JP2011503871A5 - - Google Patents

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Publication number
JP2011503871A5
JP2011503871A5 JP2010533058A JP2010533058A JP2011503871A5 JP 2011503871 A5 JP2011503871 A5 JP 2011503871A5 JP 2010533058 A JP2010533058 A JP 2010533058A JP 2010533058 A JP2010533058 A JP 2010533058A JP 2011503871 A5 JP2011503871 A5 JP 2011503871A5
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JP
Japan
Prior art keywords
layer
mesa
conductivity type
emitter
doping concentration
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JP2010533058A
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English (en)
Japanese (ja)
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JP5372002B2 (ja
JP2011503871A (ja
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Priority claimed from PCT/US2008/010538 external-priority patent/WO2009061340A1/en
Publication of JP2011503871A publication Critical patent/JP2011503871A/ja
Publication of JP2011503871A5 publication Critical patent/JP2011503871A5/ja
Application granted granted Critical
Publication of JP5372002B2 publication Critical patent/JP5372002B2/ja
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JP2010533058A 2007-11-09 2008-09-08 メサ構造とメサ段差を含むバッファ層とを備えた電力半導体デバイス Active JP5372002B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US98669407P 2007-11-09 2007-11-09
US60/986,694 2007-11-09
PCT/US2008/010538 WO2009061340A1 (en) 2007-11-09 2008-09-08 Power semiconductor devices with mesa structures and buffer layers including mesa steps

Publications (3)

Publication Number Publication Date
JP2011503871A JP2011503871A (ja) 2011-01-27
JP2011503871A5 true JP2011503871A5 (enExample) 2012-07-12
JP5372002B2 JP5372002B2 (ja) 2013-12-18

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ID=40032742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010533058A Active JP5372002B2 (ja) 2007-11-09 2008-09-08 メサ構造とメサ段差を含むバッファ層とを備えた電力半導体デバイス

Country Status (6)

Country Link
US (1) US7838377B2 (enExample)
EP (1) EP2208230B1 (enExample)
JP (1) JP5372002B2 (enExample)
KR (1) KR101494935B1 (enExample)
CN (1) CN101855726B (enExample)
WO (1) WO2009061340A1 (enExample)

