JP2015097287A - 太陽電池構造体、光起電モジュール及びこれらに対応する方法 - Google Patents
太陽電池構造体、光起電モジュール及びこれらに対応する方法 Download PDFInfo
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- JP2015097287A JP2015097287A JP2015010267A JP2015010267A JP2015097287A JP 2015097287 A JP2015097287 A JP 2015097287A JP 2015010267 A JP2015010267 A JP 2015010267A JP 2015010267 A JP2015010267 A JP 2015010267A JP 2015097287 A JP2015097287 A JP 2015097287A
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Classifications
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/228—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes
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- H01L31/02—Details
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- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
- H01L31/0504—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
- H01L31/0504—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
- H01L31/0516—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module specially adapted for interconnection of back-contact solar cells
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Abstract
Description
同様に、異なってドープ電極領域(すなわちp+ドープ領域及びn+ドープ領域)に帰する面積は電池性能に影響する。このように、n+ドープ領域及びp+ドープ領域の数及び/又は配置位置及び/又は大きさは、個々のセルの電流の電効率を改良するように選択することができる。個々のセル内のドープ電極領域の数及び/又は配置位置及び/又は大きさを選択する能力は、所望のドーパント位置の動的評価に基づいて実時間的にドーパントを選択的に積層する能力に基づく。実時間評価を用いて、個々のセルが静的ではなくむしろ動的に設計することができる(太陽電池セルの全体の大きさの動的選択に替わるもの又は付加的なものとして)。一般的に、加工方法は少なくとも利用可能な範囲内ではドープ領域の配置位置及び大きさに影響することもできる。
半導体シートは、カット処理の間、基板上で支持されることができる。特に、半導体が薄箔である実施形態において、その取扱いにおいてカット部分が損傷を受けずに済むように、半導体シートを支持することが望ましい。
一般的に、光起電モジュールは、透明な前面シートと、保護支持体層と、これらの透明な前面シートと保護支持体層との間の太陽電池セルと、を有する。一般的に、太陽電池モジュール内で複数の太陽電池セルが直列に連結されている。光起電力電池セルの半導体構造はシリコン箔であり得るが、本明細書に記載の加工方法は他の半導体材料及び他の形式にも適用可能である。各セルは、セルの二つの極性を有するコレクタのための電極を形成するための複数のドープ領域を一般的に有する。一般的に、太陽電池セルは裏面電極であってもよいが、他の電極構造も他の実施形態において採用可能である。本明細書に記載される構造体からは高いセル性能が期待される。
一般的に、ドープ領域と、保護層を貫通する孔もしくは開口部とは、当該セルの異なる極を分離する任意の適切な形状を有する。例えば、保護層を貫通する孔/開口部は、一般的に円筒状、溝形状又は他の所望の形状であってよい。略円筒状の孔は、本明細書記載の方法を使用して好都合に形成することができる。例えば、レーザー穿孔によって孔を形成することができる。同様に、溝状に成形される開口部は、パルスの間にレーザー光線を適切に移動することによって形成することができる。より大量の保護材料が除去される場合、対応するドープ領域の大きさは増加する。このように、より多くの保護材料が除去される場合、電極抵抗は減少するが、ホールと電子の表面再結合が増加するため、これらの効果間のバランスが電池設計に影響し得る。
光起電モジュールに組み込むための適切な材料の例を以下に記載する。透明な前面シートは、例えば、シリカガラス、他の無機ガラス物質、透明な高分子物質、又はこれらの複合物等であってもよい。透明な前面シートは、その一方又は両方の表面に反射防止コーティング又は別のオプティカルコーティングを有することができる。適切なポリマー支持体層には、例えば、デュポン社のTedlar(登録商標)「S」タイプのポリフッ化ビニル膜が含まれる。反射材料に関して、支持体層のためのポリマーシートは、薄い金属膜(例えば金属化されたマイラ(登録商標)ポリエステルフィルム)でコーティングすることができる。透明な前面シートと支持体層を接合する保護シールは、接着剤、天然ゴムもしくは合成ゴム又は他のポリマー等から形成することができる。
