JP2008216984A - 感光性ポリイミド樹脂組成物 - Google Patents
感光性ポリイミド樹脂組成物 Download PDFInfo
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Abstract
【解決手段】特定構造のポリイミドユニットからなるポリイミド樹脂と、メラミンシアヌレート類縁体と、ジアゾアフトキノン類縁体とを含有し、該メラミンシアヌレート類縁体が、ポリイミド樹脂100重量部に対し5〜50重量部である弱アルカリ性水溶液でポジ型現像が可能で且つ有機溶媒に可溶な感光性ポリイミド樹脂組成物。
【選択図】なし
Description
表1に示す配合量の3,4,3′,4′−ビフェニルテトラカルボン酸二無水物(BPDA)、2,2−ビス(3−アミノ−4−ヒドロキシフェニル)−1,1,1,3,3,3−ヘキサフルオプロパン(Bis−AP−AF)、及びポリテトラメチレンオキシド−ジ−p−アミノベンゾエート(エラストマー1000、イハラケミカル工業社)を、溶媒(N−メチルピロリドン(NMP))0.24リットルに溶解させ、80℃で2時間撹拌し、更に、180℃で5時間撹拌するという条件で脱水環化反応を行うことによりポリイミド樹脂(PI)溶液を得た。
形成した感光性ポリイミド樹脂膜に対し、300μmピッチのライン&スペースマスクを介して高圧水銀灯から100mW/cm2の光量で、積算光量2500mJ/cm2で露光した。次いで、50℃の10%炭酸ナトリウム水溶液を用いディピング法で現像した。90秒の現像で300μmピッチのライン&スペースができた場合を現像可能と評価した(“G”)。90秒で300μmピッチのライン&スペースができなかった場合を現像不可と評価した(“NG”)。得られた結果を表1に示す。
表2に示す配合量の3,4,3′,4′−ジフェニルスルフォンテトラカルボン酸二無水物(DSDA)、ジアミノポリシロキサン(X−22−9409、信越化学工業社),及び3,3′−ジアミノ−4,4′−ジヒドロフェニルスルフォン(BS−DA)を、溶媒(N−メチルピロリドン(NMP))0.21リットルに溶解させ、80℃で2時間撹拌し、更に、180℃で5時間撹拌という条件で脱水環化反応を行うことによりポリイミド樹脂(PI)溶液を得た。
形成した感光性ポリイミド樹脂膜に対し、300μmピッチのライン&スペースマスクを介して高圧水銀灯から100mW/cm2の光量で、積算光量2500mJ/cm2で露光した。次いで、40℃の10%炭酸ナトリウム水溶液を用いディピング法で現像した。90秒の現像で300μmピッチのライン&スペースができた場合を現像可能と評価した(“G”)。90秒で300μmピッチのライン&スペースができなかった場合を現像不可と評価した(“NG”)。得られた結果を表2に示す。なお、実施例2〜6及び比較例4の場合の残膜厚は10μmであった。
Claims (12)
- 以下の式(1)のポリイミドユニットと、式(2)又は式(3)のポリイミドユニット
とからなるポリイミド樹脂と、メラミンシアヌレート類縁体と、ジアゾナフトキノン類縁体とを含有する、弱アルカリ性水溶液でポジ型現像が可能で且つ有機溶媒に可溶な感光性ポリイミド樹脂組成物であって、該メラミンシアヌレート類縁体を、ポリイミド樹脂100重量部に対し5〜50重量部含有することを特徴とする感光性ポリイミド樹脂組成物。 - 式(1)中のXの2価の有機基が、ジ(トリフルオロメチル)メチレン、スルホ、カルボニル、ジメチルメチレン、酸素原子、又はフルオレン−9,9−ジイルであり、Aの2価の有機基が、ジ(トリフルオロメチル)メチレン、スルホ、オキシメチレン、ジメチルメチレン、フルオレン−9,9−ジイル、又はメチレンである請求項1記載の感光性ポリイミド樹脂組成物。
- 式(2)中のXの2価の有機基が、ジ(トリフルオロメチル)メチレン、スルホ、カルボニル、ジメチルメチレン、酸素原子、又はフルオレン−9,9−ジイルであり、R1が、エチレン、プロピレン、3−メチルフェニレン又はブチレンであり、R2、R3、R4及びR5はそれぞれ独立的にメチル又はフェニルであり、mは2〜20の整数である請求項1記載の感光性ポリイミド樹脂組成物。
- 式(3)中のXの2価の有機基が、ジ(トリフルオロメチル)メチレン、スルホ、カルボニル、ジメチルメチレン、酸素原子、又はフルオレン−9,9−ジイルであり、Rが、トリメチレン、テトラメチレン、ポリテトラメチレンオキシド又はポリ[(テトラメチレン/3−メチルテトラメチレンエーテル)オキシド]であり、mは2〜20の整数である請求項1記載の感光性ポリイミド樹脂組成物。
- 該ポリイミド樹脂が、式(1)のポリイミドユニットと式(2)のポリイミドユニットとからなり、式(1)中のX及びAが共にスルホであり、式(2)中のXがスルホであり、R1がメチレンであり、R2〜R5がいずれもメチルであり、mが10〜20の整数である請求項1記載の感光性ポリイミド樹脂組成物。
- 該ポリイミド樹脂が、式(1)のポリイミドユニットと式(3)のポリイミドユニットとからなり、式(1)中のXが単結合であり、Aがジ(トリフルオロメチル)メチレンであり、式(3)中のXが単結合であり、Rがテトラメチレンであり、mが2〜20の整数である請求項1記載の感光性ポリイミド樹脂組成物。
- 該メラミンシアヌレート類縁体が、メラミン・イソシアヌル酸付加物、トリアジンチオールジオール又はトリス(2−ヒドロキシエチル)イソシアヌレートである請求項7記載の感光性ポリイミド樹脂組成物。
- 該ジアゾアフトキノン類縁体を、ポリイミド樹脂100重量部に対し10〜50重量部含有する請求項1〜8のいずれかに記載の感光性ポリイミド樹脂組成物。
- 更に、有機溶媒を含有し、その溶液となっている請求項1〜10のいずれかに記載の感光性ポリイミド樹脂組成物。
- フレキシブル印刷回路の上に、請求項1〜11のいずれかに記載の感光性ポリイミド樹脂組成物を成膜し、得られた感光性ポリイミド樹脂膜に対し、ジアゾナフトキノン類縁体が分解する光を照射して潜像を形成し、弱アルカリ水溶液でポジ型現像することにより、感光性ポリイミド樹脂膜の露光部を除去して感光性ポリイミド樹脂のポジ型パターンを形成し、その後にポストべーク処理を行うことを特徴とするポリイミドポジ型パターン付きフレキシブル印刷回路の製造方法。
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JP2008012879A JP5114776B2 (ja) | 2007-02-09 | 2008-01-23 | 感光性ポリイミド樹脂組成物 |
TW097103052A TW200905395A (en) | 2007-02-09 | 2008-01-28 | Photosensitive polyimide resin composition |
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US (1) | US7592119B2 (ja) |
JP (1) | JP5114776B2 (ja) |
KR (1) | KR20090075797A (ja) |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009109591A (ja) * | 2007-10-26 | 2009-05-21 | Asahi Kasei Corp | 感光性ポリアミド樹脂組成物、感光性ドライフィルムおよびそれらを用いたカバーレイ |
WO2009136557A1 (ja) * | 2008-05-09 | 2009-11-12 | 旭化成イーマテリアルズ株式会社 | ポリイミド前駆体、感光性ポリイミド前駆体組成物、感光性ドライフィルム及びそれらを用いたフレキシブルプリント配線基板 |
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Also Published As
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US7592119B2 (en) | 2009-09-22 |
KR20090075797A (ko) | 2009-07-09 |
WO2008096601A1 (ja) | 2008-08-14 |
TW200905395A (en) | 2009-02-01 |
CN101606103A (zh) | 2009-12-16 |
JP5114776B2 (ja) | 2013-01-09 |
US20090075198A1 (en) | 2009-03-19 |
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