JP2012507162A - トランジスタにおいて進歩したシリサイド形成と組み合わされる凹型のドレイン及びソース区域 - Google Patents
トランジスタにおいて進歩したシリサイド形成と組み合わされる凹型のドレイン及びソース区域 Download PDFInfo
- Publication number
- JP2012507162A JP2012507162A JP2011533583A JP2011533583A JP2012507162A JP 2012507162 A JP2012507162 A JP 2012507162A JP 2011533583 A JP2011533583 A JP 2011533583A JP 2011533583 A JP2011533583 A JP 2011533583A JP 2012507162 A JP2012507162 A JP 2012507162A
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- drain
- gate electrode
- source regions
- strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021332 silicide Inorganic materials 0.000 title claims abstract description 38
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 230000015572 biosynthetic process Effects 0.000 title description 10
- 238000000034 method Methods 0.000 claims abstract description 103
- 230000008569 process Effects 0.000 claims abstract description 63
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 125000006850 spacer group Chemical group 0.000 claims abstract description 27
- 239000004065 semiconductor Substances 0.000 claims description 61
- 239000000463 material Substances 0.000 claims description 52
- 238000005530 etching Methods 0.000 claims description 36
- 230000001939 inductive effect Effects 0.000 claims description 20
- 239000002210 silicon-based material Substances 0.000 claims description 20
- 239000000956 alloy Substances 0.000 claims description 16
- 229910045601 alloy Inorganic materials 0.000 claims description 15
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 14
- 238000003631 wet chemical etching Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 22
- 230000009467 reduction Effects 0.000 abstract description 15
- 238000012546 transfer Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 45
- 239000003989 dielectric material Substances 0.000 description 24
- 230000001965 increasing effect Effects 0.000 description 18
- 229910052581 Si3N4 Inorganic materials 0.000 description 17
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 238000005516 engineering process Methods 0.000 description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 9
- 229910000927 Ge alloy Inorganic materials 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 238000002513 implantation Methods 0.000 description 6
- 229910000676 Si alloy Inorganic materials 0.000 description 5
- 239000002800 charge carrier Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910021334 nickel silicide Inorganic materials 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910021339 platinum silicide Inorganic materials 0.000 description 2
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical group [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 description 1
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- PCLURTMBFDTLSK-UHFFFAOYSA-N nickel platinum Chemical compound [Ni].[Pt] PCLURTMBFDTLSK-UHFFFAOYSA-N 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30608—Anisotropic liquid etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/161—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys
- H01L29/165—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
Abstract
洗練されたトランジスタ要素を形成するための製造プロセスの間、それぞれの金属シリサイド領域を形成するのに先立つ共通のエッチングシーケンスにおいて、ゲート高さが減少させられてよく、そして凹型のドレイン及びソース構造もまた得られてよい。対応する側壁スペーサ構造はエッチングシーケンスの間に維持され得るので、ゲート電極におけるシリサイド化プロセスの可制御性及び均一性を高めることができ、それにより、低減された程度のスレッショルドばらつきを得ることができる。更に、凹型のドレイン及びソース構造が、全体的な直列抵抗の低減及び応力転移効率の増大をもたらすことができる。
