JP2015053372A - 炭化珪素半導体装置およびその製造方法 - Google Patents
炭化珪素半導体装置およびその製造方法 Download PDFInfo
- Publication number
- JP2015053372A JP2015053372A JP2013185032A JP2013185032A JP2015053372A JP 2015053372 A JP2015053372 A JP 2015053372A JP 2013185032 A JP2013185032 A JP 2013185032A JP 2013185032 A JP2013185032 A JP 2013185032A JP 2015053372 A JP2015053372 A JP 2015053372A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- semiconductor device
- insulating film
- gate insulating
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 214
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 209
- 239000004065 semiconductor Substances 0.000 title claims abstract description 111
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 46
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 184
- 239000000758 substrate Substances 0.000 claims abstract description 108
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 92
- 238000000034 method Methods 0.000 claims description 32
- 238000010438 heat treatment Methods 0.000 claims description 22
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 20
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 10
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
- 229920005591 polysilicon Polymers 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 8
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000001272 nitrous oxide Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 238000003763 carbonization Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 abstract 4
- 125000004433 nitrogen atom Chemical group N* 0.000 description 18
- 210000000746 body region Anatomy 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 10
- 238000009826 distribution Methods 0.000 description 9
- 239000012535 impurity Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000000137 annealing Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- LKTZODAHLMBGLG-UHFFFAOYSA-N alumanylidynesilicon;$l^{2}-alumanylidenesilylidenealuminum Chemical compound [Si]#[Al].[Si]#[Al].[Al]=[Si]=[Al] LKTZODAHLMBGLG-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0455—Making n or p doped regions or layers, e.g. using diffusion
- H01L21/046—Making n or p doped regions or layers, e.g. using diffusion using ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/0485—Ohmic electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/049—Conductor-insulator-semiconductor electrodes, e.g. MIS contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
まず、本発明の実施形態の内容を列記して説明する。
次に、本発明の実施形態の具体例を図面を参照しつつ説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付し、その説明は繰り返さない。また、本明細書中においては、個別方位を[]、集合方位を<>、個別面を()、集合面を{}でそれぞれ示す。また、負の指数については、結晶学上、”−”(バー)を数字の上に付けることになっているが、本明細書中では、数字の前に負の符号を付けている。
(SiC−MOSFETの作製)
