TW201818520A - 半導體封裝及其製作方法 - Google Patents
半導體封裝及其製作方法 Download PDFInfo
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- TW201818520A TW201818520A TW106104555A TW106104555A TW201818520A TW 201818520 A TW201818520 A TW 201818520A TW 106104555 A TW106104555 A TW 106104555A TW 106104555 A TW106104555 A TW 106104555A TW 201818520 A TW201818520 A TW 201818520A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 83
- 238000000034 method Methods 0.000 title claims abstract description 67
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 229910052751 metal Inorganic materials 0.000 claims abstract description 108
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
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Classifications
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Abstract
本發明披露一種製作半導體封裝的方法。首先,提供一基板;接著於基板上形成一第一鈍化層;再形成複數個溝槽,延伸進入基板;然後於溝槽中形成金屬介層結構;隨後於第一鈍化層上形成一重佈線層結構;於重佈線層結構上形成一第二鈍化層;之後,於第二鈍化層中形成開孔,顯露出凸塊接墊;接著於凸塊接墊上形成第一金屬柱;然後於金屬柱上安置半導體晶片;再形成一成型模料,覆蓋半導體晶片;之後移除基板,從而顯露出第一鈍化層及各金屬介層結構的突出部分(第二金屬柱);最後,分別於各第二金屬柱上直接形成C4凸塊。
Description
本發明係有關於半導體封裝技術領域,更特定言之,本發明係有關於一種製作具有重佈線中介層結構的半導體封裝的方法。
積體電路(IC)晶片通常先經過封裝,再焊接到印刷電路板(PCB)上。積體電路晶片可透過控制崩塌晶片連接(C4)製程藉由多個焊錫凸塊連接到封裝基板。
如本領域所已知的,在半導體封裝中通常使用具有穿矽通孔(TSV)的中介層基板(諸如矽中介層)來“扇出”積體電路晶片的接點。然而,TSV矽中介層較為昂貴,因此,本領域仍期望提供一種具有中介層的改良半導體封裝,其不使用TSV和矽基板(無TSV的中介層),而中介層仍然能夠提供非常細密的互連間距。
然而,沒有TSV的重佈線中介層結構厚度較薄,在封裝過程中不易處理。例如,中介層上用來進一步連接的接墊開孔通常是利用光學微影製程定義,而厚度較薄的重佈線中介層結構容易翹曲,可能導致光學微影製程對不準問題,並因此造成良率降低。由此可知,本領域仍期望提供一種利用這種薄重佈線中介層結構來製造半導體封裝的方法,同時能夠克服上述的困難。
