JP2008258157A - 透明伝導性酸化膜のカソードを備える有機電界発光素子及びその製造方法 - Google Patents
透明伝導性酸化膜のカソードを備える有機電界発光素子及びその製造方法 Download PDFInfo
- Publication number
- JP2008258157A JP2008258157A JP2008065866A JP2008065866A JP2008258157A JP 2008258157 A JP2008258157 A JP 2008258157A JP 2008065866 A JP2008065866 A JP 2008065866A JP 2008065866 A JP2008065866 A JP 2008065866A JP 2008258157 A JP2008258157 A JP 2008258157A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- film
- oxide film
- indium
- transparent conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 38
- 238000002347 injection Methods 0.000 claims description 35
- 239000007924 injection Substances 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 28
- 229910003437 indium oxide Inorganic materials 0.000 claims description 23
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 23
- 238000002207 thermal evaporation Methods 0.000 claims description 18
- -1 aluminum tin oxide Chemical compound 0.000 claims description 10
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 claims description 10
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 10
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 10
- 229910001887 tin oxide Inorganic materials 0.000 claims description 10
- 238000005401 electroluminescence Methods 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- KWXIRYKCFANFRC-UHFFFAOYSA-N [O--].[O--].[O--].[Al+3].[In+3] Chemical compound [O--].[O--].[O--].[Al+3].[In+3] KWXIRYKCFANFRC-UHFFFAOYSA-N 0.000 claims description 8
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 6
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims description 4
- 230000002708 enhancing effect Effects 0.000 claims description 4
- 229910001195 gallium oxide Inorganic materials 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 4
- 229910003445 palladium oxide Inorganic materials 0.000 claims description 4
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 claims description 4
- 229910001954 samarium oxide Inorganic materials 0.000 claims description 4
- 229940075630 samarium oxide Drugs 0.000 claims description 4
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 4
- 238000005728 strengthening Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 98
- 239000010408 film Substances 0.000 description 89
- 230000005525 hole transport Effects 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 10
- 238000010030 laminating Methods 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 10
- 230000000903 blocking effect Effects 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 7
