の表面側に形成されているp型のボトムボディ領域と、
前記ボトムボディ領域の表面側に形成されているn型のバリア領域と、
前記バリア領域の表面側に形成されているp型のトップボディ領域と、
前記トップボディ領域の表面側に形成されているn型のエミッタ領域と、
前記半導体基板の表面から前記エミッタ領域と前記トップボディ領域と前記バリア領域と前記ボトムボディ領域を貫通して前記ドリフト領域に達する位置まで延びているゲートトレンチを備えており、
前記ダイオード領域は、
n型のドリフト領域と、
前記ドリフト領域の表面側に形成されているp型のボトムアノード領域と、
前記ボトムアノード領域の表面側に形成されているn型のバリア領域と、
前記バリア領域の表面側に形成されているp型のトップアノード領域と、
前記半導体基板の表面から前記トップアノード領域を貫通して前記バリア領域に達する位置まで延びており、前記表面電極と前記バリア領域に接続されているn型のピラー領域と、
前記半導体基板の表面から前記トップアノード領域と前記バリア領域と前記ボトムアノード領域を貫通して前記ドリフト領域に達する位置まで延びているゲートトレンチを備えており、
前記トップボディ領域の不純物濃度が前記ボトムアノード領域の不純物濃度より低い半導体装置。 - 前記表面電極がチタンから形成されている請求項1に記載の半導体装置。
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JP2015112904A JP6213522B2 (ja) | 2015-06-03 | 2015-06-03 | 半導体装置 |
US15/157,987 US9679997B2 (en) | 2015-06-03 | 2016-05-18 | Semiconductor device with suppressed two-step on phenomenon |
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JP2015112904A JP6213522B2 (ja) | 2015-06-03 | 2015-06-03 | 半導体装置 |
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JP6213522B2 JP6213522B2 (ja) | 2017-10-18 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020043237A (ja) * | 2018-09-11 | 2020-03-19 | 株式会社デンソー | 半導体装置 |
JP2020072137A (ja) * | 2018-10-30 | 2020-05-07 | 三菱電機株式会社 | 半導体装置 |
JP2021158199A (ja) * | 2020-03-26 | 2021-10-07 | 三菱電機株式会社 | 半導体装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6946922B2 (ja) * | 2017-10-18 | 2021-10-13 | 株式会社デンソー | 半導体装置 |
CN110416305B (zh) * | 2019-06-27 | 2021-01-08 | 南京芯舟科技有限公司 | 元胞结构及其应用的半导体器件 |
CN112786680B (zh) * | 2019-11-08 | 2022-09-09 | 株洲中车时代电气股份有限公司 | 一种碳化硅mosfet器件的元胞结构及功率半导体器件 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004095954A (ja) * | 2002-09-02 | 2004-03-25 | Toshiba Corp | 半導体装置 |
JP2012234848A (ja) * | 2011-04-28 | 2012-11-29 | Sanken Electric Co Ltd | 半導体装置 |
JP2013021142A (ja) * | 2011-07-12 | 2013-01-31 | Toyota Central R&D Labs Inc | 半導体装置 |
JP2013048230A (ja) * | 2011-07-27 | 2013-03-07 | Toyota Central R&D Labs Inc | ダイオード、半導体装置およびmosfet |
JP2014225599A (ja) * | 2013-05-17 | 2014-12-04 | トヨタ自動車株式会社 | 半導体装置 |
JP2016115766A (ja) * | 2014-12-12 | 2016-06-23 | 株式会社豊田中央研究所 | 逆導通igbt |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5724887B2 (ja) * | 2012-01-16 | 2015-05-27 | トヨタ自動車株式会社 | 半導体装置 |
JP6154292B2 (ja) * | 2013-11-06 | 2017-06-28 | トヨタ自動車株式会社 | 半導体装置及び半導体装置の製造方法 |
JP6185511B2 (ja) * | 2015-05-26 | 2017-08-23 | トヨタ自動車株式会社 | 半導体装置 |
JP6274154B2 (ja) * | 2015-05-27 | 2018-02-07 | トヨタ自動車株式会社 | 逆導通igbt |
-
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- 2015-06-03 JP JP2015112904A patent/JP6213522B2/ja active Active
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- 2016-05-18 US US15/157,987 patent/US9679997B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004095954A (ja) * | 2002-09-02 | 2004-03-25 | Toshiba Corp | 半導体装置 |
JP2012234848A (ja) * | 2011-04-28 | 2012-11-29 | Sanken Electric Co Ltd | 半導体装置 |
JP2013021142A (ja) * | 2011-07-12 | 2013-01-31 | Toyota Central R&D Labs Inc | 半導体装置 |
JP2013048230A (ja) * | 2011-07-27 | 2013-03-07 | Toyota Central R&D Labs Inc | ダイオード、半導体装置およびmosfet |
JP2014225599A (ja) * | 2013-05-17 | 2014-12-04 | トヨタ自動車株式会社 | 半導体装置 |
JP2016115766A (ja) * | 2014-12-12 | 2016-06-23 | 株式会社豊田中央研究所 | 逆導通igbt |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020043237A (ja) * | 2018-09-11 | 2020-03-19 | 株式会社デンソー | 半導体装置 |
WO2020054447A1 (ja) * | 2018-09-11 | 2020-03-19 | 株式会社デンソー | 半導体装置 |
CN112673466A (zh) * | 2018-09-11 | 2021-04-16 | 株式会社电装 | 半导体装置 |
JP6996461B2 (ja) | 2018-09-11 | 2022-01-17 | 株式会社デンソー | 半導体装置 |
CN112673466B (zh) * | 2018-09-11 | 2024-02-23 | 株式会社电装 | 半导体装置 |
JP2020072137A (ja) * | 2018-10-30 | 2020-05-07 | 三菱電機株式会社 | 半導体装置 |
CN111129135A (zh) * | 2018-10-30 | 2020-05-08 | 三菱电机株式会社 | 半导体装置 |
JP7101593B2 (ja) | 2018-10-30 | 2022-07-15 | 三菱電機株式会社 | 半導体装置 |
CN111129135B (zh) * | 2018-10-30 | 2023-09-29 | 三菱电机株式会社 | 半导体装置 |
JP2021158199A (ja) * | 2020-03-26 | 2021-10-07 | 三菱電機株式会社 | 半導体装置 |
JP7359053B2 (ja) | 2020-03-26 | 2023-10-11 | 三菱電機株式会社 | 半導体装置 |
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US20160359027A1 (en) | 2016-12-08 |
US9679997B2 (en) | 2017-06-13 |
JP6213522B2 (ja) | 2017-10-18 |
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