JP2012519947A - 電子出口窓の組立て方法および電子出口窓組立体 - Google Patents
電子出口窓の組立て方法および電子出口窓組立体 Download PDFInfo
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- JP2012519947A JP2012519947A JP2011553330A JP2011553330A JP2012519947A JP 2012519947 A JP2012519947 A JP 2012519947A JP 2011553330 A JP2011553330 A JP 2011553330A JP 2011553330 A JP2011553330 A JP 2011553330A JP 2012519947 A JP2012519947 A JP 2012519947A
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000011888 foil Substances 0.000 claims abstract description 78
- 238000010894 electron beam technology Methods 0.000 claims abstract description 38
- 238000000576 coating method Methods 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000003466 welding Methods 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 238000004026 adhesive bonding Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000003518 caustics Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
- H01J9/263—Sealing together parts of vessels specially adapted for cathode-ray tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
- H01J33/04—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
- H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
- H01J2237/164—Particle-permeable windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
- H01J2237/166—Sealing means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
Abstract
Description
Claims (15)
- 電子ビーム発生装置の電子出口窓を組立てる方法であって、
電子ビーム発生装置のハウジングに箔支持プレート(208)を配置する段階と、
窓箔(206)を少なくとも1本の連続した接着線(218)に沿ってフレーム(214)に接着して、出口窓副組立体(216)を作り上げる段階と、
出口窓副組立体(216)をハウジングに取付ける段階とを含んで成る電子出口窓の組立て方法。 - 箔支持プレート(208)が電子ビーム発生装置の外気に露出されないことを保証するために前記出口窓副組立体(216)が箔支持プレート(208)の保護を果たすように、出口窓副組立体(216)をハウジングに取付ける段階を含んで成る請求項1に記載の方法。
- 出口窓副組立体(216)の取付けが、ハウジングにより一部を形成されるとともに箔支持プレート(208)により一部を形成される凹部(220)の中にフレーム(214)を配置する段階を含んで成る請求項1から請求項2までのいずれか一項に記載の方法。
- 前記窓箔(206)をフレーム(214)に拡散接合する段階を含んで成る請求項1から請求項3までのいずれか一項に記載の方法。
- 出口窓副組立体(216)をハウジングに取付ける前に、窓箔(206)に被覆(206C)を備える段階を含んで成る請求項1から請求項4までのいずれか一項に記載の方法。
- 組立てられた電子ビーム発生装置の内部へ向いた窓箔(206)の表面に前記被覆(206C)を備える段階を含んで成る請求項1から請求項5までのいずれか一項に記載の方法。
- 出口窓副組立体(216)を取付ける段階がハウジングに対するフレーム(214)の溶接を含んで成る請求項1から請求項6までのいずれか一項に記載の方法。
- 箔支持プレートおよび窓箔を含んで構成される電子ビーム発生装置の電子出口窓組立体であって、
前記箔支持プレート(208)が電子ビーム発生装置のハウジングに配置され、
前記窓箔(206)が少なくとも1本の連続した取付け線(218)に沿ってフレーム(208)に接着されて出口窓副組立体(216)を形成し、
前記出口窓副組立体(216)がハウジングに取付けられた電子出口窓組立体。 - 箔支持プレート(208)が電子ビーム発生装置の外気に露出されないことを保証するために前記出口窓副組立体(216)が箔支持プレート(208)の保護を果たすように、出口窓副組立体(216)がハウジングに取付けられた請求項8に記載の電子出口窓組立体。
- 出口窓副組立体(216)のフレーム(214)が、ハウジングにより一部を形成されるとともに箔支持プレート(208)により一部を形成される凹部(220)の中に配置された請求項8から請求項9までのいずれか一項に記載の電子出口窓組立体。
- 窓箔(206)がフレーム(214)に拡散接合された請求項8から請求項10までのいずれか一項に記載の電子出口窓組立体。
- 出口窓副組立体(216)をハウジングに取付ける前に、窓箔(206)に被覆(206C)が備えられた請求項8から請求項11までのいずれか一項に記載の電子出口窓組立体。
- 前記被覆(206C)が、電子ビーム発生装置の内部へ向いた窓箔(206)の表面に備えられた請求項12に記載の電子出口窓組立体。
- フレーム(214)がハウジングに対して溶接された請求項8から請求項13までのいずれか一項に記載の電子出口窓組立体。
- フレーム(214)がステンレス鋼で作られた請求項8から請求項14までのいずれか一項に記載の電子出口窓組立体。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0900317-9 | 2009-03-11 | ||
SE0900317A SE533567C2 (sv) | 2009-03-11 | 2009-03-11 | Förfarande för montering av ett fönster för utgående elektroner och en fönsterenhet för utgående elektroner |
US16012209P | 2009-03-13 | 2009-03-13 | |
US617160,122 | 2009-03-13 | ||
PCT/EP2010/001376 WO2010102757A1 (en) | 2009-03-11 | 2010-03-05 | Method for assembling an electron exit window and an electron exit window assembly |
Publications (2)
Publication Number | Publication Date |
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JP2012519947A true JP2012519947A (ja) | 2012-08-30 |
JP5650672B2 JP5650672B2 (ja) | 2015-01-07 |
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JP2011553330A Active JP5650672B2 (ja) | 2009-03-11 | 2010-03-05 | 電子出口窓の組立て方法および電子出口窓組立体 |
Country Status (7)
Country | Link |
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US (2) | US9159522B2 (ja) |
EP (1) | EP2406807B1 (ja) |
JP (1) | JP5650672B2 (ja) |
CN (1) | CN102341884B (ja) |
ES (1) | ES2532983T3 (ja) |
SE (1) | SE533567C2 (ja) |
WO (1) | WO2010102757A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013024558A (ja) * | 2011-07-14 | 2013-02-04 | Hamamatsu Photonics Kk | 電子線照射装置及び電子線透過ユニット |
JP2013024557A (ja) * | 2011-07-14 | 2013-02-04 | Hamamatsu Photonics Kk | 電子線照射装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6320414B2 (ja) | 2012-12-20 | 2018-05-09 | テトラ ラバル ホールディングス アンド ファイナンス エス エイ | 電子線により包装容器を照射するための装置及び方法 |
DE102018001168B3 (de) * | 2018-02-05 | 2019-05-16 | Emz-Hanauer Gmbh & Co. Kgaa | Haushaltskühlgerät mit einem Wand-Leuchtmodul |
US10751549B2 (en) * | 2018-07-18 | 2020-08-25 | Kenneth Hogstrom | Passive radiotherapy intensity modulator for electrons |
CN111010794A (zh) * | 2019-12-26 | 2020-04-14 | 北京机电工程研究所 | 一种等离子体产生单元及使用方法 |
EP4279403A3 (en) * | 2022-04-26 | 2024-04-03 | Tetra Laval Holdings & Finance S.A. | Sterilization apparatus having an irradiation beam emitting device and packaging machine having a sterilization apparatus |
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2010
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- 2010-03-05 ES ES10707476.7T patent/ES2532983T3/es active Active
- 2010-03-05 WO PCT/EP2010/001376 patent/WO2010102757A1/en active Application Filing
- 2010-03-05 JP JP2011553330A patent/JP5650672B2/ja active Active
- 2010-03-05 CN CN201080010765.3A patent/CN102341884B/zh active Active
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2011
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2015
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JP2013024557A (ja) * | 2011-07-14 | 2013-02-04 | Hamamatsu Photonics Kk | 電子線照射装置 |
Also Published As
Publication number | Publication date |
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US20150380197A1 (en) | 2015-12-31 |
US10032596B2 (en) | 2018-07-24 |
US9159522B2 (en) | 2015-10-13 |
JP5650672B2 (ja) | 2015-01-07 |
US20120269997A1 (en) | 2012-10-25 |
SE533567C2 (sv) | 2010-10-26 |
CN102341884A (zh) | 2012-02-01 |
CN102341884B (zh) | 2015-04-15 |
EP2406807A1 (en) | 2012-01-18 |
SE0900317A1 (sv) | 2010-09-12 |
ES2532983T3 (es) | 2015-04-06 |
WO2010102757A1 (en) | 2010-09-16 |
EP2406807B1 (en) | 2015-01-14 |
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