【選択図】図2c
Description
Claims (25)
- 半導体材質内に形成される第1のトランジスタのドレイン及びソース領域であって、前記第1のトランジスタのゲート絶縁層の表面によって規定される高さレベルと比較して低い高さレベルに位置させられる凹型表面部分を有するドレイン及びソース領域と、
前記ゲート絶縁層上に形成され、前記ゲート絶縁層上に形成されるドープされたシリコン材質と前記ドープされたシリコン材質上に形成される金属シリサイド材質とを備えているゲート電極と、
前記ゲート電極の高さよりも大きい高さを有するスペーサ構造と、
前記ドレイン及びソース領域内に形成される金属シリサイド領域とを備えた半導体デバイス。 - 歪誘起半導体合金を含むドレイン及びソース領域を備えている第2のトランジスタを更に備えた請求項1の半導体デバイス。
- 前記第2のトランジスタの前記ドレイン及びソース領域の表面は、前記第1のトランジスタの前記ドレイン及びソース領域の前記凹型表面部分に対して高い高さレベルに位置させられている請求項2の半導体デバイス。
- 前記第2のトランジスタの前記ドレイン及びソース領域の前記表面は、前記第2のトランジスタのゲート絶縁層に対して非凹型である請求項3の半導体デバイス。
- 前記第1のトランジスタの前記ドレイン及びソース領域の上方に形成される第1の歪誘起誘電体層を更に備え、
前記第1の歪誘起誘電体層は前記第1のトランジスタのチャネル領域内に歪を誘起する請求項1の半導体デバイス。 - 前記第2のトランジスタの前記ドレイン及びソース領域の上方に形成される第2の歪誘起誘電体層を更に備え、
前記第1及び第2の歪誘起誘電体層は異なるタイプの歪を誘起する請求項5の半導体デバイス。 - 前記第1のトランジスタはnチャネルトランジスタであり、
前記第2のトランジスタはpチャネルトランジスタである請求項2の半導体デバイス。 - トランジスタのゲート電極の側壁上にスペーサ構造を形成することと、
前記スペーサ構造に対して選択的に少なくとも前記ゲート電極から材質を除去するように前記トランジスタのドレイン及びソース領域並びに前記ゲート電極をエッチング環境に曝すことと、
前記材質を除去した後に前記ドレイン及びソース領域並びに前記ゲート電極内に金属シリサイド材質を形成することと、
前記ゲート電極並びに前記ドレイン及びソース領域の上方に歪誘起層を形成することとを備えた方法。 - 前記ドレイン及びソース領域並びに前記ゲート電極を前記エッチング環境に曝すことは、凹型ドレイン及びソース構造を形成するように前記ドレイン及びソース領域の材質を除去することを更に備えている請求項8の方法。
- 前記ドレイン及びソース領域並びに前記ゲート電極を前記エッチング環境に曝すことは、プラズマ環境に基いて前記エッチング環境を確立することを更に備えている請求項8の方法。
- 前記ドレイン及びソース領域並びに前記ゲート電極を前記エッチング環境に曝すことは、ウエット化学的レシピに基いて前記エッチング環境を確立することを更に備えている請求項8の方法。
- 前記ウエット化学的エッチングレシピはTMAH(テトラメチルアンモニウムハイドロオキシド)を備えている請求項11の方法。
- 異なるエッチングレシピを用いて少なくとも1つの更なるエッチングプロセスを実行することを更に備えた請求項12の方法。
- 前記スペーサ構造を形成するのに先立ち第2のトランジスタのドレイン及びソース領域内に半導体合金を形成することを更に備えた請求項8の方法。
- 前記第1のトランジスタの前記ドレイン及びソース領域並びに前記ゲート電極と前記第2のトランジスタの前記ドレイン及びソース領域並びにゲート電極とを前記エッチング環境に曝した後の前記第2のトランジスタの前記ドレイン及びソース領域の目標高さレベルを決定するように前記半導体合金は過剰な高さで形成される請求項14の方法。
- 前記目標高さレベルは実質的に非凹型のドレイン及びソース構造に対応している請求項15の方法。
- 前記ゲート電極構造並びに前記ドレイン及びソース領域の上方に歪誘起誘電体層を形成することを更に備えた請求項8の方法。
- 前記金属シリサイドは前記ゲート電極構造のゲート絶縁層まで拡がらないように形成される請求項8の方法。
- 第1のトランジスタの第1のゲート電極及び第2のトランジスタの第2のゲート電極並びに前記第1及び第2のトランジスタの少なくとも一方のドレイン及びソース領域から材質を除去するようにエッチングプロセスを実行する一方で前記第1及び第2のゲート電極の側壁をスペーサ構造によって保護することと、
前記スペーサ構造の存在下で前記第1及び第2のゲート電極並びに前記ドレイン及びソース領域内に、前記第1及び第2のゲート電極のドープされたシリコン材質内で終端する金属シリサイドを形成することとを備えた方法。 - 前記エッチングプロセスはプラズマ環境に基いて実行される請求項19の方法。
- 前記エッチングプロセスを実行することはウエット化学的エッチングプロセスを実行することを備えている請求項19の方法。
- 前記ウエット化学的エッチングプロセスはTMAHに基いて実行される請求項21の方法。
- 前記エッチングプロセスを実行することに先立ち前記第2のトランジスタの前記ドレイン及びソース領域内に半導体合金を形成することを更に備え、前記第2のトランジスタ内に実質的に非凹型のドレイン及びソース構造を維持するように前記半導体合金の過剰な材質が設けられる請求項19の方法。
- 前記第1のトランジスタの上方の第1の歪誘起誘電体層及び前記第2のトランジスタの上方の第2の歪誘起誘電体層を形成することを更に備えた請求項19の方法。
- 前記エッチングプロセスは前記第1のトランジスタ内に凹型のドレイン及びソース構造を生成するように実行される請求項24の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008054075A DE102008054075B4 (de) | 2008-10-31 | 2008-10-31 | Halbleiterbauelement mit Abgesenktem Drain- und Sourcebereich in Verbindung mit einem Verfahren zur komplexen Silizidherstellung in Transistoren |
DE102008054075.7 | 2008-10-31 | ||
US12/549,769 US8026134B2 (en) | 2008-10-31 | 2009-08-28 | Recessed drain and source areas in combination with advanced silicide formation in transistors |
US12/549,769 | 2009-08-28 | ||
PCT/EP2009/007548 WO2010049086A2 (en) | 2008-10-31 | 2009-10-21 | Recessed drain and source areas in combination with advanced silicide formation in transistors |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012507162A true JP2012507162A (ja) | 2012-03-22 |
