JP2013516602A5 - - Google Patents

Download PDF

Info

Publication number
JP2013516602A5
JP2013516602A5 JP2012546447A JP2012546447A JP2013516602A5 JP 2013516602 A5 JP2013516602 A5 JP 2013516602A5 JP 2012546447 A JP2012546447 A JP 2012546447A JP 2012546447 A JP2012546447 A JP 2012546447A JP 2013516602 A5 JP2013516602 A5 JP 2013516602A5
Authority
JP
Japan
Prior art keywords
sensing system
sensors
sensor
pair
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012546447A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013516602A (ja
JP5599899B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2010/070889 external-priority patent/WO2011080309A1/en
Publication of JP2013516602A publication Critical patent/JP2013516602A/ja
Publication of JP2013516602A5 publication Critical patent/JP2013516602A5/ja
Application granted granted Critical
Publication of JP5599899B2 publication Critical patent/JP5599899B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012546447A 2009-12-31 2010-12-29 差動ペアを備えた静電容量感知システム Active JP5599899B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US29141109P 2009-12-31 2009-12-31
US61/291,411 2009-12-31
PCT/EP2010/070889 WO2011080309A1 (en) 2009-12-31 2010-12-29 Capacitive sensing system with differential pairs

Publications (3)

Publication Number Publication Date
JP2013516602A JP2013516602A (ja) 2013-05-13
JP2013516602A5 true JP2013516602A5 (enExample) 2014-02-20
JP5599899B2 JP5599899B2 (ja) 2014-10-01

Family

ID=43640437

Family Applications (5)

Application Number Title Priority Date Filing Date
JP2012546449A Active JP5781541B2 (ja) 2009-12-31 2010-12-29 露光方法
JP2012546447A Active JP5599899B2 (ja) 2009-12-31 2010-12-29 差動ペアを備えた静電容量感知システム
JP2012546446A Active JP5784630B2 (ja) 2009-12-31 2010-12-29 静電容量感知システム
JP2012546448A Expired - Fee Related JP5559359B2 (ja) 2009-12-31 2010-12-29 統合されたセンサシステム
JP2014243368A Active JP5917665B2 (ja) 2009-12-31 2014-12-01 静電容量感知システム

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2012546449A Active JP5781541B2 (ja) 2009-12-31 2010-12-29 露光方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2012546446A Active JP5784630B2 (ja) 2009-12-31 2010-12-29 静電容量感知システム
JP2012546448A Expired - Fee Related JP5559359B2 (ja) 2009-12-31 2010-12-29 統合されたセンサシステム
JP2014243368A Active JP5917665B2 (ja) 2009-12-31 2014-12-01 静電容量感知システム

Country Status (8)

Country Link
US (5) US8570055B2 (enExample)
EP (4) EP2519800B1 (enExample)
JP (5) JP5781541B2 (enExample)
KR (5) KR101436947B1 (enExample)
CN (6) CN102782585A (enExample)
RU (4) RU2012132634A (enExample)
TW (5) TWI512265B (enExample)
WO (4) WO2011080310A1 (enExample)