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US8835987B2 (en) * 2007-02-27 2014-09-16 Cree, Inc. Insulated gate bipolar transistors including current suppressing layers
US9640609B2 (en) * 2008-02-26 2017-05-02 Cree, Inc. Double guard ring edge termination for silicon carbide devices
US8232558B2 (en) 2008-05-21 2012-07-31 Cree, Inc. Junction barrier Schottky diodes with current surge capability
US8097919B2 (en) * 2008-08-11 2012-01-17 Cree, Inc. Mesa termination structures for power semiconductor devices including mesa step buffers
US8497552B2 (en) 2008-12-01 2013-07-30 Cree, Inc. Semiconductor devices with current shifting regions and related methods
US8294507B2 (en) 2009-05-08 2012-10-23 Cree, Inc. Wide bandgap bipolar turn-off thyristor having non-negative temperature coefficient and related control circuits
US8637386B2 (en) * 2009-05-12 2014-01-28 Cree, Inc. Diffused junction termination structures for silicon carbide devices and methods of fabricating silicon carbide devices incorporating same
US8193848B2 (en) 2009-06-02 2012-06-05 Cree, Inc. Power switching devices having controllable surge current capabilities
US8629509B2 (en) * 2009-06-02 2014-01-14 Cree, Inc. High voltage insulated gate bipolar transistors with minority carrier diverter
US8541787B2 (en) * 2009-07-15 2013-09-24 Cree, Inc. High breakdown voltage wide band-gap MOS-gated bipolar junction transistors with avalanche capability
US8354690B2 (en) 2009-08-31 2013-01-15 Cree, Inc. Solid-state pinch off thyristor circuits
US20110084332A1 (en) * 2009-10-08 2011-04-14 Vishay General Semiconductor, Llc. Trench termination structure
US9117739B2 (en) 2010-03-08 2015-08-25 Cree, Inc. Semiconductor devices with heterojunction barrier regions and methods of fabricating same
SE537101C2 (sv) 2010-03-30 2015-01-07 Fairchild Semiconductor Halvledarkomponent och förfarande för utformning av en struktur i ett målsubstrat för tillverkning av en halvledarkomponent
US8415671B2 (en) 2010-04-16 2013-04-09 Cree, Inc. Wide band-gap MOSFETs having a heterojunction under gate trenches thereof and related methods of forming such devices
US8552435B2 (en) * 2010-07-21 2013-10-08 Cree, Inc. Electronic device structure including a buffer layer on a base layer
US8809904B2 (en) * 2010-07-26 2014-08-19 Cree, Inc. Electronic device structure with a semiconductor ledge layer for surface passivation
US8803277B2 (en) 2011-02-10 2014-08-12 Cree, Inc. Junction termination structures including guard ring extensions and methods of fabricating electronic devices incorporating same
US9318623B2 (en) * 2011-04-05 2016-04-19 Cree, Inc. Recessed termination structures and methods of fabricating electronic devices including recessed termination structures
US9029945B2 (en) 2011-05-06 2015-05-12 Cree, Inc. Field effect transistor devices with low source resistance
US9142662B2 (en) 2011-05-06 2015-09-22 Cree, Inc. Field effect transistor devices with low source resistance
US9349797B2 (en) 2011-05-16 2016-05-24 Cree, Inc. SiC devices with high blocking voltage terminated by a negative bevel
US9337268B2 (en) 2011-05-16 2016-05-10 Cree, Inc. SiC devices with high blocking voltage terminated by a negative bevel
CN102244003A (zh) * 2011-06-20 2011-11-16 中国科学院微电子研究所 一种InP HBT器件侧墙的制备方法
WO2013036370A1 (en) 2011-09-11 2013-03-14 Cree, Inc. High current density power module comprising transistors with improved layout
US9373617B2 (en) 2011-09-11 2016-06-21 Cree, Inc. High current, low switching loss SiC power module
US8664665B2 (en) 2011-09-11 2014-03-04 Cree, Inc. Schottky diode employing recesses for elements of junction barrier array
US8680587B2 (en) 2011-09-11 2014-03-25 Cree, Inc. Schottky diode
US8618582B2 (en) 2011-09-11 2013-12-31 Cree, Inc. Edge termination structure employing recesses for edge termination elements
US9640617B2 (en) 2011-09-11 2017-05-02 Cree, Inc. High performance power module
WO2013107508A1 (en) 2012-01-18 2013-07-25 Fairchild Semiconductor Corporation Bipolar junction transistor with spacer layer and method of manufacturing the same
CN103378138B (zh) * 2012-04-18 2016-12-14 朱恩均 双极晶体管及其制作方法
US9425265B2 (en) 2013-08-16 2016-08-23 Cree, Inc. Edge termination technique for high voltage power devices having a negative feature for an improved edge termination structure
CN105957886B (zh) * 2016-06-28 2019-05-14 中国科学院微电子研究所 一种碳化硅双极结型晶体管
CN105977287B (zh) * 2016-07-25 2018-11-09 电子科技大学 一种碳化硅双极结型晶体管
CN107482057B (zh) * 2017-06-29 2019-04-09 厦门市三安集成电路有限公司 多重外延层的共射共基晶体管
JP6740986B2 (ja) * 2017-08-31 2020-08-19 株式会社デンソー 炭化珪素半導体装置およびその製造方法
US10573516B2 (en) * 2017-12-06 2020-02-25 QROMIS, Inc. Methods for integrated devices on an engineered substrate
JP2020184580A (ja) * 2019-05-08 2020-11-12 株式会社村田製作所 半導体装置
CN112768438B (zh) * 2019-11-05 2022-07-15 深圳第三代半导体研究院 一种压接式功率模块及其制备方法
CN113809071B (zh) * 2021-07-26 2024-03-29 浙江芯国半导体有限公司 包含肖特基二极管的电路及相关应用
CN115172471A (zh) * 2022-06-28 2022-10-11 东莞市中镓半导体科技有限公司 高耐压垂直型二极管及其制备方法

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JP2007287782A (ja) * 2006-04-13 2007-11-01 Hitachi Ltd メサ型バイポーラトランジスタ

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