JP5544367B2 JP5544367B2 (ja) | 2014-07-09 |
Family
ID=42104884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011533583A Active JP5544367B2 (ja) | 2008-10-31 | 2009-10-21 | トランジスタにおいて進歩したシリサイド形成と組み合わされる凹型のドレイン及びソース区域 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8026134B2 (ja) |
JP (1) | JP5544367B2 (ja) |
KR (1) | KR101482200B1 (ja) |
CN (2) | CN102203915B (ja) |
DE (1) | DE102008054075B4 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014232871A (ja) * | 2013-05-02 | 2014-12-11 | 富士フイルム株式会社 | エッチング液およびエッチング液のキット、これをもちいたエッチング方法および半導体基板製品の製造方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8105887B2 (en) * | 2009-07-09 | 2012-01-31 | International Business Machines Corporation | Inducing stress in CMOS device |
US8609508B2 (en) * | 2010-12-08 | 2013-12-17 | Stmicroelectronics, Inc. | Method of fabricating an integrated circuit having a strain inducing hollow trench isolation region |
DE102010064281B4 (de) * | 2010-12-28 | 2017-03-23 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | Herstellung einer Kanalhalbleiterlegierung durch Erzeugen eines Hartmaskenschichtstapels und Anwenden eines plasmaunterstützten Maskenstrukturierungsprozesses |
US8466018B2 (en) | 2011-07-26 | 2013-06-18 | Globalfoundries Inc. | Methods of forming a PMOS device with in situ doped epitaxial source/drain regions |
US8962430B2 (en) | 2013-05-31 | 2015-02-24 | Stmicroelectronics, Inc. | Method for the formation of a protective dual liner for a shallow trench isolation structure |
CN104157699B (zh) * | 2014-08-06 | 2019-02-01 | 北京大学深圳研究生院 | 一种背沟道刻蚀型薄膜晶体管及其制备方法 |
FR3029011B1 (fr) * | 2014-11-25 | 2018-04-13 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede ameliore de mise en contrainte d'une zone de canal de transistor |
US10163912B2 (en) * | 2016-01-29 | 2018-12-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for semiconductor device fabrication with improved source drain proximity |
US10269936B2 (en) * | 2017-08-31 | 2019-04-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFET device and method of forming same |
US11443982B2 (en) | 2018-11-08 | 2022-09-13 | International Business Machines Corporation | Formation of trench silicide source or drain contacts without gate damage |
US11309402B2 (en) | 2020-03-05 | 2022-04-19 | Sandisk Technologies Llc | Semiconductor device containing tubular liner spacer for lateral confinement of self-aligned silicide portions and methods of forming the same |
CN116779615B (zh) * | 2023-08-23 | 2023-11-07 | 合肥晶合集成电路股份有限公司 | 一种集成半导体器件及其制作方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07161991A (ja) * | 1993-12-10 | 1995-06-23 | Ricoh Co Ltd | 半導体装置の製造方法 |
JPH07263676A (ja) * | 1994-03-18 | 1995-10-13 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2001203346A (ja) * | 2000-01-20 | 2001-07-27 | Nec Corp | 半導体装置の製造方法 |
US20050110082A1 (en) * | 2003-11-25 | 2005-05-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device having high drive current and method of manufacture therefor |
JP2006253317A (ja) * | 2005-03-09 | 2006-09-21 | Fujitsu Ltd | 半導体集積回路装置およびpチャネルMOSトランジスタ |
JP2007165665A (ja) * | 2005-12-15 | 2007-06-28 | Renesas Technology Corp | 半導体装置およびその製造方法 |
US20070238242A1 (en) * | 2006-04-06 | 2007-10-11 | Shyh-Fann Ting | Semiconductor structure and fabrication thereof |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6777759B1 (en) | 1997-06-30 | 2004-08-17 | Intel Corporation | Device structure and method for reducing silicide encroachment |
