JP2013115433A - 半導体素子及びその製造方法 - Google Patents
半導体素子及びその製造方法 Download PDFInfo
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Abstract
【解決手段】高電圧領域及び低電圧領域を有する半導体基板100と、高電圧領域に形成され、第1活性領域110-I、第1ソース/ドレイン領域114-I、第1ゲート絶縁膜130及び第1ゲート電極202-Iを有する高電圧トランジスタTR-Iと、低電圧領域に形成され、第2活性領域110-II、第2ソース/ドレイン領域114-II、第2ゲート絶縁膜310及び第2ゲート電極320を有する低電圧トランジスタTR-IIとを備え、第2ソース/ドレイン領域は、第1ソース/ドレイン領域より薄い厚さを有することを特徴とする半導体素子。
【選択図】図13A
Description
104−I 第1素子分離層
104−II,104a−II 第2素子分離層
110−I 第1活性領域
110−II 第2活性領域
112−I 第1LDD領域
112−II 第2LDD領域
114−I 第1ソース/ドレイン領域
114−II,114a−II 第2ソース/ドレイン領域
130 第1ゲート絶縁膜
140 バッファ酸化層
150 界面酸化層
202−I 第1ゲート電極
202−II ダミーゲート電極
204−I 第1スペーサ層
206−II 第2スペーサ層
250 層間絶縁層
310 第2ゲート絶縁膜
320 第2ゲート電極
TR−I 高電圧トランジスタ
TR−II 低電圧トランジスタ
Claims (30)
- 高電圧領域及び低電圧領域を有する半導体基板と、
前記高電圧領域に形成され、第1活性領域、第1ソース/ドレイン領域、第1ゲート絶縁膜及び第1ゲート電極を有する高電圧トランジスタと、
前記低電圧領域に形成され、第2活性領域、第2ソース/ドレイン領域、第2ゲート絶縁膜及び第2ゲート電極を有する低電圧トランジスタと、を備え、
前記第2ソース/ドレイン領域は、前記第1ソース/ドレイン領域より薄い厚さを有することを特徴とする半導体素子。 - 前記第2ソース/ドレイン領域の下面は、前記第1ソース/ドレイン領域の下面より高いレベルを有することを特徴とする請求項1に記載の半導体素子。
- 前記第1ゲート絶縁膜は、前記第2ゲート絶縁膜より厚いことを特徴とする請求項1に記載の半導体素子。
- 前記第2ゲート絶縁膜は、前記第1ゲート絶縁膜より高い誘電率を有する物質で形成されたことを特徴とする請求項1に記載の半導体素子。
- 前記第1ゲート絶縁膜は、シリコン酸化物またはシリコン酸窒化物で形成され、前記第2ゲート絶縁膜は、高誘電率を有する金属酸化物または金属ケイ酸塩で形成されることを特徴とする請求項4に記載の半導体素子。
- 前記第2ゲート絶縁膜と前記第2活性領域との間に配置される界面酸化層をさらに備えることを特徴とする請求項4に記載の半導体素子。
- 前記第2ゲート電極は、前記第1ゲート電極より低い抵抗率を有する物質で形成されたことを特徴とする請求項1に記載の半導体素子。
- 前記第2ゲート電極は、金属または導電性金属窒化物で形成されることを特徴とする請求項1に記載の半導体素子。
- 前記第2ゲート電極の両側に配置される一対の第2スペーサ層をさらに備え、
前記第2ゲート絶縁膜は、前記第2ゲート電極と前記第2活性領域との間から、前記第2ゲート電極と前記第2スペーサ層との間に延びることを特徴とする請求項1に記載の半導体素子。 - 前記第1活性領域及び前記第2活性領域をそれぞれ定義する第1素子分離層及び第2素子分離層をさらに備え、
前記第1素子分離層の下面と前記第2素子分離層の下面とは、同じレベルを有することを特徴とする請求項1に記載の半導体素子。 - 前記第1素子分離層の上面は、前記第2素子分離層の上面より高いレベルを有することを特徴とする請求項10に記載の半導体素子。
- 前記低電圧トランジスタは、第2活性領域の上面及び両側面にチャネルが形成されるFinFETであることを特徴とする請求項1に記載の半導体素子。
- 前記第1ゲート電極が延びる方向の前記第1活性領域の幅は、前記第2ゲート電極が延びる方向の前記第2活性領域の幅より広いことを特徴とする請求項1に記載の半導体素子。
- 前記第2ソース/ドレイン領域は、前記第1ソース/ドレイン領域より深さに対するドーピング濃度の変化が大きいことを特徴とする請求項1に記載の半導体素子。
- 第1領域及び第2領域を有する半導体基板と、
前記第1領域に形成され、第1活性領域、第1ソース/ドレイン領域、第1ゲート絶縁膜及び第1ゲート電極を有する高電圧トランジスタと、
前記第2領域に形成され、第2活性領域、第2ソース/ドレイン領域、第2ゲート絶縁膜及び第2ゲート電極を有する低電圧トランジスタと、を備え、
前記第2ソース/ドレイン領域は、前記第1ソース/ドレイン領域より薄い厚さを有し、前記第1ゲート電極の上面と前記第2ゲート電極の上面とが同じレベルを有することを特徴とする半導体素子。 - 高電圧領域及び低電圧領域にそれぞれ第1素子分離層及び第2素子分離層によって定義される第1活性領域及び第2活性領域を有する半導体基板を準備するステップと、
前記第1活性領域及び前記第2活性領域上に、第1ゲート絶縁膜を形成するステップと、
前記第1活性領域に第1ソース/ドレイン領域を形成するステップと、
前記第1ソース/ドレイン領域を形成した後、前記第2活性領域に、前記第1ソース/ドレイン領域より薄い厚さを有する第2ソース/ドレイン領域を形成するステップと、を含むことを特徴とする半導体素子の製造方法。 - 前記半導体基板を準備するステップは、
前記第1活性領域及び前記第2活性領域の上面を露出させるように、前記高電圧領域及び前記低電圧領域に素子分離層を形成するステップと、
前記低電圧領域に形成された素子分離層の一部分を除去して、前記第2活性領域の側壁の一部分を露出させる前記第2素子分離層を形成するステップと、を含むことを特徴とする請求項16に記載の半導体素子の製造方法。 - 前記第2素子分離層を形成するステップは、前記第2活性領域上に形成された前記第1ゲート絶縁膜を共に除去することを特徴とする請求項17に記載の半導体素子の製造方法。
- 前記第1ソース/ドレイン領域を形成するステップ前に、
前記高電圧領域及び前記低電圧領域上に、第1ゲート物質層を形成するステップと、
前記第1ゲート物質層を形成して、前記高電圧領域上の前記第1活性領域と交差しつつ延びる第1ゲート電極を形成するステップと、をさらに含むことを特徴とする請求項16に記載の半導体素子の製造方法。 - 前記第1ソース/ドレイン領域を形成するステップ後、及び前記第2ソース/ドレイン領域を形成するステップ前に、
前記第1ゲート物質層をエッチングして、前記低電圧領域上の前記第2活性領域と交差しつつ延びる第2ゲート電極を形成するステップと、をさらに含むことを特徴とする請求項19に記載の半導体素子の製造方法。 - 前記第1ソース/ドレイン領域を形成するステップ後、及び前記第2ソース/ドレイン領域を形成するステップ前に、
前記第1ゲート物質層をエッチングして、前記低電圧領域上の前記第2活性領域と交差しつつ延びるダミーゲート電極を形成するステップをさらに含むことを特徴とする請求項19に記載の半導体素子の製造方法。 - 前記第1ゲート電極及び前記ダミーゲート電極の上面を露出させ、前記半導体基板を覆う層間絶縁層を形成するステップと、
前記ダミーゲート電極を除去して、前記ダミーゲート電極が除去された空間にリセスを形成するステップと、
前記リセスに金属または導電性金属窒化物を充填して、第2ゲート電極を形成するステップと、をさらに含むことを特徴とする請求項21に記載の半導体素子の製造方法。 - 前記第1ゲート物質層を形成するステップ前に、前記第2素子分離層により露出される前記第2活性領域を覆うバッファ酸化層を形成するステップをさらに含み、
前記リセスを形成するステップ後に、前記リセス内に露出された前記バッファ酸化層の部分を除去するステップをさらに含むことを特徴とする請求項22に記載の半導体素子の製造方法。 - 前記リセス内に露出された前記バッファ酸化層の部分を除去するステップ後に、前記バッファ酸化層が除去されて露出される前記第2活性領域上に界面酸化層を形成するステップをさらに含むことを特徴とする請求項23に記載の半導体素子の製造方法。
- 前記リセスを形成するステップ後、及び前記第2ゲート電極を形成するステップ前に、前記リセスの一部分を満たす第2ゲート絶縁膜を形成するステップをさらに含むことを特徴とする請求項22に記載の半導体素子の製造方法。
- 前記ダミーゲート電極を形成した後、及び前記層間絶縁層を形成する前に、
前記ダミーゲート電極の両側面を覆う第2スペーサ層を形成するステップをさらに含み、
前記第2ゲート絶縁膜は、前記リセス内で第2活性領域と第2ゲート電極との間から、前記ゲート電極と前記第2スペーサ層との間に延びるように形成されることを特徴とする請求項25に記載の半導体素子の製造方法。 - 前記第2ゲート絶縁膜は、前記第1ゲート絶縁膜より高い誘電率を有し、前記第2ゲート絶縁膜は、前記第1ゲート絶縁膜より薄く形成されることを特徴とする請求項25に記載の半導体素子の製造方法。
- 高電圧トランジスタが形成される第1領域及び低電圧トランジスタが形成される第2領域に、それぞれ第1素子分離層及び第2素子分離層によって定義される第1活性領域及び第2活性領域を有する半導体基板を準備するステップと、
前記第1活性領域上に、前記高電圧トランジスタの第1ゲート絶縁膜、及び前記第1活性領域と交差しつつ延びる前記高電圧トランジスタの第1ゲート電極を形成するステップと、
前記第1活性領域に、前記高電圧トランジスタの第1ソース/ドレイン領域を形成するステップと、
前記第1ソース/ドレイン領域を形成した後、前記第2活性領域に前記低電圧トランジスタの第2ソース/ドレイン領域を形成するステップと、を含み、
前記第1ソース/ドレイン領域を形成するステップ、及び前記第2ソース/ドレイン領域を形成するステップは、それぞれ第1熱処理工程及び第2熱処理工程を含み、
前記第2熱処理工程は、前記第1熱処理工程より短時間で進められることを特徴とする半導体素子の製造方法。 - 前記第2ソース/ドレイン領域を形成した後、
前記第2活性領域上に、前記低電圧トランジスタの第2ゲート絶縁膜、及び前記第2活性領域と交差しつつ延びる前記低電圧トランジスタの第2ゲート電極を形成するステップをさらに含むことを特徴とする請求項28に記載の半導体素子の製造方法。 - 前記第2熱処理工程を進めた後、第2ソース/ドレイン領域は、前記第1ソース/ドレイン領域より薄い厚さを有するように形成されることを特徴とする請求項28に記載の半導体素子の製造方法。
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KR20130058402A (ko) | 2013-06-04 |
KR101964262B1 (ko) | 2019-04-02 |
US9330981B2 (en) | 2016-05-03 |
CN103137621B (zh) | 2017-03-01 |
US8809990B2 (en) | 2014-08-19 |
TWI550867B (zh) | 2016-09-21 |
CN103137621A (zh) | 2013-06-05 |
US20140357035A1 (en) | 2014-12-04 |
TW201327829A (zh) | 2013-07-01 |
US20130134520A1 (en) | 2013-05-30 |
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