JP2010219224A - 電力用半導体装置 - Google Patents
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Abstract
【解決手段】電力用半導体装置は、第1又は第2導電型の第1の半導体層101と、第1の半導体層上に形成された第1導電型の第2の半導体層102と、第2の半導体層の表面に選択的に形成された第2導電型の第3の半導体層103と、第2の半導体層の表面において第3の半導体層の外周に形成された1つ以上のトレンチ111と、トレンチ内に埋め込まれた絶縁膜121と、第1の半導体層に電気的に接続された第1の主電極131と、第3の半導体層に電気的に接続された第2の主電極132とを備え、トレンチの底面の深さは、第3の半導体層の下面よりも深く、第1の半導体層の上面よりも浅くなっており、一部又は全てのトレンチは、第3の半導体層の側面に接している。
【選択図】図1
Description
図1は、第1実施形態の電力用半導体装置の構成を模式的に示す平面図及び側方断面図である。側方断面図は、平面図に示すA−A’線に沿った断面を示す。
図8は、第2実施形態の電力用半導体装置の構成を模式的に示す平面図及び側方断面図である。
図10は、第3実施形態の電力用半導体装置の構成を模式的に示す平面図及び側方断面図である。図10の電力用半導体装置は、図1の電力用半導体装置と同様、縦型ダイオードとなっている。
図12は、第4実施形態の電力用半導体装置の構成を模式的に示す平面図及び側方断面図である。図12の電力用半導体装置は、図1の電力用半導体装置と同様、縦型ダイオードとなっている。
図13は、第5実施形態の電力用半導体装置の構成を模式的に示す平面図である。図13の電力用半導体装置は、図1の装置と同様、縦型ダイオードとなっている。
図16は、第6実施形態の電力用半導体装置の構成を模式的に示す平面図である。図16の電力用半導体装置は、図1の装置と同様、縦型ダイオードとなっている。
102 n−半導体層
103 pアノード層
104 ガードリング層
111、601、701 トレンチ
121、611、711 絶縁膜
131 カソード電極
132 アノード電極
201 pベース層
202 p+コンタクト層
203 n+ソース層
211 ゲート絶縁膜
221 ゲート電極
231 ドレイン電極
232 ソース電極
301 p+半導体基板
311 コレクタ電極
312 エミッタ電極
401 リサーフ層
501 フローティング電極
Claims (5)
- 第1又は第2導電型の第1の半導体層と、
前記第1の半導体層上に形成された第1導電型の第2の半導体層と、
前記第2の半導体層の表面に選択的に形成された第2導電型の第3の半導体層と、
前記第2の半導体層の表面において前記第3の半導体層の外周に形成された1つ以上のトレンチと、
前記トレンチ内に埋め込まれた絶縁膜と、
前記第1の半導体層に電気的に接続された第1の主電極と、
前記第3の半導体層に電気的に接続された第2の主電極とを備え、
前記トレンチの底面の深さは、前記第3の半導体層の下面よりも深く、前記第1の半導体層の上面よりも浅くなっており、
一部又は全ての前記トレンチは、前記第3の半導体層の側面に接していることを特徴とする電力用半導体装置。 - 前記トレンチは、前記第2の半導体層の上方から見て渦巻状に形成された1つ以上のトレンチを含むことを特徴とする請求項1に記載の電力用半導体装置。
- 前記トレンチは、前記第2の半導体層の上方から見て直線状又は曲線状に形成された複数のトレンチを含み、
前記複数のトレンチの各々は、前記第3の半導体層の側面の近傍から外周に向けて伸びるよう形成されており、前記複数のトレンチの各々が伸びる方向は、前記側面の法線方向に対し傾いていることを特徴とする請求項1に記載の電力用半導体装置。 - 更に、前記トレンチに挟まれた領域において前記第2の半導体層の表面に選択的に形成された複数の第2導電型の第4の半導体層を備えることを特徴とする請求項1から3のいずれか1項に記載の電力用半導体装置。
- 更に、前記トレンチの側壁に形成され、所定の電圧の印加により空乏化する第2導電型の第5の半導体層を備えることを特徴とする請求項1から3のいずれか1項に記載の電力用半導体装置。
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JP2009063123A JP4945594B2 (ja) | 2009-03-16 | 2009-03-16 | 電力用半導体装置 |
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Cited By (6)
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635463A (en) * | 1979-08-31 | 1981-04-08 | Toshiba Corp | Semiconductor device |
JPS6459873A (en) * | 1987-08-31 | 1989-03-07 | Toshiba Corp | Semiconductor device |
JPH01272151A (ja) * | 1988-04-25 | 1989-10-31 | Matsushita Electric Works Ltd | ガードリングを有する半導体素子及びその製造方法 |
JPH065841A (ja) * | 1992-06-19 | 1994-01-14 | Fuji Electric Co Ltd | 半導体素子の製造方法 |
