JP2016108655A - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- 238000010926 purge Methods 0.000 claims abstract description 19
- 239000011148 porous material Substances 0.000 claims description 111
- 239000007789 gas Substances 0.000 claims description 79
- 230000007423 decrease Effects 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 30
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 3
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- 230000002093 peripheral effect Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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Abstract
Description
図1は、本発明の実施の形態1に係る成膜装置の一部の断面斜視図である。この成膜装置はシャワーヘッド10を備えている。シャワーヘッド10は、基板の表面に均等な密度のガスを供給するために設けられている。シャワーヘッド10は、ベースプレート12、ミドルプレート14及びアッパープレート16を備えている。ベースプレート12とミドルプレート14は間隙を設けて配置されている。ベースプレート12とミドルプレート14の上にアッパープレート16がのせられている。アッパープレート16は、ベースプレート12上のOリング18を圧縮変形させている。なお、ミドルプレート14とアッパープレート16は例えばセラミック等で一体的に形成してもよい。
サセプタ70の上には基板72が搭載される。なお、基板72は被成膜物であれば特に限定されないが、例えば直径0.3mのウエハである。
図11は、本発明の実施の形態2に係る成膜装置の断面図である。第1流路については実施の形態1の第1流路と同様である。第2流路100は、第3細孔100aと、第2キャビティ100bと、複数の第4細孔100cを備えている。第3細孔100aはミドルプレート14とアッパープレート16に形成された鉛直方向にまっすぐ伸びる細孔である。また、第3細孔100aは第1キャビティ20bの中に設けられた柱を貫通する。第3細孔100aは、第4細孔100cが形成された領域の中央直上と、第4細孔100cが形成された領域の外縁直上との間に複数形成されている。図11には、2つの第3細孔100aが示されている。
図12は、本発明の実施の形態3に係る成膜装置の断面図である。第1流路については実施の形態1の第1流路と同様である。第2流路150は、第3細孔150aと、第2キャビティ150bと、複数の第4細孔150cを備えている。第3細孔150aはベースプレート12に形成された細孔である。
第2上壁152の外縁部に第3細孔150aが形成されている。第3細孔150aは、シャワーヘッドの上面の外縁側から第2キャビティ150bに至る流路を提供する。図12には、2つの第3細孔150aが示されている。
Claims (10)
- サセプタと、
前記サセプタの上方に設けられ、第1流路と、前記第1流路とは独立した第2流路とが形成されたシャワーヘッドと、を備え、
前記第1流路は、第1上壁と第1下壁に囲まれた水平方向に広がる第1キャビティと、前記第1上壁に形成された第1細孔と、前記第1下壁に形成された複数の第2細孔と、を有することで前記シャワーヘッドを貫通し、
前記第1上壁は前記第1細孔から離れるほど鉛直方向高さが低くなり、
前記第1下壁の鉛直方向高さは一定であり、
前記第2流路は、第2上壁と第2下壁に囲まれた水平方向に広がる第2キャビティと、前記第2上壁に形成された第3細孔と、前記第2下壁に形成された複数の第4細孔と、を有することで前記シャワーヘッドを貫通し、
前記第2上壁は前記第3細孔から離れるほど鉛直方向高さが低くなり、
前記第2下壁の鉛直方向高さは一定であることを特徴とする成膜装置。 - 前記第1細孔は、前記第1上壁のうち、前記サセプタの中央直上に形成され、
前記第3細孔は、前記第2上壁のうち、前記サセプタの中央直上に形成されたことを特徴とする請求項1に記載の成膜装置。 - 前記第1細孔は前記シャワーヘッドの上面中央から前記第1キャビティに至る流路を提供し、
前記第3細孔は前記シャワーヘッドの上面の外縁側から前記第2キャビティに至る流路を提供することを特徴とする請求項1又は2に記載の成膜装置。 - 前記第3細孔は、前記第4細孔が形成された領域の中央直上と、前記第4細孔が形成された領域の外縁直上との間に複数形成されたことを特徴とする請求項1に記載の成膜装置。
- 前記第3細孔は、鉛直方向に伸びることを特徴とする請求項4に記載の成膜装置。
- 前記第3細孔は、前記第2上壁の外縁部に形成され、
前記第3細孔は、前記シャワーヘッドの上面の外縁側から前記第2キャビティに至る流路を提供することを特徴とする請求項1に記載の成膜装置。 - 前記第1細孔、前記第1キャビティ、及び複数の前記第2細孔、又は前記第3細孔、前記第2キャビティ、及び複数の前記第4細孔を経由して前記サセプタの上に提供され、前記サセプタの外縁の外側に広がったガスを排気する、前記シャワーヘッドと前記サセプタを囲む形状の排気ダクトを備えたことを特徴とする請求項1〜6のいずれか1項に記載の成膜装置。
- 前記第1細孔に第1ガスを供給することで前記サセプタの上に前記第1ガスを供給し、
前記第1細孔に不活性ガスを供給することで前記第1流路の前記第1ガスをパージし、
前記第3細孔に第2ガスを供給することで前記サセプタの上に前記第2ガスを供給し、
前記第3細孔に不活性ガスを供給することで前記第2流路の前記第2ガスをパージするコントローラを備えたことを特徴とする請求項1〜7のいずれか1項に記載の成膜装置。 - 前記第2細孔と前記第4細孔は丸穴であることを特徴とする請求項1〜8のいずれか1項に記載の成膜装置。
- 前記サセプタは直径300mm以上のウエハを搭載する大きさであることを特徴とする請求項1〜9のいずれか1項に記載の成膜装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/557,774 | 2014-12-02 | ||
US14/557,774 US9885112B2 (en) | 2014-12-02 | 2014-12-02 | Film forming apparatus |
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JP2016108655A true JP2016108655A (ja) | 2016-06-20 |
JP6619606B2 JP6619606B2 (ja) | 2019-12-11 |
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JP2015199549A Active JP6619606B2 (ja) | 2014-12-02 | 2015-10-07 | 成膜装置 |
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US (1) | US9885112B2 (ja) |
JP (1) | JP6619606B2 (ja) |
KR (1) | KR20160066520A (ja) |
CN (1) | CN105648421B (ja) |
TW (1) | TWI666337B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6702514B1 (ja) * | 2018-11-30 | 2020-06-03 | 株式会社明電舎 | 酸化膜形成装置 |
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TWI666337B (zh) | 2019-07-21 |
CN105648421A (zh) | 2016-06-08 |
KR20160066520A (ko) | 2016-06-10 |
US9885112B2 (en) | 2018-02-06 |
US20160153088A1 (en) | 2016-06-02 |
JP6619606B2 (ja) | 2019-12-11 |
CN105648421B (zh) | 2019-06-21 |
TW201631200A (zh) | 2016-09-01 |
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