JP2011090865A - 導電フィルムおよびその製造方法、並びに半導体装置およびその製造方法 - Google Patents
導電フィルムおよびその製造方法、並びに半導体装置およびその製造方法 Download PDFInfo
- Publication number
- JP2011090865A JP2011090865A JP2009243028A JP2009243028A JP2011090865A JP 2011090865 A JP2011090865 A JP 2011090865A JP 2009243028 A JP2009243028 A JP 2009243028A JP 2009243028 A JP2009243028 A JP 2009243028A JP 2011090865 A JP2011090865 A JP 2011090865A
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- layer
- anodized layer
- linear conductors
- connection terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H10W70/095—
-
- H10W70/635—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/812—Applying energy for connecting
- H01L2224/81201—Compression bonding
- H01L2224/81203—Thermocompression bonding, e.g. diffusion bonding, pressure joining, thermocompression welding or solid-state welding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09945—Universal aspects, e.g. universal inner layers or via grid, or anisotropic interposer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10378—Interposers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0315—Oxidising metal
-
- H10W72/07232—
-
- H10W72/07236—
-
- H10W72/20—
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Non-Insulated Conductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009243028A JP2011090865A (ja) | 2009-10-22 | 2009-10-22 | 導電フィルムおよびその製造方法、並びに半導体装置およびその製造方法 |
| US12/909,096 US20110095419A1 (en) | 2009-10-22 | 2010-10-21 | Conductive film, method of manufacturing the same, semiconductor device and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009243028A JP2011090865A (ja) | 2009-10-22 | 2009-10-22 | 導電フィルムおよびその製造方法、並びに半導体装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011090865A true JP2011090865A (ja) | 2011-05-06 |
| JP2011090865A5 JP2011090865A5 (enExample) | 2012-08-30 |
Family
ID=43897689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009243028A Pending JP2011090865A (ja) | 2009-10-22 | 2009-10-22 | 導電フィルムおよびその製造方法、並びに半導体装置およびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20110095419A1 (enExample) |
| JP (1) | JP2011090865A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017150058A1 (ja) * | 2016-02-29 | 2017-09-08 | 富士フイルム株式会社 | 異方導電性接合部材、半導体デバイス、半導体パッケージおよび半導体デバイスの製造方法 |
| WO2017203884A1 (ja) * | 2016-05-27 | 2017-11-30 | 富士フイルム株式会社 | 異方導電材、電子素子、半導体素子を含む構造体および電子素子の製造方法 |
| JP2018037509A (ja) * | 2016-08-31 | 2018-03-08 | 富士フイルム株式会社 | 多層配線基板の製造方法 |
| JP2020107834A (ja) * | 2018-12-28 | 2020-07-09 | 大日本印刷株式会社 | 電子ユニット |
| JPWO2022044585A1 (enExample) * | 2020-08-24 | 2022-03-03 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101739742B1 (ko) * | 2010-11-11 | 2017-05-25 | 삼성전자 주식회사 | 반도체 패키지 및 이를 포함하는 반도체 시스템 |
| US9226396B2 (en) * | 2013-03-12 | 2015-12-29 | Invensas Corporation | Porous alumina templates for electronic packages |
| JP2014216552A (ja) * | 2013-04-26 | 2014-11-17 | 富士通株式会社 | 積層構造体及びその製造方法 |
| US11139262B2 (en) | 2019-02-07 | 2021-10-05 | Micron Technology, Inc. | Use of pre-channeled materials for anisotropic conductors |