- 239000011343 solid material Substances 0.000 description 5
- 239000011575 calcium Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- NGQSLSMAEVWNPU-YTEMWHBBSA-N 1,2-bis[(e)-2-phenylethenyl]benzene Chemical compound C=1C=CC=CC=1/C=C/C1=CC=CC=C1\C=C\C1=CC=CC=C1 NGQSLSMAEVWNPU-YTEMWHBBSA-N 0.000 description 3
- UHXOHPVVEHBKKT-UHFFFAOYSA-N 1-(2,2-diphenylethenyl)-4-[4-(2,2-diphenylethenyl)phenyl]benzene Chemical compound C=1C=C(C=2C=CC(C=C(C=3C=CC=CC=3)C=3C=CC=CC=3)=CC=2)C=CC=1C=C(C=1C=CC=CC=1)C1=CC=CC=C1 UHXOHPVVEHBKKT-UHFFFAOYSA-N 0.000 description 3
- CUJRVFIICFDLGR-UHFFFAOYSA-N acetylacetonate Chemical compound CC(=O)[CH-]C(C)=O CUJRVFIICFDLGR-UHFFFAOYSA-N 0.000 description 3
- 238000007641 inkjet printing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- ZMLPKJYZRQZLDA-UHFFFAOYSA-N 1-(2-phenylethenyl)-4-[4-(2-phenylethenyl)phenyl]benzene Chemical compound C=1C=CC=CC=1C=CC(C=C1)=CC=C1C(C=C1)=CC=C1C=CC1=CC=CC=C1 ZMLPKJYZRQZLDA-UHFFFAOYSA-N 0.000 description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 2
- VVJKKWFAADXIJK-UHFFFAOYSA-N Allylamine Chemical compound NCC=C VVJKKWFAADXIJK-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- IBHBKWKFFTZAHE-UHFFFAOYSA-N n-[4-[4-(n-naphthalen-1-ylanilino)phenyl]phenyl]-n-phenylnaphthalen-1-amine Chemical compound C1=CC=CC=C1N(C=1C2=CC=CC=C2C=CC=1)C1=CC=C(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C3=CC=CC=C3C=CC=2)C=C1 IBHBKWKFFTZAHE-UHFFFAOYSA-N 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 125000003003 spiro group Chemical group 0.000 description 2
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- UWRZIZXBOLBCON-VOTSOKGWSA-N (e)-2-phenylethenamine Chemical compound N\C=C\C1=CC=CC=C1 UWRZIZXBOLBCON-VOTSOKGWSA-N 0.000 description 1
- XHZUPQUVMGRPDC-UHFFFAOYSA-N 1,2,3,4-tetratert-butylperylene Chemical group C1=CC(C2=C(C(C(C)(C)C)=C(C=3C2=C2C=CC=3C(C)(C)C)C(C)(C)C)C(C)(C)C)=C3C2=CC=CC3=C1 XHZUPQUVMGRPDC-UHFFFAOYSA-N 0.000 description 1
- WECOUKMONWFOGF-UHFFFAOYSA-N 1-[2-[3,5-bis[2-(9h-carbazol-1-yl)-5-methoxyphenyl]phenyl]-4-methoxyphenyl]-9h-carbazole Chemical compound C12=CC=CC=C2NC2=C1C=CC=C2C1=CC=C(OC)C=C1C1=CC(C=2C(=CC=C(OC)C=2)C=2C=3NC4=CC=CC=C4C=3C=CC=2)=CC(C=2C(=CC=C(OC)C=2)C=2C=3NC4=CC=CC=C4C=3C=CC=2)=C1 WECOUKMONWFOGF-UHFFFAOYSA-N 0.000 description 1
- PRUCJKSKYARXJB-UHFFFAOYSA-N 1-[2-[3,5-bis[2-(9h-carbazol-1-yl)phenyl]phenyl]phenyl]-9h-carbazole Chemical compound C12=CC=CC=C2NC2=C1C=CC=C2C1=CC=CC=C1C1=CC(C=2C(=CC=CC=2)C=2C=3NC4=CC=CC=C4C=3C=CC=2)=CC(C=2C(=CC=CC=2)C=2C=3NC4=CC=CC=C4C=3C=CC=2)=C1 PRUCJKSKYARXJB-UHFFFAOYSA-N 0.000 description 1