Families Citing this family (103)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8151995B2 (en) * 2008-02-04 2012-04-10 Texas Instruments Incorporated Methods and apparatus to prevent mold compound feeder jams in systems to package integrated circuits
US8570055B2 (en) * 2009-12-31 2013-10-29 Mapper Lithography Ip B.V. Capacitive sensing system
US8688393B2 (en) * 2010-07-29 2014-04-01 Medtronic, Inc. Techniques for approximating a difference between two capacitances
GB201016556D0 (en) * 2010-10-01 2010-11-17 Senergy Technology Ltd Methods for providing for correcting data and associated apparatus
JP5353991B2 (ja) * 2010-11-30 2013-11-27 株式会社日本自動車部品総合研究所 静電容量式乗員検知装置
KR20120080923A (ko) * 2011-01-10 2012-07-18 삼성전자주식회사 반도체 패키지 및 이의 제조 방법
EP3073323B1 (en) * 2011-04-22 2021-03-03 ASML Netherlands B.V. Alignment sensor, lithography system for processing a target, such as a wafer, and method for operating a lithography system for processing a target, such as a wafer
WO2013001098A2 (en) 2011-06-30 2013-01-03 Mapper Lithography Ip B.V. Active shield for capacitive measurement system
US8933712B2 (en) 2012-01-31 2015-01-13 Medtronic, Inc. Servo techniques for approximation of differential capacitance of a sensor
JP5909822B2 (ja) * 2012-02-27 2016-04-27 アルプス・グリーンデバイス株式会社 電流センサ及びその作製方法
US8961228B2 (en) * 2012-02-29 2015-02-24 Tyco Electronics Corporation Electrical connector having shielded differential pairs
TWI584334B (zh) 2012-03-08 2017-05-21 瑪波微影Ｉｐ公司 具有準直感測器和射束測量感測器的帶電粒子微影系統
JP6219320B2 (ja) 2012-03-08 2017-10-25 マッパー・リソグラフィー・アイピー・ビー．ブイ． ウェーハなどのターゲットを処理するためのリソグラフィシステム及び方法
DE102012205122B4 (de) * 2012-03-29 2024-06-20 Robert Bosch Gmbh Kapazitives Ortungsgerät
JP5934546B2 (ja) * 2012-03-29 2016-06-15 株式会社Ｓｃｒｅｅｎホールディングス 描画装置および描画方法
JP5981270B2 (ja) * 2012-08-28 2016-08-31 日置電機株式会社 電圧測定用センサおよび電圧測定装置
JP5981271B2 (ja) * 2012-08-28 2016-08-31 日置電機株式会社 電圧測定用センサおよび電圧測定装置
US9692875B2 (en) * 2012-08-31 2017-06-27 Analog Devices, Inc. Grip detection and capacitive gesture system for mobile devices
TWI464371B (zh) * 2012-10-22 2014-12-11 Pixart Imaging Inc 微機電裝置與製作方法
EP2948825A4 (en) * 2013-01-23 2016-09-14 Nokia Technologies Oy METHOD AND DEVICE FOR LIMITING A DETECTION REGION OF A CAPACITIVE ELECTRODE ARRANGEMENT
CN109187656B (zh) * 2013-03-15 2021-11-16 伊利昂科技有限公司 测量物质的电学性能的装置和方法
TW201504631A (zh) * 2013-07-23 2015-02-01 Mpi Corp 光電元件檢測用之高頻探針卡
NL2013438B1 (en) * 2013-09-07 2016-05-18 Mapper Lithography Ip Bv Target processing unit.
US9739816B2 (en) * 2013-11-27 2017-08-22 Analog Devices, Inc. Capacitive sensor with differential shield
US9952266B2 (en) 2014-02-14 2018-04-24 Witricity Corporation Object detection for wireless energy transfer systems
JP6452140B2 (ja) 2014-02-19 2019-01-16 本田技研工業株式会社 距離センサ及び計測方法
KR102224824B1 (ko) * 2014-05-30 2021-03-08 삼성전자 주식회사 Ito 전극패턴을 포함하는 전자장치 및 그 전자장치의 제조방법
US10139869B2 (en) 2014-07-23 2018-11-27 Analog Devices, Inc. Capacitive sensors for grip sensing and finger tracking
US9811218B2 (en) 2014-08-16 2017-11-07 Synaptics Incorporated Location based object classification
EP3215869B1 (en) 2014-11-03 2021-12-08 Illinois Tool Works Inc. Transmissive front-face heater for vehicle sensor system
UA114724C2 (uk) * 2014-12-23 2017-07-25 Микола Іванович Єпіфанов Автономний модульний пристрій для підвищення безпеки транспортного засобу і кластерний пристрій для його реалізації
DE112016001348T5 (de) * 2015-03-23 2018-02-15 Iee International Electronics & Engineering S.A. Kapazitives Erfassungssystem mit Gerätediagnosekonzept zur Erfassung einer Sensorunterbrechung
KR101679204B1 (ko) * 2015-04-22 2016-11-25 에이디반도체(주) 감지신호 전달 장치 및 이를 이용한 정전용량 센서 장치