本發明的目的在提供一種改良的方法,用於製作具有薄重佈線中介層結構的半導體封裝,能解決上述先前技藝的不足與缺點。
本發明一方面,提出一種製作重佈線中介層結構的方法。首先,提供一基板,包含相對的一第一表面及一第二表面;接著於基板的第一表面上形成一第一鈍化層;再形成複數個溝槽,貫通第一鈍化層,並延伸進入基板;然後於溝槽中形成金屬介層結構;隨後於第一鈍化層上形成一重佈線層結構;最後,在重佈線層結構上形成用於進一步連接到半導體晶片的第一金屬柱。於重佈線層結構上形成第一金屬柱。
本發明一方面,提出一種製作半導體封裝的方法。首先,提供一基板,包含相對的一第一表面及一第二表面;接著於基板的第一表面上形成一第一鈍化層;再形成複數個溝槽,貫通第一鈍化層,並延伸進入基板;然後於複數個溝槽中形成凸塊下金屬(UBM)材料,以形成金屬介層結構;隨後於第一鈍化層上形成一重佈線層結構;於重佈線層結構上形成一第二鈍化層;之後,於第二鈍化層中形成開孔,顯露出重佈線層結構的凸塊接墊;接著於凸塊接墊上分別形成第一金屬柱;然後進行一晶片貼合製程,於第一金屬柱上安置半導體晶片;再形成一成型模料,覆蓋半導體晶片及第一鈍化層;之後透過研磨移除部分基板;隨後進行一濕式蝕刻製程,移除基板的剩餘部分,以顯露出第一鈍化層及各金屬介層結構的突出部分,從而形成第二金屬柱;最後,分別於各第二金屬柱上直接形成一連接件(諸如焊錫凸塊)。
本發明另一方面,提出一種製作半導體封裝的方法。首先,提供一基板,包含相對的一第一表面及一第二表面;接著於基板的第一表面上形成一第一鈍化層;再形成複數個溝槽,貫通第一鈍化層,並延伸進入基板;然後於複數個溝槽中填入導電材料以形成金屬介層結構;隨後於第一鈍化層上形成一重佈線層結構;再於重佈線層結構上形成一第二鈍化層;之後,於第二鈍化層中形成開孔,顯露出重佈線層結構的凸塊接墊;接著於凸塊接墊上分別形成第一金屬柱;然後將重佈線層結構貼合一載板;接著對基板進行一基板薄化製程,移除部分基板;隨後進行一濕式回蝕刻製程,移除基板的剩餘部分,以顯露出第一鈍化層及各金屬介層結構的突出部分,以及形成第二金屬柱;之後於第二金屬柱上接合一半導體晶片;再形成一成型模料,覆蓋半導體晶片及第一鈍化層;接著移除載板,顯露出第一金屬柱及第二鈍化層;最後,分別於各第一金屬柱上直接形成一連接件(諸如焊錫凸塊)。
為讓本發明之上述目的、特徵及優點能更明顯易懂,下文特舉較佳實施方式,並配合所附圖式,作詳細說明如下。然而如下之較佳實施方式與圖式僅供參考與說明用,並非用來對本發明加以限制者。
於下文中,係加以陳述本發明之具體實施方式,該些具體實施方式可參考相對應的圖式,俾使該些圖式構成實施方式之一部分。同時也藉由說明,揭露本發明可據以施行之方式。該等實施例已被清楚地描述足夠的細節,俾使該技術領域中具有通常技術者可據以實施本發明。其他實施例亦可被加以施行,且對於其結構上所做之改變仍屬本發明所涵蓋之範疇。
因此,下文的細節描述將不被視為一種限定,且本發明所涵蓋之範疇僅被所附之申請專利範圍以及其同意義的涵蓋範圍。
本發明之一或多個實施例將參照附圖描述,其中,相同元件符號始終用以表示相同元件,且其中闡述的結構未必按比例所繪製。術語“晶粒”、“晶片” “半導體晶片”及“半導體晶粒”於本說明書中可互換使用。
文中所使用的用語“晶圓”及“基板”包括任何具有暴露表面之結構,根據本發明,於該表面上可沉積有一至少層材料,例如,形成諸如重佈線層的電路結構。用語“基板”被理解為包括半導體晶圓,但不限於此。用語“基板”亦可用以指加工過程中之半導體結構,且可包括已被製造在其上之其它層。