- AHBDIQVWSLNELJ-UHFFFAOYSA-N 1-[3,5-bis(9h-carbazol-1-yl)phenyl]-9h-carbazole Chemical compound C12=CC=CC=C2NC2=C1C=CC=C2C1=CC(C=2C=3NC4=CC=CC=C4C=3C=CC=2)=CC(C2=C3NC=4C(C3=CC=C2)=CC=CC=4)=C1 AHBDIQVWSLNELJ-UHFFFAOYSA-N 0.000 description 1
- IERDDDBDINUYCD-UHFFFAOYSA-N 1-[4-[4-(9h-carbazol-1-yl)phenyl]phenyl]-9h-carbazole Chemical group C12=CC=CC=C2NC2=C1C=CC=C2C(C=C1)=CC=C1C(C=C1)=CC=C1C1=C2NC3=CC=CC=C3C2=CC=C1 IERDDDBDINUYCD-UHFFFAOYSA-N 0.000 description 1
- OGGKVJMNFFSDEV-UHFFFAOYSA-N 3-methyl-n-[4-[4-(n-(3-methylphenyl)anilino)phenyl]phenyl]-n-phenylaniline Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 OGGKVJMNFFSDEV-UHFFFAOYSA-N 0.000 description 1
- MWMNLUGPPZOPJQ-UHFFFAOYSA-N 4-(4-aminophenyl)-3-naphthalen-1-ylaniline Chemical compound C1=CC(N)=CC=C1C1=CC=C(N)C=C1C1=CC=CC2=CC=CC=C12 MWMNLUGPPZOPJQ-UHFFFAOYSA-N 0.000 description 1
- RDBHQZLQCUALTF-UHFFFAOYSA-N 4-(4-anilinophenyl)aniline Chemical compound C1=CC(N)=CC=C1C(C=C1)=CC=C1NC1=CC=CC=C1 RDBHQZLQCUALTF-UHFFFAOYSA-N 0.000 description 1
- FJXNABNMUQXOHX-UHFFFAOYSA-N 4-(9h-carbazol-1-yl)-n,n-bis[4-(9h-carbazol-1-yl)phenyl]aniline Chemical compound C12=CC=CC=C2NC2=C1C=CC=C2C(C=C1)=CC=C1N(C=1C=CC(=CC=1)C=1C=2NC3=CC=CC=C3C=2C=CC=1)C(C=C1)=CC=C1C1=C2NC3=CC=CC=C3C2=CC=C1 FJXNABNMUQXOHX-UHFFFAOYSA-N 0.000 description 1
- BNIUBQUDMPRXLZ-UHFFFAOYSA-N C(CCC)C1=CC=C(C=C1)NC1=CC=C(C=C1)N(C1=CC=CC=C1)C1=CC=CC=C1 Chemical compound C(CCC)C1=CC=C(C=C1)NC1=CC=C(C=C1)N(C1=CC=CC=C1)C1=CC=CC=C1 BNIUBQUDMPRXLZ-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- YAPIJPOCONTNDY-UHFFFAOYSA-N N1C2=CC=CC=C2C2=C1C(C1=CC=C(C=C1)[SiH2]C=1C=CC(=CC=1)C=1C3=C(C4=CC=CC=C4N3)C=CC=1)=CC=C2 Chemical compound N1C2=CC=CC=C2C2=C1C(C1=CC=C(C=C1)[SiH2]C=1C=CC(=CC=1)C=1C3=C(C4=CC=CC=C4N3)C=CC=1)=CC=C2 YAPIJPOCONTNDY-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- UUESRJFGZMCELZ-UHFFFAOYSA-K aluminum;2-methylquinoline-8-carboxylate;4-phenylphenolate Chemical compound [Al+3].C1=CC([O-])=CC=C1C1=CC=CC=C1.C1=CC=C(C([O-])=O)C2=NC(C)=CC=C21.C1=CC=C(C([O-])=O)C2=NC(C)=CC=C21 UUESRJFGZMCELZ-UHFFFAOYSA-K 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- UFVXQDWNSAGPHN-UHFFFAOYSA-K bis[(2-methylquinolin-8-yl)oxy]-(4-phenylphenoxy)alumane Chemical compound [Al+3].C1=CC=C([O-])C2=NC(C)=CC=C21.C1=CC=C([O-])C2=NC(C)=CC=C21.C1=CC([O-])=CC=C1C1=CC=CC=C1 UFVXQDWNSAGPHN-UHFFFAOYSA-K 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000004770 highest occupied molecular orbital Methods 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000004768 lowest unoccupied molecular orbital Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/828—Transparent cathodes, e.g. comprising thin metal layers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
