JP2012513621A5 - - Google Patents

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Publication number
JP2012513621A5
JP2012513621A5 JP2011543475A JP2011543475A JP2012513621A5 JP 2012513621 A5 JP2012513621 A5 JP 2012513621A5 JP 2011543475 A JP2011543475 A JP 2011543475A JP 2011543475 A JP2011543475 A JP 2011543475A JP 2012513621 A5 JP2012513621 A5 JP 2012513621A5
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JP
Japan
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layer
insulating
conductive
layers
wafer
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JP2011543475A
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Japanese (ja)
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JP5701772B2 (ja
JP2012513621A (ja
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Priority claimed from SE0802663A external-priority patent/SE533992C2/sv
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JP2011543475A 2008-12-23 2009-12-23 ビア構造及びその製造方法 Active JP5701772B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE0802663A SE533992C2 (sv) 2008-12-23 2008-12-23 Elektrisk anslutning i en struktur med isolerande och ledande lager
SE0802663-5 2008-12-23
PCT/SE2009/051496 WO2010074649A1 (en) 2008-12-23 2009-12-23 Via structure and method thereof

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2015029295A Division JP6093788B2 (ja) 2008-12-23 2015-02-18 デバイスを作る方法、半導体デバイス及び前駆構造物
JP2015029296A Division JP2015146018A (ja) 2008-12-23 2015-02-18 偏向可能マイクロミラーを含むデバイス

Publications (3)

Publication Number Publication Date
JP2012513621A JP2012513621A (ja) 2012-06-14
JP2012513621A5 true JP2012513621A5 (https=) 2013-02-14
JP5701772B2 JP5701772B2 (ja) 2015-04-15

Family

ID=42288012

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2011543475A Active JP5701772B2 (ja) 2008-12-23 2009-12-23 ビア構造及びその製造方法
JP2015029295A Active JP6093788B2 (ja) 2008-12-23 2015-02-18 デバイスを作る方法、半導体デバイス及び前駆構造物
JP2015029296A Pending JP2015146018A (ja) 2008-12-23 2015-02-18 偏向可能マイクロミラーを含むデバイス

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2015029295A Active JP6093788B2 (ja) 2008-12-23 2015-02-18 デバイスを作る方法、半導体デバイス及び前駆構造物
JP2015029296A Pending JP2015146018A (ja) 2008-12-23 2015-02-18 偏向可能マイクロミラーを含むデバイス

Country Status (7)

Country Link
US (2) US8592981B2 (https=)
EP (3) EP2383601B1 (https=)
JP (3) JP5701772B2 (https=)
KR (2) KR101659638B1 (https=)
CN (1) CN102362346B (https=)
SE (1) SE533992C2 (https=)
WO (1) WO2010074649A1 (https=)

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