JP2013539219A - 薄膜トランジスタを堆積させるための方法およびシステム - Google Patents

薄膜トランジスタを堆積させるための方法およびシステム Download PDF

Info

Publication number
JP2013539219A
JP2013539219A JP2013527547A JP2013527547A JP2013539219A JP 2013539219 A JP2013539219 A JP 2013539219A JP 2013527547 A JP2013527547 A JP 2013527547A JP 2013527547 A JP2013527547 A JP 2013527547A JP 2013539219 A JP2013539219 A JP 2013539219A
Authority
JP
Japan
Prior art keywords
sputtering
substrate
target
deposition
gate insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013527547A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013539219A5 (enExample
Inventor
エヴリン シェーア，
オリヴァー グラウ，
ローラント ヴェーバー，
ウド シュライバー，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2013539219A publication Critical patent/JP2013539219A/ja
Publication of JP2013539219A5 publication Critical patent/JP2013539219A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H01L21/0214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being a silicon oxynitride, e.g. SiON or SiON:H
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02266—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0312—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
    • H10D30/0316—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral bottom-gate TFTs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739—Conductor-insulator-semiconductor electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Film Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP2013527547A 2010-09-10 2011-08-31 薄膜トランジスタを堆積させるための方法およびシステム Pending JP2013539219A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10176247A EP2428994A1 (en) 2010-09-10 2010-09-10 Method and system for depositing a thin-film transistor
EP10176247.4 2010-09-10
PCT/EP2011/065046 WO2012031962A1 (en) 2010-09-10 2011-08-31 Method and system for depositing a thin-film transistor

Publications (2)

Publication Number Publication Date
JP2013539219A true JP2013539219A (ja) 2013-10-17
JP2013539219A5 JP2013539219A5 (enExample) 2014-10-16

Family

ID=43430788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013527547A Pending JP2013539219A (ja) 2010-09-10 2011-08-31 薄膜トランジスタを堆積させるための方法およびシステム

Country Status (7)

Country Link
US (1) US7977255B1 (enExample)
EP (1) EP2428994A1 (enExample)
JP (1) JP2013539219A (enExample)
KR (1) KR20130102591A (enExample)
CN (1) CN103098218B (enExample)
TW (1) TWI524432B (enExample)
WO (1) WO2012031962A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020200520A (ja) * 2019-06-12 2020-12-17 株式会社アルバック 成膜装置、スパッタリングターゲット機構及び成膜方法

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI633605B (zh) * 2008-10-31 2018-08-21 半導體能源研究所股份有限公司 半導體裝置及其製造方法
KR101648927B1 (ko) 2009-01-16 2016-08-17 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
KR101671210B1 (ko) * 2009-03-06 2016-11-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
US9142462B2 (en) 2010-10-21 2015-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having a contact etch stop layer and method of forming the same
KR102440877B1 (ko) 2011-02-16 2022-09-05 더 제너럴 하스피탈 코포레이션 내시경용 광 결합기
US12471759B2 (en) 2011-02-16 2025-11-18 The General Hospital Corporation Optical coupler for an endoscope
EP2867387A4 (en) * 2012-06-29 2016-03-09 Semiconductor Energy Lab METHOD OF USE OF A SPUTTER TARGET AND METHOD FOR PRODUCING AN OXID FILM
TWI681233B (zh) 2012-10-12 2020-01-01 日商半導體能源研究所股份有限公司 液晶顯示裝置、觸控面板及液晶顯示裝置的製造方法
JP6351947B2 (ja) 2012-10-12 2018-07-04 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
JP6059513B2 (ja) * 2012-11-14 2017-01-11 出光興産株式会社 スパッタリングターゲット、酸化物半導体薄膜及びそれらの製造方法
TWI624949B (zh) 2012-11-30 2018-05-21 半導體能源研究所股份有限公司 半導體裝置
US9326327B2 (en) * 2013-03-15 2016-04-26 Ppg Industries Ohio, Inc. Stack including heater layer and drain layer
KR20150133235A (ko) 2013-03-19 2015-11-27 어플라이드 머티어리얼스, 인코포레이티드 다층 패시베이션 또는 식각 정지 ｔｆｔ
TWI632688B (zh) 2013-07-25 2018-08-11 半導體能源研究所股份有限公司 半導體裝置以及半導體裝置的製造方法
US9337030B2 (en) 2014-03-26 2016-05-10 Intermolecular, Inc. Method to grow in-situ crystalline IGZO using co-sputtering targets
US9459442B2 (en) 2014-09-23 2016-10-04 Scott Miller Optical coupler for optical imaging visualization device
US10548467B2 (en) 2015-06-02 2020-02-04 GI Scientific, LLC Conductive optical element
CA2992739A1 (en) 2015-07-21 2017-01-26 GI Scientific, LLC Endoscope accessory with angularly adjustable exit portal
JP6534123B2 (ja) * 2016-03-23 2019-06-26 日本アイ・ティ・エフ株式会社 被覆膜とその製造方法およびｐｖｄ装置
DE102016118799B4 (de) * 2016-10-05 2022-08-11 VON ARDENNE Asset GmbH & Co. KG Verfahren zum Magnetronsputtern
KR102651759B1 (ko) * 2016-10-11 2024-03-29 삼성디스플레이 주식회사 증착장치
TWI684283B (zh) 2017-06-07 2020-02-01 日商日新電機股份有限公司 薄膜電晶體的製造方法
CN117646181A (zh) * 2023-11-17 2024-03-05 中国科学院深圳先进技术研究院 一种半导体封装用二氧化硅薄膜及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001267311A (ja) * 2000-03-14 2001-09-28 Sanyo Shinku Kogyo Kk Ｔｆｔ用ゲート膜等の成膜方法とその装置
JP2001270795A (ja) * 2000-03-28 2001-10-02 Toshiba Corp 酸化物エピタキシャル歪格子膜の製造法
JP2002246602A (ja) * 2001-02-16 2002-08-30 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
JP2005179716A (ja) * 2003-12-17 2005-07-07 Sony Corp スパッタリング装置
JP2007154224A (ja) * 2005-12-01 2007-06-21 Matsushita Electric Ind Co Ltd スパッタリング方法および装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0459763B1 (en) 1990-05-29 1997-05-02 Semiconductor Energy Laboratory Co., Ltd. Thin-film transistors
JP3197557B2 (ja) 1990-11-27 2001-08-13 株式会社半導体エネルギー研究所 被膜形成方法
US5576231A (en) 1993-11-05 1996-11-19 Semiconductor Energy Laboratory Co., Ltd. Process for fabricating an insulated gate field effect transistor with an anodic oxidized gate electrode
JP3963961B2 (ja) 1994-08-31 2007-08-22 株式会社半導体エネルギー研究所 半導体装置の作製方法
TW334581B (en) 1996-06-04 1998-06-21 Handotai Energy Kenkyusho Kk Semiconductor integrated circuit and fabrication method thereof
DE19651378A1 (de) * 1996-12-11 1998-06-18 Leybold Systems Gmbh Vorrichtung zum Aufstäuben von dünnen Schichten auf flache Substrate
DE19726966C1 (de) * 1997-06-25 1999-01-28 Flachglas Ag Verfahren zur Herstellung einer transparenten Silberschicht mit hoher spezifischer elektrischer Leitfähigkeit , Glasscheibe mit einem Dünnschichtsystem mit einer solchen Silberschicht und deren Verwendung
US6362097B1 (en) * 1998-07-14 2002-03-26 Applied Komatsu Technlology, Inc. Collimated sputtering of semiconductor and other films
CZ296094B6 (cs) * 2000-12-18 2006-01-11 Shm, S. R. O. Zarízení pro odparování materiálu k povlakování predmetu
DE10237311A1 (de) * 2001-08-14 2003-05-22 Samsung Corning Co Vorrichtung und Verfahren zum Aufbringen von Dünnschichten auf einen Glasträger
CN2516564Y (zh) 2001-12-03 2002-10-16 深圳豪威真空光电子股份有限公司 具有中频反应溅射二氧化硅的氧化铟锡玻璃在线联镀装置
DE10159907B4 (de) * 2001-12-06 2008-04-24 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh & Co. Beschichtungsverfahren
US7300829B2 (en) * 2003-06-02 2007-11-27 Applied Materials, Inc. Low temperature process for TFT fabrication
WO2005041311A1 (en) 2003-10-28 2005-05-06 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and method for manufacturing the same, and liquid crystal television reciever
JP4689159B2 (ja) 2003-10-28 2011-05-25 株式会社半導体エネルギー研究所 液滴吐出システム
CN101464530A (zh) * 2008-01-23 2009-06-24 四川大学 一种ZnSe红外增透膜及其制备方法
EP2096189A1 (en) 2008-02-28 2009-09-02 Applied Materials, Inc. Sprayed Si- or Si:Al-target with low iron content
US8057649B2 (en) * 2008-05-06 2011-11-15 Applied Materials, Inc. Microwave rotatable sputtering deposition
WO2009148154A1 (ja) * 2008-06-06 2009-12-10 出光興産株式会社 酸化物薄膜用スパッタリングターゲットおよびその製造法
TWI473896B (zh) * 2008-06-27 2015-02-21 Idemitsu Kosan Co From InGaO 3 (ZnO) crystal phase, and a method for producing the same
US20100236920A1 (en) * 2009-03-20 2010-09-23 Applied Materials, Inc. Deposition apparatus with high temperature rotatable target and method of operating thereof
CN101570853B (zh) * 2009-05-08 2012-05-23 中国科学技术大学 利用磁控溅射制备形貌可控的锌和锌氧化物纳米材料的方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001267311A (ja) * 2000-03-14 2001-09-28 Sanyo Shinku Kogyo Kk Ｔｆｔ用ゲート膜等の成膜方法とその装置
JP2001270795A (ja) * 2000-03-28 2001-10-02 Toshiba Corp 酸化物エピタキシャル歪格子膜の製造法
JP2002246602A (ja) * 2001-02-16 2002-08-30 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
JP2005179716A (ja) * 2003-12-17 2005-07-07 Sony Corp スパッタリング装置
JP2007154224A (ja) * 2005-12-01 2007-06-21 Matsushita Electric Ind Co Ltd スパッタリング方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020200520A (ja) * 2019-06-12 2020-12-17 株式会社アルバック 成膜装置、スパッタリングターゲット機構及び成膜方法

Also Published As

Publication number Publication date
KR20130102591A (ko) 2013-09-17
WO2012031962A1 (en) 2012-03-15
US7977255B1 (en) 2011-07-12
TW201214581A (en) 2012-04-01
EP2428994A1 (en) 2012-03-14
TWI524432B (zh) 2016-03-01
CN103098218A (zh) 2013-05-08
CN103098218B (zh) 2017-04-12

Similar Documents

Publication Publication Date Title
JP2013539219A (ja) 薄膜トランジスタを堆積させるための方法およびシステム
KR100682163B1 (ko) 하이브리드형 ｐｖｄ-ｃｖｄ 시스템
JP5309150B2 (ja) スパッタリング装置及び電界効果型トランジスタの製造方法
TW201402851A (zh) 利用一預穩定電漿之製程的濺鍍方法
US20070181421A1 (en) Sputtering system providing large area sputtering and plasma-assisted reactive gas dissociation
TWI655677B (zh) 沈積層的方法、製造電晶體的方法、用於電子裝置的層堆疊及電子裝置
JP5615442B2 (ja) 薄膜電極および薄膜スタックを堆積させる方法
JP2001131741A (ja) 触媒スパッタリングによる薄膜形成方法及び薄膜形成装置並びに半導体装置の製造方法
CN102723359A (zh) 薄膜晶体管及其制作方法、阵列基板、显示装置
CN107623040A (zh) 一种铟镓锌氧化物薄膜晶体管及其制造方法
JPH0590247A (ja) 絶縁膜を形成する方法および装置
CN104282567B (zh) 制造igzo层和tft的方法
CN113699495B (zh) 磁控溅射组件、磁控溅射设备及磁控溅射方法
JP2015056529A (ja) 膜形成方法および膜形成装置
CN100481466C (zh) 半导体器件
TWI649804B (zh) 在通孔或溝槽中沈積層的方法、製造電晶體的方法、用於電子裝置的層堆疊、及電子裝置
CN109072400B (zh) 用于基板的真空处理的方法和用于基板的真空处理的设备
JPS61183471A (ja) 薄膜形成方法及び薄膜形成装置
JP2010037594A (ja) スパッタリング装置
JP2025037918A (ja) 基板上に薄膜トランジスタの層を堆積する方法及びスパッタ堆積装置
JPH0536620A (ja) 半導体表面処理方法及び装置
JP2006237640A (ja) 半導体製造方法
JPH036028A (ja) 薄膜トランジスタの製造方法
JP2005248222A (ja) スパッタリング方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140829

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140829

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150625

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150707

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20151002

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20160308