JP2008502127A5 - - Google Patents
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- JP2008502127A5 JP2008502127A5 JP2007513861A JP2007513861A JP2008502127A5 JP 2008502127 A5 JP2008502127 A5 JP 2008502127A5 JP 2007513861 A JP2007513861 A JP 2007513861A JP 2007513861 A JP2007513861 A JP 2007513861A JP 2008502127 A5 JP2008502127 A5 JP 2008502127A5
- Authority
- JP
- Japan
- Prior art keywords
- exposure apparatus
- projection
- projection exposure
- layer
- objective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000003287 optical effect Effects 0.000 claims description 106
- 210000001747 pupil Anatomy 0.000 claims description 55
- 230000005540 biological transmission Effects 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 37
- 238000007654 immersion Methods 0.000 claims description 35
- 230000008859 change Effects 0.000 claims description 28
- 238000012937 correction Methods 0.000 claims description 17
- 238000010521 absorption reaction Methods 0.000 claims description 16
- 230000001419 dependent effect Effects 0.000 claims description 16
- 238000005286 illumination Methods 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 13
- 239000007787 solid Substances 0.000 claims description 6
- 230000007935 neutral effect Effects 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000009826 distribution Methods 0.000 description 43
- 238000002310 reflectometry Methods 0.000 description 42
- 238000000576 coating method Methods 0.000 description 35
- 239000000758 substrate Substances 0.000 description 30
- 239000011248 coating agent Substances 0.000 description 27
- 238000003384 imaging method Methods 0.000 description 27
- 230000000694 effects Effects 0.000 description 26
- 238000000034 method Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 13
- 230000010287 polarization Effects 0.000 description 13
- 230000007423 decrease Effects 0.000 description 10
- 230000003595 spectral effect Effects 0.000 description 9
- 230000000875 corresponding effect Effects 0.000 description 7
- 230000009467 reduction Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 7
- 230000005669 field effect Effects 0.000 description 6
- 230000000007 visual effect Effects 0.000 description 6
- 230000004075 alteration Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 5
- 238000000671 immersion lithography Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910004261 CaF 2 Inorganic materials 0.000 description 3
- 206010010071 Coma Diseases 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000006117 anti-reflective coating Substances 0.000 description 3
- 230000003667 anti-reflective effect Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 229910016036 BaF 2 Inorganic materials 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminium flouride Chemical compound F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910004379 HoF 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- OKOSPWNNXVDXKZ-UHFFFAOYSA-N but-3-enoyl chloride Chemical compound ClC(=O)CC=C OKOSPWNNXVDXKZ-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910001610 cryolite Inorganic materials 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- QHEDSQMUHIMDOL-UHFFFAOYSA-J hafnium(4+);tetrafluoride Chemical compound F[Hf](F)(F)F QHEDSQMUHIMDOL-UHFFFAOYSA-J 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- QGJSAGBHFTXOTM-UHFFFAOYSA-K trifluoroerbium Chemical compound F[Er](F)F QGJSAGBHFTXOTM-UHFFFAOYSA-K 0.000 description 1
- TYIZUJNEZNBXRS-UHFFFAOYSA-K trifluorogadolinium Chemical compound F[Gd](F)F TYIZUJNEZNBXRS-UHFFFAOYSA-K 0.000 description 1
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XASAPYQVQBKMIN-UHFFFAOYSA-K ytterbium(iii) fluoride Chemical compound F[Yb](F)F XASAPYQVQBKMIN-UHFFFAOYSA-K 0.000 description 1
- 229940105963 yttrium fluoride Drugs 0.000 description 1