CN105185283B (zh) * 2015-10-23 2017-12-08 京东方科技集团股份有限公司 检测装置、基板架、检测基板架上基板位置的方法
DE102016202456B4 (de) 2016-02-17 2017-10-26 Olympus Winter & Ibe Gmbh Chirurgievorrichtung mit Funktionsvorrichtung
JP6650325B2 (ja) * 2016-04-01 2020-02-19 アルプスアルパイン株式会社 入力装置
US9852833B1 (en) * 2016-06-28 2017-12-26 Alcatel-Lucent Usa Inc. Magnetization alignment in a thin-film device
US9725302B1 (en) * 2016-08-25 2017-08-08 Applied Materials, Inc. Wafer processing equipment having exposable sensing layers
JP6775800B2 (ja) * 2016-10-25 2020-10-28 島根県 静電容量型センサ
CN108007327A (zh) * 2016-10-31 2018-05-08 深圳指瑞威科技有限公司 电容式距离传感器
FR3060733B1 (fr) * 2016-12-16 2019-01-25 Fogale Nanotech Dispositif et procede de detection de l'approche et/ou de contact, et de l'appui d'un objet, relativement a une surface de detection
FR3062205B1 (fr) * 2017-01-23 2020-01-31 Fogale Nanotech Dispositif capacitif de detection d'un objet electriquement flottant
EP3379204B1 (en) * 2017-03-22 2021-02-17 Knowles Electronics, LLC Arrangement to calibrate a capacitive sensor interface
TWI613578B (zh) * 2017-04-10 2018-02-01 友達光電股份有限公司 觸控電極陣列和觸控顯示裝置
US11415685B2 (en) * 2017-04-21 2022-08-16 Hewlett-Packard Development Company, L.P. Sensors calibration
CN107204325B (zh) * 2017-05-25 2023-06-02 成都线易科技有限责任公司 电容器阵列及制造方法
JP6718622B2 (ja) * 2017-05-26 2020-07-08 株式会社京岡 隙間センサおよび隙間測定方法
JP7094513B2 (ja) * 2017-06-19 2022-07-04 ユニパルス株式会社 厚み測定装置
KR101879285B1 (ko) * 2017-08-01 2018-07-17 송청담 고감도 정전 센서 회로
GB2566053A (en) 2017-08-31 2019-03-06 Weston Aerospace Ltd Sensor and method of manufacturing same
JP7058409B2 (ja) * 2017-09-06 2022-04-22 島根県 設置自由度の高い静電容量型センサ
JP7048043B2 (ja) * 2017-12-26 2022-04-05 島根県 非接触測定システム
KR102394081B1 (ko) * 2018-02-27 2022-05-04 삼성전자주식회사 감지 회로를 이용한 벤딩 정보에 기반하여 동작 모드를 변경하기 위한 방법, 전자 장치 및 저장 매체
CN110221594B (zh) * 2018-03-01 2024-07-12 苏州宝时得电动工具有限公司 电容传感器及自动行走设备
RU2688734C1 (ru) * 2018-04-06 2019-05-22 Общество с ограниченной ответственностью "СБ "Марит" (ООО "СБ "Марит") Емкостное средство обнаружения
US11953388B2 (en) * 2018-05-16 2024-04-09 Alleima Tube Ab Metallic tube structure with a sensor arrangement
CN108413856B (zh) * 2018-05-30 2020-07-10 华中科技大学 一种基于双变压器远距离隔离传输的电容位移传感装置
CN108562216B (zh) * 2018-05-30 2020-07-10 华中科技大学 一种基于变压器初级远距离传输的电容位移传感装置
EP3594639B1 (de) * 2018-07-13 2022-09-28 Tecan Trading Ag Vorrichtung und verfahren zur kapazitiven füllstandsmessung in flüssigkeitsbehältern
EP3608624B1 (de) * 2018-08-06 2022-06-29 Hexagon Technology Center GmbH Kapazitiver distanzsensor
US11342210B2 (en) 2018-09-04 2022-05-24 Applied Materials, Inc. Method and apparatus for measuring wafer movement and placement using vibration data
US11404296B2 (en) * 2018-09-04 2022-08-02 Applied Materials, Inc. Method and apparatus for measuring placement of a substrate on a heater pedestal
US10794681B2 (en) * 2018-09-04 2020-10-06 Applied Materials, Inc. Long range capacitive gap measurement in a wafer form sensor system
US11521872B2 (en) 2018-09-04 2022-12-06 Applied Materials, Inc. Method and apparatus for measuring erosion and calibrating position for a moving process kit
US10847393B2 (en) 2018-09-04 2020-11-24 Applied Materials, Inc. Method and apparatus for measuring process kit centering
ES2949965T3 (es) * 2018-10-30 2023-10-04 Prysmian Spa Junta de cable retráctil y sensor de voltaje
KR102518210B1 (ko) * 2018-11-15 2023-04-04 케이엘에이 코포레이션 웨이퍼 검사를 위한 유연한 전자 장치를 가진 다중 센서 타일형 카메라
US10724964B1 (en) 2019-04-10 2020-07-28 Kla-Tencor Corporation Multi-sensor tiled camera with flexible electronics for wafer inspection
EP3654532B1 (en) * 2018-11-16 2022-05-18 Bently Nevada, LLC Proximity sensing system with component compatibility testing
