JP2013524486A5 - - Google Patents
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- Publication number
- JP2013524486A5 JP2013524486A5 JP2013501282A JP2013501282A JP2013524486A5 JP 2013524486 A5 JP2013524486 A5 JP 2013524486A5 JP 2013501282 A JP2013501282 A JP 2013501282A JP 2013501282 A JP2013501282 A JP 2013501282A JP 2013524486 A5 JP2013524486 A5 JP 2013524486A5
- Authority
- JP
- Japan
- Prior art keywords
- array
- solder
- semiconductor
- semiconductor chip
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 56
- 229910000679 solder Inorganic materials 0.000 claims 44
- 239000000758 substrate Substances 0.000 claims 30
- 238000000034 method Methods 0.000 claims 20
- 238000004806 packaging method and process Methods 0.000 claims 9
- 239000002184 metal Substances 0.000 claims 8
- 239000000463 material Substances 0.000 claims 4
- 239000000919 ceramic Substances 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/731,487 US8114707B2 (en) | 2010-03-25 | 2010-03-25 | Method of forming a multi-chip stacked structure including a thin interposer chip having a face-to-back bonding with another chip |
| US12/731,487 | 2010-03-25 | ||
| PCT/US2011/026957 WO2011119308A2 (en) | 2010-03-25 | 2011-03-03 | Method of forming a multi-chip stacked structure including a thin interposer chip having a face-to-back bonding with another chip |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013524486A JP2013524486A (ja) | 2013-06-17 |
| JP2013524486A5 true JP2013524486A5 (enExample) | 2013-10-10 |
| JP5505918B2 JP5505918B2 (ja) | 2014-05-28 |
Family
ID=44656947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013501282A Expired - Fee Related JP5505918B2 (ja) | 2010-03-25 | 2011-03-03 | 半導体チップの多チップ・アセンブリを形成する方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8114707B2 (enExample) |
| JP (1) | JP5505918B2 (enExample) |
| CN (1) | CN103003938B (enExample) |
| GB (1) | GB2492026B (enExample) |
| WO (1) | WO2011119308A2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5508108B2 (ja) * | 2010-04-15 | 2014-05-28 | 株式会社ディスコ | 半導体装置の製造方法 |
| US8927909B2 (en) * | 2010-10-11 | 2015-01-06 | Stmicroelectronics, Inc. | Closed loop temperature controlled circuit to improve device stability |
| US9093396B2 (en) * | 2011-10-31 | 2015-07-28 | Masahiro Lee | Silicon interposer systems |
| KR101898678B1 (ko) | 2012-03-28 | 2018-09-13 | 삼성전자주식회사 | 반도체 패키지 |
| KR101970291B1 (ko) | 2012-08-03 | 2019-04-18 | 삼성전자주식회사 | 반도체 패키지의 제조 방법 |
| US8963336B2 (en) | 2012-08-03 | 2015-02-24 | Samsung Electronics Co., Ltd. | Semiconductor packages, methods of manufacturing the same, and semiconductor package structures including the same |
| KR20140037392A (ko) * | 2012-09-17 | 2014-03-27 | 삼성전자주식회사 | 반도체 소자 및 그 제조방법 |
| TWI488270B (zh) * | 2012-09-26 | 2015-06-11 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法 |
| KR102008014B1 (ko) | 2012-10-15 | 2019-08-06 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
| US9799592B2 (en) | 2013-11-19 | 2017-10-24 | Amkor Technology, Inc. | Semicondutor device with through-silicon via-less deep wells |
| KR101366461B1 (ko) | 2012-11-20 | 2014-02-26 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스 및 그 제조 방법 |
| KR101473093B1 (ko) * | 2013-03-22 | 2014-12-16 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스 및 그 제조 방법 |
| KR102041502B1 (ko) | 2013-04-01 | 2019-11-07 | 삼성전자 주식회사 | 관통 전극 및 접착 층을 갖는 반도체 패키지 |
| CN103545297A (zh) * | 2013-10-25 | 2014-01-29 | 矽力杰半导体技术(杭州)有限公司 | 多芯片叠合封装结构及其制作方法 |
| US9059333B1 (en) | 2013-12-04 | 2015-06-16 | International Business Machines Corporation | Facilitating chip dicing for metal-metal bonding and hybrid wafer bonding |
| JP2016058596A (ja) * | 2014-09-11 | 2016-04-21 | ソニー株式会社 | 電子デバイス、部品実装基板及び電子機器 |
| US9496188B2 (en) | 2015-03-30 | 2016-11-15 | International Business Machines Corporation | Soldering three dimensional integrated circuits |
| US9960328B2 (en) | 2016-09-06 | 2018-05-01 | Amkor Technology, Inc. | Semiconductor device and manufacturing method thereof |
| US10797039B2 (en) * | 2016-12-07 | 2020-10-06 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming a 3D interposer system-in-package module |
| US10147676B1 (en) | 2017-05-15 | 2018-12-04 | International Business Machines Corporation | Wafer-scale power delivery |
| JP2019220621A (ja) * | 2018-06-21 | 2019-12-26 | キオクシア株式会社 | 半導体装置及びその製造方法 |
| US10998271B1 (en) | 2019-11-01 | 2021-05-04 | Micron Technology, Inc. | High density pillar interconnect conversion with stack to substrate connection |
| US11088114B2 (en) | 2019-11-01 | 2021-08-10 | Micron Technology, Inc. | High density pillar interconnect conversion with stack to substrate connection |
| CN111293046B (zh) * | 2020-02-20 | 2022-05-03 | 西安微电子技术研究所 | 一种芯片与tsv硅基板的倒扣焊接方法 |
| US11532582B2 (en) | 2020-08-25 | 2022-12-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device package and method of manufacture |
| US20230093258A1 (en) * | 2021-09-23 | 2023-03-23 | Intel Corporation | Glass patch integration into an electronic device package |
| CN114446806A (zh) * | 2021-12-28 | 2022-05-06 | 深圳市紫光同创电子有限公司 | 裸片到裸片的互连电路中半导体组件、集成电路封装方法 |
| US11810882B2 (en) * | 2022-03-01 | 2023-11-07 | Micron Technology, Inc. | Solder based hybrid bonding for fine pitch and thin BLT interconnection |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4479088A (en) | 1981-01-16 | 1984-10-23 | Burroughs Corporation | Wafer including test lead connected to ground for testing networks thereon |
| JPH0714028B2 (ja) * | 1987-11-27 | 1995-02-15 | シャープ株式会社 | 立体型半導体装置の製造方法 |
| US5426072A (en) * | 1993-01-21 | 1995-06-20 | Hughes Aircraft Company | Process of manufacturing a three dimensional integrated circuit from stacked SOI wafers using a temporary silicon substrate |
| CN1155050A (zh) | 1996-10-29 | 1997-07-23 | 家电宝实业有限公司 | 防火座地卤素灯 |
| US5915167A (en) | 1997-04-04 | 1999-06-22 | Elm Technology Corporation | Three dimensional structure memory |
| US6551857B2 (en) | 1997-04-04 | 2003-04-22 | Elm Technology Corporation | Three dimensional structure integrated circuits |
| JPH11191577A (ja) | 1997-10-24 | 1999-07-13 | Seiko Epson Corp | テープキャリア、半導体アッセンブリ及び半導体装置並びにこれらの製造方法並びに電子機器 |
| JP4063944B2 (ja) * | 1998-03-13 | 2008-03-19 | 独立行政法人科学技術振興機構 | 3次元半導体集積回路装置の製造方法 |
| US6313522B1 (en) * | 1998-08-28 | 2001-11-06 | Micron Technology, Inc. | Semiconductor structure having stacked semiconductor devices |
| US6251705B1 (en) * | 1999-10-22 | 2001-06-26 | Agere Systems Inc. | Low profile integrated circuit packages |
| JP2001127088A (ja) * | 1999-10-27 | 2001-05-11 | Mitsubishi Electric Corp | 半導体装置 |
| JP2001274196A (ja) * | 2000-03-28 | 2001-10-05 | Rohm Co Ltd | 半導体装置 |
| US7189595B2 (en) * | 2001-05-31 | 2007-03-13 | International Business Machines Corporation | Method of manufacture of silicon based package and devices manufactured thereby |
| US6867501B2 (en) * | 2001-11-01 | 2005-03-15 | Rohm Co., Ltd. | Semiconductor device and method for manufacturing same |
| US6599778B2 (en) * | 2001-12-19 | 2003-07-29 | International Business Machines Corporation | Chip and wafer integration process using vertical connections |
| US7378331B2 (en) * | 2004-12-29 | 2008-05-27 | Intel Corporation | Methods of vertically stacking wafers using porous silicon |
| US7488680B2 (en) * | 2005-08-30 | 2009-02-10 | International Business Machines Corporation | Conductive through via process for electronic device carriers |
| JP4659660B2 (ja) * | 2006-03-31 | 2011-03-30 | Okiセミコンダクタ株式会社 | 半導体装置の製造方法 |
| JP2007317822A (ja) * | 2006-05-25 | 2007-12-06 | Sony Corp | 基板処理方法及び半導体装置の製造方法 |
| CN101465343A (zh) * | 2007-12-18 | 2009-06-24 | 财团法人工业技术研究院 | 具垂直电性自我连接的三维堆栈芯片结构及其制造方法 |
-
2010
- 2010-03-25 US US12/731,487 patent/US8114707B2/en active Active
-
2011
- 2011-03-03 WO PCT/US2011/026957 patent/WO2011119308A2/en not_active Ceased
- 2011-03-03 GB GB1218457.8A patent/GB2492026B/en not_active Expired - Fee Related
- 2011-03-03 JP JP2013501282A patent/JP5505918B2/ja not_active Expired - Fee Related
- 2011-03-03 CN CN201180015676.2A patent/CN103003938B/zh not_active Expired - Fee Related
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