本明細書に記載された加工工程は、モジュール内に動的に設計された太陽電池セルを任意に備える、光起電モジュールの加工のために適切かつ効率的なものである。いくつかの実施形態において、太陽電池セルは、半導性シートとしてシリコン薄箔から作るために設計される。一般的に、加工工程のうちの少なくともいくつかは、任意の厚みのシリコンシートを備える光起電力電池セルに適用可能かつ有利であって、また、他の半導体材料から形成されるセルにも適用可能かつ有利である。いくつかの加工工程又は一連の加工工程は、セルから電流を集めるために裏面電極の効率的な形成に特に向けられている。ドーパントは保護層中の孔に配置され、従来よりも少ない工程数で裏面電極セルを形成するためにコレクタ材料の綿密な配置と組み合わされ、かつ、材料の量を減らすと共に性能の改善を約束する所望の構造体を成す。
いくつかの実施形態では、薄膜の前面保護層を結晶ケイ素層の上に積層することができる。裏面保護層を積層する場合、半導体の測定は剥離層からこの構造体を分離する前に行うことができる。前面保護層を積層する場合、半導体層の測定は、剥離層の分離及び剥離層の残余の除去(任意)の後に、半導体の露出した裏面上で行うことができる。
トルプケの記事に記載の方法は、半導体表面の空間分解能のために一般化することができる。
シリコン箔もしくは他の半導体材料の担体寿命マッピングならびにセルの製造工程及びセル特性の経験的知識によって、目標電流又は目標電圧が得られるように箔を複数のセルに分割することができる。目標電流を得るために、各セルが凡その目標値の電流を生成するように複数のセルに分割される。そして、モジュールの直列接続された複数のセルは、目標値にほぼ等しい全体の電流を生成する。目標電圧に到達するために、1個のセルの凡その電圧値を用いて、目標値に到達させるためのセルの合計数を選択する。そして、シートを複数のセルに適切に分割し、目標値になるように直列接続でセルを加えていく。電流目標と電圧目標を同時に設定することは、電力性能をいくらか犠牲にすることによって一般的には可能である。一般的に、動的な加工によって、一つのモジュール中のいずれか二つのセル間の電流変化は、これらのセルの平均電流に比して8パーセント以下に減少することができ、更なる実施形態では、等しい照光下において互いに連結されたセルの最大出力点の電流における変化は約5パーセント以下である。同様に、個々のセルがより均一な電流を生成するモジュールの出力は、このモジュールの電流が増加するにつれて高くなる。
当業者は、電流及び出力の改善に関して上記に明示された範囲内での追加的な範囲を予測し、本明細書中の開示の範囲内に含まれることを認識するであろう。
一体化されたインバータは、モジュール電力の出力を、電力線に直接供給することができる標準120V60Hzの電気出力に適合させることができ、もしくは、選択された他の標準電気出力に適合させることができる。
あるいは、ドープ領域間の間隔を固定した目標値に定めて、次に、このドープ領域は、ドープ領域の目標間隔及び大きさに基づいて、セル内の利用可能なスペースに従ってドープ領域を最も多くなるように配置される。
保護層は、通常、テクスチャを付けられてはいない。テクスチャリングはプラズマエッチング又は他の適切な方法によってなされ、及び/又は、テクスチャは、積層の間に層に組み込むことができる。付加的な層は、積層されたコレクタといった所望の構造体を形成するのに適切なように積層される。同様に、エッチング処理ならびにリソグラフィ法及びフォトリソグラフィ法をパターン層に使用することができる。
先に記載したように、適切なインクには、液体のドーパント組成物、液体に溶解するドーパント組成物、又はドーパント粒子(ドーパントシリカ粒子又はドーピングされたシリコン粒子)を含ドーパント組成物が含まれる。
Claims (14)
- シリコン、ゲルマニウム、それらの合金又はそれらの組合せを含む半導体層であって、前面及び裏面、前記前面の少なくとも一部に沿って前記半導体層に入る第1のドープ領域、前記裏面の少なくとも一部の上にある反射コーティング、前記裏面の少なくとも一部に沿う第2ドープ領域、第1の電気相互接続及び第2の電気相互接続を有する前記半導体層を含んで成る太陽電池セルであって、
前記第1のドープ領域、前記第2のドープ領域、又は前記半導体表面から延び及び前記半導体表面内に延びている前記第1ドープ領域及び第2ドープ領域の少なくとも一部、並びに前記半導体表面から延びている部分が、ドーピングされたシリコン、ドーピングされたゲルマニウム、又はそれらの合金もしくはそれらの組合せを含み、ドーピングされた元素シリコン/ゲルマニウム粒子積層物からのドーパントドライブインによって形成されている、
太陽電池セル。 - 前記第1ドープ領域の少なくとも1部が、前記半導体表面から延び、前記半導体表面内に延びている、請求項1に記載の太陽電池セル。
- 前記前面と接触する誘電体層をさらに含み、そして前記第1のドープ領域が前記誘電体層のウィンドウ内に延びている、請求項1に記載の太陽電池セル。
- 前記誘電体層の前記ウィンドウ内に延びている複数のドープ領域を含み、前記誘電体層を貫通する開口部が5ミクロン〜100ミクロンの平均直径を有し、前記誘電体層を貫通する開口部が50ミクロン〜500ミクロンの間隔を有している、請求項3に記載の太陽電池セル。