| KR102608888B1 (ko) * | 2019-06-04 | 2023-12-01 | (주)포인트엔지니어링 | 전기접속용 양극산화막 및 광소자 디스플레이 및 광소자 디스플레이 제조 방법 |
| KR102865650B1 (ko) * | 2020-01-31 | 2025-09-29 | (주)포인트엔지니어링 | 프로브 헤드 및 이를 포함하는 프로브 카드 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04126307A (ja) * | 1990-03-16 | 1992-04-27 | Ricoh Co Ltd | 異方性導電膜およびその製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0854506A3 (en) * | 1987-03-04 | 1999-03-31 | Canon Kabushiki Kaisha | Electrically connecting member and electric circuit member |
| US5379515A (en) * | 1989-12-11 | 1995-01-10 | Canon Kabushiki Kaisha | Process for preparing electrical connecting member |
| JPH10308565A (ja) * | 1997-05-02 | 1998-11-17 | Shinko Electric Ind Co Ltd | 配線基板 |
| JP2003034894A (ja) * | 2001-07-25 | 2003-02-07 | Kobe Steel Ltd | 耐腐食性に優れたAl合金部材 |
| DE602004018720D1 (de) * | 2003-09-09 | 2009-02-12 | Nitto Denko Corp | Anisotrop-leitender Film , Herstellungs- und Gebrauchsverfahren |
| TWI255466B (en) * | 2004-10-08 | 2006-05-21 | Ind Tech Res Inst | Polymer-matrix conductive film and method for fabricating the same |
| JP5143045B2 (ja) * | 2008-07-09 | 2013-02-13 | 富士フイルム株式会社 | 微細構造体およびその製造方法 |
-
2009
- 2009-10-22 JP JP2009243028A patent/JP2011090865A/ja active Pending
-
2010
- 2010-10-21 US US12/909,096 patent/US20110095419A1/en not_active Abandoned
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04126307A (ja) * | 1990-03-16 | 1992-04-27 | Ricoh Co Ltd | 異方性導電膜およびその製造方法 |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017150058A1 (ja) * | 2016-02-29 | 2017-09-08 | 富士フイルム株式会社 | 異方導電性接合部材、半導体デバイス、半導体パッケージおよび半導体デバイスの製造方法 |
| KR102110258B1 (ko) * | 2016-02-29 | 2020-05-13 | 후지필름 가부시키가이샤 | 이방 도전성 접합 부재, 반도체 디바이스, 반도체 패키지 및 반도체 디바이스의 제조 방법 |
| US10559548B2 (en) | 2016-02-29 | 2020-02-11 | Fujifilm Corporation | Anisotropic conductive bonding member, semiconductor device, semiconductor package and semiconductor device production method |
| KR20180105205A (ko) * | 2016-02-29 | 2018-09-27 | 후지필름 가부시키가이샤 | 이방 도전성 접합 부재, 반도체 디바이스, 반도체 패키지 및 반도체 디바이스의 제조 방법 |
| JPWO2017150058A1 (ja) * | 2016-02-29 | 2018-11-08 | 富士フイルム株式会社 | 異方導電性接合部材、半導体デバイス、半導体パッケージおよび半導体デバイスの製造方法 |
| JPWO2017203884A1 (ja) * | 2016-05-27 | 2019-02-21 | 富士フイルム株式会社 | 異方導電材、電子素子、半導体素子を含む構造体および電子素子の製造方法 |
| KR20180134970A (ko) * | 2016-05-27 | 2018-12-19 | 후지필름 가부시키가이샤 | 이방 도전재, 전자 소자, 반도체 소자를 포함하는 구조체 및 전자 소자의 제조 방법 |
| WO2017203884A1 (ja) * | 2016-05-27 | 2017-11-30 | 富士フイルム株式会社 | 異方導電材、電子素子、半導体素子を含む構造体および電子素子の製造方法 |
| KR102134135B1 (ko) * | 2016-05-27 | 2020-07-15 | 후지필름 가부시키가이샤 | 전자 소자, 및 반도체 소자를 포함하는 구조체 |
| JP2018037509A (ja) * | 2016-08-31 | 2018-03-08 | 富士フイルム株式会社 | 多層配線基板の製造方法 |
| JP2020107834A (ja) * | 2018-12-28 | 2020-07-09 | 大日本印刷株式会社 | 電子ユニット |
| JPWO2022044585A1 (enExample) * | 2020-08-24 | 2022-03-03 | ||
| WO2022044585A1 (ja) * | 2020-08-24 | 2022-03-03 | 富士フイルム株式会社 | 金属充填微細構造体の製造方法 |
| JP7506753B2 (ja) | 2020-08-24 | 2024-06-26 | 富士フイルム株式会社 | 金属充填微細構造体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20110095419A1 (en) | 2011-04-28 |
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