JP2008286881A5 - - Google Patents

Download PDF

Info

Publication number
JP2008286881A5
JP2008286881A5 JP2007129699A JP2007129699A JP2008286881A5 JP 2008286881 A5 JP2008286881 A5 JP 2008286881A5 JP 2007129699 A JP2007129699 A JP 2007129699A JP 2007129699 A JP2007129699 A JP 2007129699A JP 2008286881 A5 JP2008286881 A5 JP 2008286881A5
Authority
JP
Japan
Prior art keywords
photoresist stripping
weight
stripping composition
group
composition according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007129699A
Other languages
English (en)
Japanese (ja)
Other versions
JP4716225B2 (ja
JP2008286881A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2007129699A external-priority patent/JP4716225B2/ja
Priority to JP2007129699A priority Critical patent/JP4716225B2/ja
Priority to TW097116444A priority patent/TWI434150B/zh
Priority to KR1020097024223A priority patent/KR101420471B1/ko
Priority to PCT/JP2008/058750 priority patent/WO2008140076A1/ja
Priority to CN2008800160126A priority patent/CN101681129B/zh
Publication of JP2008286881A publication Critical patent/JP2008286881A/ja
Publication of JP2008286881A5 publication Critical patent/JP2008286881A5/ja
Publication of JP4716225B2 publication Critical patent/JP4716225B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007129699A 2007-05-15 2007-05-15 フォトレジスト剥離剤組成物 Active JP4716225B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007129699A JP4716225B2 (ja) 2007-05-15 2007-05-15 フォトレジスト剥離剤組成物
TW097116444A TWI434150B (zh) 2007-05-15 2008-05-05 光阻剝離劑組成物
CN2008800160126A CN101681129B (zh) 2007-05-15 2008-05-13 光致抗蚀剂剥离剂组合物
PCT/JP2008/058750 WO2008140076A1 (ja) 2007-05-15 2008-05-13 フォトレジスト剥離剤組成物
KR1020097024223A KR101420471B1 (ko) 2007-05-15 2008-05-13 포토레지스트 박리제조성물

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007129699A JP4716225B2 (ja) 2007-05-15 2007-05-15 フォトレジスト剥離剤組成物

Publications (3)

Publication Number Publication Date
JP2008286881A JP2008286881A (ja) 2008-11-27
JP2008286881A5 true JP2008286881A5 (enExample) 2011-03-31
JP4716225B2 JP4716225B2 (ja) 2011-07-06

Family

ID=40002266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007129699A Active JP4716225B2 (ja) 2007-05-15 2007-05-15 フォトレジスト剥離剤組成物

Country Status (5)

Country Link
JP (1) JP4716225B2 (enExample)
KR (1) KR101420471B1 (enExample)
CN (1) CN101681129B (enExample)
TW (1) TWI434150B (enExample)
WO (1) WO2008140076A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4725905B2 (ja) * 2009-04-17 2011-07-13 ナガセケムテックス株式会社 フォトレジスト剥離剤組成物及びフォトレジスト剥離方法
TWI481706B (zh) * 2009-07-29 2015-04-21 東友精細化工有限公司 清潔組成物及使用該組成物清潔面板的方法
JP5023128B2 (ja) 2009-10-07 2012-09-12 東京エレクトロン株式会社 塗布現像装置及び塗布現像方法
JP5709075B2 (ja) * 2010-09-10 2015-04-30 ナガセケムテックス株式会社 リン酸及び／又はリン酸塩の水溶液のパーティクル数経時安定化方法及びレジスト残渣剥離剤組成物
KR101089211B1 (ko) * 2010-12-02 2011-12-02 엘티씨 (주) 1차 알칸올 아민을 포함하는 ｌｃｄ 제조용 포토레지스트 박리액 조성물
JP5885046B1 (ja) * 2015-03-24 2016-03-15 パナソニックＩｐマネジメント株式会社 レジスト剥離液
CN111781808B (zh) * 2015-09-16 2024-06-07 东友精细化工有限公司 抗蚀剂剥离液组合物、平板显示器基板及其制造方法
CN108139692A (zh) * 2015-10-13 2018-06-08 长濑化成株式会社 光致抗蚀剂剥离液
CN107995960B (zh) * 2016-09-30 2019-03-12 松下知识产权经营株式会社 抗蚀剂剥离液
KR20210024187A (ko) 2018-07-20 2021-03-04 엔테그리스, 아이엔씨. 부식 억제제를 갖는 세정 조성물
KR102334425B1 (ko) 2019-11-21 2021-12-01 엘티씨 (주) 디스플레이 제조용 포토레지스트 박리액 조성물

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08262746A (ja) * 1995-03-28 1996-10-11 Mitsubishi Gas Chem Co Inc フォトレジスト剥離剤組成物および剥離方法
JP2001350276A (ja) * 2000-06-05 2001-12-21 Nagase Kasei Kogyo Kk フォトレジスト剥離剤組成物及びその使用方法
JP4692799B2 (ja) * 2001-05-22 2011-06-01 ナガセケムテックス株式会社 レジスト剥離用組成物
JP2004287288A (ja) * 2003-03-24 2004-10-14 Nagase Chemtex Corp レジスト剥離用組成物及びレジスト剥離方法
JP4628209B2 (ja) * 2004-11-18 2011-02-09 花王株式会社 剥離剤組成物
JP4692497B2 (ja) * 2007-02-28 2011-06-01 ナガセケムテックス株式会社 フォトレジスト剥離剤組成物

Similar Documents

Publication Publication Date Title
JP2008286881A5 (enExample)
TWI426362B (zh) 用於製造液晶顯示器（ｌｃｄ）之光阻剝離組合物
JP2016040382A5 (enExample)
JP2008509554A5 (enExample)
JP2014063186A5 (enExample)
JP2001520118A5 (enExample)
TWI617902B (zh) 光阻剝離液組成物以及使用該組成物的光阻剝離方法
JP2007510173A5 (enExample)
JP2010530897A5 (enExample)
TW200508300A (en) Composition and method for removing copper-compatible resist
EP2500775A3 (en) Patterning process and composition for forming silicon-containing film usable therefor
KR101668126B1 (ko) 포토레지스트 박리제 조성물 및 포토레지스트 박리 방법
WO2009034998A1 (ja) 窒素含有シリル基を含むポリマーを含有するレジスト下層膜形成組成物
MY162416A (en) Cleaning formulations and method of using the cleaning formulations
CN102051286A (zh) 一种松香型焊锡膏用水基清洗剂
TW200736856A (en) Dynamic multi-purpose composition for the removal of photoresists and method for its use
JP2010532365A5 (enExample)
DE602005018075D1 (de) Reinigungsmittel für mikroelektronik-substrate
WO2008140076A1 (ja) フォトレジスト剥離剤組成物
JP2010529994A5 (enExample)
JP2010500432A5 (enExample)
CN105368612A (zh) 清洁组合物
JP2014508725A5 (enExample)
DK1877870T3 (da) Ikke-vandig fotolakætseopløsning, som hindrer galvanisk korrosion
WO2008105440A1 (ja) フォトレジスト剥離剤組成物