JP2012256679A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2012256679A JP2012256679A JP2011128249A JP2011128249A JP2012256679A JP 2012256679 A JP2012256679 A JP 2012256679A JP 2011128249 A JP2011128249 A JP 2011128249A JP 2011128249 A JP2011128249 A JP 2011128249A JP 2012256679 A JP2012256679 A JP 2012256679A
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- insulating layer
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Abstract
【解決手段】互いに積層された第1及び第2の半導体チップ35,36−1,36−2,36−3,36−4を含むチップ積層体14を有する半導体装置10であって、半導体基板41,61と、半導体基板41,61の第1の面41a,61aに設けられた回路素子層42,62と、回路素子層42,62の表面に設けられた第1の表面絶縁層49,64と、半導体基板41,61の第2の面41b、61bに設けられた第1の裏面絶縁層49,64と、第1の裏面絶縁層49,64の面のうち、半導体基板41,61と接触する面とは反対側に位置する面に設けられ、第1の裏面絶縁層49,64と異なる絶縁物質を含む第2の裏面絶縁層51,66と、半導体基板41,61を貫通する貫通電極と、を有する。
【選択図】図1
Description
図30を参照するに、半導体チップ300は、半導体基板301と、半導体基板301の表面301aに設けられた回路素子層302と、半導体基板301を貫通する貫通ビア303を含む貫通電極304と、貫通電極304の一端に設けられた表面電極305と、貫通電極304の他端に設けられた裏面電極306と、回路素子層302の表面302aに設けられた表面樹脂層308と、半導体基板301の裏面301bに設けられた裏面絶縁層309と、を有する。
これにより、第1及び第2の半導体チップを熱圧着する際の加熱により、第1及び第2の半導体チップに反りが発生することを抑制できる。
図1は、本発明の実施の形態に係る半導体装置の概略構成を示す断面図である。図1では、実際には、後述する図2に示すように、複雑な構成とされたチップ貫通電極68を簡略化して図示する。また、実際には、図1に示すチップ貫通電極54もチップ貫通電極68と同様に複雑な構成とされているが、図1では簡略化して図示する。また、図1では、後述する図2に示すはんだバンプ70の図示を省略する。
基板本体22は、板状とされており、平坦な面とされた表面22a及び裏面22bを有する。基板本体22としては、例えば、ガラスエポキシ基板を用いることができる。
第2のソルダーレジスト31は、基板本体22の裏面22bに設けられている。第2のソルダーレジスト31は、複数の接続ランド26を露出するように配置されている。
チップ積層体14は、第1の半導体チップ35上に、第2の半導体チップ36−1、第2の半導体チップ36−2、第2の半導体チップ36−3、第2の半導体チップ36−4の順で第2の半導体チップ36−1,36−2,36−3,36−4を積層させた構成とされており、配線基板11上に実装されている。
第2の表面絶縁層(図示せず)は、回路素子層42の最上層に設けられており、第2の表面絶縁層の表面(第2の表面絶縁層の第1の面)は、回路素子層42の表面42aを構成している。
また、第1の表面電極44は、第2の表面絶縁層(図示せず)を貫通して第1の配線階層(図示せず)に到達する第1の部分を含む。第1の配線階層と第1の表面電極44との間には、複数の配線階層(配線層)のうちのいずれの1つの配線階層も挿入していない。
第1の表面絶縁層47の材料としては、例えば、ポリイミド樹脂を用いることができる。第1の表面絶縁層47の厚さは、例えば、3μmとすることができる。
