JP2011029655A5 - - Google Patents

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Publication number
JP2011029655A5
JP2011029655A5 JP2010216895A JP2010216895A JP2011029655A5 JP 2011029655 A5 JP2011029655 A5 JP 2011029655A5 JP 2010216895 A JP2010216895 A JP 2010216895A JP 2010216895 A JP2010216895 A JP 2010216895A JP 2011029655 A5 JP2011029655 A5 JP 2011029655A5
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JP
Japan
Prior art keywords
pattern
exposure
substrate
illumination
microlithographic projection
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JP2010216895A
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English (en)
Japanese (ja)
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JP2011029655A (ja
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Priority claimed from DE102004013886A external-priority patent/DE102004013886A1/de
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Publication of JP2011029655A publication Critical patent/JP2011029655A/ja
Publication of JP2011029655A5 publication Critical patent/JP2011029655A5/ja
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JP2010216895A 2004-03-16 2010-09-28 多重露光方法、マイクロリソグラフィー投影露光装置および投影系 Pending JP2011029655A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004013886A DE102004013886A1 (de) 2004-03-16 2004-03-16 Verfahren zur Mehrfachbelichtung, Mikrolithografie-Projektionsbelichtungsanlage und Projektionssystem

Related Parent Applications (1)

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JP2005059886A Division JP2005268781A (ja) 2004-03-16 2005-03-04 多重露光方法、マイクロリソグラフィー投影露光装置および投影系

Publications (2)

Publication Number Publication Date
JP2011029655A JP2011029655A (ja) 2011-02-10
JP2011029655A5 true JP2011029655A5 (enExample) 2011-03-24

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JP2005059886A Pending JP2005268781A (ja) 2004-03-16 2005-03-04 多重露光方法、マイクロリソグラフィー投影露光装置および投影系
JP2010216895A Pending JP2011029655A (ja) 2004-03-16 2010-09-28 多重露光方法、マイクロリソグラフィー投影露光装置および投影系

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JP2005059886A Pending JP2005268781A (ja) 2004-03-16 2005-03-04 多重露光方法、マイクロリソグラフィー投影露光装置および投影系

Country Status (3)

Country Link
US (3) US7561253B2 (enExample)
JP (2) JP2005268781A (enExample)
DE (1) DE102004013886A1 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004013886A1 (de) * 2004-03-16 2005-10-06 Carl Zeiss Smt Ag Verfahren zur Mehrfachbelichtung, Mikrolithografie-Projektionsbelichtungsanlage und Projektionssystem
US20060109463A1 (en) * 2004-11-22 2006-05-25 Asml Netherlands B.V. Latent overlay metrology
DE102005042005A1 (de) * 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges Objektiv mit obskurierter Pupille
TWI327257B (en) * 2006-03-03 2010-07-11 Chi Mei Optoelectronics Corp Exposing method for manufacturing flat panel display
EP1993121A4 (en) * 2006-03-03 2011-12-07 Nikon Corp EXPOSURE DEVICE AND COMPONENT MANUFACTURING METHOD
US7884921B2 (en) * 2006-04-12 2011-02-08 Nikon Corporation Illumination optical apparatus, projection exposure apparatus, projection optical system, and device manufacturing method
WO2007119514A1 (ja) * 2006-04-17 2007-10-25 Nikon Corporation 照明光学装置、露光装置、およびデバイス製造方法
WO2008007633A1 (en) * 2006-07-12 2008-01-17 Nikon Corporation Illuminating optical apparatus, exposure apparatus and device manufacturing method
JP4883482B2 (ja) * 2006-08-18 2012-02-22 株式会社ニコン 照明光学装置、露光装置、およびデバイス製造方法
US20080085471A1 (en) * 2006-10-10 2008-04-10 Anderson Brent A Photolithographic method using multiple photoexposure apparatus
DE102007032181B4 (de) 2007-07-11 2012-02-16 Karlsruher Institut für Technologie Optische Anordnung und ihre Verwendung
US8107054B2 (en) 2007-09-18 2012-01-31 Carl Zeiss Smt Gmbh Microlithographic projection exposure apparatus
US20100053588A1 (en) * 2008-08-29 2010-03-04 Nikon Corporation Substrate Stage movement patterns for high throughput While Imaging a Reticle to a pair of Imaging Locations
JP5360379B2 (ja) * 2009-02-25 2013-12-04 株式会社ニコン 投影光学系、露光装置、およびデバイス製造方法
JP5515323B2 (ja) * 2009-02-25 2014-06-11 株式会社ニコン 投影光学装置、露光装置、およびデバイス製造方法
JP5353456B2 (ja) * 2009-06-10 2013-11-27 株式会社ニコン 投影光学装置、露光装置、露光方法およびデバイス製造方法
US8417069B2 (en) * 2009-06-30 2013-04-09 Verizon Patent And Licensing Inc. Multi dimension high security communication over multi mode fiber waveguide
JP2015510269A (ja) * 2012-02-10 2015-04-02 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置及びシステム、リソグラフィ装置を較正する方法、及びデバイス製造方法
JP5912654B2 (ja) * 2012-02-24 2016-04-27 株式会社東芝 基板保持装置及びパターン転写装置並びにパターン転写方法
CN103019041B (zh) * 2012-11-26 2014-10-22 京东方科技集团股份有限公司 一种曝光机
WO2015044182A2 (en) * 2013-09-25 2015-04-02 Asml Netherlands B.V. Beam delivery apparatus and method
US9746777B2 (en) * 2014-01-09 2017-08-29 Taiwan Semiconductor Manufacturing Co., Ltd. Exposure apparatus and exposure method thereof
DE102014215088A1 (de) * 2014-07-31 2016-02-04 Carl Zeiss Smt Gmbh Beleuchtungseinrichtung für ein Projektionsbelichtungssystem
DE102014221173A1 (de) * 2014-10-17 2016-04-21 Carl Zeiss Smt Gmbh Strahlungsquellenmodul
DE102014226918A1 (de) * 2014-12-23 2016-06-23 Carl Zeiss Smt Gmbh Optische Komponente
TWI701517B (zh) 2014-12-23 2020-08-11 德商卡爾蔡司Ｓｍｔ有限公司 光學構件
DE102015212878A1 (de) * 2015-07-09 2017-01-12 Carl Zeiss Smt Gmbh Strahlführungsvorrichtung
DE102022205273B3 (de) 2022-05-25 2023-01-26 Carl Zeiss Smt Gmbh Beleuchtungssystem, Projektionsbelichtungsanlage und Projektionsbelichtungsverfahren
DE102022205272A1 (de) 2022-05-25 2023-11-30 Carl Zeiss Smt Gmbh Katadioptrisches Projektionsobjektiv, Projektionsbelichtungsanlage und Projektionsbelichtungsverfahren

Family Cites Families (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636566B2 (enExample) * 1973-06-18 1981-08-25
JPS5211774A (en) * 1975-07-17 1977-01-28 Canon Inc Method of detecting relative position of patterns
FR2472208A1 (fr) * 1979-12-18 1981-06-26 Thomson Csf Systeme optique d'alignement de deux motifs et photorepeteur mettant en oeuvre un tel systeme
JPS59123230A (ja) 1982-12-28 1984-07-17 Toshiba Corp 半導体素子の製造装置
JPS59140420A (ja) * 1983-02-01 1984-08-11 Canon Inc 半導体レ−ザ−を用いた光源装置
JPS60154527A (ja) * 1984-01-24 1985-08-14 Canon Inc 露光装置
US4734746A (en) * 1985-06-24 1988-03-29 Nippon Kogaku K. K. Exposure method and system for photolithography
US5473410A (en) * 1990-11-28 1995-12-05 Nikon Corporation Projection exposure apparatus
JP3115389B2 (ja) 1991-12-25 2000-12-04 沖電気工業株式会社 位相差露光法
JPH05198477A (ja) * 1992-01-23 1993-08-06 Seiko Epson Corp 露光装置及び半導体装置の製造方法
JPH06124873A (ja) 1992-10-09 1994-05-06 Canon Inc 液浸式投影露光装置
JP3348467B2 (ja) 1993-06-30 2002-11-20 株式会社ニコン 露光装置及び方法
US5729331A (en) 1993-06-30 1998-03-17 Nikon Corporation Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
US6721034B1 (en) 1994-06-16 2004-04-13 Nikon Corporation Stage unit, drive table, and scanning exposure apparatus using the same
JP3484684B2 (ja) 1994-11-01 2004-01-06 株式会社ニコン ステージ装置及び走査型露光装置
JPH08313842A (ja) 1995-05-15 1996-11-29 Nikon Corp 照明光学系および該光学系を備えた露光装置
JP2994232B2 (ja) 1995-07-28 1999-12-27 ウシオ電機株式会社 マスクとマスクまたはマスクとワークの位置合わせ方法および装置
JP3473268B2 (ja) * 1996-04-24 2003-12-02 三菱電機株式会社 レーザ加工装置
US6312859B1 (en) * 1996-06-20 2001-11-06 Nikon Corporation Projection exposure method with corrections for image displacement
JP3695000B2 (ja) * 1996-08-08 2005-09-14 株式会社ニコン 露光方法及び露光装置
US5825043A (en) 1996-10-07 1998-10-20 Nikon Precision Inc. Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus
US6628370B1 (en) * 1996-11-25 2003-09-30 Mccullough Andrew W. Illumination system with spatially controllable partial coherence compensating for line width variances in a photolithographic system
JP4029182B2 (ja) 1996-11-28 2008-01-09 株式会社ニコン 露光方法
JP4029183B2 (ja) 1996-11-28 2008-01-09 株式会社ニコン 投影露光装置及び投影露光方法
CN1244021C (zh) 1996-11-28 2006-03-01 株式会社尼康 光刻装置和曝光方法
WO1998028665A1 (en) 1996-12-24 1998-07-02 Koninklijke Philips Electronics N.V. Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
JPH10232497A (ja) 1997-02-20 1998-09-02 Nikon Corp 露光装置
JP3747566B2 (ja) 1997-04-23 2006-02-22 株式会社ニコン 液浸型露光装置
JP4210871B2 (ja) 1997-10-31 2009-01-21 株式会社ニコン 露光装置
US6020964A (en) 1997-12-02 2000-02-01 Asm Lithography B.V. Interferometer system and lithograph apparatus including an interferometer system
US6897963B1 (en) 1997-12-18 2005-05-24 Nikon Corporation Stage device and exposure apparatus
JP4264676B2 (ja) 1998-11-30 2009-05-20 株式会社ニコン 露光装置及び露光方法
AU1890699A (en) * 1998-01-16 1999-08-02 Nikon Corporation Exposure method and lithography system, exposure apparatus and method of producing the apparatus, and method of producing device
CN100578876C (zh) * 1998-03-11 2010-01-06 株式会社尼康 紫外激光装置以及使用该紫外激光装置的曝光装置和曝光方法
WO1999049504A1 (fr) 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
JP2000047390A (ja) 1998-05-22 2000-02-18 Nikon Corp 露光装置およびその製造方法
JP2000021748A (ja) * 1998-06-30 2000-01-21 Canon Inc 露光方法および露光装置
JP2000021742A (ja) * 1998-06-30 2000-01-21 Canon Inc 露光方法および露光装置
JP2000284492A (ja) 1999-03-30 2000-10-13 Seiko Epson Corp 露光装置、露光方法及びプログラムを記録した記憶媒体
JP2000284494A (ja) * 1999-03-31 2000-10-13 Seiko Epson Corp 露光装置
US6600550B1 (en) * 1999-06-03 2003-07-29 Nikon Corporation Exposure apparatus, a photolithography method, and a device manufactured by the same
TW490594B (en) * 1999-06-09 2002-06-11 Asm Lithography Bv Lithographic projection method
TW587199B (en) * 1999-09-29 2004-05-11 Asml Netherlands Bv Lithographic method and apparatus
EP1091252A3 (en) * 1999-09-29 2004-08-11 ASML Netherlands B.V. Lithographic method and apparatus
JP2001291654A (ja) * 2000-04-07 2001-10-19 Canon Inc 投影露光装置および方法
JP2001297976A (ja) 2000-04-17 2001-10-26 Canon Inc 露光方法及び露光装置
DE10106861C1 (de) * 2001-02-14 2003-02-06 Infineon Technologies Ag Verfahren zur Herstellung feiner Resiststrukturen bei der Herstellung mikroelektronischer Bauelemente
US6611316B2 (en) * 2001-02-27 2003-08-26 Asml Holding N.V. Method and system for dual reticle image exposure
EP1255162A1 (en) 2001-05-04 2002-11-06 ASML Netherlands B.V. Lithographic apparatus
TW529172B (en) 2001-07-24 2003-04-21 Asml Netherlands Bv Imaging apparatus
US6897455B2 (en) * 2002-01-07 2005-05-24 Taiwan Semiconductor Manufacturing Co., Ltd Apparatus and method for repairing resist latent images
JP2005527848A (ja) * 2002-04-11 2005-09-15 ハイデルベルク・インストルメンツ・ミクロテヒニツク・ゲー・エム・ベー・ハー 基板の上にマスクを結像させる方法および装置
JP2005222963A (ja) * 2002-06-12 2005-08-18 Asml Netherlands Bv リソグラフィ装置およびその装置の製造方法
EP1532489A2 (en) 2002-08-23 2005-05-25 Nikon Corporation Projection optical system and method for photolithography and exposure apparatus and method using same
KR100585476B1 (ko) 2002-11-12 2006-06-07 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조방법
CN101349876B (zh) 2002-11-12 2010-12-01 Asml荷兰有限公司 光刻装置和器件制造方法
EP1420298B1 (en) 2002-11-12 2013-02-20 ASML Netherlands B.V. Lithographic apparatus
FR2847037B1 (fr) 2002-11-13 2005-03-04 Thermoflux Sa Dispositif de mesure d'un flux thermique
EP1575041B1 (en) 2002-12-13 2009-02-25 Panasonic Corporation Optical information recording medium and method for manufacturing same
DE60326384D1 (de) 2002-12-13 2009-04-09 Koninkl Philips Electronics Nv Flüssigkeitsentfernung in einem verfahren und einer einrichtung zum bestrahlen von flecken auf einer schicht
AU2003283717A1 (en) 2002-12-19 2004-07-14 Koninklijke Philips Electronics N.V. Method and device for irradiating spots on a layer
TWI621923B (zh) 2003-02-26 2018-04-21 Nikon Corp Exposure apparatus, exposure method, and component manufacturing method
JP2004304135A (ja) 2003-04-01 2004-10-28 Nikon Corp 露光装置、露光方法及びマイクロデバイスの製造方法
KR101319152B1 (ko) 2003-04-10 2013-10-17 가부시키가이샤 니콘 액침 리소그래피 장치용 진공 배출을 포함하는 환경 시스템
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
EP2722703A3 (en) 2003-05-06 2014-07-23 Nikon Corporation Projection optical system, and exposure apparatus and exposure method
TWI282487B (en) * 2003-05-23 2007-06-11 Canon Kk Projection optical system, exposure apparatus, and device manufacturing method
JP2005039211A (ja) 2003-06-30 2005-02-10 Canon Inc 投影光学系、露光装置及びデバイスの製造方法
WO2005029559A1 (ja) 2003-09-19 2005-03-31 Nikon Corporation 露光装置及びデバイス製造方法
JP5106858B2 (ja) 2003-12-15 2012-12-26 カール・ツァイス・エスエムティー・ゲーエムベーハー 高開口数と平面状端面とを有する投影対物レンズ
WO2005059645A2 (en) 2003-12-19 2005-06-30 Carl Zeiss Smt Ag Microlithography projection objective with crystal elements
DE102004013886A1 (de) 2004-03-16 2005-10-06 Carl Zeiss Smt Ag Verfahren zur Mehrfachbelichtung, Mikrolithografie-Projektionsbelichtungsanlage und Projektionssystem
US7164465B2 (en) * 2004-07-13 2007-01-16 Anvik Corporation Versatile maskless lithography system with multiple resolutions
DE102005042005A1 (de) * 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges Objektiv mit obskurierter Pupille
US7924406B2 (en) 2005-07-13 2011-04-12 Asml Netherlands B.V. Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
US7782442B2 (en) 2005-12-06 2010-08-24 Nikon Corporation Exposure apparatus, exposure method, projection optical system and device producing method
US8982322B2 (en) 2006-03-17 2015-03-17 Nikon Corporation Exposure apparatus and device manufacturing method
US20080085471A1 (en) * 2006-10-10 2008-04-10 Anderson Brent A Photolithographic method using multiple photoexposure apparatus
US7878418B2 (en) * 2008-10-08 2011-02-01 Early Vaughn Sevy Integrated, essential-oil atomizer

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