JP2015013782A - Break apparatus for aligned substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a break device for an aligned substrate that can efficiently break all scribe lines without turning over a mother substrate.SOLUTION: There is provided a break device D that breaks an aligned substrate M1 comprising a first substrate 1 and a second substrate 2 along scribe lines S1, S1' for parting formed on both surfaces of the aligned substrate M1. The break device includes a conveying mechanism 3 which conveys the aligned substrate M1, a break bar 4 which presses the substrate M1 from an upper surface of the first substrate 1, and a receiving member 5 which is positioned below the break bar 4 across the substrate M1 and receives a lower surface of the substrate M1. The break bar 4 is pressed against the first substrate 1 along the scribe line S1 for parting formed on the first substrate 1 and the receiving member 5 receives the second substrate 2. While the scribe line S1' for parting of the second substrate 2 is broken, the scribe line S1 for parting of the first substrate 1 formed right on the reverse side of the scribe line S1' is also broken.

Description

  The present invention relates to a break device for breaking scribe lines (cut grooves) formed on both surfaces of a bonded substrate to which a brittle material substrate is bonded, and more particularly to a break device for breaking a bonded substrate having a thin plate thickness. The present invention also relates to a breaking device for breaking by forming an external connection terminal region around a unit substrate when a unit substrate is obtained from a bonded substrate. The break device of the present invention is used for processing a unit display panel of a liquid crystal display panel, for example.

  In manufacturing a liquid crystal display panel, two large-area glass substrates are used, a color filter CF (Color Filter) is formed on one substrate, and a thin film transistor TFT (Thin Film Transistor) that drives liquid crystal on the other substrate And a terminal region for external connection. Then, the CF side substrate on which the color filter is formed and the TFT side substrate on which the TFT and the terminal region are formed are bonded to each other with a sealing material interposed therebetween, and a mother substrate in which liquid crystal is sealed is formed. Divide into unit display panels.

  Since the terminal area is an area where the signal line is connected between the TFT and the external device, it is necessary to expose the terminal area. Therefore, when the mother substrate is divided into unit display panels, the mother substrate is divided along the outer edge of the terminal region (that is, the periphery of the unit display panel) with respect to the portion of the CF side substrate facing the terminal region. The width (terminal width) necessary to attach the signal line from the outer end is cut out as an end material.

A substrate processing system and a substrate processing method for processing a scribe line on a mother substrate and breaking the substrate from the scribe line have already been disclosed in Patent Document 1 and Patent Document 2.
According to Patent Document 1, first, as shown in FIG. 7A, the TFT side substrate 11 of the mother substrate 10 is placed on the upper side and the CF side substrate 12 is placed on the lower side, and placed on a table (not shown). The TFT side substrate 11 is scribed with a cutter wheel 13 to process the scribe lines 14.
Next, as shown in FIGS. 7B and 7C, the mother substrate 10 is inverted and placed on the cushion sheet 15, and the break bar 16 is moved from the position directly above the scribe line 14 to the CF side substrate 12. Press to break the scribe line 14.
Next, as shown in FIG. 7 (d), the scribe lines 17 are processed by the cutter wheel 13 on the CF side substrate 12 facing upward. Thereafter, as shown in FIG. 7 (e), the mother substrate 10 is reversed again and placed on the cushion sheet 15, and the break bar 16 is moved from a position directly above the scribe line 17 as shown in FIG. 7 (f). The scribe lines 17 are broken by being pressed against the TFT side substrate 11. After that, the end material portion indicated by hatching is removed from the mother substrate 10 to form a unit display panel having a terminal region T in which a part of the TFT side substrate 11 is exposed as shown in FIG.

Patent Document 2 discloses the following break method as a conventional technique.
First, as shown in FIG. 8A, a scribe line 19 is formed by a cutter wheel 18 on the A surface of the mother substrate 20 in which the A surface and the B surface are bonded together.
Next, as shown in FIG. 8B, the mother substrate 20 is reversed and placed on the cushion sheet 23, and the scribe line 19 is broken by pressing the break bar 21 from the B surface toward the scribe line 19.
Next, as shown in FIG. 8C, the scribe line 22 is formed on the B surface facing upward at a position shifted from the scribe line 19 by the width for forming the terminal region.
Next, as shown in FIG. 8D, the mother substrate 20 is reversed again and placed on the cushion sheet 23, and the break bar 21 is pressed from the A surface toward the scribe line 22 to break the scribe line 22. . Thereafter, the mother board 20 is pulled left and right from the broken part to form a unit display panel having a terminal area.

JP 2003-131185 A JP 2002-103295 A

As described above, in the conventional method, when breaking the scribe lines formed on the TFT side substrate and the CF side substrate of the mother substrate, the mother substrate must be reversed each time. Therefore, the mother substrate is reversed. A substrate reversing device is required. For this reason, there is a problem that not only the breaking device is increased in size and the equipment cost is increased, but also the time required for the breaking is increased and the productivity is lowered.
In recent years, it has been required to reduce the thickness of the substrate to be processed. As an example, a bonded substrate with a substrate with a thickness of 0.2 mm is used, and a bonded substrate with a very thin substrate of 0.05 mm to 0.15 mm is used. Is being considered. However, since a thin bonded substrate of 0.2 mm or less is easily bent, it is difficult to reverse and break one by one.

  In view of the above-described problems, an object of the present invention is to provide a bonded substrate breaking device that can efficiently break all scribe lines without inverting the mother substrate.

  In order to achieve the above object, the present invention takes the following technical means. That is, the present invention is a bonded substrate in which a first substrate and a second substrate are bonded together, and the bonded substrate is formed along the scribe line with respect to a bonded substrate in which a scribe line for cutting is formed on both surfaces thereof. A breaking mechanism for conveying the bonded substrate, a break bar for pressing the bonded substrate from the upper surface of the first substrate, and a lower part of the break bar across the bonded substrate And a receiving member that receives the lower surface of the bonded substrate, and presses the break bar against the first substrate along the scribe line for cutting formed on the first substrate, and the receiving member By receiving the second substrate, the scribe line for cutting the second substrate is broken, and at the same time, the scribe line is cut. Also the first substrate formed directly behind the scribe line for cutting of are as breaks.

  Since the present invention is configured as described above, when the scribe lines for cutting each of the first substrate and the second substrate are broken, the mother substrate is placed on the transport mechanism without inverting the mother substrate each time. It is possible to break continuously with one break bar. As a result, the time required for the break can be shortened and the productivity can be improved, and an apparatus for inverting the substrate is not required, so that the break apparatus can be reduced in weight and reduced in equipment cost.

In the above invention, in addition to the dividing scribe line, a breaking device that breaks a bonded substrate in which a scribe line for forming a terminal region is formed adjacent to the dividing scribe line of the second substrate, The receiving member is formed by a pair of left and right receiving blades that receive the vicinity of the left and right of the scribe line for forming the terminal region formed on the second substrate, and the scribe line for forming the terminal region is the center between the left and right receiving blades. The receiving blade may be formed so that the distance between the adjacent cutting scribe line and the one receiving blade is smaller than the width of the terminal region.
As a result, the scribe line for forming the terminal region can be broken by pressing the break bar from the upper surface of the first substrate in the same manner as the scribe line for dividing, so that all the scribe lines are continuously broken without inverting the substrate. Therefore, the productivity of the unit display panel having the terminal area can be increased.

Explanatory drawing which shows an example of the mother board | substrate broken by the apparatus of this invention. The top view which shows roughly an example of the breaking apparatus which concerns on this invention. Explanatory drawing which shows an example of the break apparatus which concerns on this invention with a break process. Explanatory drawing of the break device similar to FIG. Partial expansion explanatory drawing which shows a break bar and a receiving member. Sectional drawing which shows another Example of a receiving member. Explanatory drawing which shows the break means of the conventional bonded substrate board. Explanatory drawing which shows another example of the break means of the conventional bonded substrate board.

  An embodiment of a bonded substrate breaker of the present invention will be described with reference to the drawings. The breaking device of the present invention is used together with a scribing device. That is, the mother substrate to be processed is transferred to the breaking device after scribe lines (grooves) are processed on the surfaces of the bonded first substrate and second substrate by the scribe device. Although the illustration of the scribe device is omitted, a known scribe device using a cutter wheel or a laser beam can be used. The means for conveying from the scribing device to the breaking device can also be performed by a conveying device using a known conveyor.

FIG. 1A is a plan view showing an example of a mother substrate M to be processed to be broken by the breaking device of the present invention, and FIG. 1B is a perspective view thereof. The mother substrate M has a substrate structure in which the first substrate 1 and the second substrate 2 are bonded together. Here, the first substrate 1 is a TFT side substrate, and the second substrate 2 is a CF side substrate. Further, the thickness of each of the mother substrates M is preferably 0.05 mm to 0.2 mm, particularly preferably 0.15 mm or less.
In the following, nine unit display panels U arranged in three rows in the X direction and the Y direction are cut out from the mother substrate M, and among the four surroundings of the cut out unit display panels U, as shown in FIG. Next, a case where a terminal region T for external connection is formed in one periphery will be described.

On the surface of the first substrate 1 of the mother substrate M, an X-direction dividing scribe line S1 and a Y-direction dividing scribe line S2 for separating the mother substrate M into nine are formed. Further, on the surface of the second substrate 2, as shown in FIG. 1B, the scribe line S 1 ′ for cutting in the X direction and the scribe line for cutting in the Y direction are directly behind the scribe lines S 1 and S 2 of the first substrate 1. A line S2 ′ is formed.
Further, a terminal region forming scribe line S3 for forming the terminal region T is formed on the second substrate along the X-direction dividing scribe line S1 ′. The interval between the dividing scribe line S1 ′ and the terminal region forming scribe line S3 is the same as the width L (see FIG. 1D) of the terminal region T of the unit display panel U that is finally cut out. The width L of the terminal region T in this example was 2 mm.

The mother substrate M on which each scribe line as described above is formed is transported to the breaking device D according to the present invention in the breaking step.
2 to 5, the breaking device D is disposed in the middle of the transport mechanism 3 that transports the mother substrate M from upstream to downstream (in the direction of the arrow in FIG. 3). A break bar 4 that presses the surface of the first substrate 1 and a receiving member 5 that receives the lower surface of the second substrate 2 of the mother substrate M at a lower position facing the break bar 4.
The transport mechanism 3 transports the mother substrate M with the scribe line to be divided in a direction orthogonal to the traveling direction, and is formed by front and rear conveyors 3a and 3b. A break bar 4 and a receiving member 5 are arranged between the front and rear conveyors 3a and 3b.

  The break bar 4 is formed of a plate-like material extending in the extending direction of the scribe line to be divided of the mother substrate M, and is held by the beam 4b via an elevating mechanism 4a such as a fluid cylinder. The lifting mechanism 4a is controlled by a computer (not shown) to control the lifting stroke of the break bar 4 so that the pressing force to the mother substrate M can be adjusted.

  As shown in the enlarged view of FIG. 5, the receiving member 5 is formed by a pair of left and right receiving blades 5 a and 5 a arranged below the break bar 4. The receiving blades 5a and 5a are used when the mother substrate M is conveyed by the conveyor 3a to any one of the scribe lines S1 ′, S2 ′, and S3 to be divided of the second substrate 2 immediately below the break bar 4. Further, it is formed so as to receive the right and left vicinity of the scribe line. Further, when the scribe line to be divided next to the second substrate 2, for example, as shown in FIG. 5B, the scribe line S3 for forming the terminal region comes to the center of the left and right receiving blades 5a and 5a. The distance L1 between the scribe line S3 and one of the receiving blades is smaller than the width L of the terminal region. As a result, the left and right receiving blades 5a, 5a can be received in a state where both sides are reliably in contact with the second substrate 2. In this embodiment, the interval between the receiving blades 5a and 5a is 3 mm.

Next, a breaking procedure of the mother board M using the breaking device D of the present invention will be described.
First, the mother substrate M shown in FIG. 1 is transported in a state where the first substrate 1 is on the upper side and the cutting scribe lines S2 and S2 ′ in the Y direction are orthogonal to the feeding direction of the transport mechanism 3. Place on mechanism 3. Then, the mother board M is transferred in the direction of the break bar 4 by the transfer mechanism 3. When the first dividing scribe lines S2 and S2 ′ come below the break bar 4 as shown in FIG. 3A, the transport mechanism 3 is stopped, the break bar 4 is lowered, and the first substrate 1 is pressed. As a result, the mother substrate M bends downward between the left and right receiving blades 5a, 5a as shown in the enlarged view of FIG. 5A, and the scribe line S2 ′ for cutting the second substrate 2 is broken. At the same time, the dividing scribe line S2 formed on the first substrate 1 is also broken without causing “chips” due to the thin plate thickness. Subsequently, the next parting scribe line is also broken in the same procedure. Then, the mother substrate M is cut along the cutting scribe lines S2 and S2 ′ to form a rectangular strip-shaped substrate M1 in which three unit display panels U are arranged as shown in FIG.
In the breaking step, the cutting scribe line S2 ′ of the second substrate 2 is directly behind the scribe line S2 of the first substrate 1, and the thicknesses of the substrates 1 and 2 are 0.05 to 0.15 mm. Since it is thin, both scribe lines S2 and S2 ′ can be simultaneously broken by pressing the break bar 4 from the upper surface of the first substrate 1.
Further, according to the experiments by the inventors, when the break bar 4 is pressed, the bending amount W of the mother board M between the left and right receiving blades 5a and 5a is 10 μm to 50 μm as shown in FIG. When the pressing force of the break bar 4 was set so as to become the break result, the break result became the cleanest section with no “chip”, and the break could be effectively performed.

Thereafter, as shown in FIG. 4A, the strip-shaped mother substrate M <b> 1 is placed on the transport mechanism 3 and transported in the direction of the break bar 4. In this case, the scribe lines S1 and S1 ′ for cutting and the scribe line S3 for forming the terminal region are placed in a direction orthogonal to the feed direction of the transport mechanism 3 with the first substrate 1 facing upward. When the first terminal region forming scribe line S3 formed on the second substrate 2 comes below the break bar 4, as shown in FIG. 4B, the transport mechanism 3 is stopped, and the break bar 4 is The first substrate 1 is pressed down. As a result, as shown in FIG. 5B, the mother substrate M1 is bent downward between the left and right receiving blades 5a and 5a, and the terminal region forming scribe line S3 formed on the second substrate 2 is broken. The
At this time, since the distance L1 between the scribe line S3 for forming the terminal region and one of the receiving blades 5a and 5a on the left and right sides is smaller than the width L of the terminal region, the left and right receiving blades 5a, The left and right sides of the terminal region forming scribe line S3 can be reliably received by 5a, and the mother board can be bent between the left and right receiving blades 5a and 5a.

Next, as shown in FIG. 4B, the mother board M1 is transported by the transport mechanism 3 until the next cutting scribe lines S1 and S1 ′ are positioned below the break bar 4, and stopped. The first substrate 1 is pressed down. As a result, as shown in the enlarged view of FIG. 5C, the mother substrate M1 is bent downward between the left and right receiving blades 5a and 5a, and the cutting scribe line S1 ′ of the second substrate 2 is broken. At the same time, the cutting scribe line S1 formed on the first substrate 1 is also broken.
Even during this break, as described above, the gap L1 between the cutting scribe lines S1, S1 ′ and the one receiving blade 5a is formed to be smaller than the width L of the terminal region. Since the receiving blades 5a and 5a can receive and break only the scribe lines S1 and S1 ′ without straddling the adjacent terminal area forming scribe line S3, the adjacent terminal area forming scribe line S3 is erroneously received. Will not break at the same time.

Next, as shown in FIG. 4C, the mother substrate M1 is transferred so that the terminal region forming scribe line S3 formed in the vicinity of the dividing scribe line S1 ′ is positioned below the break bar 4, and the break bar By pressing 4 against the surface of the first substrate 1, the terminal region forming scribe line S3 is broken.
Subsequently, the mother substrate M1 is sequentially conveyed, and the remaining dividing scribe lines S1 and S1 ′ and the terminal region forming scribe line S3 are broken.

  The unit display panel U is separated along the scribe lines S1 and S1 ′ for the broken strip-like mother substrate M1 thus obtained, and the end material portion E indicated by hatching in FIG. Remove. Thereby, as shown in FIG.1 (d), the unit display panel U which has the terminal area | region T which the part of the 1st board | substrate 1, ie, the TFT side board | substrate exposed, can be processed.

  As described above, in this embodiment, the breaking scribe line of the first substrate 1 is broken by pressing the break bar 4 from the surface of the first substrate 1, and at the same time, the breaking scribe line is formed directly behind the dividing scribe line. The scribe line for cutting the second substrate 2 can also be broken. Therefore, unlike the prior art, when the scribe lines of the first substrate 1 and the second substrate 2 are broken, the operation of inverting the mother substrate M each time becomes unnecessary. This eliminates the need for a device for inverting the substrate, thereby reducing the weight and size of the break device and reducing the cost. Further, since the scribe line for forming the terminal region formed on the second substrate 2 can also be broken by pressing the break bar 4 from the upper surface of the first substrate 1, all of the scribe lines can be continuously formed without inverting the substrate. A scribe line break can be performed. As a result, the time required for the break work can be shortened and the productivity can be increased.

  While typical examples of the present invention have been described above, the present invention is not necessarily limited to the above embodiments. For example, the receiving member 5 arranged below the break bar 4 is replaced with a pair of left and right tables 5b and 5b arranged with a gap as shown in FIG. 6 instead of the pair of receiving blades 5a and 5a. You can also In this case, the interval between the left and right tables 5b and 5b is formed to be the same length as the interval between the receiving blades 5a and 5a described above. Further, for the transport mechanism 3 that transports the mother substrate M from upstream to downstream, a suction robot (not shown) provided with an air suction board can be used. Others In the present invention, the object can be achieved and modified as appropriate without departing from the spirit of the invention.

The breaking method using the breaking device will be summarized.
(A) A transport mechanism for transporting the bonded substrate by forming a scribe line for cutting on both surfaces of the bonded substrate obtained by bonding the first substrate and the second substrate having a thickness of 0.05 to 0.2 mm. And a break bar that presses the bonded substrate from the upper surface of the first substrate, and a receiving member that is positioned below the break bar across the bonded substrate and receives the lower surface of the bonded substrate, The scribe line for dividing the second substrate is formed by pressing the break bar against the first substrate along the scribe line for dividing formed on one substrate and receiving the second substrate by the receiving member. A method for breaking a bonded substrate, in which, simultaneously with breaking, a breaking scribe line for cutting the first substrate formed directly behind the scribe line is also broken.
(B) In addition to the dividing scribe line, a terminal region forming scribe line is further formed on the second substrate, and the receiving member is a pair of left and right receiving blades for dividing the second substrate. Using a receiving blade formed so that the distance between the scribe line for forming the terminal area and one receiving blade is smaller than the width of the terminal area The terminal region forming scribe line is broken by pressing the surface of the first substrate with the break bar directly above the terminal region forming scribe line and receiving the second substrate with the receiving member. Breaking method for bonded substrates.
(C) The method for breaking a bonded substrate according to the above, wherein the dividing scribe line and the terminal region scribe line are broken alternately.

  The break device of the present invention can be used as a break device for breaking scribe lines formed on both surfaces of a bonded substrate.

DESCRIPTION OF SYMBOLS 1 1st board | substrate 2 2nd board | substrate 3 Conveying mechanism 3a Receptacle blade 4 Break bar D Break apparatus M Mother board | substrate M1 Strip-shaped mother board | substrate S1, S1 'Dividing scribe line S2, S2' Dividing scribe line S3 Terminal area formation scribe Line T Terminal area U Unit display panel

Claims (3)

Breaking device for breaking a bonded substrate along a scribe line to a bonded substrate in which a scribe line for cutting is formed on both surfaces of the bonded substrate obtained by bonding the first substrate and the second substrate Because
A transport mechanism for transporting the bonded substrate;
A break bar for pressing the bonded substrate from the upper surface of the first substrate;
A receiving member that is positioned below the break bar across the bonded substrate and receives the lower surface of the bonded substrate;
By pressing the break bar against the first substrate along the scribe line for cutting formed on the first substrate and receiving the second substrate with the receiving member, A bonded substrate breaker for breaking a scribe line and simultaneously breaking a scribe line for cutting the first substrate formed directly behind the scribe line. In addition to the dividing scribe line, a breaking device that breaks a bonded substrate in which a scribe line for forming a terminal region is formed adjacent to the dividing scribe line of the second substrate,
The receiving member is formed by a pair of left and right receiving blades that receive the vicinity of the left and right of the scribe line for forming the terminal region formed on the second substrate, and the scribe line for forming the terminal region is the center between the left and right receiving blades. The breakage of a bonded substrate according to claim 1, wherein the receiving blade is formed such that a distance between the adjacent cutting scribe line and one receiving blade is smaller than the width of the terminal region when coming to the substrate. apparatus.   The pressing force of the break bar is set so that the amount of bending of the second substrate when the bonded substrate is pressed by the break bar is 10 μm to 50 μm within the interval between the left and right receiving blades. Item 3. A bonded substrate breaker according to Item 1 or 2.

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