US6323094B1 (en) * | 1998-02-06 | 2001-11-27 | Tsmc Acer Semiconductor Manufacturing Inc. | Method to fabricate deep sub-μm CMOSFETs |
US6887762B1 (en) | 1998-11-12 | 2005-05-03 | Intel Corporation | Method of fabricating a field effect transistor structure with abrupt source/drain junctions |
US6087236A (en) * | 1998-11-24 | 2000-07-11 | Intel Corporation | Integrated circuit with multiple gate dielectric structures |
JP2004241755A (ja) | 2003-01-15 | 2004-08-26 | Renesas Technology Corp | 半導体装置 |
US7012007B1 (en) * | 2003-09-09 | 2006-03-14 | Advanced Micro Device, Inc. | Strained silicon MOSFET having improved thermal conductivity and method for its fabrication |
JP4994581B2 (ja) * | 2004-06-29 | 2012-08-08 | 富士通セミコンダクター株式会社 | 半導体装置 |
DE102004052578B4 (de) * | 2004-10-29 | 2009-11-26 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Erzeugen einer unterschiedlichen mechanischen Verformung in unterschiedlichen Kanalgebieten durch Bilden eines Ätzstoppschichtstapels mit unterschiedlich modifizierter innerer Spannung |
DE102005030583B4 (de) * | 2005-06-30 | 2010-09-30 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zur Herstellung von Kontaktisolationsschichten und Silizidgebieten mit unterschiedlichen Eigenschaften eines Halbleiterbauelements und Halbleiterbauelement |
US7709317B2 (en) * | 2005-11-14 | 2010-05-04 | International Business Machines Corporation | Method to increase strain enhancement with spacerless FET and dual liner process |
US7718500B2 (en) * | 2005-12-16 | 2010-05-18 | Chartered Semiconductor Manufacturing, Ltd | Formation of raised source/drain structures in NFET with embedded SiGe in PFET |
US7342284B2 (en) * | 2006-02-16 | 2008-03-11 | United Microelectronics Corp. | Semiconductor MOS transistor device and method for making the same |
US20070200179A1 (en) * | 2006-02-24 | 2007-08-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Strain enhanced CMOS architecture with amorphous carbon film and fabrication method of forming the same |
US7459382B2 (en) * | 2006-03-24 | 2008-12-02 | International Business Machines Corporation | Field effect device with reduced thickness gate |
DE102006015077B4 (de) * | 2006-03-31 | 2010-12-23 | Advanced Micro Devices, Inc., Sunnyvale | Transistor mit abgesenkten Drain- und Source-Gebieten und Verfahren zur Herstellung desselben |
DE102006019921B4 (de) * | 2006-04-28 | 2010-10-28 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zur Herstellung des Transistors mit eingebetteter Schicht mit Zugverformung mit geringem Abstand zu der Gateelektrode |
DE102006035666B3 (de) * | 2006-07-31 | 2008-04-17 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Ausbilden einer Halbleiterstruktur |
WO2008041301A1 (fr) * | 2006-09-29 | 2008-04-10 | Fujitsu Microelectronics Limited | DISPOSITIF SEMI-CONDUCTEUR ET Son procÉDÉ de FABRICATION |
JP4504392B2 (ja) * | 2007-03-15 | 2010-07-14 | 株式会社東芝 | 半導体装置 |
US7825477B2 (en) * | 2007-04-23 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device with localized stressor |
DE102007030053B4 (de) * | 2007-06-29 | 2011-07-21 | Advanced Micro Devices, Inc., Calif. | Reduzieren der pn-Übergangskapazität in einem Transistor durch Absenken von Drain- und Source-Gebieten |