JP2005093550A (ja) * | 2003-09-12 | 2005-04-07 | Toshiba Corp | 半導体装置 |
JP2005294772A (ja) * | 2004-04-06 | 2005-10-20 | Renesas Technology Corp | 半導体装置 |
JP2008103530A (ja) * | 2006-10-19 | 2008-05-01 | Toyota Central R&D Labs Inc | 半導体装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6603185B1 (en) * | 1999-02-01 | 2003-08-05 | Fuji Electric Co., Ltd. | Voltage withstanding structure for a semiconductor device |
JP3708057B2 (ja) * | 2001-07-17 | 2005-10-19 | 株式会社東芝 | 高耐圧半導体装置 |
JP3875245B2 (ja) | 2004-07-26 | 2007-01-31 | 株式会社東芝 | 半導体装置 |
JP2008147361A (ja) | 2006-12-08 | 2008-06-26 | Toyota Central R&D Labs Inc | 半導体装置 |
JP4564516B2 (ja) | 2007-06-21 | 2010-10-20 | 株式会社東芝 | 半導体装置 |
-
2009
- 2009-03-16 JP JP2009063123A patent/JP4945594B2/ja not_active Expired - Fee Related
-
2010
- 2010-02-26 US US12/714,002 patent/US8232593B2/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635463A (en) * | 1979-08-31 | 1981-04-08 | Toshiba Corp | Semiconductor device |
JPS6459873A (en) * | 1987-08-31 | 1989-03-07 | Toshiba Corp | Semiconductor device |
JPH01272151A (ja) * | 1988-04-25 | 1989-10-31 | Matsushita Electric Works Ltd | ガードリングを有する半導体素子及びその製造方法 |
JPH065841A (ja) * | 1992-06-19 | 1994-01-14 | Fuji Electric Co Ltd | 半導体素子の製造方法 |
JP2005093550A (ja) * | 2003-09-12 | 2005-04-07 | Toshiba Corp | 半導体装置 |
JP2005294772A (ja) * | 2004-04-06 | 2005-10-20 | Renesas Technology Corp | 半導体装置 |
JP2008103530A (ja) * | 2006-10-19 | 2008-05-01 | Toyota Central R&D Labs Inc | 半導体装置 |
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JP2011243811A (ja) * | 2010-05-19 | 2011-12-01 | Fuji Electric Co Ltd | 半導体装置 |
US8847278B2 (en) | 2011-01-17 | 2014-09-30 | Fuji Electric Co., Ltd. | Semiconductor device comprising a breakdown withstanding section |
WO2013140572A1 (ja) * | 2012-03-22 | 2013-09-26 | トヨタ自動車株式会社 | 半導体装置 |
JP5686203B2 (ja) * | 2012-03-22 | 2015-03-18 | トヨタ自動車株式会社 | 半導体装置 |
CN104170090B (zh) * | 2012-03-22 | 2017-02-22 | 丰田自动车株式会社 | 半导体装置 |
WO2014208201A1 (ja) * | 2013-06-27 | 2014-12-31 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
US9704947B2 (en) | 2013-06-27 | 2017-07-11 | Mitsubishi Electric Corporation | Semiconductor device and method for manufacturing same |
JP7174702B2 (ja) | 2016-12-08 | 2022-11-17 | ウルフスピード インコーポレイテッド | イオン注入側壁を有するゲート・トレンチを備えるパワー半導体デバイス及び関連方法 |
JP2019033148A (ja) * | 2017-08-07 | 2019-02-28 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
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