JP5089880B2 - 配線基板内蔵用キャパシタ、キャパシタ内蔵配線基板及びその製造方法 - Google Patents
配線基板内蔵用キャパシタ、キャパシタ内蔵配線基板及びその製造方法 Download PDFInfo
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- JP5089880B2 JP5089880B2 JP2005344925A JP2005344925A JP5089880B2 JP 5089880 B2 JP5089880 B2 JP 5089880B2 JP 2005344925 A JP2005344925 A JP 2005344925A JP 2005344925 A JP2005344925 A JP 2005344925A JP 5089880 B2 JP5089880 B2 JP 5089880B2
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Description
[第2実施形態]
11…コア基板
31…積層部としてのビルドアップ層
33,35,37,39,202,203,204,205,206,207…層間絶縁層としての樹脂絶縁層
42…導体層
51…層間絶縁層の一部
101,211…配線基板内蔵用キャパシタ(キャパシタ)
102,212…第1主面としての上面
103,213…第2主面としての下面
104…キャパシタ本体
105,214…誘電体層としてのセラミック誘電体層
130…ビアホール
131…ビア導体としての第1ビア導体
132…ビア導体としての第2ビア導体
141…電極層及び内部電極層としての第1内部電極層
142…電極層及び内部電極層としての第2内部電極層
161…穴部
215…電極層
216…補強用金属層
Claims (7)
- 第1主面及び第2主面を有するチップ状であって、誘電体層とその誘電体層上に積層配置される電極層とを備え、前記第1主面及び前記第2主面の両方にて開口する貫通孔である穴部が形成され、層間絶縁層及び導体層をコア基板上にて交互に積層した積層部に、前記第2主面側を前記コア基板側に向けた状態で内蔵されうるものであり、
前記穴部がキャパシタの外周に沿って複数配置されるとともに、前記層間絶縁層の一部が前記穴部に入り込むことが可能である
ことを特徴とする配線基板内蔵用キャパシタ。 - 前記キャパシタは、前記誘電体層と内部電極層とが交互に積層配置された構造のキャパシタ本体を有するとともに、前記内部電極層同士を導通する複数のビア導体が内部に配置される複数のビアホールが全体としてアレイ状に形成されたビアアレイタイプのキャパシタであることを特徴とする請求項1に記載の配線基板内蔵用キャパシタ。
- 前記キャパシタは、前記誘電体層の厚さよりも厚くて、前記誘電体層を支持する補強用金属層をさらに備えることを特徴とする請求項1に記載の配線基板内蔵用キャパシタ。
- 前記穴部の直径は、前記ビアホールの直径と同等、または、前記ビアホールの直径よりも小さいことを特徴とする請求項2に記載の配線基板内蔵用キャパシタ。
- 前記キャパシタ全体の厚さは10μm以上200μm以下であることを特徴とする請求項1乃至4のいずれか1項に記載の配線基板内蔵用キャパシタ。
- 請求項1乃至5のいずれか1項に記載の配線基板内蔵用キャパシタを有することを特徴とするキャパシタ内蔵配線基板。
- 請求項1乃至5のいずれか1項に記載の配線基板内蔵用キャパシタを準備する準備工程と、
層間絶縁層及び導体層をコア基板上にて交互に積層した積層部を構成する予定の前記層間絶縁層上に、前記キャパシタを前記第2主面側を向けた状態で載置することにより、前記穴部内に前記層間絶縁層の一部を入り込ませる載置工程と、
前記載置工程後、前記キャパシタ上に別の層間絶縁層を積層して前記キャパシタを前記積層部内に封入する封入工程と
を含むことを特徴とするキャパシタ内蔵配線基板の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005344925A JP5089880B2 (ja) | 2005-11-30 | 2005-11-30 | 配線基板内蔵用キャパシタ、キャパシタ内蔵配線基板及びその製造方法 |
US11/601,760 US7532453B2 (en) | 2005-11-30 | 2006-11-20 | Built-in capacitor type wiring board and method for manufacturing the same |
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Application Number | Priority Date | Filing Date | Title |
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JP2005344925A JP5089880B2 (ja) | 2005-11-30 | 2005-11-30 | 配線基板内蔵用キャパシタ、キャパシタ内蔵配線基板及びその製造方法 |
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Publication Number | Publication Date |
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JP2007150123A JP2007150123A (ja) | 2007-06-14 |
JP5089880B2 true JP5089880B2 (ja) | 2012-12-05 |
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JP2005344925A Expired - Fee Related JP5089880B2 (ja) | 2005-11-30 | 2005-11-30 | 配線基板内蔵用キャパシタ、キャパシタ内蔵配線基板及びその製造方法 |
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JP (1) | JP5089880B2 (ja) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101010800B (zh) * | 2005-07-13 | 2012-02-01 | 松下电器产业株式会社 | 安装基板、安装体及使用安装基板和安装体的电子设备 |
US20080128854A1 (en) * | 2006-12-04 | 2008-06-05 | Augustine Anne E | Embedded array capacitor with top and bottom exterior surface metallization |
JP4976840B2 (ja) * | 2006-12-22 | 2012-07-18 | 株式会社東芝 | プリント配線板、プリント配線板の製造方法および電子機器 |
US8207589B2 (en) | 2007-02-15 | 2012-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device, and method for manufacturing photoelectric conversion device |
US8072732B2 (en) * | 2007-04-10 | 2011-12-06 | Ngk Spark Plug Co., Ltd. | Capacitor and wiring board including the capacitor |
JP5179856B2 (ja) * | 2007-06-21 | 2013-04-10 | 日本特殊陶業株式会社 | 配線基板内蔵用部品及びその製造方法、配線基板 |
JP5122885B2 (ja) * | 2007-08-06 | 2013-01-16 | 日本特殊陶業株式会社 | コンデンサ内蔵配線基板及びその製造方法 |
JP4405537B2 (ja) * | 2007-08-30 | 2010-01-27 | 富士通株式会社 | キャパシタ内蔵インタポーザ、それを備えた半導体装置及びキャパシタ内蔵インタポーザの製造方法 |
WO2009050829A1 (ja) | 2007-10-18 | 2009-04-23 | Ibiden Co., Ltd. | 配線基板及びその製造方法 |
US8130507B2 (en) * | 2008-03-24 | 2012-03-06 | Ngk Spark Plug Co., Ltd. | Component built-in wiring board |
US8816474B2 (en) * | 2008-08-07 | 2014-08-26 | Infineon Technologies Ag | Capacitor structure |
JP2010087499A (ja) * | 2008-09-30 | 2010-04-15 | Ibiden Co Ltd | コンデンサ装置の製造方法 |
WO2010041589A1 (ja) * | 2008-10-08 | 2010-04-15 | 株式会社村田製作所 | 複合モジュール |
US8344503B2 (en) * | 2008-11-25 | 2013-01-01 | Freescale Semiconductor, Inc. | 3-D circuits with integrated passive devices |
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