- H10K2102/3023—Direction of light emission
- H10K2102/3026—Top emission
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
- H10K2102/3023—Direction of light emission
- H10K2102/3031—Two-side emission, e.g. transparent OLEDs [TOLED]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
- H10K50/171—Electron injection layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
【解決手段】素子基板10上に位置するアノードAと、アノード上に位置し、少なくとも有機発光層14を備える有機機能膜Fと、有機機能膜上に位置し、透明伝導性酸化膜であるカソードCと、を備える有機電界発光素子である。これにより、有機電界発光素子の共振効果を除去しうる。その結果、角度による輝度変化及び色転移が除去される。
【選択図】図1
Description
<製造例>
基板上に金(Au)を使用してアノードを形成し、前記アノード上にNPDを50nmの厚さに積層することによって、正孔輸送層を形成した。前記正孔輸送層上にDSA(distyrylarylene)100重量部とTBPe(テトラ(t−ブチル)ペリーレン)3重量部とを共蒸着することによって、厚さが30nmである青色発光層を形成した。前記発光層上にBalq(ビス(2−メチル−8−キノラート)−(p−フェニルフェノラート)−アルミニウム)を5nmの厚さに積層して正孔阻止層を形成した。前記正孔阻止層上にBebq2を20nmの厚さに積層して電子輸送層を形成した。前記電子輸送層上にLiFを1nmの厚さに積層して電子注入層を形成した。前記電子注入層上にプラズマ支援熱蒸発法を使用してインジウム酸化膜を積層してカソードを形成した。
電子注入層上にスパッタリング法を使用してインジウム酸化膜を積層してカソードを形成したことを除いては、製造例と同じ方法を使用して有機電界発光素子を製造した。
基板上にインジウムスズ酸化膜を積層してアノードを形成し、前記アノード上にCuPcを60nmの厚さに積層することによって正孔注入層を形成し、前記正孔注入層上にNPDを30nmの厚さに積層することによって正孔輸送層を形成した。前記正孔輸送層上にDSA 100重量部とTBPe 3重量部とを共蒸着することによって、厚さが25nmである青色発光層を形成した。前記発光層上にBalqを5nmの厚さに積層して正孔阻止層を形成し、前記正孔阻止層上にAlq3を20nmの厚さに積層して電子輸送層を形成し、前記電子輸送層上にLiFを1nmの厚さに積層して電子注入層を形成し、前記電子注入層上に熱蒸発(サーマルエバポレーション)法を使用してアルミニウムを積層してカソードを形成した。
13 正孔輸送層
14 有機発光層
15 電子輸送層
17 電子注入強化層
A アノード
C カソード
F 有機機能膜
Claims (18)
- 素子基板上に位置するアノードと、
前記アノード上に位置し、少なくとも有機発光層を備える有機機能膜と、
前記有機機能膜上に位置し、透明伝導性酸化膜であるカソードと、
を備えることを特徴とする有機電界発光素子。 - 前記透明伝導性酸化膜は、プラズマ支援熱蒸発法を使用して形成したことを特徴とする請求項1に記載の有機電界発光素子。
- 前記透明伝導性酸化膜は、インジウム酸化膜、インジウムスズ酸化膜、スズ酸化膜、インジウム亜鉛酸化膜、アルミニウム亜鉛酸化膜、アルミニウムスズ酸化膜またはアルミニウムインジウム酸化膜であることを特徴とする請求項1に記載の有機電界発光素子。
- 前記有機機能膜と前記カソードとの間に位置する電子注入強化層をさらに備えることを特徴とする請求項1に記載の有機電界発光素子。
- 前記電子注入強化層は、表面深さ未満の厚さを有する金属層であることを特徴とする請求項4に記載の有機電界発光素子。
- 前記電子注入強化層は、Mg、CaまたはInを含有することを特徴とする請求項4に記載の有機電界発光素子。
- 前記アノードは、AuまたはPtを含有することを特徴とする請求項1に記載の有機電界発光素子。
- 前記アノードは、透明伝導性酸化物質に絶縁酸化物質がドーピングされた膜であることを特徴とする請求項1に記載の有機電界発光素子。
- 前記透明伝導性酸化物質は、インジウム酸化物、インジウムスズ酸化物、スズ酸化物、インジウム亜鉛酸化物、アルミニウム亜鉛酸化物、アルミニウムスズ酸化物またはアルミニウムインジウム酸化物であり、
前記絶縁酸化物質は、ランタン酸化物、イットリウム酸化物、ベリリウム酸化物、チタン酸化物、シリコン酸化物、ガリウム酸化物、パラジウム酸化物またはサマリウム酸化物であることを特徴とする請求項8に記載の有機電界発光素子。 - 素子基板上にアノードを形成する工程と、
前記アノード上に少なくとも有機発光層を備える有機機能膜を形成する工程と、
前記有機機能膜上に透明伝導性酸化膜のカソードを形成する工程と、
を含むことを特徴とする有機電界発光素子の製造方法。 - 前記透明伝導性酸化膜は、プラズマ支援熱蒸発法を使用して形成することを特徴とする請求項10に記載の有機電界発光素子の製造方法。
