JP2008510308A - 集積回路抵抗器 - Google Patents
集積回路抵抗器 Download PDFInfo
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- JP2008510308A JP2008510308A JP2007525836A JP2007525836A JP2008510308A JP 2008510308 A JP2008510308 A JP 2008510308A JP 2007525836 A JP2007525836 A JP 2007525836A JP 2007525836 A JP2007525836 A JP 2007525836A JP 2008510308 A JP2008510308 A JP 2008510308A
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- 230000015572 biosynthetic process Effects 0.000 claims abstract description 4
- 239000004065 semiconductor Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 46
- 238000005530 etching Methods 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 16
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 claims 39
- 239000002356 single layer Substances 0.000 claims 2
- 150000002500 ions Chemical class 0.000 description 8
- 238000000206 photolithography Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910005540 GaP Inorganic materials 0.000 description 4
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 4
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0802—Resistors only
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Networks Using Active Elements (AREA)
Abstract
Description
Claims (19)
- 第1外側表面を有する半導体基板;
前記第1外側表面の外側に形成され、第2外側表面を有し、かつ前記第2外側表面内に凹部を画定する、半導体層;及び
前記第2外側表面の外側に形成される第1コンタクト及び第2コンタクト;
を有し、
前記第1コンタクトと前記第2コンタクトとの間には抵抗領域が画定され、
前記抵抗領域の電気抵抗は、前記半導体層の選択部分の除去によって前記凹部が形成されることによって増大する、
集積回路素子。 - 前記半導体層が第1エッチストップ層を有する、請求項1に記載の素子。
- 前記半導体層が、該半導体層内部に設けられている第2エッチストップ層を有し、
前記第2エッチストップ層は前記第1エッチストップ層と平行でかつ間隔を空けて設けられている、
請求項2に記載の素子。 - 前記抵抗領域の抵抗値が、前記半導体基板の一部を除去することによってさらに増大する、請求項1に記載の素子。
- 前記半導体基板がガリウムヒ素を有する、請求項1に記載の素子。
- 前記半導体層がガリウムヒ素を有する、請求項1に記載の素子。
- 集積回路素子の作製方法であって:
半導体基板の外側表面に半導体層を形成する工程;
前記半導体層の前記外側表面に第1コンタクト及び第2コンタクトを形成する工程であって、前記第1コンタクト及び前記第2コンタクトは相互に距離をおいて設けられ、かつ前記第1コンタクトと前記第2コンタクトとの間には抵抗領域が画定される、コンタクト形成工程;及び
前記抵抗領域内の前記半導体層の一部を選択的に除去して前記半導体層の前記外側表面に凹部を形成することによって、前記抵抗領域を介した前記コンタクト間の電気抵抗を増大させる、凹部形成工程;
を有する方法。 - 前記半導体層の選択部分を除去する工程が、前記半導体層内部のエッチストップ層に到達するまで、前記半導体層を選択的にエッチングする工程を有する、請求項7に記載の方法。
- 第2エッチング段階において、第2エッチストップに到達するまで、さらに前記半導体層をエッチングする工程をさらに有する、請求項8に記載の方法。
- 前記半導体基板の一部を除去することによって、前記コンタクトポイント間の電気抵抗をさらに増大させる工程をさらに有する、請求項7に記載の方法。
- 半導体層を形成する工程が、複数の異なる層を有する1層を形成する工程を有し、
前記複数の異なる層の一部は半導体材料を有し、
前記複数の異なる層は、エピタキシャルプロセスによって形成される、
請求項7に記載の方法。 - 電気コンタクトを形成する工程が、高濃度ドーピングされた半導体材料、銅、金及びアルミニウムからなる群から選択される材料を有する1組の構成体を形成する工程を有する、請求項7に記載の方法。
- 請求項1に記載の方法によって製造される集積回路素子。
- 集積回路素子の作製方法であって:
第1エッチストップ層及び第2エッチストップ層を有する半導体基板の外側表面に半導体層を形成する工程;
前記半導体層の前記外側表面に電気コンタクトを形成する工程であって、前記コンタクトは相互に距離をおいて設けられ、かつ前記コンタクト間には抵抗領域が画定される、コンタクト形成工程;
前記抵抗領域内でかつ前記第2エッチストップ層外側に設けられた前記半導体層の一部をエッチングして前記半導体層の前記外側表面に第1凹部を形成することによって、前記抵抗領域を介した前記コンタクト間の電気抵抗を増大させる、第1凹部形成工程;及び
前記抵抗領域内でかつ前記第1エッチストップ層外側に設けられた前記半導体層の一部をエッチングして前記半導体層の前記外側表面に第1凹部を形成することによって、前記第1凹部内の前記抵抗領域を介した前記コンタクト間の電気抵抗をさらに増大させる、第2凹部形成工程;
を有する方法。 - 前記半導体基板の一部を除去することで前記電気コンタクトポイント間の抵抗をさらに増大させる工程をさらに有する、請求項14に記載の方法。
- 半導体層を形成する工程がガリウムヒ素を有する層を形成する工程を有する、請求項14に記載の方法。
- 半導体層を形成する工程が、複数の異なる層を有する1層を形成する工程を有し、
前記複数の異なる層の一部は半導体材料を有し、
前記複数の異なる層は、エピタキシャルプロセスによって形成される、
請求項14に記載の方法。 - 電気コンタクトを形成する工程が、高濃度ドーピングされた半導体材料、銅、金及びアルミニウムからなる群から選択される材料を有する1組の構成体を形成する工程を有する、請求項14に記載の方法。
- 請求項14に記載の方法によって製造される集積回路素子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/917,935 US7199016B2 (en) | 2004-08-13 | 2004-08-13 | Integrated circuit resistor |
US10/917,935 | 2004-08-13 | ||
PCT/US2005/028776 WO2006020887A1 (en) | 2004-08-13 | 2005-08-11 | Integrated circuit resistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008510308A true JP2008510308A (ja) | 2008-04-03 |
JP5183199B2 JP5183199B2 (ja) | 2013-04-17 |
Family
ID=35519698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007525836A Expired - Fee Related JP5183199B2 (ja) | 2004-08-13 | 2005-08-11 | 集積回路抵抗器 |
Country Status (8)
Country | Link |
---|---|
US (2) | US7199016B2 (ja) |
EP (1) | EP1790009B1 (ja) |
JP (1) | JP5183199B2 (ja) |
KR (1) | KR101164272B1 (ja) |
CN (1) | CN100524759C (ja) |
AT (1) | ATE494634T1 (ja) |
DE (1) | DE602005025781D1 (ja) |
WO (1) | WO2006020887A1 (ja) |
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US20110017504A1 (en) * | 2009-07-23 | 2011-01-27 | Keith Bryan Hardin | Z-Directed Ferrite Bead Components for Printed Circuit Boards |
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JP2005340549A (ja) * | 2004-05-28 | 2005-12-08 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
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JPS62217671A (ja) * | 1986-03-19 | 1987-09-25 | Fujitsu Ltd | 電界効果型トランジスタの製造方法 |
JPH09321063A (ja) * | 1996-05-31 | 1997-12-12 | Nec Corp | 半導体装置およびその製造方法 |
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US20060033177A1 (en) | 2006-02-16 |
ATE494634T1 (de) | 2011-01-15 |
JP5183199B2 (ja) | 2013-04-17 |
KR20070050080A (ko) | 2007-05-14 |
US7199016B2 (en) | 2007-04-03 |
CN101006583A (zh) | 2007-07-25 |
CN100524759C (zh) | 2009-08-05 |
DE602005025781D1 (de) | 2011-02-17 |
WO2006020887A1 (en) | 2006-02-23 |
US20070138646A1 (en) | 2007-06-21 |
KR101164272B1 (ko) | 2012-07-09 |
EP1790009B1 (en) | 2011-01-05 |
EP1790009A1 (en) | 2007-05-30 |
US7884442B2 (en) | 2011-02-08 |
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