第2の裏面絶縁層51は、第1の裏面絶縁層49の表面49a(第1の裏面絶縁層49の面のうち、半導体基板41と接触する面とは反対側に位置する面)に設けられている。第1の表面絶縁層47及び第2の裏面絶縁層51は、樹脂を含む。具体的には、第1の表面絶縁層47及び第2の裏面絶縁層51は、熱硬化性の樹脂を含む。
第1の表面絶縁層47の厚さが3μmの場合、第2の裏面絶縁層51の厚さは、例えば、3μmとすることができる。
配線53は、回路素子層42の表面42aに設けられており、チップ貫通電極54の一端54Aと接続されている。配線53は、第1の表面電極44と接続されている。配線53は、第1の裏面電極52の配設間隔が接続パッド23の配設位置に対応するようにするための再配線である。
チップ貫通電極54は、半導体基板41を貫通する貫通電極と、該貫通電極と電気的に接続され、かつ回路素子層42の多階層配線構造を構成する第1の配線階層、他の配線層、及びビアと、を有する。
上記構成とされた第1の半導体チップ35は、半導体基板41を貫通する貫通電極を有するため、薄板化(例えば、50μm以下)されている。
図2を参照するに、回路素子層62は、メモリセルが形成されるメモリセル形成領域A、及び周辺回路が形成される周辺回路形成領域Bを有すると共に、素子分離領域72と、半導体基板61の第1の面61aに形成されたゲート酸化膜(図示せず)と、ゲート電極73,74と、サイドウォール76と、第1の不純物拡散層77と、第2の不純物拡散層78と、第3の不純物拡散層79と、トタンジスタ80と、第1の層間絶縁膜82と、セルフアラインコンタクト83,84と、ビット線コンタクト85と、コンタクトプラグ86と、多階層配線構造90と、を有する。
図2を参照するに、サイドウォール76は、ゲート電極72,73の側面及び上面を覆うように設けられている。サイドウォール76としては、シリコン窒化膜(SiN膜)を用いることができる。
例えば、半導体基板61がp型単結晶シリコン基板の場合、第1及び第2の不純物拡散層77,78は、半導体基板61にn型不純物をイオン注入することで形成する。
図2を参照するに、第3の不純物拡散層79は、周辺回路領域Bに位置する半導体基板61の第1の面61a側に形成されている。第3の不純物拡散層79は、周辺回路用トランジスタ(図示せず)の構成要素の1つである。
図2を参照するに、コンタクトプラグ86は、第3の不純物拡散層79上に形成された第1の層間絶縁膜82を貫通するように設けられている。コンタクトプラグ86の下端は、第3の不純物拡散層79と接触している。これにより、コンタクトプラグ86は、周辺回路用トランジスタ(図示せず)と電気的に接続されている。
このうち、配線階層142,144,147、コンタクトプラグ143、ビア146,148、及び第1の配線階層149は、チップ貫通ビア68の一部を構成している。
図2を参照するに、ビット線89は、ビット線コンタクト85上に設けられており、第2の層間絶縁膜88に内設されている。ビット線89は、ビット線コンタクト85を介して、第1の不純物拡散層77と電気的に接続されている。また、図示してはいないが、ビット線89は、ゲート電極73の延在方向に対して交差する方向に延在している。
ストッパー膜94は、エッチングにより、第3の層間絶縁膜95にキャパシタ97を配置するためのシリンダ孔123を形成する際のエッチングストッパーとなる膜である。ストッパー膜94としては、シリコン窒化膜(SiN膜)を用いる。
第3の層間絶縁膜95は、メモリセル形成領域A及び周辺回路形成領域Bに配置されている。第3の層間絶縁膜95としては、シリコン酸化膜(SiO2膜)を用いることができる。
キャパシタ97で保持されるデータは、ワード線として機能するゲート電極73の活性化に伴い、第1の不純物拡散層77、セルフアラインコンタクト83、ビット線コンタクト85、及び容量コンタクト93を介して、ビット線89に読み出される。
図2を参照するに、コンタクトプラグ101は、配線階層92上に位置するストッパー膜94、第3の層間絶縁膜95、及び第4の層間絶縁膜98を貫通するように設けられている。コンタクトプラグ101の下端は、配線階層92と接続されている。
図2を参照するに、配線階層103は、第4の層間絶縁膜98上に設けられており、コンタクトプラグ101の上端と接続されている。
複数のコンタクトプラグ143の下端は、配線階層142の上面と接続されている。これにより、複数のコンタクトプラグ143は、配線階層142と電気的に接続されている。
図2を参照するに、ビア146は、配線階層144上に位置する第5の層間絶縁膜105を貫通するように複数設けられている。複数のビア146の下端は、配線階層144と接続されている。これにより、複数のビア146は、配線階層144と電気的に接続されている。
図2を参照するに、ビア148は、配線階層147上に位置する第6の層間絶縁膜111を貫通するように複数設けられている。複数のビア148の下端は、配線階層147と接続されている。これにより、複数のビア148は、配線階層147と電気的に接続されている。
第1の配線階層149の上面149a(チップ貫通電極68の一端68A)の一部は、第2の表面絶縁層151に形成された開口部129により露出されている。第1の配線階層149は、多階層配線構造87を構成する複数の配線階層のうち、最上層に配置された配線階層である。
第2の表面絶縁層151は、多階層配線構造87のうち、第2の表面絶縁層151の下方に配置された部分を保護する機能を有する。具体的には、第2の表面絶縁層151は、多階層配線構造87のうち、第2の表面絶縁層151の下方に配置された部分に水分が浸入することを防止する機能を有する。第2の表面絶縁層151としては、例えば、シリコン窒化膜(Si3N4膜)や酸窒化膜(SiON膜)等を用いることができる。
なお、図2では、1つのチップ貫通電極68に対して1つの円筒状絶縁材63を設けた場合を例に挙げて説明したが、1つのチップ貫通電極68に対して同心円状に配置された2つの円筒状絶縁材を設けてもよい。
これにより、第1の半導体チップ35の第1の裏面電極52と第2の半導体チップ36−1の第2の表面電極69とを熱圧着する際、或いは、第2の半導体チップ36−1の第2の裏面電極71と第2の半導体チップ36−2の第2の表面電極69とを熱圧着する際の加熱により、第2の半導体チップ36−1に反りが発生することを抑制できる。
第1の表面絶縁層65の厚さが3μmの場合、第2の裏面絶縁層66の厚さは、例えば、3μmとすることができる。
図2を参照するに、貫通電極135は、シード層138と、貫通電極本体139と、を有する。シード層138は、基板貫通孔67の内面、及び貫通電極本体139の形成領域に位置する第2の裏面絶縁層66の表面66aを覆うように設けられている。
シード層138の上面138a(貫通電極135の他端)は、第1の層間絶縁膜82から露出されている。シード層138としては、例えば、Ti膜と、Cu膜と、が順次積層された積層膜を用いることができる。
また、貫通電極135は、半導体基板61の第2の面61bから突き出た一端部分135Aを含んでおり、第1の裏面絶縁層64の一部と第2の裏面絶縁層66の一部とが半導体基板61の第2の面61bと貫通電極135の一端部分135Aとの間に挿入されている。
特に、図2に示すように、半導体装置10の微細化の進展により、1つの貫通電極135に対して1つの円筒状絶縁材63しか設けることができない場合(複数の円筒状絶縁材を設けることができない場合)に有効である。
開口部129の底面に設けられたシード層152は、第1の配線階層149の上面149aと接続されている。これにより、第2の表面電極69は、チップ貫通電極68と電気的に接続されている。シード層152としては、例えば、Ti膜と、Cu膜と、が順次積層された積層膜を用いることができる。
図2を参照するに、第2の裏面電極71は、第2の裏面絶縁層66から露出された貫通電極本体139の端面139a(チップ貫通電極68の他端)を覆うように設けられている。つまり、第2の裏面電極71は、半導体基板61の第2の面61b側に配置されている。第2の裏面電極71としては、例えば、Ni層と、Au層と、が順次積層されたNi/Au積層膜を用いることができる。
