JP2013507004A - クロスフローを有するエピタキシャルチャンバ - Google Patents
クロスフローを有するエピタキシャルチャンバ Download PDFInfo
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- JP2013507004A JP2013507004A JP2012532245A JP2012532245A JP2013507004A JP 2013507004 A JP2013507004 A JP 2013507004A JP 2012532245 A JP2012532245 A JP 2012532245A JP 2012532245 A JP2012532245 A JP 2012532245A JP 2013507004 A JP2013507004 A JP 2013507004A
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- 238000000034 method Methods 0.000 claims abstract description 182
- 239000000758 substrate Substances 0.000 claims abstract description 116
- 239000007789 gas Substances 0.000 claims description 151
- 238000000151 deposition Methods 0.000 claims description 23
- 239000000203 mixture Substances 0.000 claims description 18
- 230000003993 interaction Effects 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 14
- 229910000078 germane Inorganic materials 0.000 claims description 7
- 239000000460 chlorine Substances 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 5
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 5
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 claims description 5
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 4
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 239000002243 precursor Substances 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 3
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 claims description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 229910052732 germanium Inorganic materials 0.000 description 7
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000001020 rhythmical effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000012686 silicon precursor Substances 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (15)
- 基板を処理するための装置であって、
中に基板の処理面をプロセスチャンバ内の所望の位置に支持するための基板支持体を有するプロセスチャンバと、
前記基板の前記処理面上に第1の方向に第1のプロセスガスを提供するための第1の吸入口と、
前記基板の前記処理面上に前記第1の方向と異なる第2の方向に第2のプロセスガスを提供するための第2の吸入口であって、前記基板支持体の中心軸に対して前記第1の方向と前記第2の方向の間で測定される方位角が最大約145度である第2の吸入口と、
前記第1のプロセスガスおよび第2のプロセスガスを前記プロセスチャンバから排気するために、前記第1の吸入口の反対側に配置された排気口と
を備える装置。 - 前記方位角が約90度である、請求項1に記載の装置。
- 前記処理面に対する前記第1の吸入口および前記第2の吸入口の一方または両方の高さが調整可能である、請求項1または2に記載の装置。
- 前記処理面に対する前記第2の吸入口の高さが、前記処理面に対する前記第1の吸入口の高さよりも大きい、請求項1または2に記載の装置。
- 前記基板の前記処理面を前記処理面に垂直な軸に沿った複数の位置に支持するために、前記基板支持体が前記プロセスチャンバ内でさらに移動可能に配置される、請求項1または2に記載の装置。
- 前記第2の流れの方向が前記処理面に向けられる、請求項1または2に記載の装置。
- 前記第1の吸入口が、それぞれが前記第1のプロセスガスを送達可能な第1の複数の2次的な入口をさらに備え、かつ/または
前記第2の吸入口が、それぞれが前記第2のプロセスガスを送達可能な第2の複数の2次的な入口をさらに備える、
請求項1または2に記載の装置。 - 前記第1の複数の2次的な入口のうちの少なくとも1つの2次的な入口が、前記第1の複数の2次的な入口のうちの少なくとも1つの他の2次的な入口とは異なる組成物の前記第1のプロセスガスを提供することができ、および/または前記第2の複数の2次的な入口のうちの少なくとも1つの2次的な入口が、前記第2の複数の2次的な入口のうちの少なくとも1つの他の2次的な入口とは異なる組成物の前記第2のプロセスガスを提供することができる、請求項7に記載の装置。
- 前記第1の複数の2次的な入口および/または前記第2の複数の2次的な入口のうちの1つまたは複数の前記2次的な入口からのプロセスガスの流量が独立して調整可能である、請求項7に記載の装置。
- 前記基板支持体を前記中心軸の周りで回転させるように前記基板支持体に結合されている回転機構、および
前記基板支持体を前記中心軸に沿って動かすように前記基板支持体に結合されているリフト機構
のうちの少なくとも1つをさらに備える、請求項1または2に記載の装置。 - 基板上に層を堆積させるための方法であって、
基板の処理面にわたって第1の方向に第1のプロセスガスを流すステップと、
前記基板の前記処理面にわたって前記第1の方向とは異なる第2の方向に第2のプロセスガスを流すステップであって、前記基板の中心軸に対して前記第1の方向と前記第2の方向の間で測定される方位角が最大約145度であるステップと、
前記基板上に、少なくとも部分的に前記第1のプロセスガスと第2のプロセスガスのクロスフロー相互作用から形成される層を堆積させるステップと
を含む方法。 - 前記第1のプロセスガスと第2のプロセスガスとが同一でも異なってもよく、それぞれが、
シラン(SiH4)、ジシラン(Si2H6)、およびジクロロシラン(H2SiCl2)のうちの少なくとも1つを含む堆積ガスと、
メチルシラン(H3CSiH3)、ゲルマン(GeH4)、ホスフィン(PH3)、ジボラン(B2H6)、およびアルシン(AsH3)のうちの少なくとも1つを含むドーパント前駆体ガスと、
メタン(CH3)、塩化水素(HCl)、塩素(Cl2)、およびフッ化水素(HF)の1つまたは複数を含むエッチャントガスと、
窒素(N2)、アルゴン(Ar)、ヘリウム(He)、および水素(H2)のうちの少なくとも1つを含むキャリアガスと
を含む、請求項11に記載の方法。 - 前記第2の流れの方向が前記処理面に対して角度を有する、請求項11または12に記載の方法。
- 前記第1のプロセスガスおよび第2のプロセスガスのうちの少なくとも1つを流すときに、前記基板を前記中心軸の周りで回転させるステップ、および/または
前記第1のプロセスガスおよび第2のプロセスガスのうちの少なくとも1つを流すときに、前記基板を前記中心軸に沿って動かすステップ
をさらに備える、請求項11または12に記載の方法。 - 前記第1のプロセスガスおよび第2のプロセスガスを、交互のパターンまたは周期的なパターンで律動的に送る、または前記第1のプロセスガスおよび第2のプロセスガスを同時に流す、請求項11または12に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24858509P | 2009-10-05 | 2009-10-05 | |
US61/248,585 | 2009-10-05 | ||
US12/887,647 US9127360B2 (en) | 2009-10-05 | 2010-09-22 | Epitaxial chamber with cross flow |
US12/887,647 | 2010-09-22 | ||
PCT/US2010/050593 WO2011043961A2 (en) | 2009-10-05 | 2010-09-28 | Epitaxial chamber with cross flow |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013507004A true JP2013507004A (ja) | 2013-02-28 |
JP2013507004A5 JP2013507004A5 (ja) | 2013-11-14 |
JP5908403B2 JP5908403B2 (ja) | 2016-04-26 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012532245A Active JP5908403B2 (ja) | 2009-10-05 | 2010-09-28 | クロスフローを有するエピタキシャルチャンバ |
Country Status (7)
Country | Link |
---|---|
US (1) | US9127360B2 (ja) |
JP (1) | JP5908403B2 (ja) |
KR (1) | KR101706060B1 (ja) |
CN (1) | CN102549718B (ja) |
DE (1) | DE112010003931T5 (ja) |
TW (1) | TWI512871B (ja) |
WO (1) | WO2011043961A2 (ja) |
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JP2014516475A (ja) * | 2011-04-22 | 2014-07-10 | アプライド マテリアルズ インコーポレイテッド | 基板上に材料を堆積するための装置 |
JP2017520120A (ja) * | 2014-06-20 | 2017-07-20 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | エピタキシャルチャンバへのガス注入装置 |
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US20140137801A1 (en) * | 2012-10-26 | 2014-05-22 | Applied Materials, Inc. | Epitaxial chamber with customizable flow injection |
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KR101819095B1 (ko) * | 2013-03-15 | 2018-01-16 | 어플라이드 머티어리얼스, 인코포레이티드 | Epi 프로세스를 위한 균일성 튜닝 렌즈를 갖는 서셉터 지지 샤프트 |
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TWI754765B (zh) * | 2017-08-25 | 2022-02-11 | 美商應用材料股份有限公司 | 用於磊晶沉積製程之注入組件 |
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Publication number | Publication date |
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KR101706060B1 (ko) | 2017-02-27 |
TW201126629A (en) | 2011-08-01 |
CN102549718A (zh) | 2012-07-04 |
TWI512871B (zh) | 2015-12-11 |
CN102549718B (zh) | 2016-10-12 |
JP5908403B2 (ja) | 2016-04-26 |
KR20120095382A (ko) | 2012-08-28 |
WO2011043961A3 (en) | 2011-07-14 |
US20110174212A1 (en) | 2011-07-21 |
US9127360B2 (en) | 2015-09-08 |
DE112010003931T5 (de) | 2012-11-08 |
WO2011043961A2 (en) | 2011-04-14 |
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