JP2011029655A5 - - Google Patents

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Publication number
JP2011029655A5
JP2011029655A5 JP2010216895A JP2010216895A JP2011029655A5 JP 2011029655 A5 JP2011029655 A5 JP 2011029655A5 JP 2010216895 A JP2010216895 A JP 2010216895A JP 2010216895 A JP2010216895 A JP 2010216895A JP 2011029655 A5 JP2011029655 A5 JP 2011029655A5
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JP
Japan
Prior art keywords
pattern
exposure
substrate
illumination
microlithographic projection
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JP2010216895A
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English (en)
Japanese (ja)
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JP2011029655A (ja
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Priority claimed from DE102004013886A external-priority patent/DE102004013886A1/de
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Publication of JP2011029655A publication Critical patent/JP2011029655A/ja
Publication of JP2011029655A5 publication Critical patent/JP2011029655A5/ja
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JP2010216895A 2004-03-16 2010-09-28 多重露光方法、マイクロリソグラフィー投影露光装置および投影系 Pending JP2011029655A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004013886A DE102004013886A1 (de) 2004-03-16 2004-03-16 Verfahren zur Mehrfachbelichtung, Mikrolithografie-Projektionsbelichtungsanlage und Projektionssystem

Related Parent Applications (1)

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JP2005059886A Division JP2005268781A (ja) 2004-03-16 2005-03-04 多重露光方法、マイクロリソグラフィー投影露光装置および投影系

Publications (2)

Publication Number Publication Date
JP2011029655A JP2011029655A (ja) 2011-02-10
JP2011029655A5 true JP2011029655A5 (enExample) 2011-03-24

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JP2005059886A Pending JP2005268781A (ja) 2004-03-16 2005-03-04 多重露光方法、マイクロリソグラフィー投影露光装置および投影系
JP2010216895A Pending JP2011029655A (ja) 2004-03-16 2010-09-28 多重露光方法、マイクロリソグラフィー投影露光装置および投影系

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JP2005059886A Pending JP2005268781A (ja) 2004-03-16 2005-03-04 多重露光方法、マイクロリソグラフィー投影露光装置および投影系

Country Status (3)

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US (3) US7561253B2 (enExample)
JP (2) JP2005268781A (enExample)
DE (1) DE102004013886A1 (enExample)

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TWI701517B (zh) 2014-12-23 2020-08-11 德商卡爾蔡司Ｓｍｔ有限公司 光學構件
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