まず、実施例として、上記本実施形態のSiC半導体装置の製造方法によりSiC−MOSFETを作製した(No.1)。また、比較例として、上記実施例と同様に工程(S10)〜(S50)までを実施し、当該工程(S50)の後にSiC基板を10%以上の窒素を含む雰囲気中において900℃以上の温度で加熱してSiC−MOSFETを作製した(No.2)。また、他の比較例として、上記実施例において窒素アニール工程(S30)を行わずにSiC−MOSFETを作製した(No.3)。また、さらに他の比較例として、上記実施例において窒素アニール工程(S30)を行わず、かつ工程(S50)の後にSiC基板を10%以上の窒素を含む雰囲気中において900℃以上の温度で加熱してSiC−MOSFETを作製した(No.4)。
上記実施例および比較例のSiC−MOSFETについてSIMS測定を行い、図9に示す窒素濃度分布を得た。図9中において、横軸はSiC−MOSFETの厚み方向における距離(nm)を示し、縦軸は窒素濃度(cm−3)を示している。また、図9中の「p−Si」に示す領域がゲート電極、「SiO2」に示す領域がゲート絶縁膜、「SiC」に示す領域がSiC基板にそれぞれ相当する。また、図9中の(A)が実施例であるNo.1の場合の窒素濃度分布であり、(B)が比較例であるNo.2の場合の窒素濃度分布である。そして、当該窒素濃度分布よりSiC基板とゲート絶縁膜との界面、およびゲート絶縁膜とゲート電極との界面から10nm以内の領域における窒素濃度の最大値をそれぞれ確認した。
上記実施例および比較例のSiC−MOSFETについてチャネル移動度および閾値電圧をそれぞれ測定した。上記実験結果を表1に示す。
図9を参照して、実施例であるNo.1(図9中(A))では、SiC基板とゲート絶縁膜との界面から10nm以内の領域における窒素濃度の最大値が3×1019cm−3以上(1×1020cm−3以上)であり、かつゲート絶縁膜とゲート電極との界面から10nm以内の領域における窒素濃度の最大値が1×1020cm−3以下であった。一方で、比較例であるNo.2(図9中(B))では、ゲート絶縁膜とゲート電極との界面から10nm以内の領域における窒素濃度の最大値が1×1020cm−3を超えていた。
10 炭化珪素(SiC)基板
10A,10B,11A 表面
11 ベース基板
12 炭化珪素(SiC)層
13 ドリフト領域
14 ボディ領域
15 ソース領域
16 コンタクト領域
20 ゲート絶縁膜
21,22 界面
30 ゲート電極
40 ソース電極
41 上部ソース電極
50 ドレイン電極
Claims (11)
- 炭化珪素基板と、
前記炭化珪素基板の表面上に形成され、珪素酸化物からなるゲート絶縁膜と、
前記ゲート絶縁膜上に形成されたゲート電極とを備え、
前記炭化珪素基板と前記ゲート絶縁膜との界面から10nm以内の領域における窒素濃度の最大値が3×1019cm−3以上であり、
前記ゲート絶縁膜と前記ゲート電極との界面から10nm以内の領域における窒素濃度の最大値が1×1020cm−3以下である、炭化珪素半導体装置。 - 前記ゲート絶縁膜において窒素濃度が1×1019cm−3以上である領域は、厚み方向において80%以上の領域を占めている、請求項1に記載の炭化珪素半導体装置。
- 前記ゲート電極は、ポリシリコンを含む、請求項1または請求項2に記載の炭化珪素半導体装置。
- 前記炭化珪素基板と前記ゲート絶縁膜との前記界面から10nm以内の領域における窒素濃度の最大値が1×1021cm−3以下である、請求項1〜請求項3のいずれか1項に記載の炭化珪素半導体装置。
- 前記ゲート絶縁膜と前記ゲート電極との界面から10nm以内の領域における窒素濃度の最大値が3×1019cm−3以下である、請求項1〜請求項4のいずれか1項に記載の炭化珪素半導体装置。
- 前記炭化珪素基板の前記表面は、(0001)面に対して8°以下のオフ角を有する、請求項1〜請求項5のいずれか1項に記載の炭化珪素半導体装置。
- 炭化珪素基板を準備する工程と、
前記炭化珪素基板の表面上に珪素酸化物からなるゲート絶縁膜を形成する工程と、
窒素を含む雰囲気中において1100℃以上の温度で前記ゲート絶縁膜が形成された前記炭化珪素基板を加熱する工程と、
前記炭化珪素基板を加熱する工程の後、前記ゲート絶縁膜上にゲート電極を形成する工程とを備え、
前記ゲート電極を形成する工程の後、10%以上の窒素を含む雰囲気中において900℃以上の温度で前記炭化珪素基板が加熱されない、炭化珪素半導体装置の製造方法。 - 前記炭化珪素基板を加熱する工程の後、前記ゲート電極を形成する工程の前に、不活性ガスを含む雰囲気中において1100℃以上の温度で前記炭化珪素基板を加熱する工程をさらに備える、請求項7に記載の炭化珪素半導体装置の製造方法。
- 前記ゲート電極を形成する工程の後、前記炭化珪素基板上にソース電極を形成する工程をさらに備え、
前記ソース電極を形成する工程では、10%未満の窒素を含む雰囲気中において900℃以上の温度で前記炭化珪素基板が加熱される、請求項7または請求項8に記載の炭化珪素半導体装置の製造方法。 - 前記ゲート電極を形成する工程の後、10%以上の窒素を含む雰囲気中において1100℃以上の温度で前記炭化珪素基板が加熱されない、請求項7〜請求項9のいずれか1項に炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板を加熱する工程では、一酸化窒素、亜酸化窒素、窒素およびアンモニアからなる群より選択される少なくとも一のガスを含む雰囲気中において前記炭化珪素基板が加熱される、請求項7〜請求項10のいずれか1項に記載の炭化珪素半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013185032A JP6206012B2 (ja) | 2013-09-06 | 2013-09-06 | 炭化珪素半導体装置 |
US14/916,847 US20160211333A1 (en) | 2013-09-06 | 2014-07-23 | Silicon carbide semiconductor device and method of manufacturing the same |
PCT/JP2014/069405 WO2015033686A1 (ja) | 2013-09-06 | 2014-07-23 | 炭化珪素半導体装置およびその製造方法 |
DE112014004061.4T DE112014004061T5 (de) | 2013-09-06 | 2014-07-23 | Siliziumkarbid-Halbleitervorrichtung und Verfahren zur Herstellung derselben |
CN201480048603.7A CN105556675A (zh) | 2013-09-06 | 2014-07-23 | 碳化硅半导体器件及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013185032A JP6206012B2 (ja) | 2013-09-06 | 2013-09-06 | 炭化珪素半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015053372A true JP2015053372A (ja) | 2015-03-19 |
JP6206012B2 JP6206012B2 (ja) | 2017-10-04 |
Family
ID=52628172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013185032A Active JP6206012B2 (ja) | 2013-09-06 | 2013-09-06 | 炭化珪素半導体装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20160211333A1 (ja) |
JP (1) | JP6206012B2 (ja) |
CN (1) | CN105556675A (ja) |
DE (1) | DE112014004061T5 (ja) |
WO (1) | WO2015033686A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019050294A (ja) * | 2017-09-11 | 2019-03-28 | 株式会社豊田中央研究所 | 炭化珪素半導体装置 |
JP2019169486A (ja) * | 2018-03-21 | 2019-10-03 | 株式会社東芝 | 半導体装置及びその製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004519842A (ja) * | 2000-10-03 | 2004-07-02 | クリー インコーポレイテッド | 短絡チャネルを有する炭化ケイ素パワー金属酸化物半導体電界効果トランジスタおよび短絡チャネルを有する炭化ケイ素金属酸化物半導体電界効果トランジスタの製造方法 |
JP2005166930A (ja) * | 2003-12-02 | 2005-06-23 | Matsushita Electric Ind Co Ltd | SiC−MISFET及びその製造方法 |
JP2006210818A (ja) * | 2005-01-31 | 2006-08-10 | Matsushita Electric Ind Co Ltd | 半導体素子およびその製造方法 |
JP2007180118A (ja) * | 2005-12-27 | 2007-07-12 | Mitsubishi Electric Corp | 炭化珪素半導体装置、及び炭化珪素半導体装置の製造方法 |
JP2011199132A (ja) * | 2010-03-23 | 2011-10-06 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6344663B1 (en) * | 1992-06-05 | 2002-02-05 | Cree, Inc. | Silicon carbide CMOS devices |
KR0153878B1 (ko) * | 1994-06-07 | 1998-10-15 | 쿠미하시 요시유키 | 탄화규소반도체장치와 그 제조방법 |
US6100169A (en) * | 1998-06-08 | 2000-08-08 | Cree, Inc. | Methods of fabricating silicon carbide power devices by controlled annealing |
US6107142A (en) * | 1998-06-08 | 2000-08-22 | Cree Research, Inc. | Self-aligned methods of fabricating silicon carbide power devices by implantation and lateral diffusion |
US6939756B1 (en) * | 2000-03-24 | 2005-09-06 | Vanderbilt University | Inclusion of nitrogen at the silicon dioxide-silicon carbide interace for passivation of interface defects |
JP3940560B2 (ja) * | 2001-01-25 | 2007-07-04 | 独立行政法人産業技術総合研究所 | 半導体装置の製造方法 |
US6773999B2 (en) * | 2001-07-18 | 2004-08-10 | Matsushita Electric Industrial Co., Ltd. | Method for treating thick and thin gate insulating film with nitrogen plasma |
JP2004253777A (ja) * | 2003-01-31 | 2004-09-09 | Nec Electronics Corp | 半導体装置及び半導体装置の製造方法 |
JP4135541B2 (ja) * | 2003-03-26 | 2008-08-20 | ソニー株式会社 | プラズマ表面処理方法 |
JP4485754B2 (ja) * | 2003-04-08 | 2010-06-23 | パナソニック株式会社 | 半導体装置の製造方法 |
US7709403B2 (en) * | 2003-10-09 | 2010-05-04 | Panasonic Corporation | Silicon carbide-oxide layered structure, production method thereof, and semiconductor device |
EP1689000A4 (en) * | 2003-11-25 | 2008-06-11 | Matsushita Electric Ind Co Ltd | SEMICONDUCTOR ELEMENT |
US7242055B2 (en) * | 2004-11-15 | 2007-07-10 | International Business Machines Corporation | Nitrogen-containing field effect transistor gate stack containing a threshold voltage control layer formed via deposition of a metal oxide |
US7214631B2 (en) * | 2005-01-31 | 2007-05-08 | United Microelectronics Corp. | Method of forming gate dielectric layer |
US7476594B2 (en) * | 2005-03-30 | 2009-01-13 | Cree, Inc. | Methods of fabricating silicon nitride regions in silicon carbide and resulting structures |
JP2007220755A (ja) * | 2006-02-14 | 2007-08-30 | Toshiba Corp | 半導体装置及びその製造方法 |
JP5283147B2 (ja) * | 2006-12-08 | 2013-09-04 | 国立大学法人東北大学 | 半導体装置および半導体装置の製造方法 |
ITTO20070099A1 (it) * | 2007-02-09 | 2008-08-10 | St Microelectronics Srl | Procedimento per la realizzazione di un'interfaccia tra carburo di silicio e ossido di silicio con bassa densita' di stati |
US7982224B2 (en) * | 2007-10-15 | 2011-07-19 | Panasonic Corporation | Semiconductor device with silicon carbide epitaxial layer including dopant profiles for reducing current overconcentration |
JPWO2010110253A1 (ja) * | 2009-03-27 | 2012-09-27 | 住友電気工業株式会社 | Mosfetおよびmosfetの製造方法 |
US8536583B2 (en) * | 2009-03-27 | 2013-09-17 | Sumitomo Electric Industries, Ltd. | MOSFET and method for manufacturing MOSFET |
KR20110137279A (ko) * | 2009-04-10 | 2011-12-22 | 스미토모덴키고교가부시키가이샤 | 절연 게이트형 바이폴러 트랜지스터 |
KR20110137280A (ko) * | 2009-04-10 | 2011-12-22 | 스미토모덴키고교가부시키가이샤 | 절연 게이트형 전계 효과 트랜지스터 |
CN102388433A (zh) * | 2009-11-13 | 2012-03-21 | 住友电气工业株式会社 | 制造半导体衬底的方法 |
JPWO2011058830A1 (ja) * | 2009-11-13 | 2013-03-28 | 住友電気工業株式会社 | 半導体基板の製造方法 |
JPWO2011074308A1 (ja) * | 2009-12-16 | 2013-04-25 | 住友電気工業株式会社 | 炭化珪素基板 |
CA2777675A1 (en) * | 2010-01-19 | 2011-07-28 | Sumitomo Electric Industries, Ltd. | Silicon carbide semiconductor device and method of manufacturing thereof |
WO2011089647A1 (ja) * | 2010-01-22 | 2011-07-28 | 株式会社 東芝 | 半導体装置及びその製造方法 |
JPWO2011092808A1 (ja) * | 2010-01-27 | 2013-05-30 | 住友電気工業株式会社 | 炭化ケイ素半導体装置およびその製造方法 |
JP2012004269A (ja) * | 2010-06-16 | 2012-01-05 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置の製造方法および炭化珪素半導体装置の製造装置 |
US8450221B2 (en) * | 2010-08-04 | 2013-05-28 | Texas Instruments Incorporated | Method of forming MOS transistors including SiON gate dielectric with enhanced nitrogen concentration at its sidewalls |
JP5961865B2 (ja) * | 2010-09-15 | 2016-08-02 | ローム株式会社 | 半導体素子 |
JP6083930B2 (ja) * | 2012-01-18 | 2017-02-22 | キヤノン株式会社 | 光電変換装置および撮像システム、光電変換装置の製造方法 |
-
2013
- 2013-09-06 JP JP2013185032A patent/JP6206012B2/ja active Active
-
2014
- 2014-07-23 CN CN201480048603.7A patent/CN105556675A/zh active Pending
