JP2013519111A5 - - Google Patents

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Publication number
JP2013519111A5
JP2013519111A5 JP2012551583A JP2012551583A JP2013519111A5 JP 2013519111 A5 JP2013519111 A5 JP 2013519111A5 JP 2012551583 A JP2012551583 A JP 2012551583A JP 2012551583 A JP2012551583 A JP 2012551583A JP 2013519111 A5 JP2013519111 A5 JP 2013519111A5
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Japan
Prior art keywords
holograms
group
polymer composition
photosensitive polymer
organic group
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JP2012551583A
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English (en)
Japanese (ja)
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JP2013519111A (ja
JP6023592B2 (ja
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Priority claimed from PCT/EP2011/051246 external-priority patent/WO2011095441A1/de
Publication of JP2013519111A publication Critical patent/JP2013519111A/ja
Publication of JP2013519111A5 publication Critical patent/JP2013519111A5/ja
Application granted granted Critical
Publication of JP6023592B2 publication Critical patent/JP6023592B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012551583A 2010-02-02 2011-01-28 トリアジン系書込モノマー含有感光性ポリマー組成物 Expired - Fee Related JP6023592B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10001006 2010-02-02
EP10001006.5 2010-02-02
PCT/EP2011/051246 WO2011095441A1 (de) 2010-02-02 2011-01-28 Photopolymer-formulierung mit triazin-basierten schreibmonomeren

Publications (3)

Publication Number Publication Date
JP2013519111A JP2013519111A (ja) 2013-05-23
JP2013519111A5 true JP2013519111A5 (https=) 2014-03-13
JP6023592B2 JP6023592B2 (ja) 2016-11-09

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JP2012551583A Expired - Fee Related JP6023592B2 (ja) 2010-02-02 2011-01-28 トリアジン系書込モノマー含有感光性ポリマー組成物

Country Status (8)

Country Link
US (1) US9366957B2 (https=)
EP (1) EP2531892B1 (https=)
JP (1) JP6023592B2 (https=)
KR (1) KR20120125270A (https=)
CN (1) CN102763037A (https=)
BR (1) BR112012019378A2 (https=)
RU (1) RU2012137134A (https=)
WO (1) WO2011095441A1 (https=)

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KR102214895B1 (ko) * 2017-12-26 2021-02-09 삼성에스디아이 주식회사 레지스트 하층막용 조성물 및 이를 이용한 패턴 형성 방법
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