- 前記半導体層内に延びている前記第1のドープ領域の前記ドーパントの少なくとも95原子パーセントが、前記前面の100nm内に存在する、請求項1に記載の太陽電池セル。
- 前記半導体層が、5ミクロン〜100ミクロンの厚さを有する、請求項1に記載の太陽電池セル。
- シリコン、ゲルマニウム、それらの合金又はそれらの組合せを含む半導体層であって、前面及び裏面、前記前面の少なくとも一部に沿って前記半導体層に入る第1のドープ領域、前記裏面の少なくとも一部の上にある反射コーティング、前記裏面の少なくとも一部に沿う第2ドープ領域、第1の電気相互接続及び第2の電気相互接続を有する半導体層を含んで成る太陽電池セルであって、
前記第1のドープ領域、前記第2のドープ領域、又はそれらの両方の少なくとも一部が、レーザーを用いて、ドーピングされたナノ粒子積層物を照射することによって形成され、結果として生じるドープ領域が前記半導体表面内に延びている、
太陽電池セル。 - 前記レーザーがパターンの上をスキャンして前記ドープ領域を形成する、請求項7に記載の太陽電池セル。
- 前記ドーピングされたナノ粒子が、ドーピングされたシリコン/ゲルマニウムナノ粒子を含む、請求項7に記載の太陽電池セル。
- 前記ドーピングされたナノ粒子が、ドーピングされたシリカ/ゲルマニアナノ粒子を含む、請求項7に記載の太陽電池セル。
- ドーピングされた半導体構造体を形成するための方法であって、
シリコンを含む半導体シートの第1の表面上に、ドーパントインクをパターンに印刷すること、この際、前記ドーパントインクは、100ナノメートル以下の平均一次粒子径を有するドーピングされたシリコンナノ粒子含んでおり、そして
前記半導体表面上にパターン化されたドーピングされたシリコンナノ粒子を加熱することによって、前記半導体表面に沿う領域内に局在化した第1のドープ電極を形成すること、この際、前記半導体の前記第1の表面上にパターン化された前記印刷されたインクに由来するドーパントは、加熱時に前記半導体シート内にドライブインされ、そして前記ドーピングされたシリコンナノ粒子は、前記半導体シート内に延び、そして前記半導体シートの上の局所構造として突出しているドーピングされたシリコン構造を有する前記第1のドープ電極に組み込まれる、
ドーピングされた半導体構造体を形成するための方法。 - 前記加熱がオーブン内で加熱することを含む、請求項11に記載の方法。
- 前記加熱が前記印刷されたパターンの上でレーザーをスキャンすることを含む、請求項11に記載の方法。
- 前記第1のドープ電極の少なくとも一部と接触している第1の金属コレクタをパターン付けして、前記第1のドープ電極を通って前記半導体シートから前記コレクタへの導電路を形成することをさらに含む、請求項11に記載の方法。
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JP2009549629A Active JP5687837B2 (ja) | 2007-02-16 | 2008-02-15 | 太陽電池構造体、光起電モジュール及びこれらに対応する方法 |
JP2013061758A Pending JP2013168661A (ja) | 2007-02-16 | 2013-03-25 | 太陽電池構造体、光起電モジュール及びこれらに対応する方法 |
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JP (3) | JP5687837B2 (ja) |
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- 2008-02-15 CN CN201310013171.3A patent/CN103077978B/zh not_active Expired - Fee Related
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CN103077978B (zh) | 2016-12-28 |
WO2008103293A1 (en) | 2008-08-28 |
US8853527B2 (en) | 2014-10-07 |
US9343606B2 (en) | 2016-05-17 |
US20080202577A1 (en) | 2008-08-28 |
EP2654089A2 (en) | 2013-10-23 |
EP2122691A4 (en) | 2011-02-16 |
TWI499061B (zh) | 2015-09-01 |
US8409976B2 (en) | 2013-04-02 |
CN103077978A (zh) | 2013-05-01 |
US20080202576A1 (en) | 2008-08-28 |
JP5687837B2 (ja) | 2015-03-25 |
JP2010519731A (ja) | 2010-06-03 |
CN101675531B (zh) | 2013-03-06 |
CN101675531A (zh) | 2010-03-17 |
US20130056069A1 (en) | 2013-03-07 |
US20120227810A1 (en) | 2012-09-13 |
EP2654089A3 (en) | 2015-08-12 |
JP2013168661A (ja) | 2013-08-29 |
EP2122691A1 (en) | 2009-11-25 |
TW200935612A (en) | 2009-08-16 |
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