請參考第1圖至第9圖。第1圖至第9圖係根據本發明的一實施例所繪示的製作半導體封裝的示例性方法的剖面圖,其中,第1圖至第4圖說明製作薄重佈線中介層結構的示例性方法。
如第1圖所示,首先,提供一基板10。根據本發明一實施例,基板10可以包含矽或III-V半導體,但不限於此。例如,根據本發明一實施例,基板10可以是晶圓形狀的矽基板。基板10具有相對的第一表面10a和第二表面10b。第一鈍化層11沉積在基板10的第一表面10a上。第一鈍化層11可以包含介電層。例如,第一鈍化層11可以包含氮化矽、氧化矽、氮氧化矽、聚醯亞胺或其任何組合。
如第2圖所示,利用光學微影、機械鑽孔、雷射鑽孔、反應離子蝕刻(RIE)或其組合,形成完全貫通第一鈍化層11的複數個溝槽110,各溝槽110並延伸進入基板10。各溝槽110從第一表面10a深入部分基板10的厚度,但各溝槽110不貫穿基板10。根據本發明一實施例,例如,各溝槽110的深度不超過50微米。
根據本發明一實施例,溝槽110可以具有相同的寬度。根據本發明另一實施例,溝槽110可以具有不同的寬度。
隨後,如第3圖所示,於溝槽110中填入一導電材料,從而形成金屬介層結構112。導電材料可包含銅、鉻、鎳、鋁、金、銀、鎢、鈦或氮化鈦,但不限於此。導電材料可透過使用電解電鍍、無電電鍍、蒸發、濺射、印刷或其他合適的金屬沉積製程來形成。
根據本發明一實施例,導電材料完全填滿溝槽110。導電材料可具有包含例如黏著層、一阻障層、一晶種層、一溼潤層或以上組合的多層結構。根據本發明一實施例,在基板10和填入到溝槽110中的導電材料之間不形成介電襯層。
應理解的是,在沉積導電材料之後,可以透過化學機械研磨(CMP)方法去除或平坦化第一鈍化層11上多餘的導電材料。在CMP之後,顯露第一鈍化層11的上表面。
隨後,如第4圖所示,於第一鈍化層11上形成重佈線層(RDL)結構20。根據本發明的實施例,RDL結構20可以包含至少一個介電層201和至少一個繞線層202。應理解的是,RDL結構20可以包含多層介電材料和多層繞線層,如圖所示。
根據本發明一實施例,介電層201可包含聚醯亞胺、苯環丁烯(BCB)等。根據本發明另一實施例,介電層201可包含氧化矽、氮化矽、氮氧化矽,但不限於此。繞線層202可以包含銅、鋁或合適的金屬合金,但不限於此。繞線層202可以具有細間距鑲嵌佈線結構,例如銅鑲嵌結構。
根據本發明一實施例,多個凸塊接墊204可形成在RDL結構20中並電連接至繞線層202。根據本發明一實施例,金屬介層結構112電連接至繞線層202。
根據本發明一實施例,於重佈線層結構20上形成一第二鈍化層21。分別透過於第二鈍化層21中的開孔210顯露出凸塊接墊204。根據本發明一實施例,第二鈍化層21可以包含介電層,但不限於此。例如,第二鈍化層21可以包含氮化矽、氧化矽、氮氧化矽、聚醯亞胺或以上組合。根據本發明另一實施例,第二鈍化層21可以包含防焊層,但不限於此。
在各凸塊接墊204上形成複數個第一金屬柱320,例如微凸塊等。根據本發明一實施例,各第一金屬柱320可包含凸塊下金屬結構320a和覆蓋在凸塊下金屬結構320a上的導電凸塊320b。導電凸塊320b可以包含一焊錫凸塊或一金屬凸塊。例如,第一金屬柱320可具有一凸塊間距,其與半導體晶片的主動面上的輸入/輸出(I/O)墊間距相匹配。例如,第一金屬柱320可以包含銅、金或任何合適的金屬。可理解的是,第一金屬柱320可另包含金屬處理層和形成在第一金屬柱320上的焊料蓋(未明確示出)。
如第5圖所示,進行一晶片貼合製程,於第一金屬柱320上安置至少一第一半導體晶片101及至少一第二半導體晶片102。第一半導體晶片101和第二半導體晶片102可以是覆晶晶片,其主動面面向下朝向第一金屬柱320。第一半導體晶片101和第二半導體晶片102透過第一金屬柱320電連接至RDL結構20。
