JP5870672B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5870672B2 JP5870672B2 JP2011277046A JP2011277046A JP5870672B2 JP 5870672 B2 JP5870672 B2 JP 5870672B2 JP 2011277046 A JP2011277046 A JP 2011277046A JP 2011277046 A JP2011277046 A JP 2011277046A JP 5870672 B2 JP5870672 B2 JP 5870672B2
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- side wall
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- silicon carbide
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- 239000004065 semiconductor Substances 0.000 title claims description 45
- 239000000758 substrate Substances 0.000 claims description 55
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 51
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 49
- 230000003746 surface roughness Effects 0.000 claims description 32
- 210000000746 body region Anatomy 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 10
- 239000010410 layer Substances 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 16
- 239000012535 impurity Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- LKTZODAHLMBGLG-UHFFFAOYSA-N alumanylidynesilicon;$l^{2}-alumanylidenesilylidenealuminum Chemical compound [Si]#[Al].[Si]#[Al].[Al]=[Si]=[Al] LKTZODAHLMBGLG-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0475—Changing the shape of the semiconductor body, e.g. forming recesses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/049—Conductor-insulator-semiconductor electrodes, e.g. MIS contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/34—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being on the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
Description
Claims (6)
- 一方の主表面側に開口し、側壁面を有するトレンチが形成され、炭化珪素からなる基板と、
前記側壁面上に接触して形成されたゲート絶縁膜と、
前記ゲート絶縁膜上に接触して形成されたゲート電極とを備え、
前記基板は、
前記側壁面において露出するように配置された第1導電型のソース領域と、
前記ソース領域から見て前記一方の主表面とは反対側に配置され、前記ソース領域に接触し、前記側壁面において露出する第2導電型のボディ領域とを含み、
前記側壁面の一辺100nmの正方形領域内における表面粗さはRMSで1.0nm以下であり、
前記側壁面が前記基板を構成する炭化珪素の{01−12}面に対してなす角は、前記主表面が前記基板を構成する炭化珪素の{0001}面に対してなす角よりも小さい、半導体装置。 - 前記側壁面の表面粗さは、前記主表面の表面粗さよりも小さい、請求項1に記載の半導体装置。
- 前記トレンチは、前記側壁面に交差するように形成された底壁面をさらに有し、
前記側壁面の表面粗さは、前記底壁面の表面粗さよりも小さい、請求項1または請求項2に記載の半導体装置。 - 前記主表面が前記基板を構成する炭化珪素の{0001}面に対してなす角は8°以下である、請求項1〜請求項3のいずれか1項に記載の半導体装置。
- 前記側壁面は、前記基板を構成する炭化珪素の特定の結晶面である、請求項1〜請求項4のいずれか1項に記載の半導体装置。
- 前記側壁面は、面方位(0−33−8)を有する第1の面と、前記第1の面とつながりかつ前記第1の面と異なる面方位を有する第2の面とが交互に設けられることにより構成される、請求項5に記載の半導体装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011277046A JP5870672B2 (ja) | 2011-12-19 | 2011-12-19 | 半導体装置 |
EP12859841.4A EP2797118B1 (en) | 2011-12-19 | 2012-10-12 | Semiconductor device |
CN201280054320.4A CN103930996B (zh) | 2011-12-19 | 2012-10-12 | 半导体器件 |
PCT/JP2012/076488 WO2013094287A1 (ja) | 2011-12-19 | 2012-10-12 | 半導体装置 |
US13/679,511 US20130153925A1 (en) | 2011-12-19 | 2012-11-16 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011277046A JP5870672B2 (ja) | 2011-12-19 | 2011-12-19 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013128050A JP2013128050A (ja) | 2013-06-27 |
JP5870672B2 true JP5870672B2 (ja) | 2016-03-01 |
Family
ID=48609222
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011277046A Active JP5870672B2 (ja) | 2011-12-19 | 2011-12-19 | 半導体装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20130153925A1 (ja) |
EP (1) | EP2797118B1 (ja) |
JP (1) | JP5870672B2 (ja) |
CN (1) | CN103930996B (ja) |
WO (1) | WO2013094287A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10749001B2 (en) | 2017-12-06 | 2020-08-18 | Fuji Electric Co., Ltd. | Method of evaluating insulated-gate semiconductor device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6136731B2 (ja) * | 2013-08-06 | 2017-05-31 | 住友電気工業株式会社 | 炭化珪素半導体基板およびその製造方法、ならびに炭化珪素半導体装置の製造方法 |
CN106952876A (zh) * | 2017-03-16 | 2017-07-14 | 浙江大学 | 一种金属叠层填沟槽阵列的碳化硅衬底结构 |
CN106960871A (zh) * | 2017-03-16 | 2017-07-18 | 浙江大学 | 一种带沟槽阵列和空腔的碳化硅衬底结构 |
CN108735795B (zh) * | 2017-04-21 | 2021-09-03 | 苏州能屋电子科技有限公司 | (0001)面外延的六方相SiC晶圆、UMOSFET器件及其制作方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3419163B2 (ja) | 1995-09-06 | 2003-06-23 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
JP2005012051A (ja) * | 2003-06-20 | 2005-01-13 | Toshiba Corp | 高耐圧半導体装置及びその製造方法 |
JP2005150398A (ja) * | 2003-11-14 | 2005-06-09 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法および半導体の表面処理方法 |
JPWO2005116307A1 (ja) * | 2004-05-27 | 2008-04-03 | 株式会社ブリヂストン | 炭化ケイ素単結晶ウェハの製造方法 |
JP5017768B2 (ja) * | 2004-05-31 | 2012-09-05 | 富士電機株式会社 | 炭化珪素半導体素子 |
JP2006351744A (ja) * | 2005-06-15 | 2006-12-28 | Fuji Electric Holdings Co Ltd | 炭化珪素半導体装置の製造方法 |
JP5017823B2 (ja) * | 2005-09-12 | 2012-09-05 | 富士電機株式会社 | 半導体素子の製造方法 |
JP5017855B2 (ja) * | 2005-12-14 | 2012-09-05 | 富士電機株式会社 | 半導体装置の製造方法 |
JP5167593B2 (ja) * | 2006-03-23 | 2013-03-21 | 富士電機株式会社 | 半導体装置 |
JP4087416B2 (ja) * | 2006-04-06 | 2008-05-21 | シャープ株式会社 | パワーicデバイス及びその製造方法 |
JP4046140B1 (ja) * | 2006-11-29 | 2008-02-13 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
JP5509520B2 (ja) * | 2006-12-21 | 2014-06-04 | 富士電機株式会社 | 炭化珪素半導体装置の製造方法 |
US20090272982A1 (en) * | 2008-03-03 | 2009-11-05 | Fuji Electric Device Technology Co., Ltd. | Trench gate type semiconductor device and method of producing the same |
-
2011
- 2011-12-19 JP JP2011277046A patent/JP5870672B2/ja active Active
-
2012
- 2012-10-12 CN CN201280054320.4A patent/CN103930996B/zh active Active
- 2012-10-12 WO PCT/JP2012/076488 patent/WO2013094287A1/ja unknown
- 2012-10-12 EP EP12859841.4A patent/EP2797118B1/en active Active
- 2012-11-16 US US13/679,511 patent/US20130153925A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10749001B2 (en) | 2017-12-06 | 2020-08-18 | Fuji Electric Co., Ltd. | Method of evaluating insulated-gate semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
EP2797118B1 (en) | 2022-03-30 |
US20130153925A1 (en) | 2013-06-20 |
CN103930996A (zh) | 2014-07-16 |
EP2797118A4 (en) | 2015-08-12 |
CN103930996B (zh) | 2017-02-15 |
EP2797118A1 (en) | 2014-10-29 |
WO2013094287A1 (ja) | 2013-06-27 |
JP2013128050A (ja) | 2013-06-27 |
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