なお、図2では、第2の半導体チップ36−1の一例として、DRAMを例に挙げて説明したが、DRAMの替わりに、SRAM(Static Random Access Memory)、PRAM(相変化メモリ)、フラッシュメモリ等を用いてもよい。
これにより、第2の半導体チップ36−1と第2の半導体チップ36−2とを熱圧着する際、或いは、第2の半導体チップ36−2の第2の半導体チップ36−3とを熱圧着する際の加熱により、第2の半導体チップ36−2に反りが発生することを抑制できる。
これにより、第2の半導体チップ36−3と第2の半導体チップ36−2とを熱圧着する際、或いは、第2の半導体チップ36−3の第2の半導体チップ36−4とを熱圧着する際の加熱により、第2の半導体チップ36−3に反りが発生することを抑制できる。
第2の半導体チップ36−4の第2の表面電極69は、第3の半導体チップ36−3の第2の裏面電極71と電気的に接続されている。これにより、第2の半導体チップ36−4は、第2の半導体チップ36−3に実装されると共に、配線基板11と電気的に接続されている。また、第2の半導体チップ36−3と第2の半導体チップ36−4との間には、第1の封止樹脂16が充填される隙間が形成されている。
これにより、第2の半導体チップ36−4と第2の半導体チップ36−3とを熱圧着する際の加熱により、第2の半導体チップ36−4に反りが発生することを抑制できる。
第1の封止樹脂16は、積層された第1及び第2の半導体チップ35,36−1,36−2,36−3,36−4を保護する機能を有する。第1の封止樹脂16としては、例えば、アンダーフィル樹脂を用いることができる。
第2の封止樹脂17は、第1の半導体チップ35と配線基板11との間の電気的接続を保護する機能を有する。第2の封止樹脂17としては、例えば、アンダーフィル樹脂を用いることができる。
次いで、図示していないウェル領域を形成した後、ポリシリコン膜及びタングステン膜よりなるゲート電極73,74を形成し、その後、ゲート電極73,74を覆うサイドウォール76を形成する。
次いで、セルフアラインコンタクト83を形成し、その後、ビット線コンタクト85及びコンタクトプラグ86を形成する。次いで、ビット線89、配線階層92,142を一括形成し、その後、第2の層間絶縁膜88を形成する。
次いで、第4の層間絶縁膜98上に第5の層間絶縁膜105を形成し、その後、ビア106,146及び配線階層108,147を形成する。
次いで、配線階層114、及び第1の配線階層149の一部を覆うように、第1の配線階層149の上面149aを露出する開口部129を有した第2の表面絶縁層151を形成する。第2の表面絶縁層151としては、例えば、シリコン窒化膜(Si3N4膜)や酸窒化膜(SiON膜)等を用いることができる。
次いで、第2の表面電極69の形成領域(図2参照)に対応する部分のシード層152を露出する開口部156を有しためっき用レジスト膜155を形成する。
第2の表面電極69は、半導体基板61の複数のチップ形成領域に位置する回路素子62の表面62aに形成される。
このように、図6に示す構造体の第2の表面電極69側に、接着剤161を介して、支持基板162を貼り付けることで、半導体基板61を薄板化する工程において、支持基板162が補強板として機能するため、半導体基板61を精度良く薄板化することができる。
これにより、半導体基板61を薄板化した後において、図6に示す構造体を製造する際に使用する製造装置(例えば、成膜装置、エッチング装置、洗浄装置等)を使用することができる。
また、第1の表面絶縁層65、第1の裏面絶縁層64、及び第2の裏面絶縁層66は、第2の裏面絶縁層66の熱膨張係数と第1の表面絶縁層65の熱膨張係数との差が、第1の裏面絶縁層64の熱膨張係数と第1の表面絶縁層65の熱膨張係数との差よりも小さくなるように形成する。
また、第2の裏面絶縁層66の材料として熱硬化性樹脂を用いると共に、接着剤161として熱硬化性接着剤を用いた場合、第2の裏面絶縁層66の母材となる熱硬化性樹脂は、熱硬化性接着剤の熱硬化温度よりも低い熱硬化温度を有するものを用いるとよい。
このように、基板貫通孔67を形成する際のエッチング用マスクとして第2の裏面絶縁層66を利用することで、別途、第2の裏面絶縁層66上にエッチング用マスクを形成する必要がなくなるため、第2の半導体チップ36−1の製造工程を簡略化することができる。
シード層138は、後述する図14に示す工程において、貫通電極本体139を電解めっき法により形成する際、給電層として使用する導電層である。なお、シード層138は、スパッタ法以外の方法で形成してもよい。シード層138としては、例えば、Ti膜(厚さが150nm)と、Cu膜(厚さが600nm)と、を順次積層させた積層膜を用いることができる。
このとき、開口部164は、図13に示す基板貫通孔67の上端よりも幅広形状にする。このような形状とすることで、第2の半導体チップ36−1の第2の裏面電極71と第1の半導体チップ35の第1の表面電極44とを容易に接続することができる。
次いで、電解めっき法により、貫通電極本体139の端面139aに、はんだめっき膜(例えば、Sn−Ag合金よりなるめっき膜)を析出成長させることで、第2の裏面電極71を形成する。
これにより、貫通電極135、配線階層142,144,147、コンタクトプラグ143、ビア146,148、及び第1の配線階層149よりなるチップ貫通電極68が形成される。
なお、図15では、1つのチップ貫通電極68のみ図示したが、実際には、複数のチップ貫通電極68が形成される。
これにより、第2の半導体チップ36−4と、第2の半導体チップ36−3とが電気的に接続されると共に、第2の半導体チップ36−4と第2の半導体チップ36−3との間に隙間が形成される。
これにより、第2の半導体チップ36−3と第2の半導体チップ36−4とを熱圧着する際の加熱により、第2の半導体チップ36−3,36−4に反りが発生することを抑制できる。
これにより、第2の半導体チップ36−3と、第2の半導体チップ36−2とが電気的に接続されると共に、第2の半導体チップ36−3と第2の半導体チップ36−2との間に隙間が形成される。
これにより、第2の半導体チップ36−2と第2の半導体チップ36−3とを熱圧着する際の加熱により、第2の半導体チップ36−2,36−3に反りが発生することを抑制できる。
これにより、第2の半導体チップ36−2と、第2の半導体チップ36−1とが電気的に接続されると共に、第2の半導体チップ36−2と第2の半導体チップ36−1との間に隙間が形成される。
これにより、第2の半導体チップ36−1と第2の半導体チップ36−2とを熱圧着する際の加熱により、第2の半導体チップ36−1,36−2に反りが発生することを抑制できる。
なお、図19に示すチップ積層体14は、図1に示すチップ積層体14を上下反転させたものである。
これにより、第1の半導体チップ35と第2の半導体チップ36−1とを熱圧着する際の加熱により、第1及び第2の半導体チップ35,36−1に反りが発生することを抑制できる。
次いで、塗布用シート182と共に、チップ積層体14及びアンダーフィル樹脂185を所定温度(例えば、150℃程度)で加熱することで、アンダーフィル樹脂185を硬化させる。これにより、硬化したアンダーフィル樹脂185よりなり、かつチップ積層体14を封止する第1の封止樹脂16が形成される。
基板本体187は、切断位置Fにおいて切断されることで、複数の図1に示す基板本体22となる。また、基板本体187の表面187aは、基板本体22の表面22aとなる面であり、基板本体187の裏面187bは、基板本体22の裏面22bとなる面である。基板本体187としては、例えば、ガラスエポキシ基板を用いることができる。
次いで、接続パッド23上に、バンプ12を形成する。バンプ12は、例えば、ワイボンディング装置(図示せず)により形成したスタッドバンプを用いることができる。
アンダーフィル樹脂189としては、例えば、NCP(Non Conductive Paste)と呼ばれる液状の接着剤を用いることができる。