儘管在圖式中未繪示,但是應當理解,在第一半導體晶片101和第二半導體晶片102上的對應接合焊墊上以形成有微凸塊。當第一半導體晶片101和第二半導體晶片102與RDL結構20接合時,使第一半導體晶片101和第二半導體晶片102上對應接合焊墊上的微凸塊與複數個第一金屬柱320對準。
第一半導體晶片101和第二半導體晶片102是具有一些功能的主動積體電路晶片,例如GPU(圖形處理單元)、CPU(中央處理單元)、記憶體晶片等。根據本發明一實施例,第一半導體晶片101和第二半導體晶片102可以一起設置在同一封裝中,並且可以是具有特定功能的不同晶片。另外,可以選擇在各晶片下方使用底膠(圖未示)。
如第6圖所示,形成一成型模料400覆蓋第一半導體晶片101、第二半導體晶片102和第二鈍化層21的上表面。隨後,可以對成型模料400進行一固化處理。根據本發明一實施例,成型模料400可以包含環氧樹脂和二氧化矽填料的混合物,但不限於此。
後續,可選擇研磨成型模料400的上部,使第一半導體晶片101及第二半導體晶片102的被動面被顯露出來,且與成型模料400的一表面400a共平面。
如第7圖所示,在形成成型模料400之後,對基板10進行一基板薄化製程,移除部分厚度的該基板。例如,可以對基板10的第二表面10b進行研磨製程以移除基板10的大部分厚度。在研磨製程完成之後,基板10的剩餘部分仍然覆蓋金屬介層結構112且金屬介層結構112在此時不會被顯露出來。
如第8圖所示,在基板薄化製程之後,進行一矽濕式回蝕刻製程,移除基板10的剩餘部分,以顯露出第一鈍化層11及各金屬介層結構112的突出部分。在RDL結構20的底側(或PCB側),金屬介層結構112的突出部分構成第二金屬柱112a。根據本發明一實施例,第二金屬柱112a可以為凸塊下金屬 (UBM)凸塊。
或者,可在完成基板薄化製程之後暴露出金屬介層結構112。在這種情況下,可以省略前述的矽濕式回蝕刻製程。
如第9圖所示,複數個連接件620分別直接形成在各第二金屬柱112a上。複數個連接件620可包含焊錫凸塊或C4凸塊。連接件620可包含金、銀、銅、鎳、鎢、錫或以上組合。連接件620可具有與封裝基板或印刷電路板(PCB)的墊間距相匹配的凸塊間距。隨後,進行一切割製程以將各半導體封裝彼此分離。
根據本發明一實施例,連接件620可以透過電鍍或落球法形成在第二金屬柱112a上,但不限於此。根據本發明另一實施例,連接件620可以僅形成在各第二金屬柱112a的上表面上。
本發明的方法的優點在於,連接件620的形成不涉及光學微影製程,因此可以避免晶圓級組件翹曲而導致的開口對不準問題,如此改善封裝製程餘裕及封裝製程良率。
此外,本發明的一個技術特徵在於,用於在PCB側上形成焊錫凸塊或C4凸塊的第二金屬柱112a及第一金屬柱320是在去除基板10之前就已經製作完成。
請參考第10圖至第20圖。第10圖至第20圖係根據本發明的另一實施例所繪示的製作半導體封裝的示例性方法的剖面圖,其中相同的元件符號表示相同的元件、層或區域。第10圖至第13圖說明製作薄重佈線中介層結構的示例性方法。
首先,同樣地,如第10圖所示,提供一基板10。根據本發明一實施例,基板10可以包含矽或III-V半導體,但不限於此。例如,根據本發明一實施例,基板10可以是晶圓形狀的矽基板。基板10具有相對的第一表面10a和第二表面10b。第一鈍化層11沉積在基板10的第一表面10a上。第一鈍化層11可以包含介電層。例如,第一鈍化層11可以包含氮化矽、氧化矽、氮氧化矽、聚醯亞胺或其任何組合。
如第11圖所示,利用光學微影、機械鑽孔、雷射鑽孔、反應離子蝕刻(RIE)或其組合,形成完全貫通第一鈍化層11的複數個溝槽110,各溝槽110並延伸進入基板10。各溝槽110從第一表面10a深入部分基板10的厚度,但各溝槽110不貫穿基板10。根據本發明一實施例,例如,各溝槽110的深度不超過50微米。根據本發明另一實施例,溝槽110可以具有不同的寬度。
隨後,如第12圖所示,於溝槽110中填入一導電材料,從而形成金屬介層結構122。導電材料可包含銅、鉻、鎳、鋁、金、銀、鎢、鈦或氮化鈦,但不限於此。導電材料可透過使用電解電鍍、無電電鍍、蒸發、濺射、印刷或其他合適的金屬沉積製程來形成。根據本發明一實施例,導電材料完全填滿溝槽110。
應理解的是,在沉積導電材料之後,可以透過化學機械研磨(CMP)方法去除或平坦化第一鈍化層11上多餘的導電材料。在CMP之後,顯露第一鈍化層11的上表面。
隨後,如第13圖所示,於第一鈍化層11上形成重佈線層(RDL)結構20。根據本發明的實施例,RDL結構20可以包含至少一個介電層201和至少一個繞線層202。應理解的是,RDL結構20可以包含多層介電材料和多層繞線層,如圖所示。
根據本發明一實施例,介電層201可包含聚醯亞胺、苯環丁烯(BCB)等。根據本發明另一實施例,介電層201可包含氧化矽、氮化矽、氮氧化矽,但不限於此。繞線層202可以包含銅、鋁或合適的金屬合金,但不限於此。繞線層202可以具有細間距鑲嵌佈線結構,例如銅鑲嵌結構。
根據本發明一實施例,多個凸塊接墊204可形成在RDL結構20中並電連接至繞線層202。根據本發明一實施例,金屬介層結構122電連接至繞線層202。
根據本發明一實施例,於重佈線層結構20上形成一第二鈍化層21。分別透過於第二鈍化層21中的開孔210顯露出凸塊接墊204。根據本發明一實施例,第二鈍化層21可以包含介電層,但不限於此。例如,第二鈍化層21可以包含氮化矽、氧化矽、氮氧化矽、聚醯亞胺或以上組合。根據本發明另一實施例,第二鈍化層21可以包含防焊層,但不限於此。
在各凸塊接墊204上形成複數個第一金屬柱322。例如,第一金屬柱322可以作為用於著陸焊錫凸塊或錫球的UBM凸塊,且可具有與封裝基板或印刷電路板(PCB)的墊間距相匹配的凸塊間距。例如,第一金屬柱322可以包含銅、鉻、鎳、鋁、金、銀、鎢、鈦或氮化鈦,或任何合適的金屬。
根據本發明一實施例,第一金屬柱322可以從第二鈍化層21的上表面突出。
如第14圖所示,進行一載板接合製程。載板40可以透過使用黏著層42接合到RDL結構20上。載板40可以是玻璃基板、金屬片或矽基板,但不限於此。
如第15圖所示,在進行一載板接合製程之後,對基板10進行一基板薄化製程,移除部分厚度的該基板。例如,可以對基板10的第二表面10b進行研磨製程以移除基板10的大部分厚度。在研磨製程完成之後,基板10的剩餘部分仍然覆蓋金屬介層結構122且金屬介層結構122在此時不會被顯露出來。
如第16圖所示,在基板薄化製程之後,進行一矽濕式回蝕刻製程,移除基板10的剩餘部分,以顯露出第一鈍化層11及各金屬介層結構122的突出部分。在RDL結構20的底側(或晶片側),金屬介層結構122的突出部分構成第二金屬柱122a。根據本發明一實施例,第二金屬柱122a可以用於連接到晶片的微凸塊。
或者,可在完成基板薄化製程之後暴露出金屬介層結構122。在這種情況下,可以省略前述的矽濕式回蝕刻製程。
如第17圖所示,隨後,進行一晶片貼合製程,於第二金屬柱122a上安置至少一第一半導體晶片101及至少一第二半導體晶片102。第一半導體晶片101和第二半導體晶片102可以是覆晶晶片,其主動面面向下朝向第二金屬柱122a。第一半導體晶片101和第二半導體晶片102透過第二金屬柱122a電連接至RDL結構20。
第一半導體晶片101和第二半導體晶片102是具有一些功能的主動積體電路晶片,例如GPU(圖形處理單元)、CPU(中央處理單元)、記憶體晶片等。根據本發明一實施例,第一半導體晶片101和第二半導體晶片102可以一起設置在同一封裝中,並且可以是具有特定功能的不同晶片。另外,可以選擇在各晶片下方使用底膠(圖未示)。
如第18圖所示,形成一成型模料400覆蓋第一半導體晶片101、第二半導體晶片102和第一鈍化層11的上表面。隨後,可以對成型模料400進行一固化處理。根據本發明一實施例,成型模料400可以包含環氧樹脂和二氧化矽填料的混合物,但不限於此。
後續,可選擇研磨成型模料400的上部,使第一半導體晶片101及第二半導體晶片102的被動面被顯露出來,且與成型模料400的一表面400a共平面。
如第19圖所示,在形成成型模料400之後,去除載板40和黏著層42,從來顯露出第一金屬柱322和第二鈍化層21。
如第20圖所示,複數個連接件622分別直接形成在各第一金屬柱322上。複數個連接件622可包含焊錫凸塊或C4凸塊。連接件622可包含金、銀、銅、鎳、鎢、錫或以上組合。隨後,進行一切割製程以將各半導體封裝彼此分離。 以上所述僅為本發明之較佳實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。
10‧‧‧基板
10a‧‧‧第一表面
10b‧‧‧第二表面
11‧‧‧第一鈍化層
110‧‧‧溝槽
112‧‧‧金屬介層結構
20‧‧‧重佈線層(RDL)結構
201‧‧‧介電層
202‧‧‧繞線層
204‧‧‧凸塊接墊
21‧‧‧第二鈍化層
210‧‧‧開孔
320‧‧‧第一金屬柱
320a‧‧‧凸塊下金屬結構
320b‧‧‧導電凸塊
101‧‧‧第一半導體晶片
102‧‧‧第二半導體晶片
400‧‧‧成型模料
400a‧‧‧表面
112a‧‧‧第二金屬柱
620‧‧‧連接件
122‧‧‧金屬介層結構
322‧‧‧第一金屬柱
40‧‧‧載板
42‧‧‧黏著層
122a‧‧‧第二金屬柱
622‧‧‧連接件
附圖包括對本發明的實施例提供進一步的理解,及被併入且構成說明書中的一部份。圖示說明一些本發明的實施例,並與說明書一起用於解釋其原理。 第1圖至第9圖係根據本發明的一實施例所繪示的製作半導體封裝的示例性方法的剖面圖;以及 第10圖至第20圖係根據本發明的另一實施例所繪示的製作半導體封裝的示例性方法的剖面圖。
Claims (21)
- 一種製作重佈線中介層結構的方法,包含: 提供一基板,包含相對的一第一表面及一第二表面; 形成金屬介層結構,延伸進入該基板的該第一表面; 於該基板上形成一重佈線層結構,使其電連接該金屬介層結構;以及 於該重佈線層結構上形成第一金屬柱。
- 如申請專利範圍第1項所述的一種製作重佈線中介層結構的方法,其中所述形成金屬介層結構,延伸進入該基板的該第一表面,係包含以下步驟: 於該基板的該第一表面上形成一第一鈍化層; 形成複數個溝槽,貫通該第一鈍化層,並延伸進入該基板;以及 於該複數個溝槽中填入一導電材料。
- 如申請專利範圍第2項所述的一種製作重佈線中介層結構的方法,其中各該複數個溝槽的深度不超過50微米。
- 如申請專利範圍第2項所述的一種製作重佈線中介層結構的方法,其中複數個溝槽具有相同的寬度。
- 如申請專利範圍第2項所述的一種製作重佈線中介層結構的方法,其中複數個溝槽具有不同的寬度。
- 如申請專利範圍第2項所述的一種製作重佈線中介層結構的方法,其中該導電材料包含銅、鉻、鎳、鋁、金、銀、鎢、鈦或氮化鈦。
- 如申請專利範圍第2項所述的一種製作重佈線中介層結構的方法,其中該導電材料具有一多層結構,包含一黏著層、一阻障層、一晶種層、一溼潤層或以上組合。
- 如申請專利範圍第2項所述的一種製作重佈線中介層結構的方法,其中所述於該重佈線層結構上形成第一金屬柱包含以下步驟: 於該重佈線層結構上形成一第二鈍化層; 於該第二鈍化層中形成開孔,顯露出該重佈線層結構的凸塊接墊;以及 於該凸塊接墊上形成該第一金屬柱。
- 如申請專利範圍第8項所述的一種製作重佈線中介層結構的方法,其中該第一鈍化層及該第二鈍化層包含氮化矽、氧化矽、氮氧化矽、聚醯亞胺或以上組合。
- 如申請專利範圍第1項所述的一種製作重佈線中介層結構的方法,其中該基板包含矽基板。
- 一種製作半導體封裝的方法,包含: 提供如申請專利範圍第2項所述的重佈線中介層結構; 進行一晶片貼合製程,於該第一金屬柱上安置半導體晶片; 去除該基板,顯露出該金屬介層結構的突出部分,該些突出部分構成第二金屬柱;以及 於各該第二金屬柱上形成一連接件。
- 如申請專利範圍第11項所述的一種製作半導體封裝的方法,其中所述去除該基板,顯露出該金屬介層結構的突出部分包含以下步驟: 對該基板進行一基板薄化製程,移除部分該基板;以及 進行一濕式回蝕刻製程,移除該基板的剩餘部分,以顯露出該第一鈍化層及各該金屬介層結構的該突出部分。
- 如申請專利範圍第11項所述的一種製作半導體封裝的方法,其中另包含: 形成一成型模料,覆蓋該半導體晶片及該第一鈍化層;以及 研磨該成型模料,其中該半導體晶片的被動面被顯露出來,且與該成型模料共平面。
- 如申請專利範圍第11項所述的一種製作半導體封裝的方法,其中該第一金屬柱為微凸塊,該第二金屬柱為凸塊下金屬凸塊。
- 如申請專利範圍第14項所述的一種製作半導體封裝的方法,其中該第一金屬柱包含一凸塊下金屬結構及一蓋在該凸塊下金屬結構上的導電凸塊。
- 如申請專利範圍第15項所述的一種製作半導體封裝的方法,其中該導電凸塊包含一焊錫凸塊或一金屬凸塊。
- 如申請專利範圍第11項所述的一種製作半導體封裝的方法,其中該連接件包含一焊錫凸塊或一C4凸塊。
- 一種製作半導體封裝的方法,包含: 提供如申請專利範圍第2項所述的重佈線中介層結構; 將該重佈線層結構貼合一載板; 去除該基板,顯露出該金屬介層結構的突出部分,該些突出部分構成第二金屬柱; 於該第二金屬柱上接合一半導體晶片; 移除該載板,顯露出該第一金屬柱及該第二鈍化層;以及 於各該第一金屬柱上形成一連接件。
- 如申請專利範圍第18項所述的一種製作半導體封裝的方法,其中所述去除該基板,顯露出該金屬介層結構的突出部分包含以下步驟: 對該基板進行一基板薄化製程,移除部分該基板;以及 進行一濕式回蝕刻製程,移除該基板的剩餘部分,以顯露出該第一鈍化層及各該金屬介層結構的該突出部分。
- 如申請專利範圍第19項所述的一種製作半導體封裝的方法,其中另包含: 形成一成型模料,覆蓋該半導體晶片及該第一鈍化層;以及 研磨該成型模料,其中該半導體晶片的被動面被顯露出來,且與該成型模料共平面。
- 如申請專利範圍第18項所述的一種製作半導體封裝的方法,其中該第一金屬柱為凸塊下金屬凸塊,該第二金屬柱為微凸塊。
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