JP2010153505A - 微細配線パッケージ及びその製造方法 - Google Patents
微細配線パッケージ及びその製造方法 Download PDFInfo
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- JP2010153505A JP2010153505A JP2008328488A JP2008328488A JP2010153505A JP 2010153505 A JP2010153505 A JP 2010153505A JP 2008328488 A JP2008328488 A JP 2008328488A JP 2008328488 A JP2008328488 A JP 2008328488A JP 2010153505 A JP2010153505 A JP 2010153505A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000010410 layer Substances 0.000 claims abstract description 110
- 239000011347 resin Substances 0.000 claims abstract description 99
- 229920005989 resin Polymers 0.000 claims abstract description 99
- 238000007789 sealing Methods 0.000 claims abstract description 45
- 239000012790 adhesive layer Substances 0.000 claims abstract description 35
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 28
- 239000004020 conductor Substances 0.000 claims abstract description 16
- 238000010030 laminating Methods 0.000 claims abstract description 5
- 239000000853 adhesive Substances 0.000 claims description 17
- 230000001070 adhesive effect Effects 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 description 12
- 230000017525 heat dissipation Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
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- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49162—Manufacturing circuit on or in base by using wire as conductive path
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
【解決手段】単数又は複数の電子部品12、14、16の端子側を接着剤層20により第1の支持体10表面に仮固定する工程と、接着剤層42を有する第2の支持体40を、接着剤層が電子部品の背面側となるように、第1の支持体と第2の支持体との間に挟むように固定する工程と、第1の支持体10と接着剤層20とを剥離する工程と、第2の支持体上の電子部品を端子が露出するように樹脂封止する工程と、電子部品及び封止樹脂上に、絶縁樹脂層と配線層とを積層する工程と、から成る。また、封止樹脂と絶縁樹脂層との間に導体補強層が形成される。
【選択図】図3
Description
図3(a)〜図3(d)、図4(a)〜図4(e)及び図5(a)及び(b)は、本発明の微細配線パッケージの製造方法の実施形態を示す。
、16aの表面も部品毎に一定の平面上に位置するように形成されている。
12、14、16 電子部品
12a、14a、16a 端子
20 第1の接着剤層
22 封止樹脂
24 絶縁樹脂層
26 ビア
28 配線層
30 ソルダレジスト
32 外部端子
40 第2の支持体
42 第2の接着剤層
44 導体補強層
46 補強板
48 キャビティ構造を持つ補強板
50 導電性樹脂
Claims (9)
- 一方の面に複数の端子を有する単数又は複数の電子部品を、端子側が第1の支持体側となるように、該第1の支持体の表面に第1の接着剤層により仮固定する工程と、
第2の接着剤層を有する第2の支持体を、該第2の接着剤層が前記電子部品の背面側となるように、前記第1の支持体と第2の支持体との間に前記電子部品を挟むように、該電子部品に固定する工程と、
前記第1の支持体と前記第1の接着剤層とを剥離する工程と、
前記第2の支持体上の単数又は複数の前記電子部品を前記電子部品の端子の少なくとも一部が露出するように樹脂封止する工程と、
前記電子部品及び封止樹脂上に、絶縁樹脂層と前記電子部品の端子に電気的に接続する配線層とを積層する工程と、
から成ることを特徴とする微細配線パッケージの製造方法。 - 前記電子部品を樹脂封止した後、封止した樹脂層の表面に、前記電子部品の端子と略同一高さの位置となるように、導体補強層を形成する工程を含むことを特徴とする請求項1に記載の微細配線パッケージの製造方法。
- 前記絶縁樹脂層と前記配線層とを積層した後、前記第2の支持体を剥離する工程を含むことを特徴とする請求項1又は2に記載の微細配線パッケージの製造方法。
- 前記第1の接着剤の接着力は前記第2の接着剤の接着力より弱いことを特徴とする請求項1〜3のいずれか1項に記載の微細配線パッケージの製造方法。
- 一方の面に複数の端子を有する単数又は複数の電子部品と、
該電子部品の端子の表面を所定の平面上に揃えるように、前記単数又は複数の電子部品を前記電子部品の端子の表面を露出させるように封止する封止樹脂と、
前記電子部品及び前記封止樹脂上に形成した、絶縁樹脂層と前記電子部品の端子に電気的に接続する配線層とからなる積層構造体と、
前記封止樹脂と前記絶縁樹脂層との間に形成した補強板と、からなることを特徴とする微細配線パッケージ。 - 前記補強板は導体層からなることを特徴とする請求項5に記載の微細配線パッケージ。
- 前記補強板は導電性樹脂層からなることを特徴とする請求項5に記載の微細配線パッケージ。
- 前記補強板の一方の面は、前記電子部品の端子の表面と略同一面であることを特徴とする請求項5〜7のいずれか1項に記載の微細配線パッケージ。
- 前記単数又は複数の電子部品は、少なくともその端子形成面と反対側の面を除き、前記封止樹脂に覆われていることを特徴とする請求項5〜8のいずれか1項に記載の微細配線パッケージ。
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