JP2011525697A5 - - Google Patents

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JP2011525697A5
JP2011525697A5 JP2011500986A JP2011500986A JP2011525697A5 JP 2011525697 A5 JP2011525697 A5 JP 2011525697A5 JP 2011500986 A JP2011500986 A JP 2011500986A JP 2011500986 A JP2011500986 A JP 2011500986A JP 2011525697 A5 JP2011525697 A5 JP 2011525697A5
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metal
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JP2011500986A
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JP5820267B2 (ja
JP2011525697A (ja
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Priority claimed from PCT/US2009/037826 external-priority patent/WO2009117670A2/en
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JP2011500986A 2008-03-21 2009-03-20 配線用セルフアライン（自己整合）バリア層 Expired - Fee Related JP5820267B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US3865708P 2008-03-21 2008-03-21
US61/038,657 2008-03-21
US4323608P 2008-04-08 2008-04-08
US61/043,236 2008-04-08
US7446708P 2008-06-20 2008-06-20
US61/074,467 2008-06-20
PCT/US2009/037826 WO2009117670A2 (en) 2008-03-21 2009-03-20 Self-aligned barrier layers for interconnects

Publications (3)

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JP2011525697A JP2011525697A (ja) 2011-09-22
JP2011525697A5 true JP2011525697A5 (enExample) 2012-05-17
JP5820267B2 JP5820267B2 (ja) 2015-11-24

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JP2011500986A Expired - Fee Related JP5820267B2 (ja) 2008-03-21 2009-03-20 配線用セルフアライン（自己整合）バリア層

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US (2) US7932176B2 (enExample)
JP (1) JP5820267B2 (enExample)
KR (2) KR101803221B1 (enExample)
CN (1) CN102132398B (enExample)
WO (1) WO2009117670A2 (enExample)

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