- 前記透明伝導性酸化膜は、インジウム酸化膜、インジウムスズ酸化膜、スズ酸化膜、インジウム亜鉛酸化膜、アルミニウム亜鉛酸化膜、アルミニウムスズ酸化膜またはアルミニウムインジウム酸化膜であることを特徴とする請求項10に記載の有機電界発光素子の製造方法。
- 前記カソードを形成する前に、前記有機機能膜上に電子注入強化層を形成する工程をさらに含むことを特徴とする請求項10に記載の有機電界発光素子の製造方法。
- 前記電子注入強化層は、表面深さ未満の厚さを有する金属層で形成することを特徴とする請求項13に記載の有機電界発光素子の製造方法。
- 前記電子注入強化層は、Mg、CaまたはInを含有することを特徴とする請求項14に記載の有機電界発光素子の製造方法。
- 前記アノードは、AuまたはPtを含有することを特徴とする請求項10に記載の有機電界発光素子の製造方法。
- 前記アノードは、透明伝導性酸化物質に絶縁酸化物質がドーピングして形成することを特徴とする請求項10に記載の有機電界発光素子の製造方法。
- 前記透明伝導性酸化物質は、インジウム酸化物、インジウムスズ酸化物、スズ酸化物、インジウム亜鉛酸化物、アルミニウム亜鉛酸化物、アルミニウムスズ酸化物またはアルミニウムインジウム酸化物であり、
前記絶縁酸化物質は、ランタン酸化物、イットリウム酸化物、ベリリウム酸化物、チタン酸化物、シリコン酸化物、ガリウム酸化物、パラジウム酸化物またはサマリウム酸化物であることを特徴とする請求項17に記載の有機電界発光素子の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070033749A KR100813851B1 (ko) | 2007-04-05 | 2007-04-05 | 투명 전도성 산화막인 캐소드를 구비하는 유기전계발광소자및 그의 제조방법 |
KR10-2007-0033749 | 2007-04-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008258157A true JP2008258157A (ja) | 2008-10-23 |
JP4871901B2 JP4871901B2 (ja) | 2012-02-08 |
Family
ID=39410672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008065866A Active JP4871901B2 (ja) | 2007-04-05 | 2008-03-14 | 透明伝導性酸化膜のカソードを備える有機電界発光素子及びその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7838327B2 (ja) |
EP (1) | EP1978575A3 (ja) |
JP (1) | JP4871901B2 (ja) |
KR (1) | KR100813851B1 (ja) |
CN (1) | CN101281954A (ja) |
TW (1) | TWI453967B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7622865B2 (en) * | 2006-06-19 | 2009-11-24 | Seiko Epson Corporation | Light-emitting device, image forming apparatus, display device, and electronic apparatus |
KR100813854B1 (ko) * | 2007-04-23 | 2008-03-17 | 삼성에스디아이 주식회사 | 유기 발광 소자 및 그 제조방법 |
KR100964227B1 (ko) * | 2008-05-06 | 2010-06-17 | 삼성모바일디스플레이주식회사 | 평판 표시 장치용 박막 트랜지스터 어레이 기판, 이를포함하는 유기 발광 표시 장치, 및 이들의 제조 방법 |
KR101739127B1 (ko) * | 2008-08-19 | 2017-05-23 | 엘지디스플레이 주식회사 | 유기전계발광표시장치 |
TWI419797B (zh) * | 2009-01-16 | 2013-12-21 | Hon Hai Prec Ind Co Ltd | 熱列印頭與熱列印系統 |
CN101752027B (zh) * | 2010-02-09 | 2011-06-29 | 中国科学院长春光学精密机械与物理研究所 | 铟镧钛氧化物透明导电薄膜 |
CN102186274B (zh) * | 2011-03-11 | 2016-04-13 | 台州市菲克激光设备有限公司 | 高亮度场致发光冷光板 |
KR101305869B1 (ko) * | 2011-10-12 | 2013-09-09 | 포항공과대학교 산학협력단 | 단순화된 유기 발광 소자 및 이의 제조 방법 |
CN103789745B (zh) * | 2014-01-26 | 2016-04-06 | 山东大学 | 一种带隙宽度可调的铝铟氧化物薄膜材料及其制备方法 |
TWI660533B (zh) | 2017-09-15 | 2019-05-21 | Industrial Technology Research Institute | 發光元件及其透明電極 |
KR20220140903A (ko) * | 2021-04-08 | 2022-10-19 | 삼성디스플레이 주식회사 | 발광 소자 및 이를 포함하는 전자 장치 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10162959A (ja) * | 1996-11-29 | 1998-06-19 | Idemitsu Kosan Co Ltd | 有機エレクトロルミネッセンス素子 |
JP2000016839A (ja) * | 1998-07-02 | 2000-01-18 | Toppan Printing Co Ltd | 透明導電性酸化物薄膜の形成方法及びこの装置 |
JP2000273620A (ja) * | 1999-03-23 | 2000-10-03 | Toppan Printing Co Ltd | 透明導電性薄膜被覆フィルムの形成方法 |
JP2001085164A (ja) * | 1999-07-14 | 2001-03-30 | Nec Corp | 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置 |
JP2001085163A (ja) * | 1999-09-20 | 2001-03-30 | Sony Corp | 有機エレクトロルミネッセンス素子及びその製造方法と表示装置 |
JP2002313582A (ja) * | 2001-04-17 | 2002-10-25 | Matsushita Electric Ind Co Ltd | 発光素子及び表示装置 |
JP2002352956A (ja) * | 2001-03-23 | 2002-12-06 | Mitsubishi Chemicals Corp | 薄膜型発光体及びその製造方法 |
JP2003142261A (ja) * | 2001-11-02 | 2003-05-16 | Tdk Corp | 有機el表示素子の製造方法および有機el表示素子 |
JP2005093418A (ja) * | 2003-08-08 | 2005-04-07 | Seiko Epson Corp | 有機エレクトロルミネッセンス装置とその製造方法、並びに電子機器 |
JP2005123124A (ja) * | 2003-10-20 | 2005-05-12 | Seiko Epson Corp | 有機el装置の製造方法および有機el装置 |
JP2006054147A (ja) * | 2004-08-16 | 2006-02-23 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス素子 |
JP2006347807A (ja) * | 2005-06-15 | 2006-12-28 | Sumitomo Metal Mining Co Ltd | 酸化物焼結体、酸化物透明導電膜、およびこれらの製造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999059379A2 (en) * | 1998-05-14 | 1999-11-18 | Fed Corporation | An organic light emitting diode device for use with opaque substrates |
JP2000277252A (ja) * | 1999-03-29 | 2000-10-06 | Matsushita Electric Ind Co Ltd | 有機電場発光パネルとその製造方法 |
KR100692598B1 (ko) * | 1999-09-22 | 2007-04-13 | 한국전자통신연구원 | 이중 절연층을 갖는 유기전기발광소자의 구조 및 제조방법 |
JP2001209086A (ja) | 2000-01-26 | 2001-08-03 | Canon Inc | カメラ |
JP2001215763A (ja) * | 2000-02-01 | 2001-08-10 | Canon Inc | 画像形成装置 |
JP2001243772A (ja) | 2000-02-29 | 2001-09-07 | Fujitsu Ltd | ダイナミック・ランダム・アクセス・メモリ(dram) |
SG143063A1 (en) * | 2002-01-24 | 2008-06-27 | Semiconductor Energy Lab | Light emitting device and method of manufacturing the same |
KR100505536B1 (ko) * | 2002-03-27 | 2005-08-04 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 투명한 도전성 박막, 그것의 제조방법, 그것의 제조를위한 소결 타겟, 디스플레이 패널용의 투명한 전기전도성기재, 및 유기 전기루미네선스 디바이스 |
US20040048157A1 (en) * | 2002-09-11 | 2004-03-11 | Neudecker Bernd J. | Lithium vanadium oxide thin-film battery |
DE20215401U1 (de) * | 2002-10-07 | 2004-02-19 | Schott Glas | Verbund aus einem Dünnstsubsrat und einem Trägersubstrat mit lösbarem Verbindungsmittel |
US7333072B2 (en) * | 2003-03-24 | 2008-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Thin film integrated circuit device |
KR100543009B1 (ko) * | 2003-10-16 | 2006-01-20 | 삼성에스디아이 주식회사 | 능동 매트릭스 유기전계발광표시장치 및 그의 제조방법 |
KR100542771B1 (ko) * | 2003-12-30 | 2006-01-20 | 엘지.필립스 엘시디 주식회사 | 유기 전계발광소자 및 그 제조방법 |
US20060125385A1 (en) * | 2004-12-14 | 2006-06-15 | Chun-Chung Lu | Active matrix organic electro-luminescence device array and fabricating process thereof |
KR100721571B1 (ko) * | 2005-03-07 | 2007-05-23 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자 및 그의 제조방법 |
TWI253878B (en) * | 2005-03-09 | 2006-04-21 | Au Optronics Corp | Organic electroluminescent element and display device including the same |
JP2006307320A (ja) | 2005-03-29 | 2006-11-09 | Jfe Steel Kk | 焼結鉱の製造方法 |
KR100685832B1 (ko) * | 2005-05-13 | 2007-02-22 | 삼성에스디아이 주식회사 | 무기막 및 그의 제조 방법 |
-
2007
- 2007-04-05 KR KR1020070033749A patent/KR100813851B1/ko active IP Right Grant
-
2008
- 2008-03-14 JP JP2008065866A patent/JP4871901B2/ja active Active
- 2008-03-24 US US12/053,900 patent/US7838327B2/en active Active
- 2008-04-03 CN CNA2008100898599A patent/CN101281954A/zh active Pending
- 2008-04-03 EP EP08251304A patent/EP1978575A3/en not_active Withdrawn
- 2008-04-03 TW TW097112096A patent/TWI453967B/zh active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10162959A (ja) * | 1996-11-29 | 1998-06-19 | Idemitsu Kosan Co Ltd | 有機エレクトロルミネッセンス素子 |
JP2000016839A (ja) * | 1998-07-02 | 2000-01-18 | Toppan Printing Co Ltd | 透明導電性酸化物薄膜の形成方法及びこの装置 |
JP2000273620A (ja) * | 1999-03-23 | 2000-10-03 | Toppan Printing Co Ltd | 透明導電性薄膜被覆フィルムの形成方法 |
JP2001085164A (ja) * | 1999-07-14 | 2001-03-30 | Nec Corp | 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置 |
JP2001085163A (ja) * | 1999-09-20 | 2001-03-30 | Sony Corp | 有機エレクトロルミネッセンス素子及びその製造方法と表示装置 |
JP2002352956A (ja) * | 2001-03-23 | 2002-12-06 | Mitsubishi Chemicals Corp | 薄膜型発光体及びその製造方法 |
JP2002313582A (ja) * | 2001-04-17 | 2002-10-25 | Matsushita Electric Ind Co Ltd | 発光素子及び表示装置 |
JP2003142261A (ja) * | 2001-11-02 | 2003-05-16 | Tdk Corp | 有機el表示素子の製造方法および有機el表示素子 |
JP2005093418A (ja) * | 2003-08-08 | 2005-04-07 | Seiko Epson Corp | 有機エレクトロルミネッセンス装置とその製造方法、並びに電子機器 |
JP2005123124A (ja) * | 2003-10-20 | 2005-05-12 | Seiko Epson Corp | 有機el装置の製造方法および有機el装置 |
JP2006054147A (ja) * | 2004-08-16 | 2006-02-23 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス素子 |
JP2006347807A (ja) * | 2005-06-15 | 2006-12-28 | Sumitomo Metal Mining Co Ltd | 酸化物焼結体、酸化物透明導電膜、およびこれらの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100813851B1 (ko) | 2008-03-17 |
US7838327B2 (en) | 2010-11-23 |
CN101281954A (zh) | 2008-10-08 |
JP4871901B2 (ja) | 2012-02-08 |
TWI453967B (zh) | 2014-09-21 |
EP1978575A3 (en) | 2011-08-03 |
EP1978575A2 (en) | 2008-10-08 |
TW200849690A (en) | 2008-12-16 |