CN109581511B (zh) * 2018-11-23 2020-06-16 辽宁大学 一种基于感应原理的非接触式煤岩带电监测传感器标定系统及方法
EP3896385B1 (en) * 2018-12-11 2024-01-17 Rorze Corporation Electrostatic capacitance sensor
US10809048B2 (en) * 2019-01-08 2020-10-20 Formfactor Beaverton, Inc. Probe systems and methods for calibrating capacitive height sensing measurements
DE102019102965A1 (de) * 2019-02-06 2020-08-06 Physik Instrumente (Pi) Gmbh & Co. Kg Haltevorrichtung für eine optische Faser
US10837803B2 (en) * 2019-04-12 2020-11-17 Kla Corporation Inspection system with grounded capacitive sample proximity sensor
CN110044253A (zh) * 2019-05-27 2019-07-23 中国工程物理研究院电子工程研究所 一种微马达及内嵌式角度测量装置
RU2722167C1 (ru) * 2019-08-11 2020-05-27 Сергей Викторович Тюрин Способ бесконтактного измерения смещения токоведущего проводника от геометрического центра кабельной жилы
JP7261351B2 (ja) * 2019-08-13 2023-04-19 サン－ゴバン グラス フランス 両側にセンサーアセンブリを有している複合パネル
RU2717904C1 (ru) * 2019-09-13 2020-03-26 Общество С Ограниченной Ответственностью "Конструкторское Бюро "Дорс" (Ооо "Кб "Дорс") Способ измерения при помощи дифференциального датчика
CN110631465B (zh) * 2019-09-16 2021-04-16 太原理工大学 基于电容原理差动式测量的积灰结渣在线监测装置及方法
CN110779965B (zh) * 2019-10-22 2022-08-02 电子科技大学 一种大面积表面损伤柔性探测装置
US11274037B2 (en) * 2019-10-30 2022-03-15 Taiwan Semiconductor Manufacturing Co., Ltd. Dual micro-electro mechanical system and manufacturing method thereof
CN112744779B (zh) * 2019-10-30 2024-02-23 台湾积体电路制造股份有限公司 微机电系统及其制造方法
RU197920U1 (ru) * 2020-01-28 2020-06-05 Акционерное общество "ПК Альматек" Печатная плата устройства для предъявления электрических импульсов при транслингвальной нейростимуляции
EP4139669B1 (en) * 2020-04-24 2025-01-15 Agco Corporation Agricultural machines comprising capacitive sensors, and related methods and apparatus
US11646707B2 (en) * 2020-05-21 2023-05-09 Novatek Microelectronics Corp. Analog front end with pulse width modulation current compensation
US11574530B2 (en) 2020-06-04 2023-02-07 Ecolink Intelligent Technology, Inc. Electronic sensor with flexible sensing device
CN112325980B (zh) * 2020-10-30 2024-03-01 中国航空工业集团公司西安航空计算技术研究所 自平衡交流电桥电容式油量传感器采集装置及方法
US11275312B1 (en) * 2020-11-30 2022-03-15 Waymo Llc Systems and methods for verifying photomask cleanliness
EP4262932A1 (en) * 2020-12-16 2023-10-25 Sanofi Electrode system, electronic system, drug delivery device, and a method of manufacturing an electronic system
US11940336B2 (en) * 2021-03-26 2024-03-26 Sporian Microsystems, Inc. Driven-shield capacitive pressure sensor
CN115267345B (zh) * 2021-04-29 2024-11-01 财团法人工业技术研究院 具校正功能的微机电感测装置
CN113720249A (zh) * 2021-09-14 2021-11-30 上海钊晟传感技术有限公司 一种高精度大量程电容位移传感器
CN114396862A (zh) * 2021-11-30 2022-04-26 安徽见行科技有限公司 一种电容位移传感器及其柔性探头、柔性连接线
TWI790857B (zh) * 2021-12-15 2023-01-21 財團法人工業技術研究院 差動式電容裝置與差動式電容校準方法
CN114526144B (zh) * 2022-02-25 2023-03-21 潍柴动力股份有限公司 一种NOx传感器安装位置识别方法、装置、车辆及介质
EP4258320A1 (en) 2022-04-08 2023-10-11 ASML Netherlands B.V. Sensor substrate, apparatus, and method
CN114963998B (zh) * 2022-05-09 2025-05-30 国科大杭州高等研究院 一种用于精密激光干涉测量标定的亚纳米级高精度微位移装置及应用
EP4310885A1 (en) 2022-07-21 2024-01-24 ASML Netherlands B.V. Electron-optical apparatus and method of obtaining topographical information about a sample surface
TWI822621B (zh) * 2023-03-30 2023-11-11 力晶積成電子製造股份有限公司 檢測裝置
US12313664B2 (en) 2023-08-18 2025-05-27 Elite Semiconductor Microelectronics Technology Inc. Capacitance measurement circuit
TWI850116B (zh) * 2023-09-21 2024-07-21 晶豪科技股份有限公司 電容量測電路
CN118991500B (zh) * 2024-10-17 2025-01-07 广州特伏科技有限公司 一种移动式新能源充电桩
CN119311156B (zh) * 2024-12-11 2025-06-03 基合半导体（宁波）有限公司 电容式触摸板及电子设备

Family Cites Families (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3522528A (en) * 1968-02-27 1970-08-04 Trw Inc Noncontacting capacitance distance gauge having a servosystem and a position sensor
SU932208A1 (ru) * 1978-07-17 1982-05-30 Ордена Трудового Красного Знамени Предприятие П/Я А-1742 Устройство дл измерени рассто ний до провод щей поверхности
GB2131176B (en) 1982-10-07 1986-02-19 Rolls Royce Method of manufacturing a capacitance distance measuring probe
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
JPS615317A (ja) * 1984-06-18 1986-01-11 Omron Tateisi Electronics Co 自動焦点合わせ装置
SU1195182A1 (ru) * 1984-07-26 1985-11-30 Институт Электродинамики Ан Усср Емкостный измеритель перемещений
US4766368A (en) * 1986-09-30 1988-08-23 Cox Harold A Capacitive sensor
JP2518301B2 (ja) * 1987-09-11 1996-07-24 株式会社ニコン 間隔測定装置
AT393040B (de) 1988-03-03 1991-07-25 Setec Messgeraete Gmbh Kapazitiver naeherungsgeber
JPH01285801A (ja) * 1988-05-12 1989-11-16 Koko Res Kk 近接距離センサー及び形状判別装置
JP2807827B2 (ja) * 1989-07-03 1998-10-08 直之 大纒 静電容量型距離計
US5337353A (en) * 1992-04-01 1994-08-09 At&T Bell Laboratories Capacitive proximity sensors
JP2516666Y2 (ja) * 1992-10-23 1996-11-06 株式会社ミツトヨ 静電容量式変位測定装置
JPH0682506U (ja) * 1993-04-28 1994-11-25 兼子興産株式会社 非接触厚さ計
US5539323A (en) * 1993-05-07 1996-07-23 Brooks Automation, Inc. Sensor for articles such as wafers on end effector
JP3520881B2 (ja) * 1995-07-03 2004-04-19 株式会社ニコン 露光装置
JP3328710B2 (ja) 1995-08-23 2002-09-30 オムロン株式会社 半導体静電容量型センサ
WO1997029391A1 (en) 1996-02-09 1997-08-14 Scandmec Ab Device for sensing presence of an electrically conducting object
JPH09280806A (ja) * 1996-04-09 1997-10-31 Nissan Motor Co Ltd 静電容量式変位計
US5844486A (en) * 1997-01-02 1998-12-01 Advanced Safety Concepts, Inc. Integral capacitive sensor array
US6075375A (en) * 1997-06-11 2000-06-13 Applied Materials, Inc. Apparatus for wafer detection
JP3356043B2 (ja) * 1997-12-26 2002-12-09 三菱電機株式会社 レーザ加工装置用距離検出器
US5990473A (en) * 1998-02-04 1999-11-23 Sandia Corporation Apparatus and method for sensing motion in a microelectro-mechanical system
DE19812626A1 (de) * 1998-03-23 1999-09-30 Bayerische Motoren Werke Ag Verfahren zur kapazitiven Objekterkennung bei Fahrzeugen
JP3246726B2 (ja) * 1998-11-13 2002-01-15 株式会社ミツトヨ 静電容量式変位検出器及び測定装置
US6249130B1 (en) * 1998-12-21 2001-06-19 Agrichem, Inc. Shielded flat-plate proximity/dielectric properties sensor
WO2000050261A2 (en) * 1999-02-24 2000-08-31 Advanced Safety Concepts, Inc. Capacitive sensors for vehicular environments
JP2001091205A (ja) * 1999-07-22 2001-04-06 Sumitomo Metal Ind Ltd 物体搭載装置
JP4872989B2 (ja) * 1999-07-22 2012-02-08 東京エレクトロン株式会社 静電容量型センサ部品、物体搭載体、半導体製造装置および液晶表示素子製造装置
GB0000619D0 (en) * 2000-01-13 2000-03-01 British Aerospace Accelerometer
US6633050B1 (en) * 2000-08-15 2003-10-14 Asml Holding Nv. Virtual gauging system for use in lithographic processing
US7561270B2 (en) * 2000-08-24 2009-07-14 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
EP1231515B1 (en) * 2001-02-08 2008-11-05 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
US6859260B2 (en) * 2001-04-25 2005-02-22 Asml Holding N.V. Method and system for improving focus accuracy in a lithography system
JP3980387B2 (ja) * 2002-03-20 2007-09-26 富士通株式会社 容量検出型センサ及びその製造方法
US20040207395A1 (en) * 2002-04-08 2004-10-21 Moshe Sarfaty Eddy current-capacitance sensor for conducting film characterization
CA2492835A1 (en) * 2002-06-15 2003-12-24 Nfab Limited Charged particle beam generator
WO2004040240A1 (en) * 2002-10-31 2004-05-13 Harald Philipp Charge transfer capacitive position sensor
FI115109B (fi) * 2003-01-22 2005-02-28 Nokia Corp Tunnistusjärjestely ja tunnistusjärjestelyn käsittävä matkaviestin
JP4067053B2 (ja) * 2003-03-13 2008-03-26 キヤノン株式会社 静電容量センサ式計測装置
JP4054693B2 (ja) * 2003-02-27 2008-02-27 株式会社ミツトヨ 静電容量式変位測定器
US7114399B2 (en) * 2003-03-19 2006-10-03 Ade Corporation Shaped non-contact capacitive displacement sensors for measuring shaped targets
JP4029770B2 (ja) * 2003-05-15 2008-01-09 オムロン株式会社 厚み検出センサ
JP4042973B2 (ja) * 2003-11-07 2008-02-06 株式会社日本自動車部品総合研究所 非接触式車両用接近体検出装置
JP2005156492A (ja) * 2003-11-28 2005-06-16 Agilent Technol Inc 可動機構、測定装置、静電容量式距離測定装置、および、位置決め装置
JP2005175173A (ja) 2003-12-10 2005-06-30 Nikon Corp 露光方法及び装置、並びにデバイス製造方法
US20050134865A1 (en) * 2003-12-17 2005-06-23 Asml Netherlands B.V. Method for determining a map, device manufacturing method, and lithographic apparatus
JP2005183744A (ja) * 2003-12-22 2005-07-07 Nikon Corp 露光装置及びデバイス製造方法
JP4843503B2 (ja) 2004-01-20 2011-12-21 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置および投影レンズのための測定装置
US20070229791A1 (en) * 2004-03-16 2007-10-04 Nikon Corporation Step Measuring Device and Apparatus, and Exposure Method and Apparatus
US6989679B2 (en) 2004-06-03 2006-01-24 General Electric Company Non-contact capacitive sensor and cable with dual layer active shield
JP4356570B2 (ja) * 2004-09-16 2009-11-04 沖電気工業株式会社 静電容量型距離センサ
JP4720747B2 (ja) * 2004-12-02 2011-07-13 株式会社ニコン 露光装置、露光方法、及びデバイス製造方法
KR20060082223A (ko) * 2005-01-11 2006-07-18 삼성전자주식회사 화상인식 반도체 모듈
US7342641B2 (en) * 2005-02-22 2008-03-11 Nikon Corporation Autofocus methods and devices for lithography
US7208960B1 (en) * 2006-02-10 2007-04-24 Milliken & Company Printed capacitive sensor
US7395717B2 (en) * 2006-02-10 2008-07-08 Milliken & Company Flexible capacitive sensor
GB2450261A (en) * 2006-02-21 2008-12-17 Cyberoptics Semiconductor Inc Capacitive distance sensing in semiconductor processing tools
CA2630541A1 (en) * 2006-02-27 2007-09-07 Edwards Lifesciences Corporation Method and apparatus for using flex circuit technology to create a reference electrode channel
EP2089969B1 (de) * 2006-03-13 2013-07-10 IDENT Technology AG Kapazitive sensoreinrichtung
JP4828316B2 (ja) * 2006-06-13 2011-11-30 三菱電機株式会社 レーザ加工機用のギャップ検出装置及びレーザ加工システム並びにレーザ加工機用のギャップ検出方法
RU2338997C2 (ru) * 2006-07-13 2008-11-20 Федеральное государственное унитарное предприятие "Центральный научно-исследовательский институт "Электроприбор" Способ измерения зазора между электродами и подвижной массой микромеханического устройства и устройство для его реализации
RU2318183C1 (ru) * 2006-08-09 2008-02-27 Общество С Ограниченной Ответственностью "Диамех 2000" Устройство для измерения воздушного зазора
US20080079920A1 (en) * 2006-09-29 2008-04-03 Heiko Hommen Wafer exposure device and method
JP4609731B2 (ja) * 2006-10-31 2011-01-12 株式会社デンソー 静電容量式乗員検知センサ
JP2008111758A (ja) * 2006-10-31 2008-05-15 Yamatake Corp 容量式電磁流量計
NL1036009A1 (nl) * 2007-10-05 2009-04-07 Asml Netherlands Bv An Immersion Lithography Apparatus.
JP2009109208A (ja) * 2007-10-26 2009-05-21 Ono Sokki Co Ltd 測定装置および測定方法
NL1036069A1 (nl) * 2007-10-30 2009-05-07 Asml Netherlands Bv An Immersion Lithography Apparatus.
NL1036547A1 (nl) * 2008-02-20 2009-08-24 Asml Holding Nv Gas gauge compatible with vacuum environments.
NL1036516A1 (nl) * 2008-03-05 2009-09-08 Asml Netherlands Bv Lithographic apparatus and method.
NL1036709A1 (nl) * 2008-04-24 2009-10-27 Asml Netherlands Bv Lithographic apparatus and a method of operating the apparatus.
US8872771B2 (en) * 2009-07-07 2014-10-28 Apple Inc. Touch sensing device having conductive nodes
US8570055B2 (en) * 2009-12-31 2013-10-29 Mapper Lithography Ip B.V. Capacitive sensing system

Similar Documents

Publication Publication Date Title
JP2013516602A5 (enExample)
RU2012132638A (ru) Емкостная измерительная система с дифференциальными парами
US20080231290A1 (en) Capacitive Position Sensor
US9551738B2 (en) Robust capacitive measurement system
JP5951005B2 (ja) 電束に関する異なる二つの値によって対象物の電位を非接触式に検出するための方法並びに装置
CN101726518B (zh) 溶液电导率的测量方法
JP5553848B2 (ja) 微小インピーダンス変動検出装置
CN102870327B (zh) 介电对象的检测
CA2696414A1 (en) Method and system for calibrating streamer electrodes in a marine electromagnetic survey system
JP2011003071A (ja) 近接検出装置および近接検出方法
CN102741711A (zh) 无误差电容性记录测量值的装置和方法
JP2012177571A (ja) 交流電力測定装置
CN102870011A (zh) 金属的或磁性对象的检测
ES2441869T3 (es) Dispositivo de sensor para generar señales que son indicativas de la posición o el cambio de la posición de extremidades
ATE511699T1 (de) Plasmasystem und messverfahren
JP2006084318A (ja) 静電容量型距離センサ
WO2016194358A1 (ja) 皮膚抵抗測定装置
CN104169743B (zh) 电容式定位设备
WO2015178051A1 (ja) 電圧計測装置および電圧計測方法
TWI432744B (zh) 利用共振頻移之電容式觸控螢幕之電氣特性檢查裝置
JP6961180B2 (ja) 隙間測定装置、測定子
US9372217B2 (en) Cable detector
WO2006123141A2 (en) Capacitive liquid level sensor
US10539600B2 (en) Semiconductor device and AC resistance measuring system including the same
US20150015231A1 (en) Capacitive Positioning Device