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 1
- OMQSJNWFFJOIMO-UHFFFAOYSA-J zirconium tetrafluoride Chemical compound F[Zr](F)(F)F OMQSJNWFFJOIMO-UHFFFAOYSA-J 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US57680804P | 2004-06-04 | 2004-06-04 | |
| US60/576,808 | 2004-06-04 | ||
| US63325804P | 2004-12-03 | 2004-12-03 | |
| US60/633,258 | 2004-12-03 | ||
| PCT/EP2005/005979 WO2005119369A1 (en) | 2004-06-04 | 2005-06-03 | Projection system with compensation of intensity variatons and compensation element therefor |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011207458A Division JP5134716B2 (ja) | 2004-06-04 | 2011-09-22 | 強度変化の補償を伴う投影系及びそのための補償素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008502127A JP2008502127A (ja) | 2008-01-24 |
| JP2008502127A5 true JP2008502127A5 (enExample) | 2008-07-03 |
| JP4913041B2 JP4913041B2 (ja) | 2012-04-11 |
Family
ID=34969021
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007513861A Expired - Fee Related JP4913041B2 (ja) | 2004-06-04 | 2005-06-03 | 強度変化の補償を伴う投影系及びそのための補償素子 |
| JP2011207458A Expired - Fee Related JP5134716B2 (ja) | 2004-06-04 | 2011-09-22 | 強度変化の補償を伴う投影系及びそのための補償素子 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011207458A Expired - Fee Related JP5134716B2 (ja) | 2004-06-04 | 2011-09-22 | 強度変化の補償を伴う投影系及びそのための補償素子 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8605257B2 (enExample) |
| EP (1) | EP1759248A1 (enExample) |
| JP (2) | JP4913041B2 (enExample) |
| KR (2) | KR101199076B1 (enExample) |
| WO (1) | WO2005119369A1 (enExample) |
Families Citing this family (70)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100588124B1 (ko) | 2002-11-12 | 2006-06-09 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피장치 및 디바이스제조방법 |
| US10503084B2 (en) | 2002-11-12 | 2019-12-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9482966B2 (en) | 2002-11-12 | 2016-11-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| DE10261775A1 (de) | 2002-12-20 | 2004-07-01 | Carl Zeiss Smt Ag | Vorrichtung zur optischen Vermessung eines Abbildungssystems |
| EP1598855B1 (en) | 2003-02-26 | 2015-04-22 | Nikon Corporation | Exposure apparatus and method, and method of producing apparatus |
| SG139733A1 (en) | 2003-04-11 | 2008-02-29 | Nikon Corp | Apparatus having an immersion fluid system configured to maintain immersion fluid in a gap adjacent an optical assembly |
| US7213963B2 (en) | 2003-06-09 | 2007-05-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| KR101520591B1 (ko) | 2003-06-13 | 2015-05-14 | 가부시키가이샤 니콘 | 노광 방법, 기판 스테이지, 노광 장치, 및 디바이스 제조 방법 |
| TWI543235B (zh) | 2003-06-19 | 2016-07-21 | 尼康股份有限公司 | A method of manufacturing an exposure apparatus and an element |
| US7236232B2 (en) | 2003-07-01 | 2007-06-26 | Nikon Corporation | Using isotopically specified fluids as optical elements |
| EP2264531B1 (en) | 2003-07-09 | 2013-01-16 | Nikon Corporation | Exposure apparatus and device manufacturing method |
| KR101296501B1 (ko) | 2003-07-09 | 2013-08-13 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
| EP1643543B1 (en) | 2003-07-09 | 2010-11-24 | Nikon Corporation | Exposure apparatus and method for manufacturing device |
| EP1650787A4 (en) | 2003-07-25 | 2007-09-19 | Nikon Corp | INVESTIGATION METHOD AND INVESTIGATION DEVICE FOR AN OPTICAL PROJECTION SYSTEM AND METHOD OF MANUFACTURING AN OPTICAL PROJECTION SYSTEM |
| EP1503244A1 (en) | 2003-07-28 | 2005-02-02 | ASML Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
| CN104122760B (zh) | 2003-07-28 | 2017-04-19 | 株式会社尼康 | 曝光装置、器件制造方法 |
| US7779781B2 (en) | 2003-07-31 | 2010-08-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| SG145780A1 (en) | 2003-08-29 | 2008-09-29 | Nikon Corp | Exposure apparatus and device fabricating method |
| TWI263859B (en) | 2003-08-29 | 2006-10-11 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| KR20170070264A (ko) | 2003-09-03 | 2017-06-21 | 가부시키가이샤 니콘 | 액침 리소그래피용 유체를 제공하기 위한 장치 및 방법 |
| JP4444920B2 (ja) | 2003-09-19 | 2010-03-31 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
| EP1670043B1 (en) | 2003-09-29 | 2013-02-27 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
| KR101111364B1 (ko) | 2003-10-08 | 2012-02-27 | 가부시키가이샤 자오 니콘 | 기판 반송 장치 및 기판 반송 방법, 노광 장치 및 노광방법, 디바이스 제조 방법 |
| JP2005136364A (ja) | 2003-10-08 | 2005-05-26 | Zao Nikon Co Ltd | 基板搬送装置、露光装置、並びにデバイス製造方法 |
| WO2005036623A1 (ja) | 2003-10-08 | 2005-04-21 | Zao Nikon Co., Ltd. | 基板搬送装置及び基板搬送方法、露光装置及び露光方法、デバイス製造方法 |
| TW201738932A (zh) | 2003-10-09 | 2017-11-01 | Nippon Kogaku Kk | 曝光裝置及曝光方法、元件製造方法 |
| EP3139214B1 (en) | 2003-12-03 | 2019-01-30 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
| DE602004030481D1 (de) | 2003-12-15 | 2011-01-20 | Nippon Kogaku Kk | Bühnensystem, belichtungsvorrichtung und belichtungsverfahren |
| US7589822B2 (en) | 2004-02-02 | 2009-09-15 | Nikon Corporation | Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
| WO2005076321A1 (ja) | 2004-02-03 | 2005-08-18 | Nikon Corporation | 露光装置及びデバイス製造方法 |
| US8054448B2 (en) | 2004-05-04 | 2011-11-08 | Nikon Corporation | Apparatus and method for providing fluid for immersion lithography |
| WO2005119368A2 (en) | 2004-06-04 | 2005-12-15 | Carl Zeiss Smt Ag | System for measuring the image quality of an optical imaging system |
| US7463330B2 (en) | 2004-07-07 | 2008-12-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| KR101342330B1 (ko) | 2004-07-12 | 2013-12-16 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
| JP4599936B2 (ja) * | 2004-08-17 | 2010-12-15 | 株式会社ニコン | 照明光学装置、照明光学装置の調整方法、露光装置、および露光方法 |
| US7701550B2 (en) | 2004-08-19 | 2010-04-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7397533B2 (en) | 2004-12-07 | 2008-07-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US8692973B2 (en) | 2005-01-31 | 2014-04-08 | Nikon Corporation | Exposure apparatus and method for producing device |
| KR20160135859A (ko) | 2005-01-31 | 2016-11-28 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
| US7282701B2 (en) | 2005-02-28 | 2007-10-16 | Asml Netherlands B.V. | Sensor for use in a lithographic apparatus |
| USRE43576E1 (en) | 2005-04-08 | 2012-08-14 | Asml Netherlands B.V. | Dual stage lithographic apparatus and device manufacturing method |
| DE102005041938A1 (de) * | 2005-09-03 | 2007-03-08 | Carl Zeiss Smt Ag | Mikrolithographische Projektionsbelichtungsanlage |
| US7629572B2 (en) * | 2005-10-28 | 2009-12-08 | Carl Zeiss Laser Optics Gmbh | Optical devices and related systems and methods |
| US7518797B2 (en) | 2005-12-02 | 2009-04-14 | Carl Zeiss Smt Ag | Microlithographic exposure apparatus |
| US7649611B2 (en) | 2005-12-30 | 2010-01-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| DE102006013459A1 (de) * | 2006-03-23 | 2007-09-27 | Infineon Technologies Ag | Anordnung zur Übertragung von Strukturelementen einer Photomaske auf ein Substrat und Verfahren zur Übertragung von Strukturelementen einer Photomaske auf ein Substrat |
| DE102006021797A1 (de) * | 2006-05-09 | 2007-11-15 | Carl Zeiss Smt Ag | Optische Abbildungseinrichtung mit thermischer Dämpfung |
| EP1930771A1 (en) * | 2006-12-04 | 2008-06-11 | Carl Zeiss SMT AG | Projection objectives having mirror elements with reflective coatings |
| KR101399768B1 (ko) | 2006-12-28 | 2014-05-27 | 칼 짜이스 에스엠티 게엠베하 | 기울어진 편향 미러를 갖는 반사굴절식 투영 대물렌즈, 투영 노광 장치, 투영 노광 방법 및 미러 |
| DE102007023411A1 (de) * | 2006-12-28 | 2008-07-03 | Carl Zeiss Smt Ag | Optisches Element, Beleuchtungsoptik für die Mikrolithographie mit mindestens einem derartigen optischen Element sowie Beleuchtungssystem mit einer derartigen Beleuchtungsoptik |
| JP2010517310A (ja) | 2007-01-30 | 2010-05-20 | カール・ツァイス・エスエムティー・アーゲー | マイクロリソグラフィ投影露光装置の照明システム |
| JP5165700B2 (ja) | 2007-02-28 | 2013-03-21 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 瞳補正を有する反射屈折投影対物系 |
| WO2008119794A1 (en) * | 2007-04-03 | 2008-10-09 | Carl Zeiss Smt Ag | Optical system, in particular illumination device or projection objective of a microlithographic projection exposure apparatus |
| US7929115B2 (en) * | 2007-06-01 | 2011-04-19 | Carl Zeiss Smt Gmbh | Projection objective and projection exposure apparatus for microlithography |
| US7817250B2 (en) | 2007-07-18 | 2010-10-19 | Carl Zeiss Smt Ag | Microlithographic projection exposure apparatus |
| JP5224218B2 (ja) * | 2007-07-23 | 2013-07-03 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ投影露光装置の光学システム |
| JP5269079B2 (ja) | 2007-08-20 | 2013-08-21 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 反射コーティングを備えたミラー要素を有する投影対物系 |
| US9176393B2 (en) | 2008-05-28 | 2015-11-03 | Asml Netherlands B.V. | Lithographic apparatus and a method of operating the apparatus |
| JP5473350B2 (ja) * | 2009-02-13 | 2014-04-16 | キヤノン株式会社 | 照明光学系、露光装置及びデバイスの製造方法 |
| DE102009047179B8 (de) | 2009-11-26 | 2016-08-18 | Carl Zeiss Smt Gmbh | Projektionsobjektiv |
| DE102011084152A1 (de) * | 2011-10-07 | 2013-04-11 | Carl Zeiss Smt Gmbh | Verfahren zur Einstellung der Intensitätsverteilung in einem optischen System einer mikrolithographischen Projektionsbelichtungsanlage, sowie optisches System |
| DE102012205615A1 (de) | 2012-04-04 | 2013-10-10 | Carl Zeiss Smt Gmbh | Beschichtungsverfahren, Beschichtungsanlage und optisches Element mit Beschichtung |
| JP6069919B2 (ja) | 2012-07-11 | 2017-02-01 | 旭硝子株式会社 | Ｅｕｖリソグラフィ用反射型マスクブランクおよびその製造方法、ならびに該マスクブランク用の反射層付基板およびその製造方法 |
| JP5746259B2 (ja) * | 2013-05-07 | 2015-07-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 反射コーティングを備えたミラー要素を有する投影対物系 |
| KR102030100B1 (ko) | 2015-03-05 | 2019-10-08 | 에이에스엠엘 네델란즈 비.브이. | 검사와 계측을 위한 방법 및 장치 |
| DE102016212373A1 (de) | 2016-07-07 | 2018-01-11 | Carl Zeiss Smt Gmbh | Optisches System, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
| DE102017202802A1 (de) * | 2017-02-21 | 2018-08-23 | Carl Zeiss Smt Gmbh | Objektiv und optisches System mit einem solchen Objektiv |
| DE102017208340A1 (de) | 2017-05-17 | 2018-11-22 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsverfahren und Projektionsobjektiv mit Einstellung der Pupillentransmission |
| JP7253717B2 (ja) * | 2019-05-30 | 2023-04-07 | パナソニックＩｐマネジメント株式会社 | 投影装置及びヘッドアップディスプレイ |
| JP7402702B2 (ja) * | 2020-01-31 | 2023-12-21 | リコーインダストリアルソリューションズ株式会社 | 結像光学系および画像表示装置および撮像装置 |
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| DE2963537D1 (en) * | 1979-07-27 | 1982-10-07 | Tabarelli Werner W | Optical lithographic method and apparatus for copying a pattern onto a semiconductor wafer |
| US4346164A (en) * | 1980-10-06 | 1982-08-24 | Werner Tabarelli | Photolithographic method for the manufacture of integrated circuits |
| US5222112A (en) * | 1990-12-27 | 1993-06-22 | Hitachi, Ltd. | X-ray pattern masking by a reflective reduction projection optical system |
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2005
- 2005-06-03 JP JP2007513861A patent/JP4913041B2/ja not_active Expired - Fee Related
- 2005-06-03 WO PCT/EP2005/005979 patent/WO2005119369A1/en not_active Ceased
- 2005-06-03 KR KR1020077000237A patent/KR101199076B1/ko not_active Expired - Fee Related
- 2005-06-03 US US11/628,356 patent/US8605257B2/en not_active Expired - Fee Related
- 2005-06-03 EP EP05746777A patent/EP1759248A1/en not_active Withdrawn
- 2005-06-03 KR KR1020117023187A patent/KR101248328B1/ko not_active Expired - Fee Related
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2011
- 2011-09-22 JP JP2011207458A patent/JP5134716B2/ja not_active Expired - Fee Related
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