US20080246050A1 (en) | 2008-10-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4871901B2 (ja) | 透明伝導性酸化膜のカソードを備える有機電界発光素子及びその製造方法 | |
TWI445445B (zh) | 有機發光裝置及其製造方法 | |
JP4292246B2 (ja) | 有機電界発光素子及びその製造方法 | |
Kanno et al. | High-efficiency top-emissive white-light-emitting organic electrophosphorescent devices | |
US7141924B2 (en) | Multi-layer cathode in organic light-emitting devices | |
US7309956B2 (en) | Top-emitting OLED device with improved-off axis viewing performance | |
TWI357779B (en) | Using a crystallization-inhibitor in organic elect | |
JP2009016332A (ja) | 有機発光素子 | |
US8080937B2 (en) | OLED having a charge transport enhancement layer | |
KR100721571B1 (ko) | 유기 전계 발광 소자 및 그의 제조방법 | |
JP2007027092A (ja) | 白色有機発光素子及びその製造方法 | |
JP2008166283A (ja) | 有機電界発光表示装置及びその製造方法 | |
JP2006156390A (ja) | 有機電界発光素子及びその製造方法 | |
JP2004014511A (ja) | 有機発光ダイオードデバイス | |
JP3943548B2 (ja) | エレクトロルミネセンス・デバイス | |
JP2005158676A (ja) | フールカラー有機電界発光素子 | |
Wang et al. | High‐Performance, Phosphorescent, Top‐Emitting Organic Light‐Emitting Diodes with p–i–n Homojunctions | |
JP2010278010A (ja) | 有機発光素子 | |
TWI447982B (zh) | 有機發光裝置 | |
US8628369B2 (en) | Method of fabricating organic light emitting diode display device | |
TW418590B (en) | Organic electroluminescent device | |
KR100769586B1 (ko) | 유기 el 소자 및 그 제조 방법 | |
KR20100065737A (ko) | 유기발광다이오드 표시소자 | |
KR20120003547A (ko) | 메탈로센 화합물을 포함하는 유기발광소자 및 그 제조방법 | |
WO2011096922A1 (en) | Organic light emitting device with enhanced emission uniformity |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20081205 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100511 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100730 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101102 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110131 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110531 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110829 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20111025 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20111121 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4871901 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141125 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141125 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141125 Year of fee payment: 3 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141125 Year of fee payment: 3 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141125 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141125 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |