JP2004253777A - 半導体装置及び半導体装置の製造方法 - Google Patents
半導体装置及び半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 79
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 330
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 168
- 238000010438 heat treatment Methods 0.000 claims abstract description 108
- 238000000034 method Methods 0.000 claims abstract description 83
- 239000000758 substrate Substances 0.000 claims abstract description 82
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 50
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 46
- 239000001301 oxygen Substances 0.000 claims abstract description 46
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 43
- 230000003647 oxidation Effects 0.000 claims abstract description 42
- 230000001590 oxidative effect Effects 0.000 claims abstract description 27
- 239000007789 gas Substances 0.000 claims abstract description 25
- -1 oxygen ions Chemical class 0.000 claims description 5
- 150000002829 nitrogen Chemical class 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 37
- 229910052710 silicon Inorganic materials 0.000 abstract description 37
- 239000010703 silicon Substances 0.000 abstract description 37
- 230000008569 process Effects 0.000 abstract description 36
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 26
- 229920005591 polysilicon Polymers 0.000 abstract description 26
- 238000005121 nitriding Methods 0.000 abstract description 25
- 238000009792 diffusion process Methods 0.000 abstract description 10
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- 230000008022 sublimation Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 20
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- 238000011282 treatment Methods 0.000 description 13
- 125000004429 atom Chemical group 0.000 description 11
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- 150000004767 nitrides Chemical class 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 238000000137 annealing Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
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- 229910001882 dioxygen Inorganic materials 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
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Abstract
【解決手段】半導体基板1上に酸化膜2を形成し、その後この酸化膜に窒素を導入し、さらに酸素を含むガス雰囲気中で酸化膜を熱処理する酸化熱処理工程dとを含む半導体装置の製造方法において、酸化熱処理工程dの熱処理温度が、その熱処理工程d以降の全ての工程での温度より高いことを特徴とする。酸化膜2に導入する窒化処理cの後に、その後に行なわれる全熱処理fよりも高温の条件で、しかも膜厚や昇華を抑制する雰囲気を選択した酸化性の雰囲気で熱処理することによって、事前に格子間や過剰な窒素を再分布・脱離させる。
【効果】シリコン基板の窒化やポリシリコン電極の窒化を抑制することができる。
【選択図】図1
Description
2…シリコン酸化膜
3…シリコン窒化膜層
4…ゲート電極
11…シリコン基板
12…シリコン酸化膜
13…シリコン窒化膜層
14…窒化されたポリシリコン層
15…ゲート電極
21…ロードロック室
22…酸化室
23…プラズマ窒化室
24…酸化熱処理室
25…搬送室
Claims (17)
- 半導体基板上に酸化膜を形成する工程と、
前記酸化膜に窒素を導入する工程と、
酸素を含むガス雰囲気中で前記酸化膜を熱処理する酸化熱処理工程とを含む半導体装置の製造方法において、
前記酸化熱処理工程の熱処理温度が、その熱処理工程以降の全ての工程での温度より高いことを特徴とする半導体装置の製造方法。 - 前記酸化熱処理工程の後にゲート電極を形成する工程と、
前記半導体基板にソース・ドレイン領域を形成する工程とを有することを特徴とする請求項1記載の半導体装置の製造方法。 - 前記酸化膜に窒素を導入する工程は、活性化された窒素を用いることを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記酸化熱処理工程の雰囲気には、O2、O3、活性酸素、ラジカル酸素、酸素イオンのうち、少なくとも1つが含まれることを特徴とする請求項1乃至3に記載の半導体装置の製造方法。
- 前記酸化熱処理工程において、酸素分圧が0.075〜250[Torr]であることを特徴とする請求項1乃至4に記載の半導体装置の製造方法。
- 前記酸化熱処理工程の後に、更に酸窒化雰囲気で熱処理する酸窒化処理工程を備えることを特徴とする請求項1乃至5に記載の半導体装置の製造方法。
- 前記酸化熱処理工程及び前記酸窒化処理工程の少なくともいずれか一方の工程における雰囲気が、酸素と窒素を含んだ少なくとも1種類のガスで作られることを特徴とする請求項6に記載の半導体装置の製造方法。
- 前記酸素と窒素を含むガスとして、NO、N2O、NO2のうち少なくともいずれか1種類のガスを用いることを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記半導体基板と前記酸化膜との界面に存在する前記半導体基板表面の未結合手の少なくとも一部を窒素によって終端することを特徴とする請求項1乃至8に記載の半導体装置の製造方法。
- 前記酸化膜と前記半導体基板との界面に1E11〜7E14 [atoms/cm2]の窒素を導入することを特徴とする請求項1乃至9に記載の半導体装置の製造方法。
- 前記酸化膜と前記半導体基板との界面に7E12 [atoms/cm2]の窒素を導入することを特徴とする請求項1乃至9に記載の半導体装置の製造方法。
- 前記窒素を導入する工程と、
前記酸化熱処理工程の間は前記半導体基板を大気に晒すことなく、各工程を行うことを特徴とする請求項1乃至11に記載の半導体装置の製造方法。 - 前記窒素を導入する工程と、
前記酸化熱処理工程と、
前記酸窒化処理工程の間は前記半導体基板を大気に晒すことなく、各工程を行うことを特徴とする請求項6乃至11に記載の半導体装置の製造方法。 - 半導体基板と、
前記半導体基板上に形成された酸化膜とを有する半導体装置において、
前記半導体基板と前記酸化膜との界面に存在する前記半導体基板表面の未結合手の少なくとも一部が窒素によって終端されていることを特徴とする半導体装置。 - 前記酸化膜上にさらにゲート電極を有し、
前記ゲート電極と前記酸化膜との界面の窒素濃度が、前記酸化膜中の窒素濃度より高いことを特徴とする請求項14に記載の半導体装置。 - 前記半導体基板表面の未結合手に終端した前記窒素の密度が1E11〜7E14 [atoms/cm2] であることを特徴とする請求項14または15に記載の半導体装置。
- 前記半導体基板表面の未結合手に終端した前記窒素の密度が7E12 [atoms/cm2] であることを特徴とする請求項14または15に記載の半導体装置。
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