次いで、ボンディングツール(図示せず)により、チップ積層体14を構成する第2の半導体チップ36−4を吸着する。次いで、配線基板11及びチップ積層体14を加熱した状態で、第1の半導体チップ35の第1の表面電極44と配線基板11の接続パッド23とを接触させ、その後、チップ積層体14を押圧することで、バンプ12を介して、第1の表面電極44と接続パッド23とを電気的に接続(熱圧着)する。
第3の封止樹脂18は、例えば、トランスファーモールド法により形成することができる。つまり、第3の封止樹脂18としては、モールド樹脂を用いることができる。モールド樹脂としては、例えば、熱硬化性樹脂(例えば、エポキシ樹脂)を用いることができる。
Claims (20)
- 互いに積層された第1及び第2の半導体チップを含むチップ積層体を有する半導体装置であって、
前記第1及び第2の半導体チップのそれぞれが、
半導体基板と、
前記半導体基板の第1の面に設けられた回路素子層と、
前記回路素子層の表面に設けられた第1の表面絶縁層と、
前記半導体基板の前記第1の面の反対側に位置する前記半導体基板の第2の面に設けられた第1の裏面絶縁層と、
前記第1の裏面絶縁層の面のうち、前記半導体基板と接触する面とは反対側に位置する面に設けられ、前記第1の裏面絶縁層と異なる絶縁物質を含む第2の裏面絶縁層と、
前記半導体基板を貫通する貫通電極と、
を有することを特徴とする半導体装置。 - 前記第2の裏面絶縁層の熱膨張係数と前記第1の表面絶縁層の熱膨張係数との差が、前記第1の裏面絶縁層の熱膨張係数と前記第1の表面絶縁層の前記熱膨張係数との差よりも小さいことを特徴とする請求項1記載の半導体装置。
- 前記回路素子層は、第1の配線階層として前記貫通電極と電気的に接続された第1の配線層と、前記第1の配線層を覆う第2の表面絶縁層とを有する多階層配線構造を含み、前記第1及び第2の半導体チップのそれぞれは、さらに、前記第2の表面絶縁層の第1の面に形成された表面電極であって、前記第2の表面絶縁層を貫通して前記第1の配線層に到達する第1の部分を含む前記表面電極を有することを特徴とする請求項1または2記載の半導体装置。
- 前記第1の表面絶縁層が前記第2の表面絶縁層の前記第1の面に形成されることを特徴とする請求項3に記載の半導体装置。
- 前記第1の表面絶縁層が前記第2の表面絶縁層と異なる絶縁物質を含むことを特徴とする請求項3に記載の半導体装置。
- 前記第1の表面絶縁層が前記表面電極を露出する開口部を備えることを特徴とする請求項3に記載の半導体装置。
- 前記回路素子層の前記多階層配線構造は、前記貫通電極と前記表面電極との間に複数の配線階層を含み、前記第1の配線階層と前記表面電極との間に、前記複数の配線階層のうちのいずれの1つの配線階層も挿入しないことを特徴とする請求項3に記載の半導体装置。
- 前記貫通電極は、前記半導体基板の前記第2の面から突き出た一端部分を含み、前記第1の裏面絶縁層の一部と前記第2の裏面絶縁層の一部とが前記半導体基板の前記第2の面と前記貫通電極の前記一端部分との間に挿入されることを特徴とする請求項1に記載の半導体装置。
- 前記第1の半導体チップと前記第2の半導体チップとの間の隙間を充填する第1の封止樹脂を設けたことを特徴とする請求項1ないし8のうち、いずれか1項記載の半導体装置。
- 前記第1の封止樹脂は、前記チップ積層体の外周側面を覆うことを特徴とする請求項9記載の半導体装置。
- 基板本体と、該基板本体の表面に設けられた接続パッドと、前記基板本体の裏面に設けられ、前記接続パッドと電気的に接続された接続ランドと、を含み、前記チップ積層体が搭載される配線基板を有し、
前記チップ積層体は、前記配線基板と前記第2の半導体チップとの間に前記第1の半導体チップが挟まれるように前記配線基板上に実装され、
前記第1の半導体チップの前記表面電極は、前記配線基板の前記接続パッドと接続されることを特徴とする請求項3に記載の半導体装置。 - 前記第1の表面絶縁層と前記第2の裏面絶縁層とが、樹脂を含むことを特徴とする請求項1に記載の半導体装置。
- 前記第1の表面絶縁層と前記第2の裏面絶縁層とが、熱硬化性の樹脂を含むことを特徴とする請求項1に記載の半導体装置。
- 第1及び第2の半導体チップが積層されたチップ積層体を有する半導体装置の製造方法であって、
半導体基板、該半導体基板の第1の面に設けられた回路素子層、該回路素子層の表面に設けられた表面絶縁層、該回路素子層の表面に設けられた表面電極、前記半導体基板の前記第1の面の反対側に位置する前記半導体基板の第2の面に設けられた第1の裏面絶縁層、該第1の裏面絶縁層の面のうち前記半導体基板と接触する面とは反対側に位置する面に設けられ前記第1の裏面絶縁層と異なる絶縁物質を含む第2の裏面絶縁層、前記半導体基板を貫通する貫通電極、及び前記半導体基板の前記第2の面側に設けられ該貫通電極と接続される裏面電極を有する第1及び第2の半導体チップを形成する工程と、
前記第2の半導体チップに設けられた前記表面電極と、前記第1の半導体チップに設けられた前記裏面電極とを熱圧着して、前記チップ積層体を形成する工程と、
を含むことを特徴とする半導体装置の製造方法。 - 前記チップ積層体を形成する工程では、複数の前記第2の半導体チップを熱圧着により積層させ、積層させた複数の前記第2の半導体チップのうちの1つの前記第2の半導体チップと前記第1の半導体チップとを熱圧着させることを特徴とする請求項14記載の半導体装置の製造方法。
- 前記第1及び第2の半導体チップを形成する工程では、前記第2の裏面絶縁層に開口部を形成し、前記開口部が形成された前記第2の裏面絶縁層をマスクとする異方性エッチングにより、前記第1の裏面絶縁層及び前記半導体基板を貫通し、かつ前記貫通電極が配置される基板貫通孔を形成することを特徴とする請求項14または15記載の半導体装置の製造方法。
- 前記第2の裏面絶縁層の熱膨張係数と前記表面絶縁層の熱膨張係数との差が、前記第1の裏面絶縁層の熱膨張係数と前記表面絶縁層の熱膨張係数との差よりも小さいことを特徴とする請求項14ないし16のうち、いずれか1項記載の半導体装置の製造方法。
- 前記第1及び第2の半導体チップを形成する工程は、前記第2の裏面絶縁層を形成する前に、接着剤を介して前記半導体基板に形成された前記回路素子層を支持基板に接着し、前記半導体基板を薄板化する工程と、
前記半導体基板を薄板化後に、前記回路素子層から前記接着剤及び前記支持基板を除去する工程と、を含み、
前記第2の裏面絶縁層を、前記接着剤の熱硬化温度よりも低い熱硬化温度を有する熱硬化性樹脂で形成することを特徴とする請求項14ないし17のうち、いずれか1項記載の半導体装置の製造方法。 - 前記第1の半導体チップと前記第2の半導体チップとの間の隙間を充填するように、第1の封止樹脂を形成する工程を有することを特徴とする請求項14ないし18のうち、いずれか1項記載の半導体装置の製造方法。
- 前記第1の封止樹脂を形成する工程では、前記チップ積層体の外周側面を覆うように前記第1の封止樹脂を形成すると共に、前記第1の封止樹脂の形状を、前記第1の半導体チップから前記第2の半導体チップに向かう方向に対して幅が広くなる逆テーパー形状にすることを特徴とする請求項19記載の半導体装置の製造方法。
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US9515037B2 (en) | 2016-12-06 |
US20220102318A1 (en) | 2022-03-31 |
US11211363B2 (en) | 2021-12-28 |
US20120313258A1 (en) | 2012-12-13 |
US11817427B2 (en) | 2023-11-14 |
EP2533280A3 (en) | 2017-08-23 |
US10497676B2 (en) | 2019-12-03 |
US20170040297A1 (en) | 2017-02-09 |
US20200273846A1 (en) | 2020-08-27 |
EP2533280A2 (en) | 2012-12-12 |
US10651158B2 (en) | 2020-05-12 |
US20190206842A1 (en) | 2019-07-04 |
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