KR101264113B1 (ko) * | 2007-07-16 | 2013-05-13 | 삼성전자주식회사 | 변형된 채널을 갖는 cmos 소자 및 이의 제조방법 |
DE102007041207B4 (de) * | 2007-08-31 | 2015-05-21 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | CMOS-Bauelement mit Gateisolationsschichten mit unterschiedlicher Art und Dicke und Verfahren zur Herstellung |
US20090174002A1 (en) * | 2008-01-09 | 2009-07-09 | International Business Machines Corporation | Mosfet having a high stress in the channel region |
DE102008011814B4 (de) * | 2008-02-29 | 2012-04-26 | Advanced Micro Devices, Inc. | CMOS-Bauelement mit vergrabener isolierender Schicht und verformten Kanalgebieten sowie Verfahren zum Herstellen derselben |
US7960223B2 (en) * | 2008-06-16 | 2011-06-14 | International Business Machines Corporation | Structure and method to integrate dual silicide with dual stress liner to improve CMOS performance |
DE102008030854B4 (de) * | 2008-06-30 | 2014-03-20 | Advanced Micro Devices, Inc. | MOS-Transistoren mit abgesenkten Drain- und Source-Bereichen und nicht-konformen Metallsilizidgebieten und Verfahren zum Herstellen der Transistoren |
DE102008035816B4 (de) * | 2008-07-31 | 2011-08-25 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG, 01109 | Leistungssteigerung in PMOS- und NMOS-Transistoren durch Verwendung eines eingebetteten verformten Halbleitermaterials |
DE102008045034B4 (de) * | 2008-08-29 | 2012-04-05 | Advanced Micro Devices, Inc. | Durchlassstromeinstellung für Transistoren, die im gleichen aktiven Gebiet hergestellt sind, durch lokales Vorsehen eines eingebetteten verformungsinduzierenden Halbleitermaterials in dem aktiven Gebiet |
-
2008
- 2008-10-31 DE DE102008054075A patent/DE102008054075B4/de active Active
-
2009
- 2009-08-28 US US12/549,769 patent/US8026134B2/en active Active
- 2009-10-21 CN CN200980143153.9A patent/CN102203915B/zh active Active
- 2009-10-21 CN CN201510434045.4A patent/CN105304477B/zh active Active
- 2009-10-21 JP JP2011533583A patent/JP5544367B2/ja active Active
- 2009-10-21 KR KR1020117012510A patent/KR101482200B1/ko not_active IP Right Cessation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07161991A (ja) * | 1993-12-10 | 1995-06-23 | Ricoh Co Ltd | 半導体装置の製造方法 |
JPH07263676A (ja) * | 1994-03-18 | 1995-10-13 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2001203346A (ja) * | 2000-01-20 | 2001-07-27 | Nec Corp | 半導体装置の製造方法 |
US20050110082A1 (en) * | 2003-11-25 | 2005-05-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device having high drive current and method of manufacture therefor |
JP2006253317A (ja) * | 2005-03-09 | 2006-09-21 | Fujitsu Ltd | 半導体集積回路装置およびpチャネルMOSトランジスタ |
JP2007165665A (ja) * | 2005-12-15 | 2007-06-28 | Renesas Technology Corp | 半導体装置およびその製造方法 |
US20070238242A1 (en) * | 2006-04-06 | 2007-10-11 | Shyh-Fann Ting | Semiconductor structure and fabrication thereof |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014232871A (ja) * | 2013-05-02 | 2014-12-11 | 富士フイルム株式会社 | エッチング液およびエッチング液のキット、これをもちいたエッチング方法および半導体基板製品の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102203915B (zh) | 2015-08-26 |
KR20110081334A (ko) | 2011-07-13 |
US8026134B2 (en) | 2011-09-27 |
JP5544367B2 (ja) | 2014-07-09 |
US20100109091A1 (en) | 2010-05-06 |
CN105304477B (zh) | 2018-06-05 |
CN102203915A (zh) | 2011-09-28 |
DE102008054075A1 (de) | 2010-05-20 |
DE102008054075B4 (de) | 2010-09-23 |
KR101482200B1 (ko) | 2015-01-14 |
CN105304477A (zh) | 2016-02-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5544367B2 (ja) | トランジスタにおいて進歩したシリサイド形成と組み合わされる凹型のドレイン及びソース区域 | |
JP5204645B2 (ja) | 強化した応力伝送効率でコンタクト絶縁層を形成する技術 | |
KR101148138B1 (ko) | 리세스된 드레인 및 소스 영역을 갖는 nmos 트랜지스터와 드레인 및 소스 영역에 실리콘/게르마늄 물질을 갖는 pmos 트랜지스터를 포함하는 cmos 디바이스 | |
JP4890448B2 (ja) | 相異なるチャネル領域に相異なるよう調整された内在応力を有するエッチストップ層を形成することによって、相異なる機械的応力を生成するための技術 | |
US7586153B2 (en) | Technique for forming recessed strained drain/source regions in NMOS and PMOS transistors | |
KR101366201B1 (ko) | 콘택 영역들에 금속 규화물 영역을 국부적으로 구비한 트랜지스터 및 그 트랜지스터를 제조하는 방법 | |
US7723174B2 (en) | CMOS device comprising MOS transistors with recessed drain and source areas and a SI/GE material in the drain and source areas of the PMOS transistor | |
US7569437B2 (en) | Formation of transistor having a strained channel region including a performance enhancing material composition utilizing a mask pattern | |
US6962838B2 (en) | High mobility transistors in SOI and method for forming | |
JP2012504327A (ja) | チャネル領域への減少させられたオフセットを有する埋め込みSi/Ge材質を伴うトランジスタ | |
JP2010532572A (ja) | トランジスタのゲート電極のプレアモルファス化のブロッキング | |
KR20090019693A (ko) | 스트레인된 반도체 장치 및 이의 제조 방법 | |
KR20070069160A (ko) | 서로 다른 스트레인드 채널 영역들을 갖는 반도체 영역들을포함하는 반도체 디바이스 및 이를 제조하는 방법 | |
US20090001479A1 (en) | Transistor having reduced gate resistance and enhanced stress transfer efficiency and method of forming the same | |
US20100078735A1 (en) | Cmos device comprising nmos transistors and pmos transistors having increased strain-inducing sources and closely spaced metal silicide regions | |
US7919379B2 (en) | Dielectric spacer removal | |
US7482219B2 (en) | Technique for creating different mechanical strain by a contact etch stop layer stack with an intermediate etch stop layer | |
US9450073B2 (en) | SOI transistor having drain and source regions of reduced length and a stressed dielectric material adjacent thereto | |
TW201330253A (zh) | 具有改進的矽化物厚度均勻性之金屬氧化物半導體場效電晶體積體電路及其製造方法 | |
TWI756018B (zh) | 半導體元件及半導體方法 | |
KR20130123327A (ko) | 스트레스 라이너 기법에서 추가의 세정 공정을 시행함으로써 향상되는 트랜지스터 성능 | |
WO2010049086A2 (en) | Recessed drain and source areas in combination with advanced silicide formation in transistors | |
KR100674645B1 (ko) | 반도체 소자 제조 방법 | |
KR20060054407A (ko) | 축소된 게이트 공핍을 갖는 도핑된 게이트 전극을 구비한전계 효과 트랜지스터와 이 트랜지스터의 형성방법 | |
WO2006118786A1 (en) | Technique for forming a contact insulation layer with enhanced stress transfer efficiency |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120423 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130321 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130617 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130624 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130719 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130726 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130821 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130828 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130920 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131113 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140213 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140423 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140512 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5544367 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |