JP2015045094A5 - - Google Patents
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- Publication number
- JP2015045094A5 JP2015045094A5 JP2014243538A JP2014243538A JP2015045094A5 JP 2015045094 A5 JP2015045094 A5 JP 2015045094A5 JP 2014243538 A JP2014243538 A JP 2014243538A JP 2014243538 A JP2014243538 A JP 2014243538A JP 2015045094 A5 JP2015045094 A5 JP 2015045094A5
- Authority
- JP
- Japan
- Prior art keywords
- tin alloy
- free
- alloy composition
- interconnect bumps
- tin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20404408P | 2008-12-31 | 2008-12-31 | |
| US61/204,044 | 2008-12-31 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010000141A Division JP2010174373A (ja) | 2008-12-31 | 2010-01-04 | 鉛を含まないスズ合金電気めっき組成物および方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016052176A Division JP6169211B2 (ja) | 2008-12-31 | 2016-03-16 | 鉛を含まないスズ合金電気めっき組成物および方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015045094A JP2015045094A (ja) | 2015-03-12 |
| JP2015045094A5 true JP2015045094A5 (enExample) | 2017-01-12 |
| JP6140132B2 JP6140132B2 (ja) | 2017-05-31 |
Family
ID=42199934
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010000141A Pending JP2010174373A (ja) | 2008-12-31 | 2010-01-04 | 鉛を含まないスズ合金電気めっき組成物および方法 |
| JP2014243538A Active JP6140132B2 (ja) | 2008-12-31 | 2014-12-01 | 鉛を含まないスズ合金電気めっき組成物および方法 |
| JP2016052176A Active JP6169211B2 (ja) | 2008-12-31 | 2016-03-16 | 鉛を含まないスズ合金電気めっき組成物および方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010000141A Pending JP2010174373A (ja) | 2008-12-31 | 2010-01-04 | 鉛を含まないスズ合金電気めっき組成物および方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016052176A Active JP6169211B2 (ja) | 2008-12-31 | 2016-03-16 | 鉛を含まないスズ合金電気めっき組成物および方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7968444B2 (enExample) |
| EP (1) | EP2221396A1 (enExample) |
| JP (3) | JP2010174373A (enExample) |
| KR (1) | KR101651920B1 (enExample) |
| CN (1) | CN102051645B (enExample) |
| TW (2) | TWI402380B (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9221081B1 (en) | 2011-08-01 | 2015-12-29 | Novellus Systems, Inc. | Automated cleaning of wafer plating assembly |
| US9228270B2 (en) | 2011-08-15 | 2016-01-05 | Novellus Systems, Inc. | Lipseals and contact elements for semiconductor electroplating apparatuses |
| US9988734B2 (en) | 2011-08-15 | 2018-06-05 | Lam Research Corporation | Lipseals and contact elements for semiconductor electroplating apparatuses |
| US10066311B2 (en) | 2011-08-15 | 2018-09-04 | Lam Research Corporation | Multi-contact lipseals and associated electroplating methods |
| US9390984B2 (en) * | 2011-10-11 | 2016-07-12 | Bruker Jv Israel Ltd. | X-ray inspection of bumps on a semiconductor substrate |
| CN102517615A (zh) * | 2011-12-19 | 2012-06-27 | 张家港舒马克电梯安装维修服务有限公司镀锌分公司 | 一种Sn-Ag合金电镀液 |
| US8888984B2 (en) | 2012-02-09 | 2014-11-18 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
| CN102605394B (zh) * | 2012-03-07 | 2015-02-18 | 深圳市华傲创表面技术有限公司 | 一种无氰酸性白铜锡电镀液 |
| WO2013148890A1 (en) * | 2012-03-28 | 2013-10-03 | Novellus Systems, Inc. | Methods and apparatuses for cleaning electroplating substrate holders |
| KR102092416B1 (ko) | 2012-03-30 | 2020-03-24 | 노벨러스 시스템즈, 인코포레이티드 | 역전류 디플레이팅을 이용한 전기도금 기판 홀더의 클리닝 |
| US8980077B2 (en) * | 2012-03-30 | 2015-03-17 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
| EP2722419B1 (en) | 2012-10-19 | 2018-08-15 | Rohm and Haas Electronic Materials LLC | Thin-tin tinplate |
| JP6133056B2 (ja) * | 2012-12-27 | 2017-05-24 | ローム・アンド・ハース電子材料株式会社 | スズまたはスズ合金めっき液 |
| US10416092B2 (en) | 2013-02-15 | 2019-09-17 | Lam Research Corporation | Remote detection of plating on wafer holding apparatus |
| US9389192B2 (en) | 2013-03-24 | 2016-07-12 | Bruker Jv Israel Ltd. | Estimation of XRF intensity from an array of micro-bumps |
| US9512529B2 (en) * | 2013-06-04 | 2016-12-06 | Rohm And Haas Electronic Materials Llc | Electroplating baths of silver and tin alloys |
| JP2015036449A (ja) * | 2013-08-14 | 2015-02-23 | 石原ケミカル株式会社 | 電気高純度スズ又はスズ合金メッキ浴及び当該メッキ浴で形成した突起電極 |
| US8877630B1 (en) * | 2013-11-12 | 2014-11-04 | Chipmos Technologies Inc. | Semiconductor structure having a silver alloy bump body and manufacturing method thereof |
| US10889907B2 (en) * | 2014-02-21 | 2021-01-12 | Rohm And Haas Electronic Materials Llc | Cyanide-free acidic matte silver electroplating compositions and methods |
| US9632043B2 (en) | 2014-05-13 | 2017-04-25 | Bruker Jv Israel Ltd. | Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF |
| US9368340B2 (en) | 2014-06-02 | 2016-06-14 | Lam Research Corporation | Metallization of the wafer edge for optimized electroplating performance on resistive substrates |
| JP6618241B2 (ja) * | 2014-06-11 | 2019-12-11 | 上村工業株式会社 | 錫電気めっき浴および錫めっき皮膜 |
| KR101636361B1 (ko) * | 2014-07-31 | 2016-07-06 | 주식회사 에이피씨티 | 과불소화알킬 계면활성제를 함유하는 솔더범프용 주석합금 전기도금액 |
| JP6048712B2 (ja) * | 2014-08-08 | 2016-12-21 | 奥野製薬工業株式会社 | 銅−スズ合金めっき浴 |
| US20160298249A1 (en) * | 2014-09-30 | 2016-10-13 | Rohm And Haas Electronic Materials Llc | Cyanide-free electroplating baths for white bronze based on copper (i) ions |
| US9829448B2 (en) | 2014-10-30 | 2017-11-28 | Bruker Jv Israel Ltd. | Measurement of small features using XRF |
| CN104593835B (zh) * | 2015-02-04 | 2017-10-24 | 广东羚光新材料股份有限公司 | 用于片式元器件端电极电镀的中性镀锡液 |
| US10053793B2 (en) | 2015-07-09 | 2018-08-21 | Lam Research Corporation | Integrated elastomeric lipseal and cup bottom for reducing wafer sticking |
| JP6432667B2 (ja) * | 2017-01-31 | 2018-12-05 | 三菱マテリアル株式会社 | 錫合金めっき液 |
| JP6555455B1 (ja) * | 2017-11-01 | 2019-08-07 | 日本製鉄株式会社 | 電気Snめっき鋼板 |
| CN107723760A (zh) * | 2017-11-28 | 2018-02-23 | 江苏澳光电子有限公司 | 一种Au‑Ag合金表面电镀液及其应用 |
| PT3578693T (pt) * | 2018-06-08 | 2020-06-16 | Atotech Deutschland Gmbh | Composição aquosa para a deposição de uma liga de estanho e prata e método de deposição eletrolítica dessa liga |
| US20200032409A1 (en) * | 2018-07-25 | 2020-01-30 | The Boeing Company | Compositions and Methods for Electrodepositing Tin-Bismuth Alloys on Metallic Substrates |
| JP2020050886A (ja) | 2018-09-21 | 2020-04-02 | 上村工業株式会社 | 電解Snめっき液 |
| JP2020063477A (ja) | 2018-10-17 | 2020-04-23 | 上村工業株式会社 | 電解Sn合金めっき液 |
| US11242609B2 (en) * | 2019-10-15 | 2022-02-08 | Rohm and Hass Electronic Materials LLC | Acidic aqueous silver-nickel alloy electroplating compositions and methods |
| CN110760902B (zh) * | 2019-11-29 | 2022-01-25 | 上海天承化学有限公司 | 一种锡电镀液及其制备方法和应用 |
| CN114242640B (zh) * | 2021-12-21 | 2024-08-09 | 淮安澳洋顺昌光电技术有限公司 | 一种Micro LED芯片的转移方法和显示设备 |
| EP4563729A1 (en) | 2023-11-28 | 2025-06-04 | Atotech Deutschland GmbH & Co. KG | Aqueous composition for depositing a tin silver alloy and method for electrolyti-cally depositing such an alloy |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4390709A (en) | 1976-11-11 | 1983-06-28 | Pfizer Inc. | Preparation of gamma-pyrones |
| DE2921241A1 (de) * | 1979-04-19 | 1980-10-23 | Alusuisse | Saurer zinn-ii-haltiger elektrolyt |
| DE3856429T2 (de) | 1987-12-10 | 2001-03-08 | Learonal, Inc. | Zinn, Blei- oder Zinn-Blei-Legierungselektrolyten für Elektroplattieren bei hoher Geschwindigkeit |
| US5162585A (en) | 1991-04-08 | 1992-11-10 | Phillips Petroleum Company | Preparation of dihydroxy bis-sulfides |
| US5378347A (en) | 1993-05-19 | 1995-01-03 | Learonal, Inc. | Reducing tin sludge in acid tin plating |
| US5492615A (en) * | 1994-11-22 | 1996-02-20 | Learonal Inc. | Cyclodextrin stabilization of organic metal finishing additives in aqueous metal treating baths |
| DE19623274A1 (de) * | 1996-05-31 | 1997-12-04 | Atotech Deutschland Gmbh | Wäßrige Lösung zur elektrolytischen Abscheidung von Zinn oder einer Zinnlegierung |
| KR100219806B1 (ko) | 1997-05-27 | 1999-09-01 | 윤종용 | 반도체장치의 플립 칩 실장형 솔더 범프의 제조방법, 이에 따라 제조되는 솔더범프 및 그 분석방법 |
| US5939565A (en) | 1997-11-03 | 1999-08-17 | Cultor Food Science, Inc. | Recovery of γ-pyrones |
| US6210556B1 (en) | 1998-02-12 | 2001-04-03 | Learonal, Inc. | Electrolyte and tin-silver electroplating process |
| JP3718790B2 (ja) | 1998-12-24 | 2005-11-24 | 石原薬品株式会社 | 銀及び銀合金メッキ浴 |
| JP3632499B2 (ja) | 1999-05-19 | 2005-03-23 | ユケン工業株式会社 | 錫−銀系合金電気めっき浴 |
| JP2001234387A (ja) * | 2000-02-17 | 2001-08-31 | Yuken Industry Co Ltd | 錫系電気めっきのウィスカー発生防止剤および防止方法 |
| US7628903B1 (en) | 2000-05-02 | 2009-12-08 | Ishihara Chemical Co., Ltd. | Silver and silver alloy plating bath |
| DE10026680C1 (de) * | 2000-05-30 | 2002-02-21 | Schloetter Fa Dr Ing Max | Elektrolyt und Verfahren zur Abscheidung von Zinn-Silber-Legierungsschichten und Verwendung des Elektrolyten |
| EP1167582B1 (en) | 2000-07-01 | 2005-09-14 | Shipley Company LLC | Metal alloy compositions and plating method related thereto |
| EP1325175B1 (de) * | 2000-09-20 | 2005-05-04 | Dr.Ing. Max Schlötter GmbH & Co. KG | Elektrolyt und verfahren zur abscheidung von zinn-kupfer-legierungsschichten |
| DE60226196T2 (de) * | 2001-05-24 | 2009-05-14 | Shipley Co., L.L.C., Marlborough | Zinn-Plattieren |
| WO2003072851A1 (en) * | 2002-02-28 | 2003-09-04 | Zeon Corporation | Partial plating method, partially-plated resin base, method for manufacturing multilayer circuit board |
| JP2003258014A (ja) * | 2002-03-04 | 2003-09-12 | Megic Corp | 半導体表面上に金属バンプを形成する方法 |
| JP4758614B2 (ja) * | 2003-04-07 | 2011-08-31 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | 電気めっき組成物および方法 |
| CN1261399C (zh) * | 2003-06-11 | 2006-06-28 | 浙江新和成股份有限公司 | 异戊醛的制备方法 |
| JP4605359B2 (ja) * | 2004-10-20 | 2011-01-05 | 石原薬品株式会社 | 鉛フリーの酸性スズ−ビスマス系合金電気メッキ浴 |
| JP4756886B2 (ja) * | 2005-03-22 | 2011-08-24 | 石原薬品株式会社 | 非シアン系のスズ−銀合金メッキ浴 |
| US7713859B2 (en) * | 2005-08-15 | 2010-05-11 | Enthone Inc. | Tin-silver solder bumping in electronics manufacture |
| JP4055823B1 (ja) * | 2007-03-12 | 2008-03-05 | 東洋インキ製造株式会社 | 帯電防止剤およびその用途 |
-
2009
- 2009-03-18 EP EP09155456A patent/EP2221396A1/en not_active Withdrawn
- 2009-12-29 TW TW098145441A patent/TWI402380B/zh active
- 2009-12-29 TW TW102121310A patent/TWI579415B/zh active
- 2009-12-30 KR KR1020090134621A patent/KR101651920B1/ko active Active
- 2009-12-31 CN CN2009102668168A patent/CN102051645B/zh active Active
- 2009-12-31 US US12/655,554 patent/US7968444B2/en active Active
-
2010
- 2010-01-04 JP JP2010000141A patent/JP2010174373A/ja active Pending
-
2014
- 2014-12-01 JP JP2014243538A patent/JP6140132B2/ja active Active
-
2016
- 2016-03-16 JP JP2016052176A patent/JP6169211B2/ja active Active
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