- 2014-07-23 WO PCT/JP2014/069405 patent/WO2015033686A1/ja active Application Filing
- 2014-07-23 US US14/916,847 patent/US20160211333A1/en not_active Abandoned
- 2014-07-23 DE DE112014004061.4T patent/DE112014004061T5/de active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004519842A (ja) * | 2000-10-03 | 2004-07-02 | クリー インコーポレイテッド | 短絡チャネルを有する炭化ケイ素パワー金属酸化物半導体電界効果トランジスタおよび短絡チャネルを有する炭化ケイ素金属酸化物半導体電界効果トランジスタの製造方法 |
JP2005166930A (ja) * | 2003-12-02 | 2005-06-23 | Matsushita Electric Ind Co Ltd | SiC−MISFET及びその製造方法 |
JP2006210818A (ja) * | 2005-01-31 | 2006-08-10 | Matsushita Electric Ind Co Ltd | 半導体素子およびその製造方法 |
JP2007180118A (ja) * | 2005-12-27 | 2007-07-12 | Mitsubishi Electric Corp | 炭化珪素半導体装置、及び炭化珪素半導体装置の製造方法 |
JP2011199132A (ja) * | 2010-03-23 | 2011-10-06 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019050294A (ja) * | 2017-09-11 | 2019-03-28 | 株式会社豊田中央研究所 | 炭化珪素半導体装置 |
JP2019169486A (ja) * | 2018-03-21 | 2019-10-03 | 株式会社東芝 | 半導体装置及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
DE112014004061T5 (de) | 2016-06-02 |
JP6206012B2 (ja) | 2017-10-04 |
CN105556675A (zh) | 2016-05-04 |
US20160211333A1 (en) | 2016-07-21 |
WO2015033686A1 (ja) | 2015-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8564017B2 (en) | Silicon carbide semiconductor device and method for manufacturing same | |
US8941120B2 (en) | Semiconductor device and method for manufacturing the same | |
TW201251023A (en) | Semiconductor device | |
JP2012209422A (ja) | Igbt | |
WO2014046073A1 (ja) | 炭化珪素半導体装置およびその製造方法 | |
US9786741B2 (en) | Silicon carbide semiconductor device and method for manufacturing the same | |
JP5834801B2 (ja) | 半導体装置の製造方法および半導体装置 | |
EP3125297A1 (en) | Silicon carbide semiconductor device, and method for manufacturing same | |
US9147731B2 (en) | Silicon carbide semiconductor device and method for manufacturing same | |
US8809945B2 (en) | Semiconductor device having angled trench walls | |
JP5870672B2 (ja) | 半導体装置 | |
US9806167B2 (en) | Method for manufacturing silicon carbide semiconductor device | |
JPWO2009104299A1 (ja) | 半導体装置および半導体装置の製造方法 | |
JP6206012B2 (ja) | 炭化珪素半導体装置 | |
US8829605B2 (en) | Semiconductor device having deep and shallow trenches | |
JP2015119083A (ja) | 炭化珪素半導体基板および炭化珪素半導体装置ならびにそれらの製造方法 | |
JP5673113B2 (ja) | 半導体装置 | |
JP6070790B2 (ja) | 半導体装置の製造方法および半導体装置 | |
US20130102141A1 (en) | Method for manufacturing semiconductor device | |
JP2015115570A (ja) | 炭化珪素半導体装置およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160422 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170411 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170530 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170808 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170821 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6206012 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |